CN107165923B - Sucking disc for adsorption - Google Patents

Sucking disc for adsorption Download PDF

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Publication number
CN107165923B
CN107165923B CN201710128425.4A CN201710128425A CN107165923B CN 107165923 B CN107165923 B CN 107165923B CN 201710128425 A CN201710128425 A CN 201710128425A CN 107165923 B CN107165923 B CN 107165923B
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CN
China
Prior art keywords
shaft
air
suction
suction cup
guide
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Active
Application number
CN201710128425.4A
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Chinese (zh)
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CN107165923A (en
Inventor
北泽达也
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Bisk, Japan
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Nihon Pisco Co Ltd
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Publication of CN107165923A publication Critical patent/CN107165923A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B47/00—Suction cups for attaching purposes; Equivalent means using adhesives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Feeding Of Workpieces (AREA)

Abstract

The invention aims to provide a suction chuck which can protect a workpiece and can stably detach the workpiece. The suction cup (10) comprises: a main body (11) having an internal space (16); a suction cup part (12) which communicates with the internal space (16); a shaft part (13) which has a tip part (13A), is provided in the internal space (16) so that the tip part (13A) faces the chuck part (12), and reciprocates the tip part (13A) toward the inside and outside of the chuck part (12); and a shaft elastic part (14) which holds the shaft part (13) in a free state such that the tip part (13A) retracts into the suction cup part (12).

Description

Sucking disc for adsorption
Technical Field
The present invention relates to a technique effectively applicable to a suction cup for suction.
Background
Korean laid-open patent No. 10-2006 and 0082213 (hereinafter referred to as "patent document 1") describes a mechanical vacuum chuck including an ejector pin and a spring for ejecting the ejector pin. In this vacuum chuck, a shaft that is sprung out from the main body portion by a spring in a free state protrudes from the chuck portion.
Documents of the prior art
Patent document
Patent document 1: korean laid-open patent No. 10-2006-0082213
Disclosure of Invention
Technical problem to be solved by the invention
When the internal space of the suction cup (also referred to as a vacuum cup) is vacuum, the vacuum is broken by supplying air (hereinafter referred to as "vacuum breaking air") into the internal space. In order to reliably separate the workpiece from the suction chuck that sucks the workpiece by vacuum suction, for example, vacuum breaking air based on a discharge force, a discharge time, and the like, such as a boost pressure and a flow rate, is considered. Further, it is also conceivable to reduce the vacuum break air by performing anti-adhesion processing (for example, roughening or coating) on the suction cup portion that is in contact with the workpiece to reduce the adhesion of the suction cup portion.
However, when the vacuum breaking air is intensified, the detached work may be blown off. On the other hand, in the case of weakening the vacuum breaking air, there is a possibility that detachment of the workpiece becomes unstable, for example, the workpiece is brought back in a state where a part of the workpiece is stuck. In particular, when the work is a semiconductor chip that is small and light in weight, detachment is liable to become unstable. For this reason, fine adjustment of the pressure, flow rate, and discharge time of the vacuum breaking air may be considered, but the number of processes increases due to the fine adjustment, and a control device for the fine adjustment is required.
In the case of the vacuum chuck as described in patent document 1, a problem occurs when the workpiece is brought into contact with the chuck portion. Specifically, the shaft extending from the workpiece itself is pushed up by the workpiece itself before the workpiece contacts the chuck section, and the shaft main body section must be retracted, and the workpiece may be damaged.
The invention aims to provide a suction chuck which can protect a sucked workpiece and can stably detach the workpiece. The above object, other objects and novel features of the present invention will be apparent from the description of the present specification and the accompanying drawings.
Technical scheme for solving technical problem
The outline of a typical invention among the inventions disclosed in the present application will be briefly described as follows.
The suction cup for suction according to one solution of the present invention is characterized by comprising: a main body portion having an internal space; a chuck section communicating with the internal space; a shaft portion having a tip end portion, the shaft portion being provided in the internal space so that the tip end portion faces the chuck portion, the tip end portion reciprocating inward and outward of the chuck portion; and a shaft elastic portion that holds the shaft portion by retracting the distal end portion into the suction portion.
