BRPI0416131A - método e aparelho de processamento ultra-sÈnico com transdutores de múltiplas freqüências - Google Patents

método e aparelho de processamento ultra-sÈnico com transdutores de múltiplas freqüências

Info

Publication number
BRPI0416131A
BRPI0416131A BRPI0416131-9A BRPI0416131A BRPI0416131A BR PI0416131 A BRPI0416131 A BR PI0416131A BR PI0416131 A BRPI0416131 A BR PI0416131A BR PI0416131 A BRPI0416131 A BR PI0416131A
Authority
BR
Brazil
Prior art keywords
transducers
resonant frequencies
ultrasonic processing
processing method
multiple frequency
Prior art date
Application number
BRPI0416131-9A
Other languages
English (en)
Inventor
Michael J Goodson
Original Assignee
Crest Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Crest Group Inc filed Critical Crest Group Inc
Publication of BRPI0416131A publication Critical patent/BRPI0416131A/pt

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • B06B1/0223—Driving circuits for generating signals continuous in time
    • B06B1/0269—Driving circuits for generating signals continuous in time for generating multiple frequencies
    • B06B1/0284—Driving circuits for generating signals continuous in time for generating multiple frequencies with consecutive, i.e. sequential generation, e.g. with frequency sweep
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70—Specific application
    • B06B2201/71—Cleaning in a tank

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

"MéTODO E APARELHO DE PROCESSAMENTO ULTRA-SÈNICO COM TRANSDUTORES DE MúLTIPLAS FREQüêNCIAS". São revelados um aparelho e método de processamento ultra-sênico, que incluem múltiplos transdutores de pelo menos duas freqüências ressonantes diferentes que fornecem energia ultra-sónica a um tanque cheio de líquido contendo componentes a ser limpos ou processados ultra-sonicamente. Os transdutores são arranjados em padrões triangulares eqüilaterais ao longo de linhas diagonais em uma parede do tanque, de maneira que cada transdutor tenha um transdutor adjacente de uma freqüência diferente. Alternativamente, o aparelho inclui um ou mais transdutores tipo haste tendo freqüências ressonantes diferentes, de maneira que o aparelho forneça uma mistura de várias freqüências de energia ultrasónica ao tanque. Um outro aspecto da invenção envolve selecionar transdutores com freqüências ressonantes diferentes, que estão fora de uma subfaixa excluída, e energizar os transdutores por meio de um sinal de excitação que varre as freqüências ressonantes dos transdutores e a subfaixa excluída.
BRPI0416131-9A 2003-11-05 2004-11-05 método e aparelho de processamento ultra-sÈnico com transdutores de múltiplas freqüências BRPI0416131A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US51750103P 2003-11-05 2003-11-05
PCT/US2004/037177 WO2005044440A2 (en) 2003-11-05 2004-11-05 Ultrasonic apparatus with multiple frequency transducers

Publications (1)

Publication Number Publication Date
BRPI0416131A true BRPI0416131A (pt) 2007-01-02

Family

ID=34572948

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0416131-9A BRPI0416131A (pt) 2003-11-05 2004-11-05 método e aparelho de processamento ultra-sÈnico com transdutores de múltiplas freqüências

Country Status (9)

Country Link
US (3) US7247977B2 (pt)
EP (1) EP1701781A4 (pt)
JP (1) JP2007523738A (pt)
KR (1) KR101004073B1 (pt)
CN (1) CN101084586B (pt)
AU (1) AU2004287498C1 (pt)
BR (1) BRPI0416131A (pt)
CA (1) CA2544633A1 (pt)
WO (1) WO2005044440A2 (pt)

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Also Published As

Publication number Publication date
EP1701781A2 (en) 2006-09-20
CN101084586A (zh) 2007-12-05
KR20070001058A (ko) 2007-01-03
US20050122003A1 (en) 2005-06-09
WO2005044440A3 (en) 2007-05-10
JP2007523738A (ja) 2007-08-23
EP1701781A4 (en) 2010-02-03
AU2004287498B2 (en) 2009-12-03
US20070283979A1 (en) 2007-12-13
CN101084586B (zh) 2010-04-28
AU2004287498C1 (en) 2010-06-17
WO2005044440A2 (en) 2005-05-19
AU2004287498A1 (en) 2005-05-19
US7247977B2 (en) 2007-07-24
US20070283985A1 (en) 2007-12-13
CA2544633A1 (en) 2005-05-19
KR101004073B1 (ko) 2010-12-27

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B08F Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette]

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B08K Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette]

Free format text: REFERENTE AO DESPACHO 8.6 PUBLICADO NA RPI 2260 DE 29/04/2014.