JP6251982B2 - 光学系、および面形状測定装置 - Google Patents
光学系、および面形状測定装置 Download PDFInfo
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- JP6251982B2 JP6251982B2 JP2013111978A JP2013111978A JP6251982B2 JP 6251982 B2 JP6251982 B2 JP 6251982B2 JP 2013111978 A JP2013111978 A JP 2013111978A JP 2013111978 A JP2013111978 A JP 2013111978A JP 6251982 B2 JP6251982 B2 JP 6251982B2
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- lens
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- 230000003287 optical effect Effects 0.000 title claims description 74
- 238000005259 measurement Methods 0.000 claims description 43
- 230000000052 comparative effect Effects 0.000 description 20
- 201000009310 astigmatism Diseases 0.000 description 16
- 238000010586 diagram Methods 0.000 description 14
- 238000005452 bending Methods 0.000 description 8
- 230000004075 alteration Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
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JP2013111978A JP6251982B2 (ja) | 2013-05-28 | 2013-05-28 | 光学系、および面形状測定装置 |
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JP2013111978A JP6251982B2 (ja) | 2013-05-28 | 2013-05-28 | 光学系、および面形状測定装置 |
Publications (3)
Publication Number | Publication Date |
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JP2014232009A JP2014232009A (ja) | 2014-12-11 |
JP2014232009A5 JP2014232009A5 (it) | 2016-07-14 |
JP6251982B2 true JP6251982B2 (ja) | 2017-12-27 |
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JP2013111978A Active JP6251982B2 (ja) | 2013-05-28 | 2013-05-28 | 光学系、および面形状測定装置 |
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JP (1) | JP6251982B2 (it) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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NL2017616B1 (en) * | 2016-10-13 | 2018-04-20 | Miele & Cie | Apparatus for detecting condensation and sterilizer with such apparatus |
NL2017617B1 (en) * | 2016-10-13 | 2018-04-20 | Miele & Cie | Sterilizer apparatus with measurement chamber having orifice |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS60166913A (ja) * | 1983-10-07 | 1985-08-30 | Sankyo Seiki Mfg Co Ltd | 等速度走査用高解像力レンズ |
US5155554A (en) * | 1990-12-20 | 1992-10-13 | General Signal Corporation | Large aperture reflective interferometer for measuring convex spherical surfaces |
JP3455264B2 (ja) * | 1993-12-28 | 2003-10-14 | ペンタックス株式会社 | 干渉計 |
JPH11108624A (ja) * | 1997-10-03 | 1999-04-23 | Nikon Corp | 面形状測定装置および方法、並びに波面収差測定装置および方法 |
JP2009145724A (ja) * | 2007-12-17 | 2009-07-02 | Canon Inc | 投影光学系及びそれを有する露光装置 |
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JP2014232009A (ja) | 2014-12-11 |
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