KR102094738B1 - Ｐｎ-구조의 게이트 복조 화소 - Google Patents

Ｐｎ-구조의 게이트 복조 화소 Download PDF

Info

Publication number
KR102094738B1
KR102094738B1 KR1020147027729A KR20147027729A KR102094738B1 KR 102094738 B1 KR102094738 B1 KR 102094738B1 KR 1020147027729 A KR1020147027729 A KR 1020147027729A KR 20147027729 A KR20147027729 A KR 20147027729A KR 102094738 B1 KR102094738 B1 KR 102094738B1
Authority
KR
South Korea
Prior art keywords
gate
region
gate layer
demodulation
pixel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020147027729A
Other languages
English (en)
Korean (ko)
Other versions
KR20140146088A (ko
Inventor
베른하르트 부에티겐
미카엘 레만
부르노 바엘로
Original Assignee
헵타곤 마이크로 옵틱스 피티이. 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 헵타곤 마이크로 옵틱스 피티이. 리미티드 filed Critical 헵타곤 마이크로 옵틱스 피티이. 리미티드
Publication of KR20140146088A publication Critical patent/KR20140146088A/ko
Application granted granted Critical
Publication of KR102094738B1 publication Critical patent/KR102094738B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/28—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices being characterised by field-effect operation, e.g. junction field-effect phototransistors
    • H10F30/285—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices being characterised by field-effect operation, e.g. junction field-effect phototransistors the devices having PN homojunction gates
    • H10F30/2857—CCDs having PN homojunction gates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/671—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor having lateral variation in doping or structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • H10F39/80373—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor characterised by the gate of the transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/121—The active layers comprising only Group IV materials

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Electrodes Of Semiconductors (AREA)
KR1020147027729A 2012-03-20 2013-03-20 Ｐｎ-구조의 게이트 복조 화소 Active KR102094738B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261613363P 2012-03-20 2012-03-20
US61/613,363 2012-03-20
PCT/IB2013/000422 WO2013140227A1 (en) 2012-03-20 2013-03-20 Pn-structured gate demodulation pixel

Publications (2)

Publication Number Publication Date
KR20140146088A KR20140146088A (ko) 2014-12-24
KR102094738B1 true KR102094738B1 (ko) 2020-03-31

Family

ID=48227339

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147027729A Active KR102094738B1 (ko) 2012-03-20 2013-03-20 Ｐｎ-구조의 게이트 복조 화소

Country Status (7)

Country Link
US (1) US9343607B2 (enExample)
EP (1) EP2828891B1 (enExample)
JP (1) JP6127128B2 (enExample)
KR (1) KR102094738B1 (enExample)
CN (1) CN104303304B (enExample)
AU (1) AU2013237141B2 (enExample)
WO (1) WO2013140227A1 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9721987B2 (en) * 2014-02-03 2017-08-01 Taiwan Semiconductor Manufacturing Co., Ltd. Pixel with transistor gate covering photodiode
CN105097850B (zh) * 2014-04-25 2019-03-29 格科微电子（上海）有限公司 Cmos图像传感器及其制造方法
GB2537421A (en) 2015-04-17 2016-10-19 Stmicroelectronics (Research & Development) Ltd A pixel having a plurality of photodiodes
EP3082165B1 (en) * 2015-04-17 2021-07-28 STMicroelectronics (Research & Development) Limited A pixel having a plurality of pinned photodiodes
US9860466B2 (en) * 2015-05-14 2018-01-02 Kla-Tencor Corporation Sensor with electrically controllable aperture for inspection and metrology systems
CN105161462A (zh) * 2015-07-22 2015-12-16 格科微电子（上海）有限公司 提高背照式图像传感器的载流子传输效率的方法
WO2017061951A1 (en) 2015-10-08 2017-04-13 Heptagon Micro Optics Pte. Ltd. Optoelectronic modules operable to collect spectral data and distance data
TWI571938B (zh) * 2015-10-15 2017-02-21 力晶科技股份有限公司 半導體元件及其製造方法
US10276628B2 (en) 2016-05-17 2019-04-30 Ams Sensors Singapore Pte. Ltd. Time-of-fight pixel including in-pixel buried channel transistors
JP7209170B2 (ja) * 2017-06-29 2023-01-20 パナソニックＩｐマネジメント株式会社 光検出装置、及び撮像装置
JP6967716B2 (ja) * 2017-06-29 2021-11-17 パナソニックＩｐマネジメント株式会社 光検出装置、及び撮像装置
WO2021184191A1 (zh) * 2020-03-17 2021-09-23 深圳市汇顶科技股份有限公司 光传感器及基于飞行时间的测距系统
US11742370B2 (en) 2020-05-27 2023-08-29 Microsoft Technology Licensing, Llc Time-of-flight pixel with vertical photogates
CN112331688B (zh) * 2020-11-04 2022-07-29 中国电子科技集团公司第四十四研究所 一种同时实现大信号处理和高频转移的ccd结构
DE102020132868A1 (de) * 2020-12-09 2022-06-09 Ifm Electronic Gmbh Lichtlaufzeitpixel mit Ladungsspeicher
CN112864183B (zh) * 2021-01-18 2023-08-25 上海集成电路装备材料产业创新中心有限公司 一种改善传输迟滞的像元结构
CN113889495A (zh) * 2021-09-06 2022-01-04 天津大学 降低前馈效应的psd型传输栅图像传感器及制作方法
JP7572012B2 (ja) * 2022-08-27 2024-10-23 Ｔｏｐｐａｎホールディングス株式会社 光検出素子及び固体撮像装置
CN115548138B (zh) * 2022-08-31 2025-06-27 山东东仪光电仪器有限公司 低电容硅像素探测器阵列芯片及其制作方法
FR3142606B1 (fr) * 2022-11-29 2024-11-15 Commissariat Energie Atomique Démodulateur photonique assisté par courant à performances améliorées comportant des électrodes intermédiaires

