JP6311068B2 - 耐引っかき性／耐摩耗性と撥油性とが改良されたガラス用コーティング - Google Patents
耐引っかき性／耐摩耗性と撥油性とが改良されたガラス用コーティング Download PDFInfo
- Publication number
- JP6311068B2 JP6311068B2 JP2017503885A JP2017503885A JP6311068B2 JP 6311068 B2 JP6311068 B2 JP 6311068B2 JP 2017503885 A JP2017503885 A JP 2017503885A JP 2017503885 A JP2017503885 A JP 2017503885A JP 6311068 B2 JP6311068 B2 JP 6311068B2
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- JP
- Japan
- Prior art keywords
- layer
- coating
- silicon
- glass
- diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011521 glass Substances 0.000 title claims description 62
- 238000000576 coating method Methods 0.000 title claims description 53
- 239000011248 coating agent Substances 0.000 title claims description 45
- 238000005299 abrasion Methods 0.000 title description 2
- 239000010410 layer Substances 0.000 claims description 170
- 229910052710 silicon Inorganic materials 0.000 claims description 81
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 80
- 239000010703 silicon Substances 0.000 claims description 80
- 239000000758 substrate Substances 0.000 claims description 44
- 239000006117 anti-reflective coating Substances 0.000 claims description 42
- 238000004544 sputter deposition Methods 0.000 claims description 39
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 34
- 239000012790 adhesive layer Substances 0.000 claims description 25
- 239000007789 gas Substances 0.000 claims description 22
- 229910052786 argon Inorganic materials 0.000 claims description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 17
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 15
- 239000011241 protective layer Substances 0.000 claims description 15
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 15
- 239000006116 anti-fingerprint coating Substances 0.000 claims description 13
- 238000005546 reactive sputtering Methods 0.000 claims description 13
- 229910052760 oxygen Inorganic materials 0.000 claims description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 11
- 239000001301 oxygen Substances 0.000 claims description 11
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 238000005984 hydrogenation reaction Methods 0.000 claims description 7
- 239000011253 protective coating Substances 0.000 claims description 7
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 6
- 229910001882 dioxygen Inorganic materials 0.000 claims description 6
- 150000004767 nitrides Chemical class 0.000 claims description 5
- 238000000137 annealing Methods 0.000 claims description 3
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 3
- 210000002381 plasma Anatomy 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 23
- 229910052814 silicon oxide Inorganic materials 0.000 description 19
- 239000003921 oil Substances 0.000 description 17
- 230000001681 protective effect Effects 0.000 description 14
- 239000002245 particle Substances 0.000 description 12
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 9
- 238000000151 deposition Methods 0.000 description 8
- 230000007704 transition Effects 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 239000005871 repellent Substances 0.000 description 7
- 230000001154 acute effect Effects 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000005240 physical vapour deposition Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 4
- 230000002940 repellent Effects 0.000 description 4
- 238000005477 sputtering target Methods 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000006297 dehydration reaction Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000011856 silicon-based particle Substances 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 210000002268 wool Anatomy 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 229910003481 amorphous carbon Inorganic materials 0.000 description 2
