JP6226004B2 - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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- JP6226004B2 JP6226004B2 JP2016037588A JP2016037588A JP6226004B2 JP 6226004 B2 JP6226004 B2 JP 6226004B2 JP 2016037588 A JP2016037588 A JP 2016037588A JP 2016037588 A JP2016037588 A JP 2016037588A JP 6226004 B2 JP6226004 B2 JP 6226004B2
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- silicon dioxide
- dioxide film
- gallium nitride
- semiconductor layer
- nitride semiconductor
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- 239000004065 semiconductor Substances 0.000 title claims description 44
- 238000004519 manufacturing process Methods 0.000 title claims description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 248
- 235000012239 silicon dioxide Nutrition 0.000 claims description 123
- 239000000377 silicon dioxide Substances 0.000 claims description 123
- 239000010410 layer Substances 0.000 claims description 82
- 229910002601 GaN Inorganic materials 0.000 claims description 45
- 239000007789 gas Substances 0.000 claims description 39
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 37
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 28
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 28
- 229910052799 carbon Inorganic materials 0.000 claims description 28
- 239000012535 impurity Substances 0.000 claims description 25
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 23
- 239000011229 interlayer Substances 0.000 claims description 23
- 229910052733 gallium Inorganic materials 0.000 claims description 22
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 12
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 4
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- 229910001882 dioxygen Inorganic materials 0.000 claims description 4
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
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- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
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- 238000005229 chemical vapour deposition Methods 0.000 description 2
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- 229910052749 magnesium Inorganic materials 0.000 description 2
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- 238000009832 plasma treatment Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
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- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
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- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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Description
[先行技術文献]
[特許文献]
[特許文献1] 特開2015−162578号公報
Claims (7)
- 窒化ガリウム半導体層を用いた半導体装置であって、
少なくとも一部が前記窒化ガリウム半導体層に直接接して設けられ、不純物原子を有する二酸化シリコン膜を備え、
前記二酸化シリコン膜は、前記不純物原子として、
前記窒化ガリウム半導体層のおもて面から64nm未満である上方の任意の位置において、5E+17cm−3より大きく2E+18cm−3未満の濃度の炭素と、
1E+17cm−3以下の濃度のガリウムと
を含み、
前記二酸化シリコン膜は、前記二酸化シリコン膜に直接接して設けられたアルミニウム金属層と前記窒化ガリウム半導体層との間に位置し、
前記アルミニウム金属層、前記二酸化シリコン膜および前記窒化ガリウム半導体層からなるMOS構造におけるフラットバンド電圧の絶対値は、1V以下である
半導体装置。 - 前記二酸化シリコン膜上に直接接して設けられたゲート電極をさらに備え、
前記ゲート電極は前記アルミニウム金属層であり、
前記窒化ガリウム半導体層は、前記二酸化シリコン膜が設けられたおもて面側に、前記窒化ガリウム半導体層に対するp型不純物を有するp型ウェル領域を有し、
前記二酸化シリコン膜は、前記ゲート電極と前記p型ウェル領域との間に設けられるゲート絶縁膜である
請求項1に記載の半導体装置。 - 前記二酸化シリコン膜は、前記窒化ガリウム半導体層上に設けられる層間絶縁膜である
請求項1に記載の半導体装置。 - 窒化ガリウム半導体層を有する半導体装置の製造方法であって、
不純物原子を有する二酸化シリコン膜を、前記二酸化シリコン膜の少なくとも一部が前記窒化ガリウム半導体層に直接接するように形成する段階を備え、
前記二酸化シリコン膜を形成する段階は、シリコンの原料としてTEOSガスを供給する段階を含み、
前記二酸化シリコン膜は、前記不純物原子として2E+18cm−3未満の濃度の炭素と、1E+17cm−3以下の濃度のガリウムとを含む
半導体装置の製造方法。 - 前記二酸化シリコン膜を形成する段階は、酸素の原料として酸素ガスを供給し、プラズマCVDにより前記二酸化シリコン膜を形成する段階を含む
請求項4に記載の半導体装置の製造方法。 - 前記二酸化シリコン膜を形成する段階において、前記窒化ガリウム半導体層上に前記二酸化シリコン膜を5nm/min以下の成膜レートで形成する
請求項4または5に記載の半導体装置の製造方法。 - 前記二酸化シリコン膜を形成する段階において、前記窒化ガリウム半導体層を300℃以上400℃以下の温度で加熱する
請求項4から6のいずれか一項に記載の半導体装置の製造方法。
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