JP6318903B2 - 半導体装置 - Google Patents
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- JP6318903B2 JP6318903B2 JP2014128287A JP2014128287A JP6318903B2 JP 6318903 B2 JP6318903 B2 JP 6318903B2 JP 2014128287 A JP2014128287 A JP 2014128287A JP 2014128287 A JP2014128287 A JP 2014128287A JP 6318903 B2 JP6318903 B2 JP 6318903B2
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- 239000004065 semiconductor Substances 0.000 title claims description 86
- 229910005542 GaSb Inorganic materials 0.000 claims description 52
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 claims description 50
- 229910000673 Indium arsenide Inorganic materials 0.000 claims description 48
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 claims description 47
- 239000000758 substrate Substances 0.000 claims description 43
- 150000001875 compounds Chemical class 0.000 claims description 35
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 229910052799 carbon Inorganic materials 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 238000002441 X-ray diffraction Methods 0.000 claims description 8
- 238000005229 chemical vapour deposition Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 description 24
- 239000013078 crystal Substances 0.000 description 20
- 230000000052 comparative effect Effects 0.000 description 19
- 230000004048 modification Effects 0.000 description 17
- 238000012986 modification Methods 0.000 description 17
- 238000002161 passivation Methods 0.000 description 15
- 230000015572 biosynthetic process Effects 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 8
- 239000002994 raw material Substances 0.000 description 8
- 238000000927 vapour-phase epitaxy Methods 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 6
- 230000002349 favourable effect Effects 0.000 description 5
- 229910021478 group 5 element Inorganic materials 0.000 description 5
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 229910052787 antimony Inorganic materials 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910002056 binary alloy Inorganic materials 0.000 description 2
- 229910021386 carbon form Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000779 depleting effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- HJUGFYREWKUQJT-UHFFFAOYSA-N tetrabromomethane Chemical compound BrC(Br)(Br)Br HJUGFYREWKUQJT-UHFFFAOYSA-N 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- VCZQFJFZMMALHB-UHFFFAOYSA-N tetraethylsilane Chemical compound CC[Si](CC)(CC)CC VCZQFJFZMMALHB-UHFFFAOYSA-N 0.000 description 2
- OTRPZROOJRIMKW-UHFFFAOYSA-N triethylindigane Chemical compound CC[In](CC)CC OTRPZROOJRIMKW-UHFFFAOYSA-N 0.000 description 2
- HTDIUWINAKAPER-UHFFFAOYSA-N trimethylarsine Chemical compound C[As](C)C HTDIUWINAKAPER-UHFFFAOYSA-N 0.000 description 2
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 2
- 230000005428 wave function Effects 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- SXZDTYABFPAVOF-UHFFFAOYSA-N CCCC[Sb] Chemical group CCCC[Sb] SXZDTYABFPAVOF-UHFFFAOYSA-N 0.000 description 1
- 101100208382 Danio rerio tmsb gene Proteins 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- QTQRGDBFHFYIBH-UHFFFAOYSA-N tert-butylarsenic Chemical compound CC(C)(C)[As] QTQRGDBFHFYIBH-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- RBEXEKTWBGMBDZ-UHFFFAOYSA-N tri(propan-2-yl)stibane Chemical compound CC(C)[Sb](C(C)C)C(C)C RBEXEKTWBGMBDZ-UHFFFAOYSA-N 0.000 description 1
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 1
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
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- H—ELECTRICITY