Here, the stroke amount of the shaft portion is preferably larger than a maximum projecting amount of the tip end portion of the shaft portion to project outward of the chuck portion. Thus, even if the workpiece is stuck to the chuck section after the vacuum breaking air is discharged from the chuck section, the workpiece can be stably detached using the shaft section.
Further, it is preferable to further include: an air inlet/outlet portion communicating with the internal space; and a piston portion disposed in the internal space between the shaft portion and the air inlet/outlet portion. Thereby, the shaft portion can be pressed against the shaft elastic portion toward the suction cup portion side.
Preferably, the body portion further includes a guide through-portion which communicates with the tray suction portion and into which a tip portion of the shaft portion is inserted, and the shaft portion further includes a flange portion having a diameter larger than that of the guide through-portion on a side opposite to the tip portion. Thus, after the workpiece is detached, the guide penetrating portion (air flow path) is closed by the flange portion, and the air can be stopped from being discharged from the suction cup portion.
The present invention provides a method for operating a suction cup for suction, the suction cup comprising: a main body portion having an internal space; a chuck section communicating with the internal space; and a shaft portion provided in the internal space so that a distal end portion of the shaft portion faces the chuck portion, wherein the method for operating the suction chuck includes: (a) a step of sucking air from the internal space in a state where the tip end portion is retracted into the chuck section, and causing the workpiece to be attracted to the chuck section; and (b) supplying air to the internal space after the step (a), and extending the shaft portion from the suction portion after the air is discharged from the suction portion.
In the step (b), it is preferable that the air is stopped from being discharged from the suction pad portion after the tip portion is protruded from the suction pad portion. Thus, the work can be prevented from being blown away after the work is separated.
Effects of the invention
The effects obtained by typical ones of the inventions disclosed in the present application will be briefly described as follows. According to the suction chuck of one solution of the present invention, the work can be stably detached while protecting the work to be sucked.
Drawings
Fig. 1 is a sectional view of a suction pad according to an embodiment of the present invention.
Fig. 2 is a cross-sectional view of the suction pad in the operation process continuous with fig. 1.
Fig. 3 is a cross-sectional view of the suction pad in the operation process continuous with fig. 2.
Fig. 4 is a cross-sectional view of the suction pad in the operation process continuous with fig. 3.
Fig. 5 is a cross-sectional view of the suction pad in the operation step continuous with fig. 4.
Fig. 6 is a diagram for explaining an operation state of the suction pad.
Detailed Description
In the embodiments of the present invention described below, the number of constituent elements (including the number, numerical value, amount, range, and the like) is not particularly limited, and may be equal to or greater than a specific number or less, unless otherwise explicitly stated or clearly limited to a specific number in principle. In addition, when a shape of a component or the like is referred to, a shape substantially similar to or similar to the shape or the like is included unless specifically indicated or unless the shape is considered to be clearly obvious in principle.
A suction pad 10 according to an embodiment of the present invention will be described with reference to the drawings. Fig. 1 to 5 are sectional views of the suction pad 10 in the operation step. Fig. 6 is a diagram for explaining an operation state of the suction pad 10, and positions 1 to 5 correspond to fig. 1 to 5, respectively.
First, the structure of the suction pad 10 will be schematically described. The suction pad 10 is applied to the field of suction conveyance using vacuum, for example, and is connected to an air supply source (not shown) via a pipe (air flow path) by a screw mechanism or a joint, for example. The air supply source includes, for example, a selector valve (such as an electromagnetic valve), a pressure regulator, a vacuum pump, and a compressor, and is configured to be capable of sucking air and supplying air to the suction pad 10 connected thereto. Therefore, the suction pad 10 can suck the workpiece W (for example, a semiconductor chip) by vacuum suction from an air supply source (also referred to as air suction), or can detach the workpiece W by air supply.
In the present embodiment, the air sucked by the air supply source is referred to as "vacuum air", and the air supplied by the air supply source is referred to as "vacuum break air". The vacuum suction is performed to generate a pressure lower than the surrounding high pressure, and is not limited to a vacuum of one atmosphere or less.
The suction pad 10 includes a main body 11, a pad portion 12, a shaft portion 13, a shaft elastic portion 14, and a piston portion 15. In the present embodiment, the suction pad 10 has an axis X, and one of the axes X shown in the drawings may be referred to as an upper side and the other as a lower side.
