JP2017002939A - Fluid control valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fluid control valve capable of improving the responsiveness while reducing the size.SOLUTION: A fluid control valve 10 has a housing chamber 15 which is isolated from a valve chamber 14 by a bottom wall 12e of a second housing 12, and a magnet 23 housed in the housing chamber 15. A valve part 20 has a magnetic body 22 disposed closer to the bottom wall 12e side than a valve element 21. By a pilot pressure by a pilot fluid acting on the end face of the magnet 23 on the opposite side from the bottom wall 12e, the magnet 23 is moved toward the bottom wall 12e, and the magnet 23 and the magnetic body 22 attract to each other, so that the valve part 20 is moved toward the bottom wall 12e against biasing force of a bias spring 17, and the valve element 21 is separated from a valve seat 16.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a fluid control valve.

  As one type of conventionally known fluid control valves, for example, there is a fluid control valve of Patent Document 1. As shown in FIGS. 7A and 7B, the fluid control valve 100 of Patent Document 1 includes a valve body 101, a piston cylinder 102 connected to the valve body 101, and the valve body 101 and the piston cylinder 102. And an adapter 103 that is fixed while being sandwiched. The adapter 103 partitions the inside of the valve body 101 and the inside of the piston cylinder 102.

  A first port 104 and a second port 105 are formed in the valve body 101. In the valve body 101, a valve chamber 106 that communicates the first port 104 and the second port 105 is formed. Further, on the inner wall of the valve body 101, a valve seat 107 is formed around the opening on the valve chamber 106 side in the first port 104.

  A piston 108 is accommodated in the piston cylinder 102 so as to be able to reciprocate. A rod 109 capable of reciprocating integrally with the piston 108 is attached to the piston 108. The rod 109 projects from the inside of the piston cylinder 102 into the valve chamber 106 through the adapter 103. A main valve body 110 seated on the valve seat 107 is attached to the end of the rod 109 on the valve chamber 106 side.

  A storage chamber 111 is formed between the piston 108 and the piston cylinder 102. A spring 112 that urges the piston 108 toward the adapter 103 is accommodated in the accommodation chamber 111. A pressurizing chamber 113 is formed between the piston 108 and the adapter 103. An annular packing 108 s that seals the pressurizing chamber 113 and the storage chamber 111 is attached to the outer peripheral surface of the piston 108. A seal member 114 is provided between the rod 109 and the adapter 103 to seal the pressurizing chamber 113 and the valve chamber 106.

  An operation port 115 communicating with the pressurizing chamber 113 is formed in the piston cylinder 102. Then, air as a pilot fluid is supplied to and discharged from the pressurizing chamber 113 through the operation port 115.

  As shown in FIG. 7B, when air is supplied to the pressurizing chamber 113 via the operation port 115, the pressure of the air supplied to the pressurizing chamber 113 acts on the piston 108 as a pilot pressure, The piston 108 moves in a direction away from the adapter 103 against the biasing force of the spring 112. Then, the main valve body 110 moves in a direction away from the valve seat 107 via the rod 109, so that the first port 104 and the second port 105 communicate with each other via the valve chamber 106.

  As shown in FIG. 7A, when the air in the pressurizing chamber 113 acting on the piston 108 as a pilot pressure is discharged through the operation port 115, the piston 108 is moved to the adapter 103 by the biasing force of the spring 112. Move in the direction approaching. Then, the main valve body 110 moves in a direction approaching the valve seat 107 via the rod 109, and the main valve body 110 is seated on the valve seat 107, so that the first port 104 and the first port via the valve chamber 106 are connected. A closed state is established in which communication with the two-port 105 is blocked.

Japanese Patent No. 4694159

  By the way, in the fluid control valve 100 of Patent Document 1, when the piston 108 and the rod 109 reciprocate, sliding is performed between the packing 108 s and the inner surface of the piston cylinder 102 and between the seal member 114 and the outer surface of the rod 109. Dynamic resistance occurs. In order to move the piston 108 and the rod 109 by the air pressure supplied to the pressurizing chamber 113, the air pressure that overcomes the sliding resistance must act on the piston 108 as a pilot pressure. In 108, it is necessary to increase the pressure receiving area of the portion where the air acts as the pilot pressure as much as possible. In order to increase the pressure receiving area of the piston 108, it is necessary to increase the outer diameter of the piston 108. When the outer diameter of the piston 108 increases, the size of the packing 108s attached to the outer peripheral surface of the piston 108 also increases, and as a result, the fluid control valve 100 increases in size. Therefore, increasing the pressure receiving area of the portion where air acts as a pilot pressure is one of the factors that lead to an increase in the size of the fluid control valve 100.