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035236—Superlattices; Multiple quantum well structures
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- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0304—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L31/03046—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds including ternary or quaternary compounds, e.g. GaAlAs, InGaAs, InGaAsP
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035236—Superlattices; Multiple quantum well structures
- H01L31/035263—Doping superlattices, e.g. nipi superlattices
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- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/184—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP
- H01L31/1844—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP comprising ternary or quaternary compounds, e.g. Ga Al As, In Ga As P
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Description
最初に本願発明の実施態様を列記して説明する。本願の一の局面における半導体装置は、III−V族化合物半導体からなる基板と、当該基板上に配置され、GaSbからなるバッファ層と、当該バッファ層上に形成され、III−V族化合物半導体からなる多重量子井戸構造を含む受光層と、を備える。この多重量子井戸構造は、複数の要素層からなる単位構造が複数回繰り返されて構成される。上記単位構造は、InAs1−aSbaからなる第1要素層と、GaSbからなる第2要素層と、InSbxAs1−xからなる第3要素層と、を含む。上記一の単位構造内において、上記第3要素層は上記第2要素層の一方の主面に接触するように配置される。上記第2要素層の他方の主面は、当該一の単位構造内または当該一の単位構造上に配置される他の上記単位構造内の上記第1要素層に接触する。上記第1要素層を構成するInAs1−aSbaにおけるaの値は0以上0.05以下である。上記第3要素層を構成するInSbxAs1−xにおけるxの値は0を超え1未満である。そして、上記第3要素層の厚みは0.1nm以上0.9nm以下である。
次に、本発明にかかる半導体装置の一実施の形態を、以下に図面を参照しつつ説明する。なお、以下の図面において同一または相当する部分には同一の参照番号を付しその説明は繰返さない。
10 半導体積層体
20 基板
20A 主面
30 バッファ層
30A 主面
40 多重量子井戸構造
40A 主面
41 単位構造
50 コンタクト層
50A 主面
71 第1要素層
71A 主面
711 下部第1要素層
711A 主面
712 上部第1要素層
712A 主面
72 第2要素層
72A 主面
72B 主面
721 下部第2要素層
721A 主面
722 上部第2要素層
722A 主面
73 第3要素層
73A 主面
74 第4要素層
74A 主面
75 第5要素層
75A 主面
80 パッシベーション膜
81,82 開口部
91 p側電極
92 n側電極
99 トレンチ
99A 側壁
99B 底壁
Claims (12)
- III−V族化合物半導体からなる基板と、
前記基板上に配置され、GaSbからなるバッファ層と、
前記バッファ層上に形成され、III−V族化合物半導体からなる多重量子井戸構造を含む受光層と、を備え、
前記多重量子井戸構造は、複数の要素層からなる単位構造が複数回繰り返されて構成され、
前記単位構造は、
InAs1−aSbaからなる第1要素層と、
GaSbからなる第2要素層と、
InSbxAs1−xからなる第3要素層と、を含み、
一の前記単位構造内において、前記第3要素層は前記第2要素層の一方の主面に接触するように配置され、
前記第2要素層の他方の主面は、前記一の単位構造内または前記一の単位構造上に配置される他の前記単位構造内の前記第1要素層に接触し、
前記第1要素層を構成するInAs1−aSbaにおけるaの値は0以上0.05以下であり、
前記第3要素層を構成するInSbxAs1−xにおけるxの値は0.3以上1未満であり、
前記第3要素層の厚みは0.1nm以上0.9nm以下である、半導体装置。 - III−V族化合物半導体からなる基板と、
前記基板上に配置され、GaSbからなるバッファ層と、
前記バッファ層上に形成され、III−V族化合物半導体からなる多重量子井戸構造を含む受光層と、を備え、
前記多重量子井戸構造は、複数の要素層からなる単位構造が複数回繰り返されて構成され、
前記単位構造は、
InAs1−aSbaからなる第1要素層と、
GaSbからなる第2要素層と、
InSbxAs1−xからなる第3要素層と、
InSbyAs1−yからなる第4要素層と、を含み、
前記単位構造内において、
前記第3要素層は前記第2要素層の一方の主面に接触するように配置され、
前記第4要素層は前記第2要素層の他方の主面に接触するように配置され、
前記第1要素層を構成するInAs1−aSbaにおけるaの値は0以上0.05以下であり、
前記第3要素層を構成するInSbxAs1−xにおけるxの値は0.3以上1未満であり、
前記第4要素層を構成するInSbyAs1−yにおけるyの値は0.3以上1未満であり、
前記第3要素層の厚みは0.1nm以上0.9nm以下であり、
前記第4要素層の厚みは0.1nm以上0.9nm以下である、半導体装置。 - 前記単位構造は、InSbzAs1−zからなる第5要素層をさらに含み、
前記第5要素層は、前記第1要素層内または前記第2要素層内に配置され、
前記第5要素層を構成するInSbzAs1−zにおけるzの値は0を超え1未満であり、
前記第5要素層の厚みは0.1nm以上0.9nm以下である、請求項1または請求項2に記載の半導体装置。 - 前記第5要素層を構成するInSbzAs1−zにおけるzの値は0.3以上である、請求項3に記載の半導体装置。
- 前記多重量子井戸構造を構成するIII−V族化合物半導体の(004)面のX線回折ピークのうち0次のサテライトピークと、前記バッファ層を構成するGaSbの(004)面のX線回折ピークとのω成分の差であるΔωは、−400秒以上400秒以下である、請求項1〜請求項4のいずれか1項に記載の半導体装置。
- 前記Δωは−100秒以上200秒以下である、請求項5に記載の半導体装置。
- 前記第1要素層を構成するInAs1−aSbaにおけるaの値は0.005以上である、請求項1〜請求項6のいずれか1項に記載の半導体装置。
- 前記第1要素層を構成するInAs1−aSbaにおけるaの値は0である、請求項1〜請求項6のいずれか1項に記載の半導体装置。
- 前記基板はGaSbからなる、請求項1〜請求項8のいずれか1項に記載の半導体装置。
- 前記第2要素層の厚みは4nm以上7nm以下である、請求項1〜請求項9のいずれか1項に記載の半導体装置。
- 前記多重量子井戸構造を構成するIII−V族化合物半導体の炭素濃度は1×1016cm−3以下である、請求項1〜請求項10のいずれか1項に記載の半導体装置。
- 前記多重量子井戸構造は有機金属気相成長法により形成されている、請求項1〜請求項11のいずれか1項に記載の半導体装置。
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