JP6235480B2 - 放射線検出器 - Google Patents

放射線検出器 Download PDF

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Publication number
JP6235480B2
JP6235480B2 JP2014546707A JP2014546707A JP6235480B2 JP 6235480 B2 JP6235480 B2 JP 6235480B2 JP 2014546707 A JP2014546707 A JP 2014546707A JP 2014546707 A JP2014546707 A JP 2014546707A JP 6235480 B2 JP6235480 B2 JP 6235480B2
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Japan
Prior art keywords
cathode
segment
anode
segments
radiation detector
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Expired - Fee Related
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JP2014546707A
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English (en)
Japanese (ja)
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JP2015507841A (ja
Inventor
ユルゲン エンゲル,クラウス
ユルゲン エンゲル,クラウス
ヘルマン,クリストフ
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Koninklijke Philips NV
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Koninklijke Philips NV
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/24Measuring radiation intensity with semiconductor detectors
    • G01T1/241Electrode arrangements, e.g. continuous or parallel strips or the like
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/802Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • H10F39/8023Disposition of the elements in pixels, e.g. smaller elements in the centre of the imager compared to larger elements at the periphery
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/24Measuring radiation intensity with semiconductor detectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/189X-ray, gamma-ray or corpuscular radiation imagers
    • H10F39/1892Direct radiation image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/191Photoconductor image sensors
    • H10F39/195X-ray, gamma-ray or corpuscular radiation imagers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/807Pixel isolation structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/812Arrangements for transferring the charges in the image sensor perpendicular to the imaging plane, e.g. buried regions used to transfer generated charges to circuitry under the photosensitive region

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Light Receiving Elements (AREA)
  • Measurement Of Radiation (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP2014546707A 2011-12-13 2012-12-12 放射線検出器 Expired - Fee Related JP6235480B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161569833P 2011-12-13 2011-12-13
US61/569,833 2011-12-13
PCT/IB2012/057212 WO2013088352A2 (en) 2011-12-13 2012-12-12 Radiation detector

Publications (2)

Publication Number Publication Date
JP2015507841A JP2015507841A (ja) 2015-03-12
JP6235480B2 true JP6235480B2 (ja) 2017-11-22

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014546707A Expired - Fee Related JP6235480B2 (ja) 2011-12-13 2012-12-12 放射線検出器

Country Status (8)

Country Link
US (1) US20140319363A1 (enExample)
EP (1) EP2748639B1 (enExample)
JP (1) JP6235480B2 (enExample)
CN (1) CN104024889A (enExample)
BR (1) BR112014014064A2 (enExample)
IN (1) IN2014CN04758A (enExample)
RU (1) RU2014128555A (enExample)
WO (1) WO2013088352A2 (enExample)