  Further, when the packing 108s and the seal member 114 are deteriorated over time, the sealability between the pressurizing chamber 113 and the storage chamber 111 by the packing 108s is deteriorated, and the sealability between the pressurization chamber 113 and the valve chamber 106 by the seal member 114 is deteriorated. Getting worse. As a result, air may leak from the pressurizing chamber 113 to the accommodating chamber 111 or air may leak from the pressurizing chamber 113 to the valve chamber 106. As a result, the piston 108 becomes difficult to move, and the responsiveness of the fluid control valve 100 is deteriorated.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a fluid control valve capable of improving the responsiveness while achieving downsizing.

  A fluid control valve that solves the above-described problems is a valve housing having a flow path, a valve seat formed in the valve housing, and moves in a direction to be in contact with and separated from the valve seat and is seated on the valve seat. A valve portion having a valve body for blocking the flow path, a biasing member for biasing the valve portion toward the valve seat, and the valve portion and the biasing member formed on the valve housing. A valve chamber to be housed, a housing chamber formed in the valve housing and isolated from the valve chamber by a partition wall which is a part of the valve housing, and a magnet housed in the housing chamber, The valve portion has a magnetic body disposed on the partition side with respect to the valve body, and a pilot pressure by a pilot fluid acts on an end surface of the magnet opposite to the partition wall, whereby the magnet The valve body moves toward the partition wall against the biasing force of the biasing member by moving toward the partition wall, and the magnet and the magnetic body attract each other. Separate from the seat.

  In the fluid control valve, a holding magnetic body that holds the magnet in a state of being separated from the partition by being attracted to the magnet is disposed on the opposite side of the partition from the partition in the valve housing. Preferably it is.

  In the fluid control valve, it is preferable that the magnet moves in a direction away from the partition when a pilot pressure by a pilot fluid acts on an end face of the magnet on the partition side.

  According to the present invention, the responsiveness can be improved while reducing the size.

Sectional drawing which shows the fluid control valve in 1st Embodiment. Sectional drawing which shows the fluid control valve of the state in which the valve body is spaced apart from the valve seat. Sectional drawing which shows the fluid control valve in 2nd Embodiment. Sectional drawing which shows the fluid control valve of the state in which the 1st valve body is spaced apart from the 1st valve seat, and the 2nd valve body is seated on the 2nd valve seat. Sectional drawing which shows the fluid control valve in another embodiment. Sectional drawing which shows the fluid control valve of the state in which the valve body is spaced apart from the valve seat. (A) And (b) is sectional drawing which shows the fluid control valve in a prior art example.

(First embodiment)
Hereinafter, a first embodiment in which a fluid control valve is embodied will be described with reference to FIGS. 1 and 2.
As shown in FIG. 1, the fluid control valve 10 includes a resin-made valve housing 10h having a long cylindrical shape. The valve housing 10 h includes a bottomed cylindrical first housing 11, a bottomed cylindrical second housing 12 connected to the first housing 11, and a cylindrical third housing 13 connected to the second housing 12. And have. The valve housing 10h is configured by arranging the first housing 11, the second housing, and the third housing 13 in this order from one end to the other end in the longitudinal direction of the valve housing 10h. The first housing 11 and the second housing 12 are connected so that their openings face each other. The third housing 13 is connected to the outer surface of the bottom wall 12 e of the second housing 12.

  A valve chamber 14 is formed between the first housing 11 and the second housing 12. A storage chamber 15 is formed between the bottom wall 12 e of the second housing 12 and the third housing 13. Therefore, the storage chamber 15 is isolated from the valve chamber 14 by the bottom wall 12 e of the second housing 12. Therefore, the bottom wall 12e of the second housing 12 is a part of the valve housing 10h and functions as a partition wall that isolates the storage chamber 15 from the valve chamber 14.

  A passage 11 a is formed in the first housing 11. One end of the passage 11a opens to the valve chamber 14, and the other end opens to the outside. In the present embodiment, air as a fluid is supplied to the passage 11a from the air supply source 29a. Further, the first housing 11 is formed with a port 11b. One end of the port 11b opens to the valve chamber 14, and the other end opens to the outside. The other end of the port 11b is connected to a fluid pressure device 29b (for example, an air cylinder). The valve housing 10h has a flow path formed by the passage 11a, the valve chamber 14, and the port 11b.

