TWI646313B - Temperature measuring device and temperature measuring method - Google Patents

Temperature measuring device and temperature measuring method Download PDF

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Publication number
TWI646313B
TWI646313B TW104106434A TW104106434A TWI646313B TW I646313 B TWI646313 B TW I646313B TW 104106434 A TW104106434 A TW 104106434A TW 104106434 A TW104106434 A TW 104106434A TW I646313 B TWI646313 B TW I646313B
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TW
Taiwan
Prior art keywords
light
temperature
light source
measurement
led
Prior art date
Application number
TW104106434A
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English (en)
Chinese (zh)
Other versions
TW201538939A (zh
Inventor
山本能吏
山田建一郎
山中進矢
Original Assignee
日商東京威力科創股份有限公司
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Application filed by 日商東京威力科創股份有限公司 filed Critical 日商東京威力科創股份有限公司
Publication of TW201538939A publication Critical patent/TW201538939A/zh
Application granted granted Critical
Publication of TWI646313B publication Critical patent/TWI646313B/zh

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/12Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in colour, translucency or reflectance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/32Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K15/00Testing or calibrating of thermometers
    • G01K15/005Calibration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
TW104106434A 2014-03-04 2015-03-02 Temperature measuring device and temperature measuring method TWI646313B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-042138 2014-03-04
JP2014042138A JP6266384B2 (ja) 2014-03-04 2014-03-04 温度測定装置及び温度測定方法

Publications (2)

Publication Number Publication Date
TW201538939A TW201538939A (zh) 2015-10-16
TWI646313B true TWI646313B (zh) 2019-01-01

Family

ID=54055158

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104106434A TWI646313B (zh) 2014-03-04 2015-03-02 Temperature measuring device and temperature measuring method

Country Status (4)

Country Link
US (1) US10139289B2 (enExample)
JP (1) JP6266384B2 (enExample)
TW (1) TWI646313B (enExample)
WO (1) WO2015133349A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016076650A1 (ko) * 2014-11-12 2016-05-19 (주)디엑스엠 펠티어소자에 의해 치과용 매트리얼을 가열하는 치과용 매트리얼 가열주입기
IT201800010364A1 (it) * 2018-11-15 2020-05-15 Chemitec S R L Metodo e sistema per l’analisi spettrofotometrica di un campione

Citations (5)

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US4278349A (en) * 1978-06-26 1981-07-14 Asea Aktiebolag Fiber optical temperature sensors
US4703175A (en) * 1985-08-19 1987-10-27 Tacan Corporation Fiber-optic sensor with two different wavelengths of light traveling together through the sensor head
JPH07142803A (ja) * 1993-11-12 1995-06-02 Fuji Photo Film Co Ltd レーザーダイオードポンピング固体レーザー
JP2008286697A (ja) * 2007-05-18 2008-11-27 Neubrex Co Ltd 分布型光ファイバセンサ
US20110231135A1 (en) * 2008-09-27 2011-09-22 Kwang Suh Auto-correcting or self-calibrating DTS temperature sensing systems and methods

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US4367040A (en) * 1979-05-29 1983-01-04 Tokyo Shibaura Denki Kabushiki Kaisha Multi-channel optical sensing system
JPS58144722A (ja) * 1982-02-23 1983-08-29 Mitsubishi Electric Corp 温度測定装置
JPS59226999A (ja) * 1983-06-09 1984-12-20 株式会社東芝 光学的検出装置
US4703174A (en) * 1984-03-02 1987-10-27 Fiberdynamics, Inc. Fiberoptic temperature/pressure sensor system
JPS61213738A (ja) 1985-03-20 1986-09-22 Nagoyashi 光フアイバ温度計測センサ
JPS61232684A (ja) * 1985-04-08 1986-10-16 Mitsubishi Cable Ind Ltd 光半導体素子の温度安定化装置
JPS61233331A (ja) 1985-04-08 1986-10-17 Mitsubishi Cable Ind Ltd 光学式温度計
JPS6285832A (ja) 1985-10-11 1987-04-20 Mitsubishi Cable Ind Ltd 光学式温度計
JPH01242931A (ja) 1988-03-23 1989-09-27 Mitsubishi Electric Corp 温度センサ
US5258614A (en) * 1991-05-13 1993-11-02 The Babcock & Wilcox Company Optical fiber loop temperature sensor
US5446280A (en) * 1993-08-31 1995-08-29 Center For Innovative Technology Split-spectrum self-referenced fiber optic sensor
US20030053169A1 (en) * 2001-06-07 2003-03-20 The Furukawa Electric Co., Ltd. Optical transmitter, WDM optical transmission device and optical module
US7106978B2 (en) * 2001-10-09 2006-09-12 The Furukawa Electric Co., Ltd. Optical module, optical transmission apparatus, WDM optical transmission device, and method for stabilizing laser wavelength
JP2003307458A (ja) * 2002-04-15 2003-10-31 Akifumi Ito 基材の温度測定方法および温度測定装置
JP2005084019A (ja) * 2003-09-11 2005-03-31 Akifumi Ito 基板の温度測定方法
US7355715B2 (en) * 2004-10-12 2008-04-08 Tokyo Electron Limited Temperature measuring apparatus, temperature measurement method, temperature measurement system, control system and control method
JP4775173B2 (ja) * 2006-08-24 2011-09-21 住友電気工業株式会社 光ファイバ温度センサ
JP5591565B2 (ja) * 2010-03-12 2014-09-17 東京エレクトロン株式会社 温度測定用プローブ、温度測定システム及びこれを用いた温度測定方法
DE102011102079A1 (de) * 2011-05-19 2012-11-22 Ingeneric Gmbh Einkoppelvorrichtung für einen Lichtwellenleiter
KR20130107818A (ko) * 2012-03-23 2013-10-02 삼성전자주식회사 레이저 간섭계 및 이 레이저 간섭계를 이용한 변위 측정 시스템

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4278349A (en) * 1978-06-26 1981-07-14 Asea Aktiebolag Fiber optical temperature sensors
US4703175A (en) * 1985-08-19 1987-10-27 Tacan Corporation Fiber-optic sensor with two different wavelengths of light traveling together through the sensor head
JPH07142803A (ja) * 1993-11-12 1995-06-02 Fuji Photo Film Co Ltd レーザーダイオードポンピング固体レーザー
JP2008286697A (ja) * 2007-05-18 2008-11-27 Neubrex Co Ltd 分布型光ファイバセンサ
US20110231135A1 (en) * 2008-09-27 2011-09-22 Kwang Suh Auto-correcting or self-calibrating DTS temperature sensing systems and methods

Also Published As

Publication number Publication date
TW201538939A (zh) 2015-10-16
US10139289B2 (en) 2018-11-27
JP2015169445A (ja) 2015-09-28
US20170176264A1 (en) 2017-06-22
JP6266384B2 (ja) 2018-01-24
WO2015133349A1 (ja) 2015-09-11

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