JP6224633B2 - ガス回収と再利用のためのシステムと方法 - Google Patents

ガス回収と再利用のためのシステムと方法 Download PDF

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Publication number
JP6224633B2
JP6224633B2 JP2015002878A JP2015002878A JP6224633B2 JP 6224633 B2 JP6224633 B2 JP 6224633B2 JP 2015002878 A JP2015002878 A JP 2015002878A JP 2015002878 A JP2015002878 A JP 2015002878A JP 6224633 B2 JP6224633 B2 JP 6224633B2
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process gas
line
processing
recovered
production tool
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JP2015163573A5 (enExample
JP2015163573A (ja
Inventor
マイケル オルブライト クリストファー
マイケル オルブライト クリストファー
コースロフ アルスラニアン グレゴリー
コースロフ アルスラニアン グレゴリー
アンドリュー　デイビッド　ジョンソン
デイビッド ジョンソン アンドリュー
チャールズ ウィンチェスター デイビッド
チャールズ ウィンチェスター デイビッド
Original Assignee
バーサム マテリアルズ ユーエス，リミティド ライアビリティ カンパニー
バーサム マテリアルズ ユーエス，リミティド ライアビリティ カンパニー
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C01B23/0036—Physical processing only
    • C01B23/0042—Physical processing only by making use of membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D2053/221—Devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/18—Noble gases
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0029—Obtaining noble gases
    • C01B2210/0031—Helium

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Engineering & Computer Science (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Treating Waste Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP2015002878A 2014-01-13 2015-01-09 ガス回収と再利用のためのシステムと方法 Active JP6224633B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201461926649P 2014-01-13 2014-01-13
US61/926,649 2014-01-13
US14/567,353 2014-12-11
US14/567,353 US9649590B2 (en) 2014-01-13 2014-12-11 System and method for gas recovery and reuse

Publications (3)

Publication Number Publication Date
JP2015163573A JP2015163573A (ja) 2015-09-10
JP2015163573A5 JP2015163573A5 (enExample) 2015-12-10
JP6224633B2 true JP6224633B2 (ja) 2017-11-01

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ID=52302144

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JP2015002878A Active JP6224633B2 (ja) 2014-01-13 2015-01-09 ガス回収と再利用のためのシステムと方法

Country Status (8)

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US (1) US9649590B2 (enExample)
EP (1) EP2893968B1 (enExample)
JP (1) JP6224633B2 (enExample)
KR (1) KR101713116B1 (enExample)
CN (1) CN104772008B (enExample)
MY (1) MY172889A (enExample)
SG (1) SG10201408623TA (enExample)
TW (1) TWI617343B (enExample)

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CN110087755A (zh) 2016-12-21 2019-08-02 埃克森美孚上游研究公司 具有活性材料的自支承性结构
WO2019147516A1 (en) 2018-01-24 2019-08-01 Exxonmobil Upstream Research Company Apparatus and system for temperature swing adsorption
EP3758828A1 (en) 2018-02-28 2021-01-06 ExxonMobil Upstream Research Company Apparatus and system for swing adsorption processes
US11535207B2 (en) 2018-11-24 2022-12-27 Change Energy Services Compressed-gas distribution associated with vehicle
US11318410B2 (en) 2018-12-21 2022-05-03 Exxonmobil Upstream Research Company Flow modulation systems, apparatus, and methods for cyclical swing adsorption
US11557462B2 (en) 2019-03-13 2023-01-17 Kla Corporation Collecting and recycling rare gases in semiconductor processing equipment
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Also Published As

Publication number Publication date
EP2893968A1 (en) 2015-07-15
TW201526976A (zh) 2015-07-16
MY172889A (en) 2019-12-13
KR101713116B1 (ko) 2017-03-07
CN104772008A (zh) 2015-07-15
US20150196870A1 (en) 2015-07-16
CN104772008B (zh) 2017-08-18
JP2015163573A (ja) 2015-09-10
EP2893968B1 (en) 2021-02-24
US9649590B2 (en) 2017-05-16
TWI617343B (zh) 2018-03-11
SG10201408623TA (en) 2015-08-28
KR20150084676A (ko) 2015-07-22

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