  On the inner surface of the first housing 11, a valve seat 16 is formed around the opening of the passage 11 a to the valve chamber 14. Housed in the valve chamber 14 are a valve portion 20 and a biasing spring 17 as a biasing member that biases the valve portion 20 toward the valve seat 16. The valve portion 20 moves in a direction in which the valve seat 16 moves toward and away from the valve seat 16 and can be seated on the valve seat 16. The valve portion 20 is disposed closer to the bottom wall 12 e of the second housing 12 than the valve body 21. And a columnar magnetic body 22. In the present embodiment, the magnetic body 22 is a permanent magnet.

  The end surface of the magnetic body 22 on the valve body 21 side is in contact with the valve body 21. An annular flange 22f that protrudes outward is formed at the end of the magnetic body 22 on the valve body 21 side. The end face of the magnetic body 22 on the valve body 21 side and the end face of the flange 22f on the valve body 21 side are located on the same plane. The outer diameter H1 of the flange 22f is larger than the outer diameter H2 of the valve body 21. The biasing spring 17 is interposed between the second housing 12 and the flange 22f. Further, a spring 18 that urges the valve body 21 in a direction away from the valve seat 16 is interposed between the first housing 11 and the valve body 21. The biasing force of the spring 18 is smaller than the biasing force of the biasing spring 17.

  A columnar magnet 23 is accommodated in the storage chamber 15. In the present embodiment, the magnet 23 is a permanent magnet. A holding magnetic body 24 is disposed on the opposite side of the second housing 12 from the bottom wall 12 e with the magnet 23 in the third housing 13. In the present embodiment, the holding magnetic body 24 is a permanent magnet. The holding magnetic body 24 has a cylindrical shape having a through hole 24h.

  A groove 12 a is formed on the outer surface of the bottom wall 12 e of the second housing 12 on the accommodation chamber 15 side. The groove 12a extends from the outer edge of the bottom wall 12e to a position facing the end surface of the magnet 23 on the bottom wall 12e side of the second housing 12. Further, the third housing 13 is formed with a groove 13a communicating with the groove 12a near the outer edge of the bottom wall 12e. Each groove 12a, 13a forms a pilot supply / discharge passage 25 for supplying / discharging pilot fluid to / from the space in the housing wall 15 on the bottom wall 12e side of the magnet 23.

  The third housing 13 is formed with a communication hole 13 h that communicates with the through hole 24 h of the holding magnetic body 24. The communication hole 13h and the through hole 24h form a pilot supply / discharge passage 26 for supplying / discharging pilot fluid to / from the space in the holding magnetic body 24 with respect to the magnet 23 in the storage chamber 15.

Next, the operation of the first embodiment will be described.
As shown in FIG. 2, the pilot fluid is supplied from the pilot supply / exhaust flow path 26, and the pilot fluid is supplied to the end surface (end surface on the holding magnetic body 24 side) of the magnet 23 opposite to the bottom wall 12 e of the second housing 12. As a result of the pilot pressure of, the magnet 23 starts to move toward the bottom wall 12e of the second housing 12. Then, since a force attracting each other is generated between the magnet 23 and the magnetic body 22, the magnet 23 moves toward the bottom wall 12 e of the second housing 12. Then, the pilot fluid in the space closer to the bottom wall 12e than the magnet 23 in the storage chamber 15 is discharged from the pilot supply / discharge channel 25, and the magnet 23 is the end surface of the magnet 23 on the bottom wall 12e side of the second housing 12. However, it moves until it contacts the bottom wall 12e of the second housing 12. Further, the magnet 23 and the magnetic body 22 attract each other, so that the valve portion 20 moves toward the bottom wall 12e of the second housing 12 against the urging force of the urging spring 17, and the valve body 21 is moved to the valve seat. 16 apart. As a result, the passage 11a and the port 11b communicate with each other via the valve chamber 14, and a valve open state in which air is allowed to flow in the flow path is obtained. The air supplied from the air supply source 29a to the passage 11a is output to the fluid pressure device 29b via the valve chamber 14 and the port 11b.