The main body 11 has an internal space 16. The internal space 16 has a shaft chamber 16A in which the shaft portion 13 mainly exists, and a piston chamber 16B in which the piston portion 15 mainly exists. The shaft chamber 16A and the piston chamber 16B are adjacent and in communication. The internal space 16 is in a vacuum state by vacuum air. The vacuum state is broken by the vacuum breaking the air. Accordingly, the interior space 16 may also be referred to as an air flow path for vacuum air and vacuum break air to flow.
The main body 11 has an air inlet/outlet portion 11A communicating with a piston chamber 16B of the internal space 16 at an upper side. The air inlet and outlet portion 11A has an air through portion 16C serving as an air flow path. The suction pad 10 is connected to an air supply source in the air inlet/outlet portion 11A. The body 11 has a guide through-portion 16D, and the guide through-portion 16D communicates with the tray suction portion 12, and the tip portion 13A of the shaft portion 13 is inserted thereinto. The guide through-portion 16D communicates with the shaft chamber 16A of the internal space 16 to form an air flow path. The air through-hole 16C and the guide through-hole 16D also serve as air flow paths and are therefore included in the internal space 16.
The tray portion 12 has a lip portion 12A (opening), communicates with the internal space 16, and is provided on the lower side of the main body portion 11. That is, the suction cup portion 12 and the internal space 16 communicate. Therefore, the suction cup 10 is not limited to the internal space 16 of the body 11, and can be said to be an internal space of the entire suction cup 10 including the internal space of the suction cup part 12.
The shaft portion 13 has a distal end portion 13A and a holding portion 13B, and the distal end portion 13A is provided in the internal space 16 toward the chuck portion 12. The shaft portion 13 has a flange portion 13C on the side opposite to the distal end portion 13A, and the diameter of the flange portion 13C is larger than the diameter of the guide through portion 16D. Therefore, the flange portion 13C can close the guide through portion 16D.
The tip end portion 13A of the shaft portion 13 reciprocates toward the inside and outside of the chuck portion 12. In the present embodiment, when the shaft portion 13 reciprocates, the distal end portion 13A of the shaft portion 13 and the holding portion 13B slide in the guide through portion 16D of the body portion 11 (guide body portion 11B). In fig. 1 and the like, the right front end portion 13A and the holding portion 13B are shown in a thin view on the left side of the axis X in order to clarify the air flow path leading to the through portion 16D.
The shaft elastic portion 14 is provided to hold the shaft portion 13 by retracting the distal end portion 13A into the suction cup portion 12 (into the internal space 16) in a free state (a state in which no air is introduced or discharged) of the suction cup 10 (see fig. 1). Specifically, the shaft elastic portion 14 is provided inside the guide through portion 16D and between the holding portion 11D (step portion) of the body portion 11 and the holding portion 13B (step portion) of the shaft portion 13.
According to the suction chuck 10, the workpiece W can be sucked to the chuck section 12 in a state where the distal end portion 13A of the shaft section 13 is retracted into the chuck section 12 (see fig. 3). That is, damage to the workpiece W caused by the shaft portion 13 can be eliminated, and the sucked workpiece W can be protected.
The suction pad 10 is configured such that the shaft portion 13 reciprocates (moves up and down) in accordance with the expansion and contraction movement (up and down movement) of the shaft elastic portion 14. In the present embodiment, the shaft portion 13 can be pressed toward the suction pad portion 12 against the shaft elastic portion 14 by the piston portion 15 provided between the shaft portion 13 and the air inlet/outlet portion 11A and provided in the internal space 16. The piston portion 15 reciprocates (moves up and down) by thrust. For example, when the tip end portion 13A of the shaft portion 13 protrudes from the suction cup portion 12, the shaft portion 13 is pushed out via the piston portion 15 by the action of vacuum breaking air (pressure difference occurring between the shaft chamber 16A and the piston chamber 16B) and the shaft portion 13 is moved downward, and the shaft elastic portion 14 becomes a contracted state.
The suction pad 10 is configured such that a stroke amount x1 (see fig. 1) of the shaft portion 13 in the internal space 16 is larger than a maximum projecting amount x2 (see fig. 5) of the tip end portion 13A of the shaft portion 13 to project out of the pad portion 12. Thus, when the workpiece W is detached, even if the workpiece W adheres to the chuck section 12 after the vacuum break air is discharged from the chuck section 12 (see fig. 4), the workpiece W can be mechanically pushed out using the shaft section 13 (see fig. 5), and the detachment of the workpiece W can be stably performed. Therefore, the shaft portion 13 is used as a member for assisting detachment of the sucked work W.
