JP6125783B2 - 塗布装置及び塗布方法 - Google Patents
塗布装置及び塗布方法 Download PDFInfo
- Publication number
- JP6125783B2 JP6125783B2 JP2012209288A JP2012209288A JP6125783B2 JP 6125783 B2 JP6125783 B2 JP 6125783B2 JP 2012209288 A JP2012209288 A JP 2012209288A JP 2012209288 A JP2012209288 A JP 2012209288A JP 6125783 B2 JP6125783 B2 JP 6125783B2
- Authority
- JP
- Japan
- Prior art keywords
- slit
- coating
- coating liquid
- temperature
- manifold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000576 coating method Methods 0.000 title claims description 281
- 239000011248 coating agent Substances 0.000 title claims description 275
- 239000007788 liquid Substances 0.000 claims description 149
- 239000000758 substrate Substances 0.000 claims description 35
- 238000007599 discharging Methods 0.000 claims description 22
- 238000010438 heat treatment Methods 0.000 claims description 13
- 230000000630 rising effect Effects 0.000 claims description 4
- 238000002791 soaking Methods 0.000 claims description 4
- 239000010408 film Substances 0.000 description 27
- 238000011144 upstream manufacturing Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/001—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work incorporating means for heating or cooling the liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1042—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material provided with means for heating or cooling the liquid or other fluent material in the supplying means upstream of the applying apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
Landscapes
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012209288A JP6125783B2 (ja) | 2012-09-24 | 2012-09-24 | 塗布装置及び塗布方法 |
PCT/JP2013/074610 WO2014045982A1 (ja) | 2012-09-24 | 2013-09-12 | 塗布装置及び塗布方法 |
KR1020157006929A KR102110628B1 (ko) | 2012-09-24 | 2013-09-12 | 도포 장치 및 도포 방법 |
CN201380048511.4A CN104661759B (zh) | 2012-09-24 | 2013-09-12 | 涂布装置以及涂布方法 |
TW102133503A TWI594806B (zh) | 2012-09-24 | 2013-09-16 | Coating device and coating method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012209288A JP6125783B2 (ja) | 2012-09-24 | 2012-09-24 | 塗布装置及び塗布方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014061501A JP2014061501A (ja) | 2014-04-10 |
JP6125783B2 true JP6125783B2 (ja) | 2017-05-10 |
Family
ID=50341296
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012209288A Active JP6125783B2 (ja) | 2012-09-24 | 2012-09-24 | 塗布装置及び塗布方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6125783B2 (zh) |
KR (1) | KR102110628B1 (zh) |
CN (1) | CN104661759B (zh) |
TW (1) | TWI594806B (zh) |
WO (1) | WO2014045982A1 (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5735161B1 (ja) * | 2014-07-08 | 2015-06-17 | 中外炉工業株式会社 | 塗布装置及びその改良方法 |
CN104668150B (zh) * | 2015-03-09 | 2017-07-07 | 浙江长兴森大竹木制品有限公司 | 一种自动淋幕机的淋幕装置 |
JP6385864B2 (ja) * | 2015-03-18 | 2018-09-05 | 株式会社東芝 | ノズルおよび液体供給装置 |
JP6804850B2 (ja) * | 2016-02-26 | 2020-12-23 | 東レ株式会社 | 塗布装置及び塗布方法 |
KR102096609B1 (ko) * | 2016-03-31 | 2020-04-02 | 단국대학교 천안캠퍼스 산학협력단 | 직선 및 곡선의 패턴을 도포할 수 있는 다이나믹 3d 라미네이션 장치 |
JP6655479B2 (ja) * | 2016-06-22 | 2020-02-26 | 東レ株式会社 | 塗布器及び塗布装置 |
KR20200011038A (ko) | 2020-01-10 | 2020-01-31 | 장신 | 묘목 생장용 전용포트 및 그 전용포트를 이용한 묘목 생장 방법 |
CN113926666B (zh) * | 2020-06-29 | 2023-03-10 | 上海德沪涂膜设备有限公司 | 一种狭缝涂敷成膜方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000157906A (ja) | 1998-11-25 | 2000-06-13 | Canon Inc | 枚葉塗工方法及び枚葉塗工装置、カラーフィルタの製造方法 |
JP4374647B2 (ja) * | 1999-04-05 | 2009-12-02 | 凸版印刷株式会社 | 塗布装置 |
JP2001009342A (ja) * | 1999-06-28 | 2001-01-16 | Dainippon Printing Co Ltd | ダイヘッド |
JP2001029861A (ja) * | 1999-07-21 | 2001-02-06 | Dainippon Printing Co Ltd | ダイヘッド |
JP2003154302A (ja) * | 2001-11-21 | 2003-05-27 | Dainippon Printing Co Ltd | 塗工装置 |
JP2003159557A (ja) * | 2001-11-27 | 2003-06-03 | Fuji Photo Film Co Ltd | 塗布方法及び塗布装置 |
JP2003170098A (ja) * | 2001-12-06 | 2003-06-17 | Shimadzu Corp | スリットコータ |
JP2005028212A (ja) * | 2003-07-07 | 2005-02-03 | Seiko Epson Corp | 液滴吐出方法及び装置、デバイスとその製造方法並びに電子機器 |
JP2006175415A (ja) * | 2004-12-24 | 2006-07-06 | Sony Corp | ダイヘッド、塗布装置および電池電極製造方法 |
JP2007190456A (ja) * | 2006-01-17 | 2007-08-02 | Konica Minolta Medical & Graphic Inc | 積層体の製造装置 |
TW200831189A (en) * | 2007-01-17 | 2008-08-01 | Himax Display Inc | Coating apparatus and nozzle |
JP5205902B2 (ja) * | 2007-09-28 | 2013-06-05 | 大日本印刷株式会社 | ダイコータを用いて得られる光学素子および液晶表示装置 |
JP5138058B2 (ja) * | 2011-03-07 | 2013-02-06 | 東レ株式会社 | 清掃部材と塗布器の清掃方法及び清掃装置並びにディスプレイ用部材の製造方法 |
-
2012
- 2012-09-24 JP JP2012209288A patent/JP6125783B2/ja active Active
-
2013
- 2013-09-12 CN CN201380048511.4A patent/CN104661759B/zh active Active
- 2013-09-12 KR KR1020157006929A patent/KR102110628B1/ko active IP Right Grant
- 2013-09-12 WO PCT/JP2013/074610 patent/WO2014045982A1/ja active Application Filing
- 2013-09-16 TW TW102133503A patent/TWI594806B/zh active
Also Published As
Publication number | Publication date |
---|---|
TW201420211A (zh) | 2014-06-01 |
KR20150060704A (ko) | 2015-06-03 |
WO2014045982A1 (ja) | 2014-03-27 |
TWI594806B (zh) | 2017-08-11 |
KR102110628B1 (ko) | 2020-05-13 |
JP2014061501A (ja) | 2014-04-10 |
CN104661759B (zh) | 2017-11-28 |
CN104661759A (zh) | 2015-05-27 |
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