  As shown in FIG. 1, the pilot fluid is supplied from the pilot supply / discharge channel 25, and the pilot pressure by the pilot fluid acts on the end surface of the magnet 23 on the bottom wall 12 e side of the second housing 12. Then, the second housing 12 starts to move away from the bottom wall 12e. Then, a force attracting each other is generated between the magnet 23 and the holding magnetic body 24, so that the magnet 23 moves toward the holding magnetic body 24. Then, the pilot fluid in the space closer to the holding magnetic body 24 than the magnet 23 in the storage chamber 15 is discharged from the pilot supply / discharge passage 26, and the magnet 23 is the bottom wall 12 e of the second housing 12 in the magnet 23. The opposite end surface moves until it comes into contact with the end surface of the holding magnetic body 24 on the magnet 23 side, and the magnet 23 is attracted to the holding magnetic body 24. Thereby, the holding magnetic body 24 holds the magnet 23 in a state of being separated from the bottom wall 12 e of the second housing 12. As a result, the force attracting the magnet 23 and the magnetic body 22 disappears, the urging force of the urging spring 17 biases the valve portion 20 toward the valve seat 16, and the valve body 21 is seated on the valve seat 16. . As a result, communication between the passage 11a and the port 11b via the valve chamber 14 is not performed, and the valve is closed with the flow path blocked. As a result, the air supplied from the air supply source 29a to the passage 11a is not output to the fluid pressure device 29b via the valve chamber 14 and the port 11b.

In the first embodiment, the following effects can be obtained.
(1) The fluid control valve 10 includes a storage chamber 15 that is isolated from the valve chamber 14 by the bottom wall 12 e of the second housing 12, and a magnet 23 that is stored in the storage chamber 15. The valve unit 20 includes a magnetic body 22 that is disposed closer to the bottom wall 12 e than the valve body 21. The pilot pressure by the pilot fluid acts on the end surface of the magnet 23 opposite to the bottom wall 12e, so that the magnet 23 moves toward the bottom wall 12e, and the magnet 23 and the magnetic body 22 attract each other. The valve portion 20 moves toward the bottom wall 12e against the urging force of the urging spring 17, and the valve body 21 is separated from the valve seat 16. According to this, when the magnet 23 begins to move toward the bottom wall 12e due to the pilot pressure by the pilot fluid acting on the end surface of the magnet 23 opposite to the bottom wall 12e, the magnet 23 and the magnetic body 22 Therefore, the attracting force assists the movement of the magnet 23 toward the bottom wall 12e. Therefore, the pressure receiving area where the pilot fluid acts as the pilot pressure can be reduced on the end surface of the magnet 23 opposite to the bottom wall 12e, and the fluid control valve 10 can be downsized. Further, since the storage chamber 15 is isolated from the valve chamber 14 by the bottom wall 12e, it is possible to prevent the pilot fluid from leaking from the storage chamber 15 into the valve chamber 14. Therefore, the pilot fluid leaks from the storage chamber 15 to the valve chamber 14, so that the magnet 23 does not easily move toward the bottom wall 12e, and the responsiveness of the fluid control valve 10 is improved. can do.

  (2) A holding magnetic body 24 that holds the magnet 23 away from the bottom wall 12e by being attracted to the magnet 23 is disposed on the opposite side of the bottom wall 12e across the magnet 23 in the valve housing 10h. Yes. According to this, in order to maintain the state where the magnet 23 is separated from the bottom wall 12e, for example, there is no need to provide a biasing member that biases the magnet 23 in a direction away from the bottom wall 12e. Therefore, the pilot pressure by the pilot fluid for moving the magnet 23 toward the bottom wall 12e becomes a pressure that resists the biasing force of the biasing member that biases the magnet 23 in the direction away from the bottom wall 12e. Thus, since it is not necessary to increase the pressure receiving area of the end surface of the magnet 23 opposite to the bottom wall 12e, the fluid control valve 10 can be downsized. Further, for example, in order to hold the magnet 23 in a state of being separated from the bottom wall 12e, for example, it is not necessary to apply a pilot pressure by a pilot fluid to the end surface of the magnet 23 on the bottom wall 12e side. Therefore, it is not necessary to increase the pressure receiving area of the end surface of the magnet 23 on the bottom wall 12e side so that the magnet 23 can be held away from the bottom wall 12e. be able to.