Further, after the workpiece W is detached, that is, after the shaft portion 13 is extended from the suction pad portion 12, the guide through portion 16D is closed by the flange portion 13C (see fig. 5), so that the discharge of the vacuum break air can be stopped. Further, by stopping the discharge of the vacuum breaking air, the blow-off of the workpiece W can be prevented. Therefore, the separation of the light-weight workpiece W is stabilized, and the productivity of the workpiece W is improved (cycle is improved, equipment operation rate is improved).
Further, since the stop of the vacuum breaking air is performed by blocking the guide through-portion 16D with the flange portion 13C, the pressure, flow rate, and discharge time of the vacuum breaking air can be roughly set, and the number of adjustment steps can be reduced. Further, in order to prevent the blow-off, it is not necessary to use a control device for controlling the vacuum breaking air, and the cost of the suction system using the suction cup 10 can be reduced.
Next, the structure of the suction pad 10 will be specifically described. The suction pad 10 includes a main body 11 having an internal space 16. The main body 11 is made of a conductive member such as metal. If the conductive member is used, electrostatic breakdown of electronic components such as semiconductor chips as the workpiece W can be prevented.
The internal space 16 is configured such that the air penetration portion 16C, the piston chamber 16B, the shaft chamber 16A, and the guide penetration portion 16D communicate in this order from the upper side to the lower side in the axis X direction. Here, the inner diameter of the shaft chamber 16A is larger than the inner diameter of the piston chamber 16B, and a step is formed between the shaft chamber 16A and the piston chamber 16B. The step portion is a stopper portion 11F that restricts the upward movement of the shaft portion 13. The inner diameter of the piston chamber 16B is larger than the inner diameter of the air penetration portion 16C, and a step is formed between the piston chamber 16B and the air penetration portion 16C. The step portion is a stopper portion 11G that restricts the upward movement of the piston portion 15.
The body 11 has a portion having an air penetration portion 16C as an air inlet/outlet portion 11A. The air inlet/outlet portion 11A is connected to an air supply source via a pipe by, for example, a screw mechanism or a joint. Air is sucked from the internal space 16 of the body 11 or air is supplied to the internal space 16 of the body 11 by an air supply source through the air penetration portion 16C of the air inlet/outlet portion 11A. The suction pad 10 is provided at a connection portion between the air inlet/outlet portion 11A and the air supply source, and includes a sealing portion 22 (e.g., a gasket) for preventing air leakage.
The body 11 is configured such that a portion having the guide penetration portion 16D is a guide body 11B. The guide body 11B guides the reciprocating motion of the distal end portion 13A of the shaft portion 13 inserted into the guide through portion 16D and the holding portion 13B (large diameter portion) having a diameter larger than that of the distal end portion 13A. Therefore, a step is formed between a small-diameter portion into which only the tip end portion 13A is inserted and a large-diameter portion into which the tip end portion 13A and the holding portion 13B are inserted. The step portion is a holding portion 11D that holds the shaft elastic portion 14.
The guide body portion 11B is detachable as a cover by a screw mechanism in order to mount components such as the shaft portion 13 and the piston portion 15 in the internal space 16. The suction cup 10 includes a sealing portion 23 (e.g., an O-ring) which is provided at a connection portion between a main portion of the main body portion 11 and the guide body portion 11B as a cover portion, and which prevents air from leaking from the internal space 16.
The suction pad 10 includes a pad portion 12. The chuck section 12 is made of a rubber member such as nitrile rubber, silicone rubber, or conductive rubber. If a rubber member is used, the work W can be protected when it comes into contact with the work W. The tray section 12 is held by a cover holding section 11C of the main body section 11 (guide main body section 11B). In the present embodiment, a circumferential groove is formed in the suction cup portion 12 so as to fit into the flange-shaped lid holding portion 11C, and the suction cup portion 12 is attached (held) to the main body portion 11. If the suction cup portion 12 is made of a rubber member, the sealing property of the connection portion between the main body portion 11 and the suction cup portion 12 can be ensured. In the present embodiment, the main body portion 11 and the suction cup portion 12 are separate bodies, and the suction cup portion 12 is attached to the main body portion 11, but the main body portion 11 and the suction cup portion 12 may be integrally molded from a resin material, for example.
