JP6127128B2 - ｐｎ構造ゲートを備える復調ピクセル - Google Patents

ｐｎ構造ゲートを備える復調ピクセル Download PDF

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JP6127128B2
JP6127128B2 JP2015500994A JP2015500994A JP6127128B2 JP 6127128 B2 JP6127128 B2 JP 6127128B2 JP 2015500994 A JP2015500994 A JP 2015500994A JP 2015500994 A JP2015500994 A JP 2015500994A JP 6127128 B2 JP6127128 B2 JP 6127128B2
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gate
pixel
region
type
demodulating
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Japanese (ja)
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JP2015512562A5 (enExample
JP2015512562A (ja
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ブエットゲン・ベルンハルト
リーマン・ミハエル
ファエッロ・ブルーノ
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Ams Sensors Singapore Pte Ltd
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Heptagon Micro Optics Pte Ltd
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/28—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices being characterised by field-effect operation, e.g. junction field-effect phototransistors
    • H10F30/285—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices being characterised by field-effect operation, e.g. junction field-effect phototransistors the devices having PN homojunction gates
    • H10F30/2857—CCDs having PN homojunction gates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/671—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor having lateral variation in doping or structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • H10F39/80373—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor characterised by the gate of the transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/121—The active layers comprising only Group IV materials

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  • Solid State Image Pick-Up Elements (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2015500994A 2012-03-20 2013-03-20 ｐｎ構造ゲートを備える復調ピクセル Active JP6127128B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261613363P 2012-03-20 2012-03-20
US61/613,363 2012-03-20
PCT/IB2013/000422 WO2013140227A1 (en) 2012-03-20 2013-03-20 Pn-structured gate demodulation pixel

Publications (3)

Publication Number Publication Date
JP2015512562A JP2015512562A (ja) 2015-04-27
JP2015512562A5 JP2015512562A5 (enExample) 2016-03-17
JP6127128B2 true JP6127128B2 (ja) 2017-05-10

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JP2015500994A Active JP6127128B2 (ja) 2012-03-20 2013-03-20 ｐｎ構造ゲートを備える復調ピクセル

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US (1) US9343607B2 (enExample)
EP (1) EP2828891B1 (enExample)
JP (1) JP6127128B2 (enExample)
KR (1) KR102094738B1 (enExample)
CN (1) CN104303304B (enExample)
AU (1) AU2013237141B2 (enExample)
WO (1) WO2013140227A1 (enExample)

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US9721987B2 (en) * 2014-02-03 2017-08-01 Taiwan Semiconductor Manufacturing Co., Ltd. Pixel with transistor gate covering photodiode
CN105097850B (zh) * 2014-04-25 2019-03-29 格科微电子（上海）有限公司 Cmos图像传感器及其制造方法
EP3082165B1 (en) * 2015-04-17 2021-07-28 STMicroelectronics (Research & Development) Limited A pixel having a plurality of pinned photodiodes
GB2537421A (en) 2015-04-17 2016-10-19 Stmicroelectronics (Research & Development) Ltd A pixel having a plurality of photodiodes
US9860466B2 (en) * 2015-05-14 2018-01-02 Kla-Tencor Corporation Sensor with electrically controllable aperture for inspection and metrology systems
CN105161462A (zh) * 2015-07-22 2015-12-16 格科微电子（上海）有限公司 提高背照式图像传感器的载流子传输效率的方法
US10418410B2 (en) 2015-10-08 2019-09-17 Ams Sensors Singapore Pte. Ltd. Optoelectronic modules operable to collect spectral data and distance data
TWI571938B (zh) * 2015-10-15 2017-02-21 力晶科技股份有限公司 半導體元件及其製造方法
US10276628B2 (en) 2016-05-17 2019-04-30 Ams Sensors Singapore Pte. Ltd. Time-of-fight pixel including in-pixel buried channel transistors
JP7209170B2 (ja) * 2017-06-29 2023-01-20 パナソニックＩｐマネジメント株式会社 光検出装置、及び撮像装置
JP6967716B2 (ja) * 2017-06-29 2021-11-17 パナソニックＩｐマネジメント株式会社 光検出装置、及び撮像装置
CN111819695B (zh) * 2020-03-17 2024-06-11 深圳市汇顶科技股份有限公司 光传感器及基于飞行时间的测距系统
US11742370B2 (en) 2020-05-27 2023-08-29 Microsoft Technology Licensing, Llc Time-of-flight pixel with vertical photogates
CN112331688B (zh) * 2020-11-04 2022-07-29 中国电子科技集团公司第四十四研究所 一种同时实现大信号处理和高频转移的ccd结构
DE102020132868A1 (de) * 2020-12-09 2022-06-09 Ifm Electronic Gmbh Lichtlaufzeitpixel mit Ladungsspeicher
CN112864183B (zh) * 2021-01-18 2023-08-25 上海集成电路装备材料产业创新中心有限公司 一种改善传输迟滞的像元结构
CN113889495A (zh) * 2021-09-06 2022-01-04 天津大学 降低前馈效应的psd型传输栅图像传感器及制作方法
JP7572012B2 (ja) * 2022-08-27 2024-10-23 Ｔｏｐｐａｎホールディングス株式会社 光検出素子及び固体撮像装置
CN115548138B (zh) * 2022-08-31 2025-06-27 山东东仪光电仪器有限公司 低电容硅像素探测器阵列芯片及其制作方法
FR3142606B1 (fr) * 2022-11-29 2024-11-15 Commissariat Energie Atomique Démodulateur photonique assisté par courant à performances améliorées comportant des électrodes intermédiaires

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2389960A (en) 2002-06-20 2003-12-24 Suisse Electronique Microtech Four-tap demodulation pixel
JP4280822B2 (ja) * 2004-02-18 2009-06-17 国立大学法人静岡大学 光飛行時間型距離センサ
US7288788B2 (en) * 2004-12-03 2007-10-30 International Business Machines Corporation Predoped transfer gate for an image sensor
DE602005005685T2 (de) * 2005-10-19 2009-07-09 Mesa Imaging Ag Einrichtung und Verfahren zur Demodulation von modulierten elektromagnetischen Wellenfeldern
JP4847828B2 (ja) * 2006-09-22 2011-12-28 旭化成エレクトロニクス株式会社 Ｃｍｏｓイメージセンサの製造方法
US8227844B2 (en) * 2008-01-14 2012-07-24 International Business Machines Corporation Low lag transfer gate device
US8953149B2 (en) * 2009-02-17 2015-02-10 Microsoft Corporation CMOS three-dimensional image sensor detectors having reduced inter-gate capacitance, and enhanced modulation contrast

Also Published As

Publication number Publication date
WO2013140227A1 (en) 2013-09-26
AU2013237141A1 (en) 2014-08-21
EP2828891B1 (en) 2017-03-15
CN104303304A (zh) 2015-01-21
JP2015512562A (ja) 2015-04-27
AU2013237141B2 (en) 2016-05-12
US20130248938A1 (en) 2013-09-26
CN104303304B (zh) 2017-10-03
KR20140146088A (ko) 2014-12-24
KR102094738B1 (ko) 2020-03-31
EP2828891A1 (en) 2015-01-28
US9343607B2 (en) 2016-05-17

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