JP6252900B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6252900B2 JP6252900B2 JP2013248166A JP2013248166A JP6252900B2 JP 6252900 B2 JP6252900 B2 JP 6252900B2 JP 2013248166 A JP2013248166 A JP 2013248166A JP 2013248166 A JP2013248166 A JP 2013248166A JP 6252900 B2 JP6252900 B2 JP 6252900B2
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- 239000004065 semiconductor Substances 0.000 title claims description 58
- 229910003460 diamond Inorganic materials 0.000 claims description 51
- 239000010432 diamond Substances 0.000 claims description 51
- 239000012535 impurity Substances 0.000 claims description 45
- 239000000758 substrate Substances 0.000 claims description 16
- 239000010410 layer Substances 0.000 description 176
- 230000005684 electric field Effects 0.000 description 21
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 5
- 230000015556 catabolic process Effects 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 230000005428 wave function Effects 0.000 description 2
- 108091006146 Channels Proteins 0.000 description 1
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/76—Unipolar devices, e.g. field effect transistors
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- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- H01L29/76—Unipolar devices, e.g. field effect transistors
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7803—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device
- H01L29/7806—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device the other device being a Schottky barrier diode
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- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
Description
本発明の第1実施形態について説明する。本実施形態では、ダイヤモンド半導体を用いた半導体装置として、トレンチゲート構造のMISFETを備えた半導体装置を例に挙げて説明する。まず、図1を参照して、本実施形態にかかるトレンチゲート構造のMISFETの構成について説明する。なお、図1では、MISFETの1セル分しか記載していないが、直線L1を対称線として図1を左右対称にした構造のものを複数個形成することで、本実施形態にかかるトレンチゲート構造のMISFETを備えた半導体装置が構成されている。
本発明の第2実施形態について説明する。本実施形態は、第1実施形態に対して半導体装置に備えられる半導体素子を変更したものであり、その他に関しては第1実施形態と同様であるため、第1実施形態と異なる部分についてのみ説明する。
本発明は上記した実施形態に限定されるものではなく、特許請求の範囲に記載した範囲内において適宜変更が可能である。
2 p型ドリフト層
2a 第1層
2b 第2層
3 n型ボディ層
4 p+型ソース領域
5 トレンチ
6 ゲート絶縁膜
7 ゲート電極
8 ソース電極
9 ドレイン電極
Claims (4)
- ダイヤモンド半導体にて構成された第1導電型のダイヤモンド基板(1)と、
ホッピング伝導が行われる第1密度にて構成された第1導電型の第1層(2a)と、前記第1密度よりも低密度な第2密度にて構成された第1導電型もしくはi型の第2層(2b)とを有し、前記第1層および前記第2層が交互に繰り返し積層されたδドープ構造のダイヤモンド半導体にて構成されたドリフト層(2)と、
前記ドリフト層の上に形成され、ダイヤモンド半導体にて構成された第2導電型のボディ層(3)と、
前記ボディ層の上層部に形成され、ダイヤモンド半導体にて構成された第1導電型のソース領域(4)と、
前記ボディ層の表面に形成されたゲート絶縁膜(6)と、
前記ゲート絶縁膜の表面に形成されたゲート電極(7)と、
前記ソース領域および前記ボディ層に電気的に接続された第1電極(8)と、
前記ダイヤモンド基板に電気的に接続された第2電極(9)と、を含み、
前記ドリフト層内において、前記第1層と前記第2層の平面方向に対して交差する方向となる縦方向に電流を流すことで、前記第1電極と前記第2電極との間に電流を流すMISFETを半導体素子として有し、
前記ドリフト層におけるトータルの第1導電型の不純物量が1×10 13 cm −2 以下であることを特徴とする半導体装置。 - ダイヤモンド半導体にて構成された第1導電型のダイヤモンド基板(11)と、
ホッピング伝導が行われる第1密度にて構成された第1導電型の第1層(12a)と、前記第1密度よりも低密度な第2密度にて構成された第1導電型もしくはi型の第2層(12b)とを有し、前記第1層および前記第2層が交互に繰り返し積層されたδドープ構造のダイヤモンド半導体にて構成されたドリフト層(12)と、
前記ドリフト層にショットキー接触させられたショットキー電極にて構成された第1電極(13)と、
前記ダイヤモンド基板に電気的に接続された第2電極(14)と、を含み、
前記ドリフト層内において、前記第1層と前記第2層の平面方向に対して交差する方向となる縦方向に電流を流すことで、前記第1電極と前記第2電極との間に電流を流すショットキーダイオードを半導体素子として有し、前記ドリフト層におけるトータルの第1導電型の不純物量が1×1013cm−2以下であることを特徴とする半導体装置。 - 隣接する前記第1層の中心同士の間隔となるピッチ間隔が0.13μm以下とされていることを特徴とする請求項1または2に記載の半導体装置。
- 前記第1層が1nm以下であることを特徴とする請求項3に記載の半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013248166A JP6252900B2 (ja) | 2013-11-29 | 2013-11-29 | 半導体装置 |
PCT/JP2014/005875 WO2015079671A1 (ja) | 2013-11-29 | 2014-11-25 | ダイヤモンドを用いた半導体装置 |
US15/039,505 US9711638B2 (en) | 2013-11-29 | 2014-11-25 | Semiconductor device using diamond |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2013248166A JP6252900B2 (ja) | 2013-11-29 | 2013-11-29 | 半導体装置 |
Publications (2)
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JP2015106650A JP2015106650A (ja) | 2015-06-08 |
JP6252900B2 true JP6252900B2 (ja) | 2017-12-27 |
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US (1) | US9711638B2 (ja) |
JP (1) | JP6252900B2 (ja) |
WO (1) | WO2015079671A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6765651B2 (ja) * | 2015-11-16 | 2020-10-07 | 国立研究開発法人産業技術総合研究所 | ダイヤモンド電子素子 |
JP7486729B2 (ja) * | 2020-04-14 | 2024-05-20 | 国立研究開発法人産業技術総合研究所 | 半導体装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07221328A (ja) * | 1994-02-01 | 1995-08-18 | Murata Mfg Co Ltd | 半導体装置 |
JP2005026408A (ja) * | 2003-07-01 | 2005-01-27 | Matsushita Electric Ind Co Ltd | 半導体素子およびその製造方法 |
JP5099486B2 (ja) * | 2007-08-23 | 2012-12-19 | 独立行政法人産業技術総合研究所 | 高出力ダイヤモンド半導体素子 |
JP5119553B2 (ja) * | 2008-07-24 | 2013-01-16 | 独立行政法人産業技術総合研究所 | ダイヤモンド半導体素子 |
JP2013232533A (ja) * | 2012-04-27 | 2013-11-14 | Rohm Co Ltd | 半導体装置および半導体装置の製造方法 |
JP6104575B2 (ja) * | 2012-11-28 | 2017-03-29 | 株式会社東芝 | 半導体装置 |
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2013
- 2013-11-29 JP JP2013248166A patent/JP6252900B2/ja active Active
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2014
- 2014-11-25 WO PCT/JP2014/005875 patent/WO2015079671A1/ja active Application Filing
- 2014-11-25 US US15/039,505 patent/US9711638B2/en active Active
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Publication number | Publication date |
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US9711638B2 (en) | 2017-07-18 |
JP2015106650A (ja) | 2015-06-08 |
WO2015079671A1 (ja) | 2015-06-04 |
US20160372590A1 (en) | 2016-12-22 |
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