The suction cup portion 12 attached to the body portion 11 has a suction cup through-portion 12B communicating with the internal space 16 (guide through-portion 16D). The suction pad penetrating portion 12B opens in a manner gradually spreading out on the lip portion 12A, and the lip portion 12A secures an area for sucking the workpiece W. The diameter of the lip portion 12A is about 3mm when the workpiece W is a small and lightweight semiconductor chip of several millimeters square, for example, but may be about 200mm depending on the size and weight of the workpiece W. When the workpiece W is sucked by the suction portion 12, the suction-pad penetrating portion 12B is in a vacuum state (see fig. 3).
Further, the suction pad 10 includes a shaft portion 13. The shaft portion 13 is made of a conductive member such as metal, for example, as in the case of the main body portion 11. The shaft portion 13 is configured to include a tip portion 13A, a holding portion 13B, and a flange portion 13C in this order from the lower side toward the upper side in the longitudinal direction (the axis X direction). The holding portion 13B is larger in diameter than the distal end portion 13A, and the flange portion 13C is larger in diameter than the holding portion 13B.
Such a shaft portion 13 has a shaft penetrating portion 13D penetrating in the longitudinal direction (axis X direction). The shaft penetration portion 13D is used as an air flow path (see fig. 2) when the workpiece W is sucked. The shaft penetrating portion 13D is opened and closed by the piston portion 15. When the shaft penetrating portion 13D is closed by the piston portion 15, the piston portion 15 contacts the flange portion 13C of the shaft portion 13. In the present embodiment, a portion where the piston portion 15 contacts the flange portion 13C of the shaft portion 13 is referred to as a port a, and a portion where the flange portion 13C contacts the guide body portion 11B is referred to as a port B.
The flange portion 13C has a recessed portion 24 recessed from the upper surface side (piston portion 15 side). The shaft penetration portion 13D opens on the back side of the recess 24. By providing the recess 24, the shaft portion 13 and the piston portion 15 can be easily attached to the body portion 11. Instead of providing the recess 24, the upper surface of the flange portion 13C may be a flat surface, and the shaft penetration portion 13D may be opened.
Further, the suction pad 10 includes a shaft elastic portion 14. The shaft elastic portion 14 is a coil-shaped spring made of, for example, a stainless steel material, into which the shaft portion 13 is inserted. The shaft elastic portion 14 is provided in the guide through portion 16D between the holding portion 11D of the body portion 11 (guide body portion 11B) and the holding portion 13B of the shaft portion 13. The shaft elastic portion 14 holds the shaft portion 13 in a free state with the tip end portion 13A retracted into the suction cup portion 12 (see fig. 1).
In the present embodiment, the stroke amount x1 (see fig. 1) of the shaft portion 13 in the internal space 16 is configured to be larger than the maximum protrusion amount x2 (see fig. 5) of the distal end portion 13A of the shaft portion 13 to the outside of the suction cup portion 12. Here, the stroke amount x1 is the distance from the state where the flange portion 13C of the shaft portion 13 is in contact with the stopper portion 11F to the state where the flange portion 13C of the shaft portion 13 is in contact with the guide body portion 11B (port B).
Further, the suction pad 10 includes a piston portion 15. The piston portion 15 is provided in the internal space 16 between the shaft portion 13 and the air inlet/outlet portion 11A. The piston portion 15 reciprocates (moves up and down) by thrust. Specifically, the piston portion 15 moves upward by vacuum air and moves downward by vacuum breaking air.
The piston portion 15 includes a recessed portion 15A on the air inlet/outlet portion 11A side and a cross-over through portion 15B (axis Y is shown in fig. 1), and the cross-over through portion 15B extends in a direction intersecting the depth direction (axis X direction) of the recessed portion 15A and communicates with the recessed portion 15A. The piston portion 15 and the shaft portion 13 are pressed down by breaking air by vacuum supplied to the suction pad 10. In this pushing-down operation, the vacuum break air can be sent toward the chuck section 12 by the cross through-section 15B and the air flow path (formed between the outer peripheral surface of the shaft section 13 and the inner peripheral surface of the internal space 16). Further, a small hole (hole with small air flow rate) penetrating toward the shaft portion 13 side along the axis X direction may be provided in the bottom portion of the recessed portion 15A.
