JP6318957B2 - 感放射線性樹脂組成物、硬化膜及びその形成方法、並びに表示素子 - Google Patents
感放射線性樹脂組成物、硬化膜及びその形成方法、並びに表示素子 Download PDFInfo
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- JP6318957B2 JP6318957B2 JP2014157156A JP2014157156A JP6318957B2 JP 6318957 B2 JP6318957 B2 JP 6318957B2 JP 2014157156 A JP2014157156 A JP 2014157156A JP 2014157156 A JP2014157156 A JP 2014157156A JP 6318957 B2 JP6318957 B2 JP 6318957B2
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- Materials For Photolithography (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electroluminescent Light Sources (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
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JP2014157156A JP6318957B2 (ja) | 2014-07-31 | 2014-07-31 | 感放射線性樹脂組成物、硬化膜及びその形成方法、並びに表示素子 |
KR1020150069450A KR102044779B1 (ko) | 2014-07-31 | 2015-05-19 | 감방사선성 수지 조성물, 경화막 및 그의 형성 방법, 그리고 표시 소자 |
CN201510381497.0A CN105301898A (zh) | 2014-07-31 | 2015-07-02 | 感放射线性树脂组合物、硬化膜及其形成方法以及显示元件 |
TW104122846A TW201604654A (zh) | 2014-07-31 | 2015-07-15 | 感放射線性樹脂組成物、硬化膜及其形成方法、以及顯示元件 |
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JP7161845B2 (ja) * | 2016-11-11 | 2022-10-27 | ヨトゥン アーエス | 防汚組成物 |
KR102654731B1 (ko) * | 2017-09-28 | 2024-04-03 | 제이에스알 가부시끼가이샤 | 감방사선성 수지 조성물 및 그의 용도 |
KR20190095128A (ko) * | 2018-02-05 | 2019-08-14 | 제이에스알 가부시끼가이샤 | 배선 부재 |
JP7063173B2 (ja) * | 2018-08-01 | 2022-05-09 | Jsr株式会社 | 感放射線性組成物およびその用途 |
TWI795489B (zh) * | 2018-12-14 | 2023-03-11 | 奇美實業股份有限公司 | 化學增幅型正型感光性樹脂組成物及其應用 |
TWI799484B (zh) * | 2018-12-25 | 2023-04-21 | 奇美實業股份有限公司 | 化學增幅型正型感光性樹脂組成物及其應用 |
TWI818026B (zh) * | 2019-05-27 | 2023-10-11 | 奇美實業股份有限公司 | 化學增幅型正型感光性樹脂組成物、保護膜及元件 |
TW202132274A (zh) * | 2019-12-25 | 2021-09-01 | 日商東京應化工業股份有限公司 | 硬化性組合物、硬化物、(甲基)丙烯酸樹脂、及化合物 |
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JP4269740B2 (ja) | 2002-03-28 | 2009-05-27 | 住友化学株式会社 | ポジ型化学増幅型レジスト組成物 |
JP4207604B2 (ja) | 2003-03-03 | 2009-01-14 | Jsr株式会社 | 感放射線性樹脂組成物、層間絶縁膜およびマイクロレンズ、ならびにそれらの形成方法 |
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JP5449061B2 (ja) * | 2010-06-30 | 2014-03-19 | 富士フイルム株式会社 | 感光性組成物、パターン形成材料、並びに、これを用いた感光性膜、パターン形成方法、パターン膜、低屈折率膜、光学デバイス、及び、固体撮像素子 |
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JP2016033628A (ja) | 2016-03-10 |
KR20160016566A (ko) | 2016-02-15 |
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