TWI617343B - 用於氣體回收及再使用的系統及方法 - Google Patents
用於氣體回收及再使用的系統及方法 Download PDFInfo
- Publication number
- TWI617343B TWI617343B TW104100449A TW104100449A TWI617343B TW I617343 B TWI617343 B TW I617343B TW 104100449 A TW104100449 A TW 104100449A TW 104100449 A TW104100449 A TW 104100449A TW I617343 B TWI617343 B TW I617343B
- Authority
- TW
- Taiwan
- Prior art keywords
- process gas
- line
- gas
- production facility
- production
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 252
- 238000011084 recovery Methods 0.000 title claims description 26
- 239000007789 gas Substances 0.000 claims abstract description 179
- 238000004519 manufacturing process Methods 0.000 claims abstract description 85
- 229910052734 helium Inorganic materials 0.000 claims abstract description 18
- 239000001307 helium Substances 0.000 claims abstract description 16
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 16
- 238000004064 recycling Methods 0.000 claims abstract description 8
- 238000012545 processing Methods 0.000 claims description 27
- 238000000746 purification Methods 0.000 claims description 23
- 238000004891 communication Methods 0.000 claims description 18
- 238000007906 compression Methods 0.000 claims description 9
- 230000006835 compression Effects 0.000 claims description 9
- 238000003860 storage Methods 0.000 claims description 7
- 239000012528 membrane Substances 0.000 claims description 3
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 1
- 229910052762 osmium Inorganic materials 0.000 claims 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 claims 1
- 229910052707 ruthenium Inorganic materials 0.000 claims 1
- 239000002699 waste material Substances 0.000 abstract description 9
- -1 but not limited to Substances 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 4
- 239000012467 final product Substances 0.000 description 7
- 238000011282 treatment Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000003750 conditioning effect Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 241001674044 Blattodea Species 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052778 Plutonium Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- OYEHPCDNVJXUIW-UHFFFAOYSA-N plutonium atom Chemical compound [Pu] OYEHPCDNVJXUIW-UHFFFAOYSA-N 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
- C01B23/001—Purification or separation processes of noble gases
- C01B23/0036—Physical processing only
- C01B23/0042—Physical processing only by making use of membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
- B01D2053/221—Devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2256/00—Main component in the product gas stream after treatment
- B01D2256/18—Noble gases
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0029—Obtaining noble gases
- C01B2210/0031—Helium
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Engineering & Computer Science (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201461926649P | 2014-01-13 | 2014-01-13 | |
| US61/926,649 | 2014-01-13 | ||
| US14/567,353 | 2014-12-11 | ||
| US14/567,353 US9649590B2 (en) | 2014-01-13 | 2014-12-11 | System and method for gas recovery and reuse |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201526976A TW201526976A (zh) | 2015-07-16 |
| TWI617343B true TWI617343B (zh) | 2018-03-11 |
Family
ID=52302144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104100449A TWI617343B (zh) | 2014-01-13 | 2015-01-07 | 用於氣體回收及再使用的系統及方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9649590B2 (enExample) |
| EP (1) | EP2893968B1 (enExample) |
| JP (1) | JP6224633B2 (enExample) |
| KR (1) | KR101713116B1 (enExample) |
| CN (1) | CN104772008B (enExample) |
| MY (1) | MY172889A (enExample) |
| SG (1) | SG10201408623TA (enExample) |
| TW (1) | TWI617343B (enExample) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10443127B2 (en) * | 2013-11-05 | 2019-10-15 | Taiwan Semiconductor Manufacturing Company Limited | System and method for supplying a precursor for an atomic layer deposition (ALD) process |