Further, the suction pad 10 includes a piston elastic portion 25. The piston elastic portion 25 is a coil-shaped spring made of, for example, a stainless steel material. The piston elastic portion 25 is held (fitted) in association with the holding portion 11E (recessed portion) of the main body portion 11 and the recessed portion 15A of the piston portion 15. In the present embodiment, a member having a smaller thrust force (spring load) than the shaft elastic portion 14 is used as the piston elastic portion 25.
Next, a method of operating the suction pad 10 will be described. In the suction cup 10 in a free state (a state in which no air is introduced) as shown in fig. 1 (corresponding to position 1 in fig. 6), the tip end portion 13A of the shaft portion 13 is retracted into the suction cup portion 12. Vacuum air and vacuum break air are off states because they are free states. Further, the work W is also in a non-adsorbed state. Port a is closed, and port B is open.
When the vacuum air is turned on (the vacuum breaking air is turned off) with respect to the suction pad 10 in the free state, the state is shown in fig. 2 (corresponding to position 2 in fig. 6). Specifically, the vacuum air is sucked from the internal space 16 in a state where the tip end portion 13A is retracted into the chuck section 12. Thereby, the piston portion 15 moves upward to contact the stopper portion 11G, and the port a becomes open. At this time, air flow (vacuum flow) occurs from the lip portion 12A of the suction cup portion 12 into the shaft penetrating portion 13D, between the outer peripheral surface of the shaft portion 13 and the inner peripheral surface of the internal space 16 (the guide penetrating portion 16D and the shaft chamber 16A), in the piston chamber 16B including the interior of the piston portion 15, and in the air penetrating portion 16C. For this reason, a suction force is generated in the lip portion 12A of the suction cup portion 12 by vacuum air.
Next, when the vacuum air is turned on and vacuum suction is performed, the workpiece W is sucked by the lip portion 12A of the suction pad portion 12 as shown in fig. 3 (corresponding to position 3 in fig. 6). After the work W is adsorbed, the vacuum state is changed to a vacuum state in which no air flows, and the port a is changed to a closed state. In this state, the workpiece W is conveyed.
Thus, according to the suction chuck 10, the work W can be sucked to the chuck section 12 by sucking the vacuum air from the internal space 16 in a state where the tip end portion 13A is retracted into the chuck section 12. Therefore, the shaft portion 13 does not need to be brought into contact with the workpiece W at the time of suction, and the workpiece W can be protected and damage to the workpiece W can be reduced.
When the vacuum break air is turned on (the vacuum air is turned off) with respect to the suction pad 10 in the vacuum state, the state is shown in fig. 4 (corresponding to position 4 in fig. 6). That is, when the vacuum breaking air is supplied, the internal pressure of the suction cup 10 rises, and the vacuum breaking air can be discharged from the cup portion 12.
Specifically, when the vacuum breaking air is supplied, the shaft portion 13 starts moving downward by the thrust force pushing out the shaft portion 13 via the piston portion 15. At this time, the piston portion 15 contacts the flange portion 13C of the shaft portion 13, and the port a is closed. While the shaft portion 13 is moving, vacuum break air flows between the inner peripheral surface of the guide through portion 16D and the outer peripheral surface of the shaft portion 13 (port B), and the vacuum break air is discharged from the lip portion 12A of the suction cup portion 12. The vacuum breaks the air, and the workpiece W is detached from the lip portion 12A of the suction cup portion 12 (not sucked). Further, the discharge time of the vacuum break air can be adjusted according to the stroke amount of the shaft portion 13.
After the vacuum breaking air is discharged from the lip portion 12A of the suction cup portion 12, the vacuum breaking air is continuously supplied, and the tip end portion 13A of the shaft portion 13 is extended from the lip portion 12A of the suction cup portion 12 by the pressing of the piston portion 15 (vacuum breaking air). Thereby, even when the workpiece W is stuck to the lip portion 12A of the chuck section 12 (which is likely to occur particularly when the workpiece W is light in weight), the workpiece W can be detached by pushing out the shaft section 13.