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JP6186205B2 (ja) * 2013-08-15 2017-08-23 ソニーセミコンダクタソリューションズ株式会社 撮像素子および撮像装置
EP2876465A1 (en) * 2013-11-26 2015-05-27 Danmarks Tekniske Universitet (DTU) X-ray and gamma-ray radiation detector
AT515501B1 (de) * 2014-02-18 2016-01-15 Griesmayer Erich Dr Verfahren und Vorrichtung zum Erfassen und zum Unterscheiden von Elementarteilchen
DE102014207324A1 (de) * 2014-04-16 2015-10-22 Siemens Aktiengesellschaft Direktkonvertierender Röntgenstrahlungsdetektor und CT-System
EP3161522B1 (en) * 2014-12-05 2018-02-28 Koninklijke Philips N.V. X-ray detector device for inclined angle x-ray radiation
RU2705717C2 (ru) * 2014-12-17 2019-11-11 Конинклейке Филипс Н.В. Детектор и способ для обнаружения ионизирующего излучения
JP2018505565A (ja) * 2014-12-19 2018-02-22 ジーレイ スイッツァーランド エスアー モノリシックcmos集積ピクセル検出器ならびに様々な用途を含む粒子検出および撮像のためのシステムおよび方法
US9482764B1 (en) * 2015-05-28 2016-11-01 General Electric Company Systems and methods for charge-sharing identification and correction using a single pixel
JP6808317B2 (ja) * 2015-12-04 2021-01-06 キヤノン株式会社 撮像装置、および、撮像システム
JP6808316B2 (ja) * 2015-12-04 2021-01-06 キヤノン株式会社 撮像装置、および、撮像システム
CN105540526B (zh) * 2015-12-29 2017-03-15 中国科学院电子学研究所 单片复合敏感电极的制造方法、基于其的敏感器件
CN108885273B (zh) * 2016-03-23 2023-09-08 皇家飞利浦有限公司 具有整体像素边界的纳米材料成像探测器
CN105974460B (zh) * 2016-05-11 2018-12-07 天津大学 可重构型x射线能谱探测方法及探测器像素单元结构
CN106324649B (zh) * 2016-08-31 2023-09-15 同方威视技术股份有限公司 半导体探测器
EP3306353A1 (en) * 2016-10-07 2018-04-11 Danmarks Tekniske Universitet Radiation detector
GB201703196D0 (en) 2017-02-28 2017-04-12 Univ Of Sussex X-ray and gammay-ray photodiode
EP3422051A1 (en) * 2017-06-28 2019-01-02 Koninklijke Philips N.V. Direct conversion radiation detection
EP3658959A4 (en) * 2017-07-26 2020-12-23 Shenzhen Xpectvision Technology Co., Ltd. RADIATION DETECTOR WITH INTEGRATED DEPOLARIZATION DEVICE
EP3658960B1 (en) * 2017-07-26 2022-09-07 Shenzhen Xpectvision Technology Co., Ltd. X-ray detector capable of managing charge sharing at its periphery
CN108267777B (zh) * 2018-02-26 2023-07-07 张岚 面阵列像素探测器及中低能射线源的定向方法
WO2021168693A1 (en) * 2020-02-26 2021-09-02 Shenzhen Xpectvision Technology Co., Ltd. Radiation detector
US11835666B1 (en) * 2020-07-31 2023-12-05 Redlen Technologies, Inc. Photon counting computed tomography detector with improved count rate stability and method of operating same
US11953452B2 (en) * 2021-03-01 2024-04-09 Redlen Technologies, Inc. Ionizing radiation detector with reduced street width and improved count rate stability
JP2023055071A (ja) * 2021-10-05 2023-04-17 キヤノンメディカルシステムズ株式会社 検出器モジュール、x線コンピュータ断層撮影装置及びx線検出装置
CN120358815B (zh) * 2025-06-19 2025-10-03 湘潭大学 一种带有肖特基漂浮电极的小像素阵列探测器

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US5677539A (en) * 1995-10-13 1997-10-14 Digirad Semiconductor radiation detector with enhanced charge collection
US6046454A (en) 1995-10-13 2000-04-04 Digirad Corporation Semiconductor radiation detector with enhanced charge collection
DE19616545B4 (de) * 1996-04-25 2006-05-11 Siemens Ag Schneller Strahlungsdetektor
SE514472C2 (sv) * 1999-04-14 2001-02-26 Xcounter Ab Strålningsdetektor och en anordning för användning vid radiografi
JP3900992B2 (ja) * 2002-04-02 2007-04-04 株式会社日立製作所 放射線検出器及び放射線検査装置
US7145986B2 (en) * 2004-05-04 2006-12-05 General Electric Company Solid state X-ray detector with improved spatial resolution
JP4881071B2 (ja) * 2006-05-30 2012-02-22 株式会社日立製作所 放射線検出器、及びこれを搭載した放射線撮像装置
DE102007055676A1 (de) * 2007-11-21 2009-06-04 Siemens Ag Strahlungswandler, Strahlungsdetektor und Strahlungserfassungseinrichtung
JP5155808B2 (ja) * 2008-10-08 2013-03-06 株式会社日立製作所 半導体放射線検出器および核医学診断装置
WO2010073189A1 (en) * 2008-12-22 2010-07-01 Koninklijke Philips Electronics N.V. Radiation detector with improved charge collection and minimized leakage currents
NL1037989C2 (en) * 2010-05-28 2011-11-29 Photonis France Sas An electron multiplying structure for use in a vacuum tube using electron multiplying as well as a vacuum tube using electron multiplying provided with such an electron multiplying structure.

Also Published As

Publication number Publication date
BR112014014064A8 (pt) 2017-06-13
RU2014128555A (ru) 2016-02-10
JP2015507841A (ja) 2015-03-12
EP2748639B1 (en) 2019-07-17
BR112014014064A2 (pt) 2017-06-13
IN2014CN04758A (enExample) 2015-09-18
EP2748639A2 (en) 2014-07-02
WO2013088352A3 (en) 2013-08-08
US20140319363A1 (en) 2014-10-30
CN104024889A (zh) 2014-09-03
WO2013088352A2 (en) 2013-06-20

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