- 230000008033 biological extinction Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000018044 dehydration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 238000006748 scratching Methods 0.000 description 2
- 230000002393 scratching effect Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241000282575 Gorilla Species 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000003666 anti-fingerprint Effects 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000006059 cover glass Substances 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- -1 for example Inorganic materials 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000009863 impact test Methods 0.000 description 1
- 230000005923 long-lasting effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B17/00—Methods preventing fouling
- B08B17/02—Preventing deposition of fouling or of dust
- B08B17/06—Preventing deposition of fouling or of dust by giving articles subject to fouling a special shape or arrangement
- B08B17/065—Preventing deposition of fouling or of dust by giving articles subject to fouling a special shape or arrangement the surface having a microscopic surface pattern to achieve the same effect as a lotus flower
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3482—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising silicon, hydrogenated silicon or a silicide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/42—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating of an organic material and at least one non-metal coating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/006—Other surface treatment of glass not in the form of fibres or filaments by irradiation by plasma or corona discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/73—Anti-reflective coatings with specific characteristics
- C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/76—Hydrophobic and oleophobic coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/31—Pre-treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Plasma & Fusion (AREA)
- Physical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462027745P | 2014-07-22 | 2014-07-22 | |
| US62/027,745 | 2014-07-22 | ||
| US201462033099P | 2014-08-04 | 2014-08-04 | |
| US62/033,099 | 2014-08-04 | ||
| PCT/US2015/041423 WO2016022286A1 (en) | 2014-07-22 | 2015-07-21 | Coating for glass with improved scratch/wear resistance and oleophobic properties |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017523949A JP2017523949A (ja) | 2017-08-24 |
| JP6311068B2 true JP6311068B2 (ja) | 2018-04-11 |
Family
ID=55166155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017503885A Expired - Fee Related JP6311068B2 (ja) | 2014-07-22 | 2015-07-21 | 耐引っかき性／耐摩耗性と撥油性とが改良されたガラス用コーティング |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20160023941A1 (ko) |
| JP (1) | JP6311068B2 (ko) |
| KR (1) | KR102475014B1 (ko) |
| CN (1) | CN107000382B (ko) |
| MY (1) | MY179562A (ko) |
| SG (1) | SG11201700529QA (ko) |
| TW (1) | TWI616330B (ko) |
| WO (1) | WO2016022286A1 (ko) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20170242503A1 (en) * | 2016-02-19 | 2017-08-24 | Intevac, Inc. | Smudge, scratch and wear resistant glass via ion implantation |
| AU2017286554B2 (en) * | 2016-06-13 | 2019-12-19 | Viavi Solutions Inc. | Protected item including a protective coating |
| CN106746721A (zh) * | 2016-12-09 | 2017-05-31 | 北京航玻新材料技术有限公司 | 硬质复合膜、触摸屏面板及其制备方法 |
| TWI672226B (zh) * | 2017-06-01 | 2019-09-21 | 美商因特瓦克公司 | 具有奈米積層以提高耐用性的光學塗層 |
| CN112166208B (zh) * | 2017-07-19 | 2023-12-12 | 因特瓦克公司 | 用于形成纳米层合光学涂层的系统 |
| TWI649775B (zh) * | 2018-01-02 | 2019-02-01 | 台灣積體電路製造股份有限公司 | 離子佈植機及離子佈植機腔室的製造方法 |
| TWI674969B (zh) * | 2018-04-25 | 2019-10-21 | 台灣玻璃工業股份有限公司 | 半反半透玻璃 |
| KR102582647B1 (ko) * | 2018-10-10 | 2023-09-25 | 삼성디스플레이 주식회사 | 커버 윈도우 부재 및 이를 갖는 표시 장치 |
| WO2020263632A1 (en) | 2019-06-26 | 2020-12-30 | Applied Materials, Inc. | Flexible multi-layered cover lens stacks for foldable displays |