| US9675925B2 (en) | 2014-07-25 | 2017-06-13 | Exxonmobil Upstream Research Company | Apparatus and system having a valve assembly and swing adsorption processes related thereto |
| US10307749B2 (en) | 2014-11-11 | 2019-06-04 | Exxonmobil Upstream Research Company | High capacity structures and monoliths via paste imprinting |
| AU2015361102B2 (en) | 2014-12-10 | 2018-09-13 | Exxonmobil Research And Engineering Company | Adsorbent-incorporated polymer fibers in packed bed and fabric contactors, and methods and devices using same |
| KR20170140153A (ko) | 2014-12-23 | 2017-12-20 | 엑손모빌 업스트림 리서치 캄파니 | 구조화된 흡착제 베드, 이의 제조방법 및 이의 용도 |
| EA201792488A1 (ru) | 2015-05-15 | 2018-03-30 | Эксонмобил Апстрим Рисерч Компани | Аппарат и система для процессов короткоцикловой адсорбции, связанные с ней, содержащие системы продувки среднего слоя |
| SG11201707065PA (en) | 2015-05-15 | 2017-11-29 | Exxonmobil Upstream Res Co | Apparatus and system for swing adsorption processes related thereto |
| US10080991B2 (en) | 2015-09-02 | 2018-09-25 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto |
| KR102057023B1 (ko) | 2015-09-02 | 2019-12-18 | 엑손모빌 업스트림 리서치 캄파니 | 퍼지 가스로서 디메타나이저의 오버헤드 스트림을 사용하는 스윙 흡착 공정 및 시스템 |
| SG11201802604TA (en) | 2015-10-27 | 2018-05-30 | Exxonmobil Upstream Res Co | Apparatus and system for swing adsorption processes related thereto having actively-controlled feed poppet valves and passively controlled product valves |
| SG11201802606VA (en) | 2015-10-27 | 2018-05-30 | Exxonmobil Upstream Res Co | Apparatus and system for swing adsorption processes related thereto having a plurality of valves |
| CA3001336A1 (en) | 2015-10-27 | 2017-05-04 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto having a plurality of valves |
| RU2018121824A (ru) | 2015-11-16 | 2019-12-20 | Эксонмобил Апстрим Рисерч Компани | Адсорбирующие материалы и способы адсорбции диоксида углерода |
| EP3429727B1 (en) | 2016-03-18 | 2025-02-12 | ExxonMobil Technology and Engineering Company | Apparatus and method for swing adsorption processes |
| CN109195685A (zh) | 2016-05-31 | 2019-01-11 | 埃克森美孚上游研究公司 | 用于变吸附方法的装置和系统 |
| WO2017209860A1 (en) | 2016-05-31 | 2017-12-07 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes |
| US10434458B2 (en) | 2016-08-31 | 2019-10-08 | Exxonmobil Upstream Research Company | Apparatus and system for swing adsorption processes related thereto |
| CN109922872A (zh) | 2016-09-01 | 2019-06-21 | 埃克森美孚上游研究公司 | 使用3a沸石结构移除水的变化吸附处理 |
| US10328382B2 (en) | 2016-09-29 | 2019-06-25 | Exxonmobil Upstream Research Company | Apparatus and system for testing swing adsorption processes |
| EP3558490B1 (en) | 2016-12-21 | 2022-06-29 | ExxonMobil Upstream Research Company | Self-supporting structures having foam-geometry structure and active materials |
| CN110087755A (zh) | 2016-12-21 | 2019-08-02 | 埃克森美孚上游研究公司 | 具有活性材料的自支承性结构 |
| WO2019147516A1 (en) | 2018-01-24 | 2019-08-01 | Exxonmobil Upstream Research Company | Apparatus and system for temperature swing adsorption |
| EP3758828A1 (en) | 2018-02-28 | 2021-01-06 | ExxonMobil Upstream Research Company | Apparatus and system for swing adsorption processes |
| US11535207B2 (en) | 2018-11-24 | 2022-12-27 | Change Energy Services | Compressed-gas distribution associated with vehicle |
| US11318410B2 (en) | 2018-12-21 | 2022-05-03 | Exxonmobil Upstream Research Company | Flow modulation systems, apparatus, and methods for cyclical swing adsorption |
| US11557462B2 (en) | 2019-03-13 | 2023-01-17 | Kla Corporation | Collecting and recycling rare gases in semiconductor processing equipment |
| US11376545B2 (en) | 2019-04-30 | 2022-07-05 | Exxonmobil Upstream Research Company | Rapid cycle adsorbent bed |
| WO2021071755A1 (en) | 2019-10-07 | 2021-04-15 | Exxonmobil Upstream Research Company | Adsorption processes and systems utilizing step lift control of hydraulically actuated poppet valves |
| US11433346B2 (en) | 2019-10-16 | 2022-09-06 | Exxonmobil Upstream Research Company | Dehydration processes utilizing cationic zeolite RHO |