  (3) The magnet 23 moves in a direction away from the bottom wall 12e when the pilot pressure by the pilot fluid acts on the end surface of the magnet 23 on the bottom wall 12e side. According to this, it is not necessary to provide an urging member for urging the magnet 23 in the direction away from the bottom wall 12e, and therefore the number of parts can be reduced.

  (4) At the end of the magnetic body 22 on the valve body 21 side, an annular flange 22f protruding outward is formed. The end face of the magnetic body 22 on the valve body 21 side and the end face of the flange 22f on the valve body 21 side are located on the same plane. The outer diameter H1 of the flange 22f is larger than the outer diameter H2 of the valve body 21. According to this, compared with the case where the outer diameter H1 of the flange 22f is smaller than the outer diameter H2 of the valve body 21, the valve body 21 is in contact with the end surface of the magnetic body 22 on the valve body 21 side. When the valve 21 moves, the valve element 21 can be prevented from tilting. Therefore, it can suppress that the valve body 21 inclines and the valve body 21 contacts the inner surface of the 1st housing 11 and the 2nd housing 12 which forms the valve chamber 14, and movement of the valve body 21 is smooth. Can be. As a result, the responsiveness of the fluid control valve 10 can be improved.

(Second Embodiment)
Hereinafter, a second embodiment in which the fluid control valve is embodied will be described with reference to FIGS. 3 and 4. In the embodiment described below, the same components as those in the first embodiment described above are denoted by the same reference numerals, and the redundant description thereof is omitted or simplified. The fluid control valve of the second embodiment constitutes a chip mounter that is a device for mounting electronic components on a substrate.

  As shown in FIG. 3, the fluid control valve 30 includes a resin-made valve housing 30h having a long cylindrical shape. The valve housing 30 h includes a bottomed cylindrical first housing 31, a bottomed cylindrical second housing 32 connected to the first housing 31, and a cylindrical third housing 33 connected to the second housing 32. And have. The first housing 31 and the second housing 32 are connected so that their openings face each other. One end of the third housing 33 is connected to the outer surface of the bottom wall 32 e of the second housing 32.

  Further, the valve housing 30 h includes a bottomed cylindrical fourth housing 34 and a bottomed cylindrical fifth housing 35 connected to the fourth housing 34. The 4th housing 34 and the 5th housing 35 are connected so that each opening may face each other. The other end of the third housing 33 is connected to the outer surface of the bottom wall 35 e of the fifth housing 35. Therefore, in the valve housing 30h, the first housing 31, the second housing 32, the third housing 33, the fifth housing 35, and the fourth housing 34 are arranged in this order from one end to the other end in the longitudinal direction of the valve housing 30h. It is constituted by being arranged.

  A first valve chamber 36 a as a valve chamber is formed between the first housing 31 and the second housing 32. A second valve chamber 36 b as a valve chamber is formed between the fourth housing 34 and the fifth housing 35. Further, the storage chamber 45 is defined by the bottom wall 32 e of the second housing 32, the bottom wall 35 e of the fifth housing 35, and the third housing 33. Therefore, the storage chamber 45 is isolated from the first valve chamber 36a by the bottom wall 32e of the second housing 32, and is isolated from the second valve chamber 36b by the bottom wall 35e of the fifth housing 35. . Therefore, the bottom wall 32e of the second housing 32 is a part of the valve housing 30h and functions as a partition wall that isolates the storage chamber 45 from the first valve chamber 36a. The bottom wall 35e of the fifth housing 35 is It is a part of the valve housing 30h and functions as a partition that isolates the storage chamber 45 from the second valve chamber 36b.

  A first passage 31 a is formed in the first housing 31. One end of the first passage 31a opens to the first valve chamber 36a, and the other end opens to the outside. In the present embodiment, positive pressure air is supplied from the positive pressure supply source 49a to the first passage 31a. Furthermore, a first port 31 b is formed in the first housing 31. One end of the first port 31b opens to the first valve chamber 36a, and the other end opens to the outside. The other end of the first port 31b is connected to the nozzle 49b. The valve housing 30h has a first flow path as a flow path formed by the first passage 31a, the first valve chamber 36a, and the first port 31b.

  A second passage 34 a is formed in the fourth housing 34. One end of the second passage 34a opens to the second valve chamber 36b, and the other end opens to the outside. In the present embodiment, a vacuum pump 49c is connected to the second passage 34a. Further, a second port 34 b is formed in the fourth housing 34. One end of the second port 34b opens to the second valve chamber 36b and the other end opens to the outside. The other end of the second port 34b is connected to the nozzle 49b. The valve housing 30h has a second flow path as a flow path formed by the second passage 34a, the second valve chamber 36b, and the second port 34b.

