JP6316735B2 - プラズマエッチング方法 - Google Patents

プラズマエッチング方法 Download PDF

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Publication number
JP6316735B2
JP6316735B2 JP2014246069A JP2014246069A JP6316735B2 JP 6316735 B2 JP6316735 B2 JP 6316735B2 JP 2014246069 A JP2014246069 A JP 2014246069A JP 2014246069 A JP2014246069 A JP 2014246069A JP 6316735 B2 JP6316735 B2 JP 6316735B2
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JP
Japan
Prior art keywords
etching
plasma
frequency power
frequency
power
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JP2014246069A
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English (en)
Japanese (ja)
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JP2016111140A (ja
JP2016111140A5 (https=
Inventor
隆男 舟久保
隆男 舟久保
慎一 狐塚
慎一 狐塚
祐太 瀬谷
祐太 瀬谷
在利 三谷
在利 三谷
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Tokyo Electron Ltd
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Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2014246069A priority Critical patent/JP6316735B2/ja
Priority to KR1020150166149A priority patent/KR101900136B1/ko
Priority to US14/956,719 priority patent/US9779962B2/en
Priority to TW104140258A priority patent/TWI613721B/zh
Publication of JP2016111140A publication Critical patent/JP2016111140A/ja
Publication of JP2016111140A5 publication Critical patent/JP2016111140A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
    • H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means
    • H10P50/285—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means of materials not containing Si, e.g. PZT or Al2O3
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32146—Amplitude modulation, includes pulsing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
    • H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
JP2014246069A 2014-12-04 2014-12-04 プラズマエッチング方法 Active JP6316735B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014246069A JP6316735B2 (ja) 2014-12-04 2014-12-04 プラズマエッチング方法
KR1020150166149A KR101900136B1 (ko) 2014-12-04 2015-11-26 플라즈마 에칭 방법
US14/956,719 US9779962B2 (en) 2014-12-04 2015-12-02 Plasma etching method
TW104140258A TWI613721B (zh) 2014-12-04 2015-12-02 電漿蝕刻方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014246069A JP6316735B2 (ja) 2014-12-04 2014-12-04 プラズマエッチング方法

Publications (3)

Publication Number Publication Date
JP2016111140A JP2016111140A (ja) 2016-06-20
JP2016111140A5 JP2016111140A5 (https=) 2017-10-26
JP6316735B2 true JP6316735B2 (ja) 2018-04-25

Family

ID=56094952

Family Applications (1)

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JP2014246069A Active JP6316735B2 (ja) 2014-12-04 2014-12-04 プラズマエッチング方法

Country Status (4)

Country Link
US (1) US9779962B2 (https=)
JP (1) JP6316735B2 (https=)
KR (1) KR101900136B1 (https=)
TW (1) TWI613721B (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10002744B2 (en) * 2013-12-17 2018-06-19 Tokyo Electron Limited System and method for controlling plasma density
JP6541596B2 (ja) * 2016-03-22 2019-07-10 東京エレクトロン株式会社 プラズマ処理方法

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR890004881B1 (ko) * 1983-10-19 1989-11-30 가부시기가이샤 히다찌세이사꾸쇼 플라즈마 처리 방법 및 그 장치
JPH0514435A (ja) 1991-07-08 1993-01-22 Fujitsu Ltd 装置内監視方式
JP2000012529A (ja) * 1998-06-26 2000-01-14 Hitachi Ltd 表面加工装置
WO2003021002A1 (en) * 2001-08-29 2003-03-13 Tokyo Electron Limited Apparatus and method for plasma processing
US6700090B2 (en) * 2002-04-26 2004-03-02 Hitachi High-Technologies Corporation Plasma processing method and plasma processing apparatus
JP3681718B2 (ja) * 2002-08-12 2005-08-10 株式会社日立ハイテクノロジーズ プラズマ処理装置及び方法
US7025895B2 (en) * 2002-08-15 2006-04-11 Hitachi High-Technologies Corporation Plasma processing apparatus and method
US20070066038A1 (en) * 2004-04-30 2007-03-22 Lam Research Corporation Fast gas switching plasma processing apparatus
JP5192209B2 (ja) * 2006-10-06 2013-05-08 東京エレクトロン株式会社 プラズマエッチング装置、プラズマエッチング方法およびコンピュータ読取可能な記憶媒体
JP5094289B2 (ja) * 2007-09-05 2012-12-12 株式会社日立ハイテクノロジーズ プラズマ処理装置
JP5008509B2 (ja) 2007-09-25 2012-08-22 パナソニック株式会社 プラズマ処理方法
EP2267764A4 (en) * 2008-03-07 2011-05-04 Ulvac Inc PLASMA PROCESSING
KR101489326B1 (ko) * 2008-09-09 2015-02-11 삼성전자주식회사 기판의 처리 방법
WO2011016266A1 (ja) * 2009-08-07 2011-02-10 株式会社京三製作所 パルス変調高周波電力制御方法およびパルス変調高周波電源装置
JP5461148B2 (ja) * 2009-11-05 2014-04-02 株式会社日立ハイテクノロジーズ プラズマエッチング方法及び装置
US8709953B2 (en) * 2011-10-27 2014-04-29 Applied Materials, Inc. Pulsed plasma with low wafer temperature for ultra thin layer etches
US20130119018A1 (en) * 2011-11-15 2013-05-16 Keren Jacobs Kanarik Hybrid pulsing plasma processing systems
US8808561B2 (en) * 2011-11-15 2014-08-19 Lam Research Coporation Inert-dominant pulsing in plasma processing systems
JP5977509B2 (ja) * 2011-12-09 2016-08-24 東京エレクトロン株式会社 プラズマ処理方法及びプラズマ処理装置
US8883028B2 (en) * 2011-12-28 2014-11-11 Lam Research Corporation Mixed mode pulsing etching in plasma processing systems
JP5887201B2 (ja) * 2012-05-14 2016-03-16 東京エレクトロン株式会社 基板処理方法、基板処理装置、基板処理プログラム、及び記憶媒体
JP5822795B2 (ja) * 2012-07-17 2015-11-24 株式会社日立ハイテクノロジーズ プラズマ処理装置
JP6035606B2 (ja) 2013-04-09 2016-11-30 株式会社日立ハイテクノロジーズ プラズマ処理方法およびプラズマ処理装置
JP2015099824A (ja) * 2013-11-18 2015-05-28 株式会社東芝 基板処理装置及び制御方法
US9620382B2 (en) * 2013-12-06 2017-04-11 University Of Maryland, College Park Reactor for plasma-based atomic layer etching of materials
JP6424024B2 (ja) * 2014-06-24 2018-11-14 株式会社日立ハイテクノロジーズ プラズマ処理装置及びプラズマ処理方法
KR101745686B1 (ko) * 2014-07-10 2017-06-12 도쿄엘렉트론가부시키가이샤 기판의 고정밀 에칭을 위한 방법
KR102247560B1 (ko) * 2014-07-14 2021-05-03 삼성전자 주식회사 Rps에서의 플라즈마 생성방법, 및 그 플라즈마 생성방법을 포함한 반도체 소자 제조방법

Also Published As

Publication number Publication date
TW201631657A (zh) 2016-09-01
TWI613721B (zh) 2018-02-01
KR20160067740A (ko) 2016-06-14
JP2016111140A (ja) 2016-06-20
US9779962B2 (en) 2017-10-03
KR101900136B1 (ko) 2018-09-18
US20160163554A1 (en) 2016-06-09

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