| EP4265322A1 (en) * | 2022-04-22 | 2023-10-25 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Helium recovery process |
| KR102710551B1 (ko) | 2023-09-01 | 2024-09-26 | 주식회사 에프알디 | 흡착칼럼을 이용한 제논 및 크립톤 함유 미정제 혼합가스의 추출방법 |
| KR102710602B1 (ko) | 2023-09-01 | 2024-09-27 | 주식회사 에프알디 | 제논 및 크립톤의 분리정제방법 |
| KR20250095882A (ko) | 2023-12-20 | 2025-06-27 | 주식회사 에프알디 | 흡착제를 활용한 고순도 크립톤의 분리정제방법 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201134544A (en) * | 2010-01-28 | 2011-10-16 | Air Prod & Chem | Method and equipment for selectively collecting process effluent |
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| GB2189165A (en) * | 1986-04-16 | 1987-10-21 | James Ephraim Lovelock | Method and apparatus for purifying a continuous flow of helium and/or neon gas |
| US4916237A (en) * | 1986-07-08 | 1990-04-10 | American Cyanamid Company | Substituted 1,2,3-thiadiazole-4-thiolates |
| US4857082A (en) | 1988-09-15 | 1989-08-15 | Air Products And Chemicals, Inc. | Membrane unit turn-down control system |
| GB2260854B (en) | 1991-10-22 | 1995-04-05 | British Aerospace | Surface discharge corona plasma cathode assembly |
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| BR9702330A (pt) * | 1996-06-24 | 1999-07-20 | Corning Inc | Reciclagem de hélio para manufatura de fibra ópticas |
| ID17537A (id) | 1996-07-26 | 1998-01-08 | Praxair Technology Inc | Perolehan kembali helium bagi manupaktur serat optis |
| US6089282A (en) * | 1998-05-08 | 2000-07-18 | Aeronex, Inc. | Method for recovery and reuse of gas |
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| AU7185900A (en) * | 2000-01-14 | 2001-07-19 | Boc Group, Inc., The | Helium recovery process |
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| EP1412057B1 (en) | 2001-07-31 | 2008-12-03 | Praxair Technology, Inc. | Control system for helium recovery |
| US7261763B2 (en) | 2003-07-17 | 2007-08-28 | The Boc Group, Inc. | Method for the recovery and recycle of helium and chlorine |
| JP4652860B2 (ja) * | 2004-04-27 | 2011-03-16 | 大陽日酸株式会社 | クリプトン又はキセノンの回収方法 |
| JP2007019052A (ja) | 2005-07-05 | 2007-01-25 | Sharp Corp | 窒化物半導体製造装置および窒化物半導体素子 |
| US20070221065A1 (en) | 2006-03-23 | 2007-09-27 | Adisorn Aroonwilas | Heat recovery gas absorption process |
| JP5202836B2 (ja) * | 2006-12-01 | 2013-06-05 | 日本エア・リキード株式会社 | キセノンの回収システムおよび回収装置 |
| KR20090080609A (ko) * | 2008-01-22 | 2009-07-27 | 삼성전기주식회사 | 양면 발광 소자 패키지 및 그 제조 방법 |
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| US8308854B2 (en) * | 2009-12-15 | 2012-11-13 | Thermo Finnigan Llc | Helium reclamation systems and methods for a gas chromatograph |
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| CN203048598U (zh) * | 2013-01-20 | 2013-07-10 | 廊坊黎明气体有限公司 | 一种高纯度氩气净化装置 |
-
2014
- 2014-12-11 US US14/567,353 patent/US9649590B2/en active Active
- 2014-12-23 SG SG10201408623TA patent/SG10201408623TA/en unknown
-
2015
- 2015-01-07 TW TW104100449A patent/TWI617343B/zh active
- 2015-01-08 MY MYPI2015700052A patent/MY172889A/en unknown
- 2015-01-09 EP EP15150696.1A patent/EP2893968B1/en active Active
- 2015-01-09 JP JP2015002878A patent/JP6224633B2/ja active Active
- 2015-01-13 CN CN201510017698.2A patent/CN104772008B/zh active Active
- 2015-01-13 KR KR1020150006021A patent/KR101713116B1/ko active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201134544A (en) * | 2010-01-28 | 2011-10-16 | Air Prod & Chem | Method and equipment for selectively collecting process effluent |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2893968A1 (en) | 2015-07-15 |
| TW201526976A (zh) | 2015-07-16 |
| MY172889A (en) | 2019-12-13 |
| KR101713116B1 (ko) | 2017-03-07 |
| CN104772008A (zh) | 2015-07-15 |
| US20150196870A1 (en) | 2015-07-16 |
| CN104772008B (zh) | 2017-08-18 |
| JP2015163573A (ja) | 2015-09-10 |
| EP2893968B1 (en) | 2021-02-24 |
| US9649590B2 (en) | 2017-05-16 |
| SG10201408623TA (en) | 2015-08-28 |
| KR20150084676A (ko) | 2015-07-22 |
| JP6224633B2 (ja) | 2017-11-01 |
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