  On the inner surface of the first housing 31, a first valve seat 37a as a valve seat is formed around the opening of the first passage 31a to the first valve chamber 36a. In the first valve chamber 36a, there are a first valve portion 40a as a valve portion and a first biasing spring 38a as a biasing member that biases the first valve portion 40a toward the first valve seat 37a. Contained. The first valve portion 40a moves in a direction in which the first valve seat 37a comes in contact with and separates from the first valve seat 37a, and a first valve body 41a as a rubber valve body that can be seated on the first valve seat 37a, and a first valve body It has the 1st magnetic body 42a as a columnar magnetic body arrange | positioned at the bottom wall 32e side of the 2nd housing 32 rather than 41a. In the present embodiment, the first magnetic body 42a is a permanent magnet.

  The end surface of the first magnetic body 42a on the first valve body 41a side is in contact with the first valve body 41a. An annular flange 421f protruding outward is formed at the end of the first magnetic body 42a on the first valve body 41a side. The end face of the first magnetic body 42a on the first valve body 41a side and the end face of the flange 421f on the first valve body 41a side are located on the same plane. The outer diameter H11 of the flange 421f is larger than the outer diameter H12 of the first valve body 41a. The first urging spring 38a is interposed between the second housing 32 and the flange 421f. In addition, a spring 39a for biasing the first valve body 41a in a direction away from the first valve seat 37a is interposed between the first housing 31 and the first valve body 41a. The biasing force of the spring 39a is smaller than the biasing force of the first biasing spring 38a.

  On the inner surface of the fourth housing 34, a second valve seat 37b as a valve seat is formed around the opening of the second passage 34a to the second valve chamber 36b. In the second valve chamber 36b, there are a second valve portion 40b as a valve portion, and a second biasing spring 38b as a biasing member that biases the second valve portion 40b toward the second valve seat 37b. Contained. The second valve portion 40b moves in a direction in which the second valve seat 37b comes in contact with and separates from the second valve seat 37b, and a second valve body 41b as a rubber valve body that can be seated on the second valve seat 37b, and a second valve body And a second magnetic body 42b as a columnar magnetic body disposed closer to the bottom wall 35e of the fifth housing 35 than 41b. In the present embodiment, the second magnetic body 42b is a permanent magnet.

  An end surface of the second magnetic body 42b on the second valve body 41b side is in contact with the second valve body 41b. An annular flange 422f that protrudes outward is formed at the end of the second magnetic body 42b on the second valve body 41b side. The end surface on the second valve body 41b side in the second magnetic body 42b and the end surface on the second valve body 41b side in the flange 422f are located on the same plane. The outer diameter H13 of the flange 422f is larger than the outer diameter H14 of the second valve body 41b. The second urging spring 38b is interposed between the fourth housing 34 and the flange 422f. In addition, a spring 39b that biases the second valve body 41b in a direction away from the second valve seat 37b is interposed between the fourth housing 34 and the second valve body 41b. The biasing force of the spring 39b is smaller than the biasing force of the second biasing spring 38b.

  A columnar magnet 43 is accommodated in the accommodation chamber 45. In the present embodiment, the magnet 43 is a permanent magnet. A groove 32 a is formed on the outer surface of the bottom wall 32 e of the second housing 32 on the accommodation chamber 45 side. The groove 32 a extends from the outer edge of the bottom wall 32 e to a position facing the end surface of the magnet 43 on the bottom wall 32 e side of the second housing 32. Further, the third housing 33 is formed with a groove 33a communicating with the groove 32a near the outer edge of the bottom wall 32e. The grooves 32a and 33a form a pilot supply / discharge flow path 46 for supplying and discharging pilot fluid to and from the space in the housing chamber 45 closer to the bottom wall 32e than the magnet 43.

  A groove 35 a is formed on the outer surface of the bottom wall 35 e of the fifth housing 35 on the accommodation chamber 45 side. The groove 35a extends from the outer edge of the bottom wall 35e to a position facing the end surface of the magnet 43 on the bottom wall 35e side of the fifth housing 35. Further, the third housing 33 is formed with a groove 33b communicating with the outer edge of the bottom wall 35e in the groove 35a. The grooves 33b and 35a form a pilot supply / discharge passage 47 that supplies and discharges pilot fluid to and from the space in the housing wall 45 closer to the bottom wall 35e than the magnet 43.

