JP6317106B2 - 基板保持装置及び基板保持方法 - Google Patents

基板保持装置及び基板保持方法 Download PDF

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Publication number
JP6317106B2
JP6317106B2 JP2013271297A JP2013271297A JP6317106B2 JP 6317106 B2 JP6317106 B2 JP 6317106B2 JP 2013271297 A JP2013271297 A JP 2013271297A JP 2013271297 A JP2013271297 A JP 2013271297A JP 6317106 B2 JP6317106 B2 JP 6317106B2
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substrate
gas
inner chamber
holding
substrate holding
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Japanese (ja)
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JP2015126174A (ja
JP2015126174A5 (enrdf_load_stackoverflow
Inventor
隆宏 金井
隆宏 金井
崇 大田垣
崇 大田垣
絵美 松井
絵美 松井
林　航之介
航之介 林
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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Priority to JP2013271297A priority Critical patent/JP6317106B2/ja
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Publication of JP2015126174A5 publication Critical patent/JP2015126174A5/ja
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
JP2013271297A 2013-12-27 2013-12-27 基板保持装置及び基板保持方法 Active JP6317106B2 (ja)

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JP2013271297A JP6317106B2 (ja) 2013-12-27 2013-12-27 基板保持装置及び基板保持方法

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JP2013271297A JP6317106B2 (ja) 2013-12-27 2013-12-27 基板保持装置及び基板保持方法

Publications (3)

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JP2015126174A JP2015126174A (ja) 2015-07-06
JP2015126174A5 JP2015126174A5 (enrdf_load_stackoverflow) 2017-02-16
JP6317106B2 true JP6317106B2 (ja) 2018-04-25

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JP2013271297A Active JP6317106B2 (ja) 2013-12-27 2013-12-27 基板保持装置及び基板保持方法

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6568773B2 (ja) * 2015-11-10 2019-08-28 東京エレクトロン株式会社 基板搬送装置及び剥離システム
JP7592434B2 (ja) * 2020-08-28 2024-12-02 株式会社荏原製作所 ワークピース支持装置およびワークピース支持方法
JP2024069889A (ja) * 2022-11-10 2024-05-22 株式会社荏原製作所 基板洗浄装置、および基板洗浄方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0336784U (enrdf_load_stackoverflow) * 1989-08-11 1991-04-10
AU2001241086A1 (en) * 2000-12-05 2002-06-18 Nippon Pneumatics/Fluidics System Co., Ltd. Holder
JP2006282345A (ja) * 2005-04-01 2006-10-19 Hiroshi Akashi 非接触搬送装置
JP2009028862A (ja) * 2007-07-27 2009-02-12 Ihi Corp 非接触搬送装置
JP2009119562A (ja) * 2007-11-15 2009-06-04 Izumi Akiyama 非接触型搬送保持具および非接触型搬送保持装置
JP4982875B2 (ja) * 2008-07-03 2012-07-25 Ｓｍｃ株式会社 シート状物品のための非接触パッド
JP2011151233A (ja) * 2010-01-22 2011-08-04 Disco Abrasive Syst Ltd 搬送機構
US8905680B2 (en) * 2011-10-31 2014-12-09 Masahiro Lee Ultrathin wafer transport systems

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JP2015126174A (ja) 2015-07-06

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