JP6254841B2 - 半導体装置用ボンディングワイヤ - Google Patents
半導体装置用ボンディングワイヤ Download PDFInfo
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- JP6254841B2 JP6254841B2 JP2013260563A JP2013260563A JP6254841B2 JP 6254841 B2 JP6254841 B2 JP 6254841B2 JP 2013260563 A JP2013260563 A JP 2013260563A JP 2013260563 A JP2013260563 A JP 2013260563A JP 6254841 B2 JP6254841 B2 JP 6254841B2
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Images
Classifications
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- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0227—Rods, wires
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- B23K35/3006—Ag as the principal constituent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- B23K35/302—Cu as the principal constituent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
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- B23K35/3033—Ni as the principal constituent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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Description
(全体構成)
以下、本発明の実施形態について詳細に説明する。本実施形態に係るボンディングワイヤは、金属Mを50mol%超含む芯材と、芯材上に形成された中間層と、当該中間層上に形成された被覆層とを備える。金属Mは、Cu又はAgである。
次に本実施形態に係るボンディングワイヤの製造方法を説明する。ボンディングワイヤの製造においては、芯材の表面に中間層、被覆層、場合によって表面層を形成する工程、所望の太さにする加工工程、熱処理工程が必要となる。
実施例について、試料、評価内容、評価結果の順に説明する。
ボンディングワイヤの原材料として、芯材に用いるCu、Agは純度が約99.99mass%以上の高純度の素材を用い、被覆層のPd、中間層のNi、表面層のAuには純度99.9mass%以上のメッキ液を用意した。芯材を溶解する工程で、合金元素を適量添加した。
接合部の高温信頼性について、ボンディング後に樹脂封止された試料を、処理温度185℃、処理時間2000時間の条件で加熱処理した後に、60本のボンディングワイヤの電気特性を評価した。電気抵抗が初期の3倍以上に上昇したボンディングワイヤの割合が30%以上の場合には接合不良のため×印、電気抵抗が3倍以上に上昇したボンディングワイヤの割合が5%以上30%未満の範囲の場合には信頼性要求が厳しくないICには使用可能なため△印、電気抵抗が3倍以上に上昇したボンディングワイヤの割合が5%未満で且つ1.5倍以上に上昇したボンディングワイヤの割合が10%以上30%未満の場合には実用上は問題ないため○印、電気抵抗が1.5倍以上に上昇したボンディングワイヤの割合が10%未満であれば良好であるため◎印で、表1,2中の「高温信頼性」の欄に表示した。
実施例1〜18のボンディングワイヤは、芯材、中間層、被覆層からなり、中間層のNiの濃度が15〜80mol%であることにより、スネークループ不良が低減できることが確認された。一方、中間層を含まない比較例1、2、5、又は中間層のNiの濃度が上記範囲外である比較例3、4、6は、スネークループ不良が高頻度で発生した。
Claims (8)
- 金属Mを50mol%超含む芯材と、
前記芯材の表面に形成され、Ni、Pd、前記金属M及び不可避不純物からなり、前記Niの濃度が15〜80mol%である中間層と、
前記中間層上に形成され、Ni、Pd、Au及び不可避不純物からなり、前記Pdの濃度が50〜100mol%である被覆層と、
前記被覆層上に形成され、AuとPdを含む合金からなり、前記Auの濃度が10〜70mol%、AuとPdの合計濃度が80mol%以上である表面層と
を備え、
前記金属MがCu又はAgであり、
前記被覆層のNi濃度が前記中間層のNi濃度よりも低く、
前記被覆層のAu濃度が前記表面層のAu濃度よりも低い
ことを特徴とする半導体装置用ボンディングワイヤ。 - 前記中間層の厚さが8〜80nmであることを特徴とする請求項1記載の半導体装置用ボンディングワイヤ。
- 前記表面層、前記被覆層、及び前記中間層の総計厚さが25〜200nmであることを特徴とする請求項1又は2記載の半導体装置用ボンディングワイヤ。
- 前記表面層の厚さが3〜30nmであることを特徴とする請求項1〜3のいずれか1項記載の半導体装置用ボンディングワイヤ。
- 前記金属MがCuであり、前記芯材は、P、Ti、B、Agから選ばれる1種以上の元素を含有し、ワイヤ全体に占める前記元素濃度が総計で0.0005〜0.02mass%の範囲であることを特徴とする請求項1〜4のいずれか1項記載の半導体装置用ボンディングワイヤ。
- 前記金属MがCuであり、前記芯材は、Pd、Niから選ばれる1種以上の元素を含有し、ワイヤ全体に占める前記元素濃度が総計で0.2〜2.0mass%の範囲であることを特徴とする請求項1〜4のいずれか1項記載の半導体装置用ボンディングワイヤ。
- 前記金属MがAgであり、前記芯材は、Pd、Ni、Cuから選ばれる1種以上の元素を含有し、ワイヤ全体に占める前記元素濃度が総計で0.5〜5.0mass%の範囲であることを特徴とする請求項1〜4のいずれか1項記載の半導体装置用ボンディングワイヤ。
- 前記被覆層がさらに前記芯材と同じ前記金属Mを含むことを特徴とする請求項1〜7のいずれか1項記載の半導体装置用ボンディングワイヤ。
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CN201480068797.7A CN105830205B (zh) | 2013-12-17 | 2014-12-04 | 半导体装置用接合线 |
KR1020197024020A KR20190100426A (ko) | 2013-12-17 | 2014-12-04 | 반도체 장치용 본딩 와이어 |
KR1020167018870A KR102013214B1 (ko) | 2013-12-17 | 2014-12-04 | 반도체 장치용 본딩 와이어 |
US15/105,707 US9812421B2 (en) | 2013-12-17 | 2014-12-04 | Bonding wire for semiconductor devices |
PCT/JP2014/082164 WO2015093306A1 (ja) | 2013-12-17 | 2014-12-04 | 半導体装置用ボンディングワイヤ |
TW103143290A TWI647766B (zh) | 2013-12-17 | 2014-12-11 | Bonding wire for semiconductor device |
TW107143058A TWI700754B (zh) | 2013-12-17 | 2014-12-11 | 半導體裝置用接合線 |
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SG10201509634UA (en) * | 2015-11-23 | 2017-06-29 | Heraeus Oriental Hitec Co Ltd | Coated wire |
DE112016005747B4 (de) | 2015-12-15 | 2022-05-05 | Nippon Micrometal Corporation | Bonddrähte für eine Halbleitervorrichtung |
SG10201607523RA (en) * | 2016-09-09 | 2018-04-27 | Heraeus Materials Singapore Pte Ltd | Coated wire |
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CN112687649B (zh) * | 2020-12-25 | 2024-03-12 | 中国科学院宁波材料技术与工程研究所 | 键合线表面的耐腐蚀抗氧化涂层及其制备方法与应用 |
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WO2022270051A1 (ja) * | 2021-06-25 | 2022-12-29 | 日鉄マイクロメタル株式会社 | 半導体装置用ボンディングワイヤ |
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JP2015119004A (ja) | 2015-06-25 |
TWI700754B (zh) | 2020-08-01 |
CN105830205B (zh) | 2018-09-18 |
KR20190100426A (ko) | 2019-08-28 |
TW201921535A (zh) | 2019-06-01 |
WO2015093306A1 (ja) | 2015-06-25 |
TW201530673A (zh) | 2015-08-01 |
US9812421B2 (en) | 2017-11-07 |
US20160315063A1 (en) | 2016-10-27 |
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TWI647766B (zh) | 2019-01-11 |
KR102013214B1 (ko) | 2019-08-22 |
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