JP6137410B2 - ペースト状接着剤組成物、半導体装置、半導体装置の製造方法、および放熱板の接着方法 - Google Patents

ペースト状接着剤組成物、半導体装置、半導体装置の製造方法、および放熱板の接着方法 Download PDF

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JP6137410B2
JP6137410B2 JP2016528923A JP2016528923A JP6137410B2 JP 6137410 B2 JP6137410 B2 JP 6137410B2 JP 2016528923 A JP2016528923 A JP 2016528923A JP 2016528923 A JP2016528923 A JP 2016528923A JP 6137410 B2 JP6137410 B2 JP 6137410B2
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adhesive composition
paste
heating
compound
semiconductor device
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JPWO2016121806A1 (ja
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安雄 下邊
安雄 下邊
竜一 村山
竜一 村山
康二 牧原
康二 牧原
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Sumitomo Bakelite Co Ltd
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Sumitomo Bakelite Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02—Non-macromolecular additives
    • C09J11/04—Non-macromolecular additives inorganic
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/04—Homopolymers or copolymers of esters
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J163/00—Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J201/00—Adhesives based on unspecified macromolecular compounds
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J9/00—Adhesives characterised by their physical nature or the effects produced, e.g. glue sticks
    • C09J9/02—Electrically-conducting adhesives
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/14—Conductive material dispersed in non-conductive inorganic material
    • H01B1/16—Conductive material dispersed in non-conductive inorganic material the conductive material comprising metals or alloys
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00—Additional features of adhesives in the form of films or foils
    • C09J2301/40—Additional features of adhesives in the form of films or foils characterized by the presence of essential components
    • C09J2301/408—Additional features of adhesives in the form of films or foils characterized by the presence of essential components additives as essential feature of the adhesive layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/874—On different surfaces
    • H10W72/884—Die-attach connectors and bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/736—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Die Bonding (AREA)
  • Conductive Materials (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Polymerisation Methods In General (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2016528923A 2015-01-29 2016-01-27 ペースト状接着剤組成物、半導体装置、半導体装置の製造方法、および放熱板の接着方法 Active JP6137410B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015015599 2015-01-29
JP2015015599 2015-01-29
PCT/JP2016/052295 WO2016121806A1 (ja) 2015-01-29 2016-01-27 ペースト状接着剤組成物、半導体装置、半導体装置の製造方法、および放熱板の接着方法

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JP2017005905A Division JP6260722B2 (ja) 2015-01-29 2017-01-17 ペースト状接着剤組成物、半導体装置、半導体装置の製造方法、および放熱板の接着方法

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JPWO2016121806A1 JPWO2016121806A1 (ja) 2017-04-27
JP6137410B2 true JP6137410B2 (ja) 2017-05-31

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JP2016528923A Active JP6137410B2 (ja) 2015-01-29 2016-01-27 ペースト状接着剤組成物、半導体装置、半導体装置の製造方法、および放熱板の接着方法
JP2017005905A Active JP6260722B2 (ja) 2015-01-29 2017-01-17 ペースト状接着剤組成物、半導体装置、半導体装置の製造方法、および放熱板の接着方法

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US (1) US10259976B2 (https=)
EP (1) EP3252123A4 (https=)
JP (2) JP6137410B2 (https=)
CN (1) CN107207941B (https=)
SG (1) SG11201705967TA (https=)
TW (1) TW201700681A (https=)
WO (1) WO2016121806A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102076547B1 (ko) * 2016-10-31 2020-02-13 스미또모 베이크라이트 가부시키가이샤 열전도성 페이스트 및 전자 장치
JP6950175B2 (ja) * 2016-12-08 2021-10-13 住友ベークライト株式会社 ペースト状接着剤組成物および電子装置
JP6772801B2 (ja) * 2016-12-08 2020-10-21 住友ベークライト株式会社 ペースト状接着剤組成物および電子装置
JP6973589B2 (ja) * 2016-12-08 2021-12-01 住友ベークライト株式会社 ペースト状接着剤組成物および電子装置
JP6930888B2 (ja) * 2017-10-02 2021-09-01 リンテック株式会社 フィルム状焼成材料、及び支持シート付フィルム状焼成材料
WO2019111778A1 (ja) * 2017-12-04 2019-06-13 住友ベークライト株式会社 ペースト状接着剤組成物、および半導体装置
CN111788275B (zh) * 2018-03-01 2021-12-03 住友电木株式会社 糊状粘接剂组合物和半导体装置
WO2020189445A1 (ja) * 2019-03-20 2020-09-24 住友ベークライト株式会社 熱伝導性組成物および半導体装置
CN114341288B (zh) * 2019-09-05 2023-07-28 住友电木株式会社 导热性组合物和半导体装置
WO2021153405A1 (ja) * 2020-01-29 2021-08-05 住友ベークライト株式会社 ペースト状樹脂組成物、高熱伝導性材料、および半導体装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1161086A (ja) 1997-08-19 1999-03-05 Sumitomo Bakelite Co Ltd 半導体用ダイアタッチ樹脂ペースト
JP2000239616A (ja) * 1999-02-24 2000-09-05 Hitachi Chem Co Ltd 樹脂ペースト組成物及びこれを用いた半導体装置
JP2001257219A (ja) * 2000-03-13 2001-09-21 Sumitomo Bakelite Co Ltd ダイアタッチペースト及び半導体装置
JP2002012738A (ja) * 2000-06-28 2002-01-15 Hitachi Chem Co Ltd 樹脂ペースト組成物及びこれを用いた半導体装置
US6888257B2 (en) * 2002-06-28 2005-05-03 Lord Corporation Interface adhesive
US7772040B2 (en) * 2006-09-12 2010-08-10 Nitto Denko Corporation Manufacturing method of semiconductor device, adhesive sheet used therein, and semiconductor device obtained thereby
JP5476839B2 (ja) 2009-07-31 2014-04-23 住友ベークライト株式会社 樹脂組成物及び樹脂組成物を使用して作製した半導体装置
TWI569385B (zh) 2011-05-27 2017-02-01 住友電木股份有限公司 半導體裝置之製造方法
JP5831762B2 (ja) 2011-12-21 2015-12-09 昭栄化学工業株式会社 熱硬化型導電性ペースト
JP5567636B2 (ja) * 2012-10-05 2014-08-06 京セラケミカル株式会社 半導体接着用熱硬化型樹脂組成物及び半導体装置
JP6333576B2 (ja) 2013-03-01 2018-05-30 京セラ株式会社 熱硬化性樹脂組成物、半導体装置及び電気・電子部品

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US20180340101A1 (en) 2018-11-29
CN107207941A (zh) 2017-09-26
CN107207941B (zh) 2018-07-17
EP3252123A1 (en) 2017-12-06
SG11201705967TA (en) 2017-08-30
JPWO2016121806A1 (ja) 2017-04-27
EP3252123A4 (en) 2018-07-25
US10259976B2 (en) 2019-04-16
JP2017106023A (ja) 2017-06-15
JP6260722B2 (ja) 2018-01-17
TW201700681A (zh) 2017-01-01
WO2016121806A1 (ja) 2016-08-04

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