JP2015126174A5 - - Google Patents

Download PDF

Info

Publication number
JP2015126174A5
JP2015126174A5 JP2013271297A JP2013271297A JP2015126174A5 JP 2015126174 A5 JP2015126174 A5 JP 2015126174A5 JP 2013271297 A JP2013271297 A JP 2013271297A JP 2013271297 A JP2013271297 A JP 2013271297A JP 2015126174 A5 JP2015126174 A5 JP 2015126174A5
Authority
JP
Japan
Prior art keywords
gas
substrate
holding
inner chamber
discharge port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013271297A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015126174A (ja
JP6317106B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013271297A priority Critical patent/JP6317106B2/ja
Priority claimed from JP2013271297A external-priority patent/JP6317106B2/ja
Publication of JP2015126174A publication Critical patent/JP2015126174A/ja
Publication of JP2015126174A5 publication Critical patent/JP2015126174A5/ja
Application granted granted Critical
Publication of JP6317106B2 publication Critical patent/JP6317106B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013271297A 2013-12-27 2013-12-27 基板保持装置及び基板保持方法 Active JP6317106B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013271297A JP6317106B2 (ja) 2013-12-27 2013-12-27 基板保持装置及び基板保持方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013271297A JP6317106B2 (ja) 2013-12-27 2013-12-27 基板保持装置及び基板保持方法

Publications (3)

Publication Number Publication Date
JP2015126174A JP2015126174A (ja) 2015-07-06
JP2015126174A5 true JP2015126174A5 (enrdf_load_stackoverflow) 2017-02-16
JP6317106B2 JP6317106B2 (ja) 2018-04-25

Family

ID=53536664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013271297A Active JP6317106B2 (ja) 2013-12-27 2013-12-27 基板保持装置及び基板保持方法

Country Status (1)

Country Link
JP (1) JP6317106B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6568773B2 (ja) * 2015-11-10 2019-08-28 東京エレクトロン株式会社 基板搬送装置及び剥離システム
JP7592434B2 (ja) * 2020-08-28 2024-12-02 株式会社荏原製作所 ワークピース支持装置およびワークピース支持方法
JP2024069889A (ja) * 2022-11-10 2024-05-22 株式会社荏原製作所 基板洗浄装置、および基板洗浄方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0336784U (enrdf_load_stackoverflow) * 1989-08-11 1991-04-10
AU2001241086A1 (en) * 2000-12-05 2002-06-18 Nippon Pneumatics/Fluidics System Co., Ltd. Holder
JP2006282345A (ja) * 2005-04-01 2006-10-19 Hiroshi Akashi 非接触搬送装置
JP2009028862A (ja) * 2007-07-27 2009-02-12 Ihi Corp 非接触搬送装置
JP2009119562A (ja) * 2007-11-15 2009-06-04 Izumi Akiyama 非接触型搬送保持具および非接触型搬送保持装置
JP4982875B2 (ja) * 2008-07-03 2012-07-25 Ｓｍｃ株式会社 シート状物品のための非接触パッド
JP2011151233A (ja) * 2010-01-22 2011-08-04 Disco Abrasive Syst Ltd 搬送機構
US8905680B2 (en) * 2011-10-31 2014-12-09 Masahiro Lee Ultrathin wafer transport systems

Similar Documents

Publication Publication Date Title
IN2014DN07532A (enrdf_load_stackoverflow)
JP2016533870A5 (enrdf_load_stackoverflow)
WO2014164897A3 (en) Inhalator device and method
JP2014175669A5 (enrdf_load_stackoverflow)
JP2015002208A5 (enrdf_load_stackoverflow)
PH12018502051A1 (en) Liquid ejection head and method for circulating liquid
HK1243893A1 (zh) 用於生成可吸入介质的料筒、部件以及方法
EP2286745A3 (en) Fluid ejection method and fluid ejection device
EP2905142A3 (en) Liquid ejecting apparatus
WO2015165708A3 (de) Metall-luft-batterie
JP2017512379A5 (enrdf_load_stackoverflow)
MX2019007543A (es) Dispositivo removedor de polvo y sistema removedor de polvo.
JP2014039534A5 (enrdf_load_stackoverflow)
EP2717950A4 (en) DEVICE AND METHOD FOR CONTROLLING THE FLOW RATE OF A SURGICAL VENTILATION OF STEAM AND MIST FROM A BODY CAVITY
EP2476383A3 (en) Liquid ejecting apparatus
SG153760A1 (en) Spouted bed device and polyolefin production process using the same
HK1205023A1 (en) Gas dispenser with diffusing nosepiece
JP2012504188A5 (enrdf_load_stackoverflow)
MX2019005562A (es) Metodo para producir frascos de vidrio con una tendencia de baja delaminacion bajo el efecto de un flujo de gas de purga.
JP2015126174A5 (enrdf_load_stackoverflow)
MY177437A (en) Imprint material discharge device
WO2016069916A3 (en) A flow control devices and method to control the flow of a fluid
TWD171078S (zh) 基板處理裝置用氣體供給噴嘴之部分
WO2017070246A9 (en) Micro-sized structure and construction method for fluidic oscillator wash nozzle
PH12016502157A1 (en) Liquid supply unit and liquid ejection device