JP6195830B2 - 適応光学系を有する顕微鏡検査法 - Google Patents

適応光学系を有する顕微鏡検査法 Download PDF

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JP6195830B2
JP6195830B2 JP2014520398A JP2014520398A JP6195830B2 JP 6195830 B2 JP6195830 B2 JP 6195830B2 JP 2014520398 A JP2014520398 A JP 2014520398A JP 2014520398 A JP2014520398 A JP 2014520398A JP 6195830 B2 JP6195830 B2 JP 6195830B2
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beamlet
beamlets
focal point
lens
light
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JP2014521122A5 (enExample
JP2014521122A (ja
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ベトジグ エリク
ベトジグ エリク
ジ ナ
ジ ナ
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ホワルド フグヘス メドイクアル インストイトウテ
ホワルド フグヘス メドイクアル インストイトウテ
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N21/6458—Fluorescence microscopy
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2014520398A 2011-07-14 2012-07-13 適応光学系を有する顕微鏡検査法 Active JP6195830B2 (ja)

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Application Number Priority Date Filing Date Title
US201161507906P 2011-07-14 2011-07-14
US61/507,906 2011-07-14
PCT/US2012/046815 WO2013010151A1 (en) 2011-07-14 2012-07-13 Microscopy with adaptive optics

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JP2014521122A JP2014521122A (ja) 2014-08-25
JP2014521122A5 JP2014521122A5 (enExample) 2015-09-17
JP6195830B2 true JP6195830B2 (ja) 2017-09-13

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US (1) US8629413B2 (enExample)
EP (1) EP2732326B1 (enExample)
JP (1) JP6195830B2 (enExample)
WO (1) WO2013010151A1 (enExample)

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JP7554064B2 (ja) * 2020-06-30 2024-09-19 株式会社ヴィーネックス 異物・欠陥検査装置、異物・欠陥検査における画像生成装置、及び異物・欠陥検査方法
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EP2732326B1 (en) 2020-11-18
US8629413B2 (en) 2014-01-14
JP2014521122A (ja) 2014-08-25
US20130181143A1 (en) 2013-07-18
WO2013010151A1 (en) 2013-01-17
EP2732326A1 (en) 2014-05-21

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