JP6266384B2 - 温度測定装置及び温度測定方法 - Google Patents

温度測定装置及び温度測定方法 Download PDF

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Publication number
JP6266384B2
JP6266384B2 JP2014042138A JP2014042138A JP6266384B2 JP 6266384 B2 JP6266384 B2 JP 6266384B2 JP 2014042138 A JP2014042138 A JP 2014042138A JP 2014042138 A JP2014042138 A JP 2014042138A JP 6266384 B2 JP6266384 B2 JP 6266384B2
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Prior art keywords
light
temperature
measurement
light source
led
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JP2014042138A
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English (en)
Japanese (ja)
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JP2015169445A5 (enExample
JP2015169445A (ja
Inventor
能吏 山本
能吏 山本
建一郎 山田
建一郎 山田
進矢 山中
進矢 山中
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority to JP2014042138A priority Critical patent/JP6266384B2/ja
Priority to US15/115,989 priority patent/US10139289B2/en
Priority to PCT/JP2015/055462 priority patent/WO2015133349A1/ja
Priority to TW104106434A priority patent/TWI646313B/zh
Publication of JP2015169445A publication Critical patent/JP2015169445A/ja
Publication of JP2015169445A5 publication Critical patent/JP2015169445A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/12—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in colour, translucency or reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K15/00—Testing or calibrating of thermometers
    • G01K15/005—Calibration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
JP2014042138A 2014-03-04 2014-03-04 温度測定装置及び温度測定方法 Active JP6266384B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014042138A JP6266384B2 (ja) 2014-03-04 2014-03-04 温度測定装置及び温度測定方法
US15/115,989 US10139289B2 (en) 2014-03-04 2015-02-25 Temperature measurement device, light emitting module and temperature measurement method
PCT/JP2015/055462 WO2015133349A1 (ja) 2014-03-04 2015-02-25 温度測定装置、投光モジュール及び温度測定方法
TW104106434A TWI646313B (zh) 2014-03-04 2015-03-02 Temperature measuring device and temperature measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014042138A JP6266384B2 (ja) 2014-03-04 2014-03-04 温度測定装置及び温度測定方法

Publications (3)

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JP2015169445A JP2015169445A (ja) 2015-09-28
JP2015169445A5 JP2015169445A5 (enExample) 2017-01-26
JP6266384B2 true JP6266384B2 (ja) 2018-01-24

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JP2014042138A Active JP6266384B2 (ja) 2014-03-04 2014-03-04 温度測定装置及び温度測定方法

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US (1) US10139289B2 (enExample)
JP (1) JP6266384B2 (enExample)
TW (1) TWI646313B (enExample)
WO (1) WO2015133349A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016076650A1 (ko) * 2014-11-12 2016-05-19 (주)디엑스엠 펠티어소자에 의해 치과용 매트리얼을 가열하는 치과용 매트리얼 가열주입기
IT201800010364A1 (it) * 2018-11-15 2020-05-15 Chemitec S R L Metodo e sistema per l’analisi spettrofotometrica di un campione

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE418997B (sv) * 1978-06-26 1981-07-06 Asea Ab Fiberoptisk temeraturgivare baserad pa metning av den temperaturberoende, spektrala absorptionsformagan hos ett material
US4367040A (en) * 1979-05-29 1983-01-04 Tokyo Shibaura Denki Kabushiki Kaisha Multi-channel optical sensing system
JPS58144722A (ja) * 1982-02-23 1983-08-29 Mitsubishi Electric Corp 温度測定装置
JPS59226999A (ja) * 1983-06-09 1984-12-20 株式会社東芝 光学的検出装置
US4703174A (en) * 1984-03-02 1987-10-27 Fiberdynamics, Inc. Fiberoptic temperature/pressure sensor system
JPS61213738A (ja) 1985-03-20 1986-09-22 Nagoyashi 光フアイバ温度計測センサ
JPS61232684A (ja) * 1985-04-08 1986-10-16 Mitsubishi Cable Ind Ltd 光半導体素子の温度安定化装置
JPS61233331A (ja) 1985-04-08 1986-10-17 Mitsubishi Cable Ind Ltd 光学式温度計
US4703175A (en) * 1985-08-19 1987-10-27 Tacan Corporation Fiber-optic sensor with two different wavelengths of light traveling together through the sensor head
JPS6285832A (ja) 1985-10-11 1987-04-20 Mitsubishi Cable Ind Ltd 光学式温度計
JPH01242931A (ja) 1988-03-23 1989-09-27 Mitsubishi Electric Corp 温度センサ
US5258614A (en) * 1991-05-13 1993-11-02 The Babcock & Wilcox Company Optical fiber loop temperature sensor
US5446280A (en) * 1993-08-31 1995-08-29 Center For Innovative Technology Split-spectrum self-referenced fiber optic sensor
JPH07142803A (ja) * 1993-11-12 1995-06-02 Fuji Photo Film Co Ltd レーザーダイオードポンピング固体レーザー
US20030053169A1 (en) * 2001-06-07 2003-03-20 The Furukawa Electric Co., Ltd. Optical transmitter, WDM optical transmission device and optical module
US7106978B2 (en) * 2001-10-09 2006-09-12 The Furukawa Electric Co., Ltd. Optical module, optical transmission apparatus, WDM optical transmission device, and method for stabilizing laser wavelength
JP2003307458A (ja) * 2002-04-15 2003-10-31 Akifumi Ito 基材の温度測定方法および温度測定装置
JP2005084019A (ja) * 2003-09-11 2005-03-31 Akifumi Ito 基板の温度測定方法
US7355715B2 (en) * 2004-10-12 2008-04-08 Tokyo Electron Limited Temperature measuring apparatus, temperature measurement method, temperature measurement system, control system and control method
JP4775173B2 (ja) * 2006-08-24 2011-09-21 住友電気工業株式会社 光ファイバ温度センサ
JP4896814B2 (ja) * 2007-05-18 2012-03-14 ニューブレクス株式会社 分布型光ファイバセンサ
US20110231135A1 (en) * 2008-09-27 2011-09-22 Kwang Suh Auto-correcting or self-calibrating DTS temperature sensing systems and methods
JP5591565B2 (ja) * 2010-03-12 2014-09-17 東京エレクトロン株式会社 温度測定用プローブ、温度測定システム及びこれを用いた温度測定方法
DE102011102079A1 (de) * 2011-05-19 2012-11-22 Ingeneric Gmbh Einkoppelvorrichtung für einen Lichtwellenleiter
KR20130107818A (ko) * 2012-03-23 2013-10-02 삼성전자주식회사 레이저 간섭계 및 이 레이저 간섭계를 이용한 변위 측정 시스템

Also Published As

Publication number Publication date
TWI646313B (zh) 2019-01-01
US10139289B2 (en) 2018-11-27
US20170176264A1 (en) 2017-06-22
JP2015169445A (ja) 2015-09-28
WO2015133349A1 (ja) 2015-09-11
TW201538939A (zh) 2015-10-16

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