JP6236806B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

Info

Publication number
JP6236806B2
JP6236806B2 JP2013045486A JP2013045486A JP6236806B2 JP 6236806 B2 JP6236806 B2 JP 6236806B2 JP 2013045486 A JP2013045486 A JP 2013045486A JP 2013045486 A JP2013045486 A JP 2013045486A JP 6236806 B2 JP6236806 B2 JP 6236806B2
Authority
JP
Japan
Prior art keywords
stationary blade
outer peripheral
peripheral rim
portions
divided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013045486A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014173468A5 (enExample
JP2014173468A (ja
Inventor
慎 住本
慎 住本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2013045486A priority Critical patent/JP6236806B2/ja
Priority to CN201410080508.7A priority patent/CN104033395B/zh
Priority to US14/197,364 priority patent/US20140255153A1/en
Publication of JP2014173468A publication Critical patent/JP2014173468A/ja
Publication of JP2014173468A5 publication Critical patent/JP2014173468A5/ja
Application granted granted Critical
Publication of JP6236806B2 publication Critical patent/JP6236806B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2013045486A 2013-03-07 2013-03-07 真空ポンプ Active JP6236806B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013045486A JP6236806B2 (ja) 2013-03-07 2013-03-07 真空ポンプ
CN201410080508.7A CN104033395B (zh) 2013-03-07 2014-03-04 真空泵
US14/197,364 US20140255153A1 (en) 2013-03-07 2014-03-05 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013045486A JP6236806B2 (ja) 2013-03-07 2013-03-07 真空ポンプ

Publications (3)

Publication Number Publication Date
JP2014173468A JP2014173468A (ja) 2014-09-22
JP2014173468A5 JP2014173468A5 (enExample) 2016-03-24
JP6236806B2 true JP6236806B2 (ja) 2017-11-29

Family

ID=51464323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013045486A Active JP6236806B2 (ja) 2013-03-07 2013-03-07 真空ポンプ

Country Status (3)

Country Link
US (1) US20140255153A1 (enExample)
JP (1) JP6236806B2 (enExample)
CN (1) CN104033395B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6660176B2 (ja) * 2015-12-25 2020-03-11 エドワーズ株式会社 真空ポンプ及びそれに使用される分割静翼部
GB2557679A (en) * 2016-12-15 2018-06-27 Edwards Ltd Stator blade unit for a turbomolecular pump
CN118979887B (zh) * 2024-10-22 2024-12-20 苏州中科科仪技术发展有限公司 一种静片隔离环一体化组件及其应用

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62173594U (enExample) * 1986-03-22 1987-11-04
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
JP3013083B2 (ja) * 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
JP4527966B2 (ja) * 2003-05-01 2010-08-18 株式会社大阪真空機器製作所 分子ポンプ
JP4676731B2 (ja) * 2004-09-10 2011-04-27 エドワーズ株式会社 ターボ分子ポンプ固定翼及び真空ポンプ
JP2011027049A (ja) * 2009-07-28 2011-02-10 Shimadzu Corp ターボ分子ポンプ
DE102010052660A1 (de) * 2010-11-26 2012-05-31 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
CN202091252U (zh) * 2011-05-31 2011-12-28 埃慕迪磁电科技(上海)有限公司 用于涡轮分子泵的固定叶片

Also Published As

Publication number Publication date
US20140255153A1 (en) 2014-09-11
CN104033395A (zh) 2014-09-10
JP2014173468A (ja) 2014-09-22
CN104033395B (zh) 2017-03-01

Similar Documents

Publication Publication Date Title
JP6154787B2 (ja) 真空ポンプ
JP4935527B2 (ja) 固定翼の製造方法、およびその固定翼を備えたターボ分子ポンプ
JP6241223B2 (ja) 真空ポンプ
US9664055B2 (en) Impeller and rotary machine provided with the same
JP6236806B2 (ja) 真空ポンプ
WO2007135883A1 (ja) 真空ポンプ
JP4676731B2 (ja) ターボ分子ポンプ固定翼及び真空ポンプ
JPWO2009028099A1 (ja) ターボ分子ポンプ
JP6241222B2 (ja) 真空ポンプ
JP4749054B2 (ja) ターボ分子ポンプ、およびターボ分子ポンプの組み立て方法
JP6433812B2 (ja) アダプタ及び真空ポンプ
US8591204B2 (en) Turbo-molecular pump
JP5786639B2 (ja) ターボ分子ポンプ
JP4517724B2 (ja) ターボ分子ポンプ
JP4785400B2 (ja) 真空ポンプのロータ
JP2011214558A (ja) ターボ分子ポンプ
JP5344849B2 (ja) ターボ型真空ポンプ
JP4400294B2 (ja) 固定翼の製造方法、およびその固定翼を備えたターボ分子ポンプ
JP6673103B2 (ja) 真空ポンプ
JP3175680U (ja) ターボ分子ポンプの静翼段
JP2015145637A (ja) ターボ分子ポンプ
JP6125801B2 (ja) 真空ポンプ
JP2011179466A (ja) 真空ポンプおよび真空ポンプの製造方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20151216

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160204

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160920

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20161004

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20161201

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170404

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170531

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20171003

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20171016

R151 Written notification of patent or utility model registration

Ref document number: 6236806

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151