| JP7380708B2 (ja) * | 2019-11-27 | 2023-11-15 | Ａｇｃ株式会社 | 扉または壁 |
| CN111960667A (zh) * | 2020-08-17 | 2020-11-20 | 宿州竹梦光学科技有限公司 | 一种智能终端触控光学玻璃生产工艺 |
| CN112746264A (zh) * | 2020-12-29 | 2021-05-04 | 上海哈呐机电设备有限公司 | 一种防指纹镀膜方法、防指纹镀膜结构及显示装置 |
| CN113698107A (zh) * | 2021-08-02 | 2021-11-26 | Oppo广东移动通信有限公司 | 防眩光玻璃及制备方法、应用、显示装置、电子设备 |
| DE102022110375A1 (de) | 2022-04-28 | 2023-11-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Schichtsystem, beschichtetes Substrat umfassend das Schichtsystem, Verfahren zum Beschichten der Oberfläche eines Substrats mit dem Schichtsystem sowie Verwendung des Schichtsystems |
| CN114685058A (zh) * | 2022-04-28 | 2022-07-01 | 江西群泰科技有限公司 | 一种玻璃盖板的制备方法、玻璃盖板以及移动终端 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5637353A (en) * | 1990-09-27 | 1997-06-10 | Monsanto Company | Abrasion wear resistant coated substrate product |
| US5135808A (en) * | 1990-09-27 | 1992-08-04 | Diamonex, Incorporated | Abrasion wear resistant coated substrate product |
| KR970000382B1 (ko) * | 1994-07-08 | 1997-01-09 | 한국유리공업 주식회사 | 저반사 코팅유리 및 그 제조방법 |
| US6086796A (en) * | 1997-07-02 | 2000-07-11 | Diamonex, Incorporated | Diamond-like carbon over-coats for optical recording media devices and method thereof |
| US6338901B1 (en) * | 1999-05-03 | 2002-01-15 | Guardian Industries Corporation | Hydrophobic coating including DLC on substrate |
| US6808606B2 (en) * | 1999-05-03 | 2004-10-26 | Guardian Industries Corp. | Method of manufacturing window using ion beam milling of glass substrate(s) |
| JP2003501555A (ja) * | 1999-06-08 | 2003-01-14 | ナムローゼ・フェンノートシャップ・ベーカート・ソシエテ・アノニム | ドープダイヤモンド状カーボン皮膜 |
| US6290821B1 (en) * | 1999-07-15 | 2001-09-18 | Seagate Technology Llc | Sputter deposition utilizing pulsed cathode and substrate bias power |
| US6713179B2 (en) * | 2000-05-24 | 2004-03-30 | Guardian Industries Corp. | Hydrophilic DLC on substrate with UV exposure |
| US6533907B2 (en) * | 2001-01-19 | 2003-03-18 | Symmorphix, Inc. | Method of producing amorphous silicon for hard mask and waveguide applications |
| JP2004093437A (ja) * | 2002-09-02 | 2004-03-25 | Citizen Watch Co Ltd | 時計用カバーガラス |
| FR2858816B1 (fr) * | 2003-08-13 | 2006-11-17 | Saint Gobain | Substrat transparent comportant un revetement antireflet |
| JP4910619B2 (ja) * | 2006-10-13 | 2012-04-04 | セイコーエプソン株式会社 | メガネレンズの製造方法 |
| KR101479488B1 (ko) * | 2010-05-28 | 2015-01-06 | 다이요 가가쿠 고교 가부시키가이샤 | 비정질 탄소막을 갖는 스크린 인쇄용 공판 및 그 제조 방법 |
| TWI449625B (zh) * | 2011-08-24 | 2014-08-21 | Ritedia Corp | 具有疏水與疏油特性之結構及其製備方法 |
| US8968831B2 (en) * | 2011-12-06 | 2015-03-03 | Guardian Industries Corp. | Coated articles including anti-fingerprint and/or smudge-reducing coatings, and/or methods of making the same |
| JP2013155399A (ja) * | 2012-01-27 | 2013-08-15 | Asahi Glass Co Ltd | 防汚膜付き基体およびその製造方法 |
| WO2013183457A1 (ja) * | 2012-06-08 | 2013-12-12 | 旭硝子株式会社 | 光学素子 |
-
2015
- 2015-07-21 JP JP2017503885A patent/JP6311068B2/ja not_active Expired - Fee Related
- 2015-07-21 WO PCT/US2015/041423 patent/WO2016022286A1/en active Application Filing
- 2015-07-21 MY MYPI2017000105A patent/MY179562A/en unknown
- 2015-07-21 US US14/805,418 patent/US20160023941A1/en not_active Abandoned
- 2015-07-21 SG SG11201700529QA patent/SG11201700529QA/en unknown
- 2015-07-21 KR KR1020177004883A patent/KR102475014B1/ko active IP Right Grant
- 2015-07-21 CN CN201580048279.3A patent/CN107000382B/zh not_active Expired - Fee Related
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|---|---|
| US20160023941A1 (en) | 2016-01-28 |
| TWI616330B (zh) | 2018-03-01 |
| WO2016022286A1 (en) | 2016-02-11 |
| SG11201700529QA (en) | 2017-02-27 |
| CN107000382A (zh) | 2017-08-01 |
| JP2017523949A (ja) | 2017-08-24 |
| CN107000382B (zh) | 2020-04-28 |
| KR102475014B1 (ko) | 2022-12-06 |
| KR20170035998A (ko) | 2017-03-31 |
| MY179562A (en) | 2020-11-10 |
| TW201604003A (zh) | 2016-02-01 |
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