JP6153950B2 - 臨界角光センサ装置 - Google Patents
臨界角光センサ装置 Download PDFInfo
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- JP6153950B2 JP6153950B2 JP2014558772A JP2014558772A JP6153950B2 JP 6153950 B2 JP6153950 B2 JP 6153950B2 JP 2014558772 A JP2014558772 A JP 2014558772A JP 2014558772 A JP2014558772 A JP 2014558772A JP 6153950 B2 JP6153950 B2 JP 6153950B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/43—Refractivity; Phase-affecting properties, e.g. optical path length by measuring critical angle
- G01N21/431—Dip refractometers, e.g. using optical fibres
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/43—Refractivity; Phase-affecting properties, e.g. optical path length by measuring critical angle
- G01N2021/434—Dipping block in contact with sample, e.g. prism
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/43—Refractivity; Phase-affecting properties, e.g. optical path length by measuring critical angle
- G01N2021/436—Sensing resonant reflection
- G01N2021/437—Sensing resonant reflection with investigation of angle
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
本明細書では、以下の用語は、以下の意味を有する。
臨界角測定に基づく、従来技術による数多くの屈折率センサでは、光源と光検出器アレイとが、プリズムを形成している材料、例えば透明なエポキシ樹脂内に封入されている。従来技術による屈折率センサの一欠点は、こうしたセンサは通常、屈折率の測定に用いる1つの波長光を供給する光源を1つだけ用いているという点である。これには、いくつかの不利益がある。第1に、単一の光源によって入射角範囲が制限されることになり、したがって測定できる屈折率範囲が制限されることになる。第2に、単一の光源によって、センサの分解能が制限されるおそれがある。
本発明の一実施形態によれば、新しい設計の光センサ装置は、精密に機械加工された単一体の光学的に透明な材料で作製された光導波路構造体を使用し、この構造体は、測定境界面と、光源および光検出器アレイとの境界面と、を同時に形成する。
102、302 導光構造体(プリズム)
104 プリント回路基板
106A、106B、106C、106D、306A、306B 光源
108、308 光検出器アレイ
110 メモリ
111、311 サンプル
112、312 窓
113、313 境界面
114 プロセッサ
115 実行可能命令
Claims (13)
- 平坦な第1の面、第2の面、および第3の面を有する光学的に透過性の導光構造体と、
前記導光構造体の外側に、前記第1の面に隣接して配置された複数の光源と、
前記導光構造体の外側に、前記第1の面に隣接して配置された光検出器アレイと
を備え、
前記導光構造体と、前記導光構造体の外側に、前記第2の面に近接して配置されたサンプルと、の間の光境界面で全反射した、前記複数の光源からの光が、前記第3の面で反射し、前記サンプルの屈折率に依存して前記光検出器アレイの一部分に入射するように、前記導光構造体、前記光源、および前記光検出器アレイが構成され、
前記光境界面で全反射し、前記第3の面で反射した、前記複数の光源それぞれからの光が、前記サンプルの異なる屈折率範囲に対応しかつ前記光検出器アレイの対応する部分にマッピングされるように、前記複数の光源が、前記導光構造体および前記光検出器アレイに対して配置され、
前記複数の光源は、真空波長が共通の光を発するように構成された、波長が共通の2つ以上の光源を含み、前記2つ以上の光源は対応する真空波長が異なる光を発するように構成された光センサ装置。 - 前記複数の光源が、自由空間間隙だけ前記導光構造体から分離されている、請求項1に記載の装置。
- 前記光検出器アレイが、自由空間間隙だけ前記導光構造体から分離されている、請求項1に記載の装置。
- 前記光検出器アレイに結合されたプロセッサをさらに含み、前記プロセッサが、対応する真空波長が異なる光を発するように構成された前記2つ以上の光源からの、前記光境界面で全反射した光を用いて、前記光検出器アレイによって得られた測定値から、前記サンプルの光分散を求めるように構成される、請求項1に記載の装置。
- 前記光境界面で全反射した前記2つ以上の光源からの光が、前記2つ以上の光源から出発してから、前記光境界面で全反射するまでの間に、前記第1の面を1度通過し、前記光境界面で全反射してから、前記光検出器アレイに到達するまでの間にその同じ面を再度通過するように、前記複数の光源、前記プリズム、および前記光検出器アレイが構成される、請求項1に記載の装置。
- 前記プリズムの一面に取り付けられた光学窓をさらに備え、前記光学窓が、前記導光構造体の屈折率よりも大きい屈折率を特徴とする、請求項1に記載の装置。
- 前記導光構造体が、前記光学窓の材料とCTEが整合した材料から成る、請求項6に記載の装置。
- 前記導光構造体がホウケイ酸ガラスから成り、前記光学窓がサファイアから成る、請求項6に記載の装置。
- 光境界面で全反射した前記複数の光源からの光が、前記第3の面で全反射するように、前記導光構造体が構成される、請求項1に記載の装置。
- 前記複数の光源と、前記光検出器アレイとが、支持構造体に対して実質的に同じ高さにある、請求項8に記載の装置。
- 前記複数の光源が、支持構造体に対して実質的に同じ高さにあり、前記光検出器アレイの高さが、前記2つ以上の光源の高さからずれている、請求項8に記載の装置。
- 前記導光構造体が、サファイアウェハから成る、請求項8に記載の装置。
- 前記サファイアウェハの光軸が、前記サファイアウェハの平面に対して垂直に向いている、請求項12に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US13/401,765 | 2012-02-21 | ||
US13/401,765 US9024252B2 (en) | 2012-02-21 | 2012-02-21 | Optical sensor apparatus to detect light based on the refractive index of a sample |
PCT/US2013/026329 WO2013126280A1 (en) | 2012-02-21 | 2013-02-15 | Critical angle optical sensor apparatus |
Publications (2)
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JP2015508178A JP2015508178A (ja) | 2015-03-16 |
JP6153950B2 true JP6153950B2 (ja) | 2017-06-28 |
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JP2014558772A Active JP6153950B2 (ja) | 2012-02-21 | 2013-02-15 | 臨界角光センサ装置 |
Country Status (9)
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US (2) | US9024252B2 (ja) |
EP (1) | EP2817611B1 (ja) |
JP (1) | JP6153950B2 (ja) |
KR (1) | KR102138607B1 (ja) |
CN (1) | CN104272088B (ja) |
FI (1) | FI2817611T3 (ja) |
SG (1) | SG11201405079PA (ja) |
TW (2) | TWI503532B (ja) |
WO (1) | WO2013126280A1 (ja) |
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- 2013-02-15 CN CN201380016172.1A patent/CN104272088B/zh active Active
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US20150042985A1 (en) | 2015-02-12 |
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