Next, when the vacuum break air is turned on and air is supplied, the state shown in fig. 5 (corresponding to position 5 in fig. 6) is obtained. That is, after the tip portion 13A of the shaft portion 13 is protruded from the suction pad portion 12, the vacuum breaking air can be stopped from being discharged from the suction pad portion 12. Here, the tip end portion 13A of the shaft portion 13 is completely extended out of the suction cup portion 12 (maximum extension amount x 2). Specifically, the flange portion 13C of the shaft portion 13 is moved downward by the pressing of the piston portion 15 to contact the guide body portion 11B, and the port B is closed. Thus, the discharge of vacuum breaking air from the lip portion 12A of the chuck portion 12 is blocked, and the work W is not blown off, and the detachment can be performed stably.

Claims (3)

1. A suction cup for suction, comprising:
a body portion having an interior space;
a chuck section in communication with the interior space;
a shaft portion having a tip end portion, the shaft portion being provided in the internal space so that the tip end portion faces the chuck portion, the tip end portion reciprocating inward and outward of the chuck portion;
a shaft elastic portion that holds the shaft portion by retracting the distal end portion into the suction cup portion in a state where no air enters or exits the suction cup portion; and
an air inlet and outlet portion communicating with the internal space,
it is characterized in that the preparation method is characterized in that,
the sucking disc further comprises a piston part arranged in the inner space and between the shaft part and the air inlet/outlet part,
the body section further has a guide body section having a guide through-portion into which the tip section is inserted, the guide through-portion communicating with the opening of the tray suction section,
the shaft portion has a shaft penetrating portion penetrating in an axial direction of the distal end portion, and a diameter of a predetermined portion of the shaft portion opposite to the distal end portion is larger than a diameter of the guide penetrating portion,
in a state where no air is taken in or out of the chuck section, the shaft elastic section separates the predetermined portion of the shaft section from the guide body section on the side contacting or separating from the guide body section,
the suction cup is configured to:
when vacuum air is sucked, the piston portion is separated from the predetermined portion of the shaft portion on the side contacting or separating from the piston portion, and an air flow path for the vacuum air is formed in the shaft penetrating portion, between the outer peripheral surface of the shaft portion and the inner peripheral surface of the internal space, in the piston portion, and in the air inlet/outlet portion, and suction force is generated in the opening of the chuck portion to suck a workpiece,
when vacuum breaking air is supplied, the piston portion contacts and presses the shaft portion on the side of the predetermined portion of the shaft portion that contacts or separates from the piston portion, and while the shaft portion moves in a state where the shaft through portion is closed, an air flow path for the vacuum breaking air is formed between the inner circumferential surface of the guide through portion and the outer circumferential surface of the shaft portion, inside the piston portion, and the air inlet/outlet portion, and the vacuum breaking air is discharged from the opening of the chuck portion, and the work is detached,
when the supply of the vacuum breaking air is continued, the shaft portion moves in a state where the shaft through-portion is closed, and after the distal end portion protrudes from the opening of the tray suction portion, the side of the predetermined portion of the shaft portion that is in contact with or separated from the guide body portion comes into contact with the guide body portion, the guide through-portion is in a closed state, and the air flow path of the vacuum breaking air is blocked by the guide through-portion being in a closed state, and the discharge of the vacuum breaking air is stopped.
2. The suction cup according to claim 1, wherein the predetermined portion of the shaft portion is a flange portion.
3. The suction cup according to claim 1 or 2, wherein a stroke amount of the shaft portion is larger than a maximum protruding amount of the tip portion of the shaft portion from the suction cup portion.
CN201710128425.4A 2016-03-07 2017-03-06 Sucking disc for adsorption Active CN107165923B (en)

Applications Claiming Priority (2)

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JP2016043610A JP6325589B2 (en) 2016-03-07 2016-03-07 Suction pad
JP2016-043610 2016-03-07

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TW201739681A (en) 2017-11-16
CN107165923A (en) 2017-09-15
TWI705037B (en) 2020-09-21
JP6325589B2 (en) 2018-05-16
JP2017159378A (en) 2017-09-14
KR102535641B1 (en) 2023-05-23
KR20170104379A (en) 2017-09-15

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Patentee before: Kabushiki Kaisha Nihon Pisco