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008078489A (ja) 2006-09-22 2008-04-03 Asahi Kasei Electronics Co Ltd Ｃｍｏｓイメージセンサおよびその製造方法
US20090179232A1 (en) * 2008-01-14 2009-07-16 Adkisson James W Low lag transfer gate device
KR101098216B1 (ko) 2004-02-18 2012-01-12 고쿠리츠 다이가꾸 호우진 시즈오까 다이가꾸 광 비행 시간형 거리 센서

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2389960A (en) 2002-06-20 2003-12-24 Suisse Electronique Microtech Four-tap demodulation pixel
US7288788B2 (en) * 2004-12-03 2007-10-30 International Business Machines Corporation Predoped transfer gate for an image sensor
ATE390715T1 (de) * 2005-10-19 2008-04-15 Suisse Electronique Microtech Einrichtung und verfahren zur demodulation von modulierten elektromagnetischen wellenfeldern
US8953149B2 (en) * 2009-02-17 2015-02-10 Microsoft Corporation CMOS three-dimensional image sensor detectors having reduced inter-gate capacitance, and enhanced modulation contrast

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101098216B1 (ko) 2004-02-18 2012-01-12 고쿠리츠 다이가꾸 호우진 시즈오까 다이가꾸 광 비행 시간형 거리 센서
JP2008078489A (ja) 2006-09-22 2008-04-03 Asahi Kasei Electronics Co Ltd Ｃｍｏｓイメージセンサおよびその製造方法
US20090179232A1 (en) * 2008-01-14 2009-07-16 Adkisson James W Low lag transfer gate device

Also Published As

Publication number Publication date
CN104303304A (zh) 2015-01-21
AU2013237141B2 (en) 2016-05-12
JP6127128B2 (ja) 2017-05-10
WO2013140227A1 (en) 2013-09-26
JP2015512562A (ja) 2015-04-27
AU2013237141A1 (en) 2014-08-21
EP2828891A1 (en) 2015-01-28
US20130248938A1 (en) 2013-09-26
EP2828891B1 (en) 2017-03-15
CN104303304B (zh) 2017-10-03
KR20140146088A (ko) 2014-12-24
US9343607B2 (en) 2016-05-17

Similar Documents

Publication Publication Date Title
KR102094738B1 (ko) Ｐｎ-구조의 게이트 복조 화소
JP6485880B2 (ja) 多数電流によって補助される放射線検出器デバイス
TWI722060B (zh) 堆疊式單光子雪崩二極體影像感測器及其形成方法
CN110431441B (zh) 用于调制的图像捕获的系统和方法
CN105374834B (zh) 制作单光子雪崩二极管成像传感器的方法
US10594966B2 (en) Optical sensor device and method for manufacturing the optical sensor device
CN104779317B (zh) 背侧照明式单光子雪崩二极管及包括其的成像传感器系统
US11709238B2 (en) Demodulator with a carrier generating pinned photodiode and a method for operating it
US20130040417A1 (en) Substrate bias for cmos imagers
JP2015177191A (ja) Ｃｍｏｓイメージセンサ
JP7167061B2 (ja) 電磁放射線のファーストゲート式検出のための検出器
EP3738148A1 (en) Germanium-modified, back-side illuminated optical sensor
US20110042773A1 (en) High fill-factor laser-treated semiconductor device on bulk material with single side contact scheme
Mahdi et al. Lateral Drift-Field Photodetector for high speed 0.35 µm CMOS imaging sensors based on non-uniform lateral doping profile: design, theoretical concepts, and TCAD simulations
KR100749253B1 (ko) 청색감쇠가 개선된 이미지센서
Durini et al. CMOS Process for Optical Devices

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20141001

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PN2301 Change of applicant

Patent event date: 20160726

Comment text: Notification of Change of Applicant

Patent event code: PN23011R01D

A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20180319

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20190726

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20200102

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20200324

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20200324

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20240314

Start annual number: 5

End annual number: 5