Next, the operation of the second embodiment will be described.
The pilot fluid is supplied from the pilot supply / exhaust flow path 46, and the pilot pressure by the pilot fluid acts on the end surface of the magnet 43 on the bottom wall 32 e side of the second housing 32, so that the magnet 43 has the bottom of the second housing 32. It starts to move away from the wall 32e. Then, a force attracting each other is generated between the magnet 43 and the second magnetic body 42 b, so that the magnet 43 moves toward the bottom wall 35 e of the fifth housing 35. The pilot fluid in the space closer to the bottom wall 35e than the magnet 43 in the storage chamber 45 is discharged from the pilot supply / discharge passage 47, and the end face of the magnet 43 on the bottom wall 35e side is the fifth housing. The second magnetic body 42b is held in a state of being separated from the bottom wall 32e of the second housing 32. Therefore, the second magnetic body 42 b also functions as a holding magnetic body that holds the magnet 43 in a state of being separated from the bottom wall 32 e of the second housing 32.

  Further, the magnet 43 and the second magnetic body 42b attract each other, so that the second valve portion 40b moves toward the bottom wall 35e of the fifth housing 35 against the biasing force of the second biasing spring 38b. The second valve body 41b is separated from the second valve seat 37b. As a result, the second passage 34a and the second port 34b communicate with each other via the second valve chamber 36b. On the other hand, the first valve portion 40a is urged toward the first valve seat 37a by the urging force of the first urging spring 38a, and the first valve body 41a is seated on the first valve seat 37a. Thereby, the communication between the first passage 31a and the first port 31b via the first valve chamber 36a is not performed. Then, a negative pressure is generated at the tip of the nozzle 49b by the action of the vacuum pump 49c, and the electronic component is adsorbed on the tip of the nozzle 49b.

  As shown in FIG. 4, when pilot fluid is supplied from the pilot supply / discharge flow path 47 and pilot pressure by the pilot fluid acts on the end surface of the magnet 43 on the bottom wall 35e side of the fifth housing 35, the magnet 43 , Movement toward the bottom wall 32e of the second housing 32 begins. Then, a force attracting each other is generated between the magnet 43 and the first magnetic body 42 a, so that the magnet 43 moves toward the bottom wall 32 e of the second housing 32. The pilot fluid in the space closer to the bottom wall 32e than the magnet 43 in the storage chamber 45 is discharged from the pilot supply / discharge flow path 46, and the end surface of the magnet 43 on the bottom wall 32e side has a second housing. The first magnetic body 42a is held in a state of being separated from the bottom wall 35e of the fifth housing 35. Therefore, the first magnetic body 42 a also functions as a holding magnetic body that holds the magnet 43 in a state of being separated from the bottom wall 35 e of the fifth housing 35.

  Further, the magnet 43 and the first magnetic body 42a attract each other, so that the first valve portion 40a moves toward the bottom wall 32e of the second housing 32 against the biasing force of the first biasing spring 38a. The first valve body 41a is separated from the first valve seat 37a. Thereby, the 1st channel | path 31a and the 1st port 31b are connected via the 1st valve chamber 36a. On the other hand, the second valve portion 40b is biased toward the second valve seat 37b by the biasing force of the second biasing spring 38b, and the second valve body 41b is seated on the second valve seat 37b. As a result, communication between the second passage 34a and the second port 34b via the second valve chamber 36b is not performed. And the positive pressure air supplied to the 1st channel | path 31a from the positive pressure supply source 49a is output from the nozzle 49b via the 1st valve chamber 36a and the 1st port 31b. Thereby, the electronic component adsorbed on the tip of the nozzle 49b is released from the tip of the nozzle 49b and mounted on the substrate. Therefore, according to the second embodiment, the same effects as the effects (1) to (4) of the first embodiment can be obtained.

In addition, you may change the said embodiment as follows.
-As shown in FIG.5 and FIG.6, you may provide the urging | biasing member 50 (spring) which urges | biases the magnet 23 in the direction away from the bottom wall 12e. This stabilizes the movement of the magnet 23 in the direction away from the bottom wall 12e. In this case, the holding magnetic body 24 may not be provided, and the magnet 23 may be held away from the bottom wall 12e by the biasing force of the biasing member 50.

