JP6227834B2 - 三極管型電離真空計 - Google Patents
三極管型電離真空計 Download PDFInfo
- Publication number
- JP6227834B2 JP6227834B2 JP2017503333A JP2017503333A JP6227834B2 JP 6227834 B2 JP6227834 B2 JP 6227834B2 JP 2017503333 A JP2017503333 A JP 2017503333A JP 2017503333 A JP2017503333 A JP 2017503333A JP 6227834 B2 JP6227834 B2 JP 6227834B2
- Authority
- JP
- Japan
- Prior art keywords
- grid
- ion collector
- filament
- length
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
Description
Claims (3)
- 測定対象物に装着されてその内部の圧力を検出する三極管型電離真空計であって、フィラメントと、フィラメントの周囲に配置される筒状の輪郭を有するグリッドと、グリッドの周囲に同心に配置される筒状のイオンコレクタとを備え、フィラメントに通電してこのフィラメントを点灯させて熱電子を放出させ、フィラメントより高い電位をグリッドに付与し、このグリッド周辺で熱電子と衝突して生じた気体原子、分子の正イオンをイオンコレクタで捕集し、このときのイオン電流から圧力を検出するものにおいて、
イオンコレクタの母線方向の両端部の粒子放出領域が省略されるように構成したことを特徴とする三極管型電離真空計。 - 前記イオンコレクタの母線方向の長さをグリッドの母線方向の長さの6%〜80%の範囲に設定し、イオンコレクタの母線方向の粒子放出領域を省略したことを特徴とする請求項1記載の三極管型電離真空計。
- 前記フィラメントと、前記グリッドと、前記イオンコレクタとを金属製の真空隔壁内に収納したことを特徴とする請求項1または請求項2記載の三極管型電離真空計。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015041030 | 2015-03-03 | ||
JP2015041030 | 2015-03-03 | ||
PCT/JP2016/000698 WO2016139894A1 (ja) | 2015-03-03 | 2016-02-10 | 三極管型電離真空計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2016139894A1 JPWO2016139894A1 (ja) | 2017-10-26 |
JP6227834B2 true JP6227834B2 (ja) | 2017-11-08 |
Family
ID=56849286
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017503333A Active JP6227834B2 (ja) | 2015-03-03 | 2016-02-10 | 三極管型電離真空計 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6227834B2 (ja) |
KR (1) | KR20170120692A (ja) |
CN (1) | CN107407611B (ja) |
TW (1) | TWI638151B (ja) |
WO (1) | WO2016139894A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019015666A (ja) * | 2017-07-10 | 2019-01-31 | 株式会社アルバック | 三極管型電離真空計及び圧力測定方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1535314A (en) * | 1975-02-06 | 1978-12-13 | Boc International Ltd | Vacuum gauges |
JP4493139B2 (ja) * | 2000-02-02 | 2010-06-30 | キヤノンアネルバ株式会社 | 電離真空計 |
CN201237545Y (zh) * | 2008-07-25 | 2009-05-13 | 德州学院 | 电离真空计 |
TWM376759U (en) * | 2009-11-10 | 2010-03-21 | Univ Tungnan | The cold cathode ionization vacuum gauge of carbon nanotube |
JP5827532B2 (ja) * | 2011-09-27 | 2015-12-02 | 株式会社アルバック | 熱陰極電離真空計 |
-
2016
- 2016-02-10 CN CN201680013476.6A patent/CN107407611B/zh active Active
- 2016-02-10 KR KR1020177027508A patent/KR20170120692A/ko not_active Application Discontinuation
- 2016-02-10 WO PCT/JP2016/000698 patent/WO2016139894A1/ja active Application Filing
- 2016-02-10 JP JP2017503333A patent/JP6227834B2/ja active Active
- 2016-03-01 TW TW105106151A patent/TWI638151B/zh active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019015666A (ja) * | 2017-07-10 | 2019-01-31 | 株式会社アルバック | 三極管型電離真空計及び圧力測定方法 |
Also Published As
Publication number | Publication date |
---|---|
TW201643396A (zh) | 2016-12-16 |
KR20170120692A (ko) | 2017-10-31 |
CN107407611B (zh) | 2019-08-02 |
TWI638151B (zh) | 2018-10-11 |
WO2016139894A1 (ja) | 2016-09-09 |
CN107407611A (zh) | 2017-11-28 |
JPWO2016139894A1 (ja) | 2017-10-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6566884B2 (en) | Ionization vacuum pressure gauge | |
US9952113B2 (en) | Ionization gauge for high pressure operation | |
JP6227834B2 (ja) | 三極管型電離真空計 | |
JP2024038315A (ja) | 検出装置 | |
JP6227836B2 (ja) | 三極管型電離真空計 | |
JP3069975B2 (ja) | 電離真空計 | |
JP5827532B2 (ja) | 熱陰極電離真空計 | |
JP6932892B2 (ja) | 三極管型電離真空計及び圧力測定方法 | |
JP5669324B2 (ja) | 四重極型質量分析計 | |
JP6200840B2 (ja) | 熱陰極電離真空計 | |
JP6803496B1 (ja) | 圧力測定方法及び熱陰極電離真空計 | |
JP2000039375A (ja) | イオン源 | |
JP2013072695A (ja) | 熱陰極電離真空計 | |
JP2020118555A (ja) | 熱陰極電離真空計、熱陰極電離真空計を備える圧力測定システム並びに熱陰極電離真空計を用いた圧力測定方法 | |
JP2000329634A (ja) | 電離真空計 | |
JPH02142050A (ja) | 熱陰極型電離真空計 | |
JP4926233B2 (ja) | 複合型真空計 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20170721 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20171003 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20171011 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6227834 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |