JP6190450B2 - 多重周波数超広帯域幅変換器 - Google Patents
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Description
本出願は、「多重周波数超広帯域幅変換器」という名称の2012年5月1日出願の米国特許仮出願第61/641,197号及び「多重周波数超広帯域幅変換器」という名称の2013年3月15日出願の米国特許出願第13/835,500号の利益を主張するものであり、これらの内容全体は、これにより全ての目的に対してその全体が本明細書に組み込まれる。
101 基板
110、120、130、140 要素集団
120” 駆動/感知電極レール
L1 長さ
Claims (20)
- 基板の上に配置された複数の圧電変換器要素集団を備え、
各圧電変換器要素集団は複数の変換器要素を有し、前記変換器要素は、
圧電膜と、
前記変換器要素の前記圧電膜に結合された駆動/感知電極と、
を含み、前記複数の圧電変換器要素集団の各圧電変換器要素集団に対して、前記圧電変換器要素集団の第1の変換器要素の圧電膜の寸法が前記圧電変換器要素集団の第2の変換器要素の圧電膜の寸法とは異なっており、
さらに、前記基板の上に配置された複数の電極レールの組を備え、
前記複数組の電極レールの1つの組の電極レールに対して、1つの組の電極レールは前記複数の変換器要素集団の各1つのみに結合され、
複数の電極レールの組の各第1の電極レールは、複数の変換器要素集団の各1つの第1の変換器要素の駆動/感知電極に電気的に結合され、
複数の電極レールの組の各第2の電極レールは、複数の変換器要素集団の各1つの第2の変換器要素の前記駆動/感知電極に電気的に結合されている、
ことを特徴とする圧電微小超音波変換器(pMUT)アレイ。 - 第1の圧電変換器要素集団は、
それぞれが第1の寸法の圧電膜を有する複数の第1の変換要素と、
それぞれが第2の寸法の圧電膜を有する複数の第2の変換要素と、
を備え、
複数の電極レールの第1の組の第1の電極レールは、複数の第1の変換器要素の前記駆動/感知電極のそれぞれに電気的に結合され、複数の電極レールの第1の組の第2の電極レールは、複数の第2の変換器要素の前記駆動/感知電極のそれぞれに電気的に結合されている、
ことを特徴とする請求項1に記載のpMUTアレイ。 - 前記第1の圧電変換要素集団の複数の変換要素は、第1の圧電変換要素集団の最大の膜と第1の圧電変換要素集団の最小の膜との間の寸法差よりも小さい第1の圧電変換器要素集団のいずれか2つの隣接する膜の間の寸法差で、膜の寸法が、前記基板の上の距離に沿ってサイズが順次増分されることを特徴とする請求項2に記載のpMUTアレイ。
- 第1の圧電変換要素集団の各圧電変換器要素が、楕円体又は球体圧電膜を有することを特徴とする請求項3に記載のpMUTアレイ。
- n及びiはそれぞれ2より大きいとして、各圧電変換要素集団が、i個の異なるサイズの圧電膜を有するn個の変換器要素を含み、前記電極レールの複数の組のそれぞれは、m個の電極レールを含み、
第1の圧電変換要素集団はj個の変換器要素を含み、前記j個の変換器要素の各圧電膜は同じ寸法であり、前記j個の変換器要素は、第1の圧電変換器要素集団に結合されたm個の電極レールの対応する1つに電気的に結合されている
ことを特徴とする請求項4に記載のpMUTアレイ。 - jが1よりも大きく、かつmが2に等しいことを特徴とする請求項5に記載のpMUTアレイ。
- 第1の圧電変換要素集団の前記i個の変換器要素の第1の部分集合が、第1の圧電変換要素集団のi個の変換器要素の第2の部分集合によって第2の電極レールに出力されるi−y個の異なる周波数応答の周波数範囲よりも低い周波数範囲のものであるy個の異なる周波数応答を第1の電極レールに出力するためのものであることを特徴とする請求項5に記載のpMUTアレイ。
- 前記複数の電極レールの組は、前記基板の第1の次元にわたって線形アレイを形成し、
前記圧電変換器要素集団の各々が、前記基板の第2の次元にわたって線形アレイを含み、
第1の圧電変換器要素集団の前記圧電膜は、異なる直径を有する円形又は回転楕円形である、
ことを特徴とする請求項1に記載のpMUTアレイ。 - 前記複数のセットの電極レールは、前記基板の第1及び第2の次元に沿って電極レールの2次元アレイを形成し、
第1の圧電変換器要素集団の前記圧電膜は、異なる直径を有する円形又は回転楕円形である、
ことを特徴とする請求項1に記載のpMUTアレイ。 - 媒質内に圧力波を発生してそれを感知するための装置であって、
請求項1に記載のpMUTアレイと、
複数の信号レールの複数の組の1つの第1の電極レール上に第1の電気駆動信号を印加し、複数の信号レールの複数の組の1つの第2の電極レール上に第2の電気駆動信号を印加するために前記pMUTアレイに結合された少なくとも1つの信号発生器と、
を含むことを特徴とする装置。 - 第1及び第2の電気駆動信号は、異なる周波数、異なる振幅、又は異なる位相のうちの少なくとも1つを有することを特徴とする請求項10に記載の装置。
- 複数の圧電変換器要素集団の1つの第1の変換器要素の圧電膜が、複数の圧電変換器要素集団の1つの第2の変換器要素の圧電膜よりも小さく、
前記第1の電気駆動信号は、前記第2の電気駆動信号のものよりも大きい電圧振幅を有する、
ことを特徴とする請求項10に記載の装置。 - 複数の信号レールの複数の組の1つの前記第1の電極レールからの第1の電気応答信号及び複数の信号レールの複数の組の1つの第2の電極レールからの第2の電気応答信号を受信するように前記pMUTアレイに結合された少なくとも1つの受信機と、
受信した前記第1及び第2の電気応答信号を処理するように前記少なくとも1つの受信機に結合された信号プロセッサと、
を更に含むことを特徴とする請求項10に記載の装置。 - 前記第1の電気応答信号は、前記第2の電気応答信号のものよりも高い帯域幅を張る第1の周波数応答を有することを特徴とする請求項13に記載の装置。
- 複数の圧電変換要素集団の1つの第1の変換器要素の圧電膜が、複数の圧電変換要素集団の1つの第2の変換器要素の圧電膜よりも小さく、
前記信号プロセッサは、前記第2の電気応答信号に対するものよりも大きい増幅を前記第1の電気応答信号に対して印加するためのものである、
ことを特徴とする請求項13に記載の装置。 - 前記少なくとも1つの信号発生器は、前記第1及び第2の電気駆動信号を変調するためのものであり、
信号プロセッサが、前記第1及び第2の電気応答信号を変調して該第1又は第2の電気応答信号のいずれかよりも大きい帯域幅を有する累積周波数応答を発生させるためのものである、
ことを特徴とする請求項15に記載の装置。 - 請求項1に記載のpMUTアレイを用いて媒質内に圧力波を発生してそれを感知する方法であって、
第1の電気信号を発生させる段階と、
第2の電気信号を発生させる段階と、
前記第1の電気信号を、複数の圧電変換器要素集団の1つの第1の変換器要素の駆動/感知電極に印加し、かつ、前記第2の電気信号を、複数の圧電変換器要素集団の1つの第2の変換器要素の駆動/感知電極に印加する段階と、
前記pMUTアレイの侵入深さを制御するために、第1の電気信号及び第2の電気信号のうちの一方の振幅及び位相のうちの少なくとも一方を、前記第1の電気信号及び第2の電気信号のうちの他方の振幅及び位相のうちの少なくとも一方に対して変調する段階と、
を含むことを特徴とする方法。 - 複数の圧電変換要素集団の1つの第1の変換器要素の圧電膜が、複数の圧電変換要素集団の1つの第2の変換器要素の圧電膜よりも小さく、
振幅及び位相のうちの少なくとも一方を変調する段階は、前記pMUTアレイの遠視野分解能を増大させるために、前記第1の電気信号の振幅を前記第2の電気信号の振幅に対して低減する段階を更に含む、
ことを特徴とする請求項17に記載の方法。 - 複数の圧電変換要素集団の1つの第1の変換器要素の前記駆動/感知電極から第1の電気応答信号を受信する段階と、
複数の圧電変換要素集団の1つの第2の変換器要素の前記駆動/感知電極から第2の電気応答信号を受信する段階と、
前記第1及び第2の電気応答信号を信号処理して該第1又は第2の電気応答信号単独のいずれかよりも大きい帯域幅を有する累積周波数応答を発生させる段階と、
を更に含むことを特徴とする請求項17に記載の方法。 - 複数の圧電変換要素集団の1つの第1の変換器要素の圧電膜が、複数の圧電変換要素集団の1つの第2の変換器要素の圧電膜よりも小さく、
前記信号処理する段階は、前記pMUTアレイの近視野分解能を増大させるために前記第1の電気応答信号の増幅を前記第2の電気応答信号の増幅に対して増加させる段階、又は該pMUTアレイの遠視野分解能を増大させるために該第2の電気応答信号の該増幅を該第1の電気応答信号のものに対して増加させる段階を更に含む、
ことを特徴とする請求項19に記載の方法。
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