  In the first embodiment, the pressure receiving area of the end face on the bottom wall 12e side of the magnet 23 is set large so that the magnet 23 can be held in a state of being separated from the bottom wall 12e, and the bottom wall 12e of the magnet 23 is set. The magnet 23 may be held in a state of being separated from the bottom wall 12e by applying a pilot pressure by a pilot fluid to the end face on the side. In this case, the holding magnetic body 24 may be omitted.

  In the first embodiment, the outer diameter H1 of the flange 22f may be smaller than the outer diameter H2 of the valve body 21, and the outer diameter H1 of the flange 22f and the outer diameter H2 of the valve body 21 are the same. May be.

In the first embodiment, the magnetic body 22 and the flange 22f may be separate bodies.
-In 1st Embodiment, the valve part 20 may be comprised by the valve body 21 and the magnetic body 22 being integrally formed.

  In the second embodiment, the outer diameter H11 of the flange 421f may be smaller than the outer diameter H12 of the first valve body 41a, or the outer diameter H11 of the flange 421f and the outer diameter H12 of the first valve body 41a May be the same.

  In the second embodiment, the outer diameter H13 of the flange 422f may be smaller than the outer diameter H14 of the second valve body 41b, or the outer diameter H13 of the flange 422f and the outer diameter H14 of the second valve body 41b. May be the same.

In the second embodiment, the first magnetic body 42a and the flange 421f may be separate bodies.
-In 2nd Embodiment, the 1st valve part 40a may be comprised by integrally forming the 1st valve body 41a and the 1st magnetic body 42a.

In the second embodiment, the second magnetic body 42b and the flange 422f may be separate bodies.
-In 2nd Embodiment, the 2nd valve part 40b may be comprised by integrally forming the 2nd valve body 41b and the 2nd magnetic body 42b.

  In each of the embodiments described above, the magnetic body 22, the holding magnetic body 24, the first magnetic body 42a, and the second magnetic body 42b may be formed of, for example, iron, and the material is particularly a magnetic body. It is not limited.

  DESCRIPTION OF SYMBOLS 10,30 ... Fluid control valve, 10h, 30h ... Valve housing, 12e, 32e, 35e ... Bottom wall which functions as a partition, 14 ... Valve chamber, 15, 45 ... Storage chamber, 16 ... Valve seat, 17 ... Energizing member As a biasing spring, 20 ... valve part, 21 ... valve body, 22 ... magnetic body, 23, 43 ... magnet, 24 ... holding magnetic body, 36a ... first valve chamber as a valve chamber, 36b ... as valve chamber 2nd valve chamber, 37a ... 1st valve seat as a valve seat, 37b ... 2nd valve seat as a valve seat, 38a ... 1st biasing spring as a biasing member, 38b ... 2nd addition as a biasing member Force spring, 40a: first valve portion as a valve portion, 40b: second valve portion as a valve portion, 41a: first valve body as a valve body, 41b ... second valve body as a valve body, 42a: magnetism A first magnetic body that functions as a holding magnetic body as well as a body, 42b... Second magnetic body that also functions as lifting magnetic material.

Claims (3)

A valve housing having a flow path;
A valve seat formed in the valve housing;
A valve portion having a valve body that moves in a direction of contact with and away from the valve seat and blocks the flow path by being seated on the valve seat;
A biasing member that biases the valve portion toward the valve seat;
A valve chamber formed in the valve housing and accommodating the valve portion and the biasing member;
A storage chamber formed in the valve housing and isolated from the valve chamber by a partition wall that is part of the valve housing;
A magnet housed in the housing chamber,
The valve portion has a magnetic body disposed on the partition side from the valve body,
When the pilot pressure by the pilot fluid acts on the end surface of the magnet opposite to the partition wall, the magnet moves toward the partition wall, and the magnet and the magnetic body attract each other, so that the valve portion Moves toward the partition against the urging force of the urging member, and the valve body is separated from the valve seat.   A holding magnetic body that holds the magnet in a state of being separated from the partition by being attracted to the magnet is disposed on the opposite side of the partition from the partition in the valve housing. The fluid control valve according to claim 1.   3. The fluid control valve according to claim 1, wherein a pilot pressure by a pilot fluid acts on an end face of the magnet on the partition side, so that the magnet moves in a direction away from the partition. 4. .