JP6107186B2 - 光学モジュール、電子機器、及び分光カメラ - Google Patents
光学モジュール、電子機器、及び分光カメラ Download PDFInfo
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- JP6107186B2 JP6107186B2 JP2013020168A JP2013020168A JP6107186B2 JP 6107186 B2 JP6107186 B2 JP 6107186B2 JP 2013020168 A JP2013020168 A JP 2013020168A JP 2013020168 A JP2013020168 A JP 2013020168A JP 6107186 B2 JP6107186 B2 JP 6107186B2
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- 230000003287 optical effect Effects 0.000 title claims description 80
- 239000000758 substrate Substances 0.000 description 80
- 238000000605 extraction Methods 0.000 description 61
- 238000001514 detection method Methods 0.000 description 59
- 230000003595 spectral effect Effects 0.000 description 34
- 238000012545 processing Methods 0.000 description 31
- 238000003384 imaging method Methods 0.000 description 21
- 238000009434 installation Methods 0.000 description 20
- 238000010586 diagram Methods 0.000 description 17
- 238000003860 storage Methods 0.000 description 16
- 238000007689 inspection Methods 0.000 description 14
- 238000005259 measurement Methods 0.000 description 14
- 230000002093 peripheral effect Effects 0.000 description 14
- 239000000306 component Substances 0.000 description 11
- 230000006866 deterioration Effects 0.000 description 10
- 230000008859 change Effects 0.000 description 9
- 239000010410 layer Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 238000001069 Raman spectroscopy Methods 0.000 description 8
- 239000000126 substance Substances 0.000 description 7
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 6
- 238000001228 spectrum Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 238000004611 spectroscopical analysis Methods 0.000 description 5
- 239000007772 electrode material Substances 0.000 description 4
- 238000004186 food analysis Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 229910001316 Ag alloy Inorganic materials 0.000 description 3
- 238000004737 colorimetric analysis Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 235000012041 food component Nutrition 0.000 description 3
- 239000005428 food component Substances 0.000 description 3
- 229910052500 inorganic mineral Inorganic materials 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000011707 mineral Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000000411 transmission spectrum Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000008280 blood Substances 0.000 description 2
- 210000004369 blood Anatomy 0.000 description 2
- 210000001124 body fluid Anatomy 0.000 description 2
- 239000010839 body fluid Substances 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 238000004497 NIR spectroscopy Methods 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000012491 analyte Substances 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 150000001720 carbohydrates Chemical class 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013075 data extraction Methods 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 210000000887 face Anatomy 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 210000000554 iris Anatomy 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 210000001525 retina Anatomy 0.000 description 1
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 1
- 239000013076 target substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
- G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
- G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29358—Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Spectrometry And Color Measurement (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013020168A JP6107186B2 (ja) | 2013-02-05 | 2013-02-05 | 光学モジュール、電子機器、及び分光カメラ |
| CN201410043550.1A CN103969728B (zh) | 2013-02-05 | 2014-01-29 | 光学模块、电子设备以及分光照相机 |
| EP14153779.5A EP2762948A1 (en) | 2013-02-05 | 2014-02-04 | Optical module comprising a tunable Fabry-Perot interferometer, electronic apparatus, and spectroscopic camera |
| US14/171,866 US9297997B2 (en) | 2013-02-05 | 2014-02-04 | Optical module, electronic apparatus, and spectroscopic camera |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013020168A JP6107186B2 (ja) | 2013-02-05 | 2013-02-05 | 光学モジュール、電子機器、及び分光カメラ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014153389A JP2014153389A (ja) | 2014-08-25 |
| JP2014153389A5 JP2014153389A5 (enExample) | 2016-03-17 |
| JP6107186B2 true JP6107186B2 (ja) | 2017-04-05 |
Family
ID=50097551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013020168A Active JP6107186B2 (ja) | 2013-02-05 | 2013-02-05 | 光学モジュール、電子機器、及び分光カメラ |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9297997B2 (enExample) |
| EP (1) | EP2762948A1 (enExample) |
| JP (1) | JP6107186B2 (enExample) |
| CN (1) | CN103969728B (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010002558A1 (de) | 2009-11-20 | 2011-06-01 | Symrise Ag | Verwendung physiologischer Kühlwirkstoffe und Mittel enthaltend solche Wirkstoffe |
| JP2013238755A (ja) | 2012-05-16 | 2013-11-28 | Seiko Epson Corp | 光学モジュール、電子機器、食物分析装置、分光カメラ、及び波長可変干渉フィルターの駆動方法 |
| JP6107186B2 (ja) | 2013-02-05 | 2017-04-05 | セイコーエプソン株式会社 | 光学モジュール、電子機器、及び分光カメラ |
| JP6543884B2 (ja) | 2014-01-27 | 2019-07-17 | セイコーエプソン株式会社 | アクチュエーター制御装置、光学モジュール、電子機器、及びアクチュエーター制御方法 |
| JP6413325B2 (ja) | 2014-05-01 | 2018-10-31 | セイコーエプソン株式会社 | アクチュエーター装置、電子機器、及び制御方法 |
| US9780134B2 (en) * | 2014-05-16 | 2017-10-03 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor device and method of forming the same |
| JP6601007B2 (ja) * | 2015-06-18 | 2019-11-06 | セイコーエプソン株式会社 | 分光測定装置、画像形成装置、及び分光測定方法 |
| JP6897226B2 (ja) * | 2017-03-28 | 2021-06-30 | セイコーエプソン株式会社 | 光学モジュール及び光学モジュールの駆動方法 |
| US11480783B2 (en) | 2017-06-13 | 2022-10-25 | Hamamatsu Photonics K.K. | Optical filter system |
| KR102289043B1 (ko) | 2017-07-25 | 2021-08-10 | 삼성전자주식회사 | 스펙트럼 측정 장치 및 방법 |
| EP3675809B1 (de) | 2017-08-31 | 2023-09-27 | Basf Se | Verwendung physiologischer kühlwirkstoffe und mittel enthaltend solche wirkstoffe |
| CN107561684B (zh) * | 2017-09-30 | 2021-02-23 | Oppo广东移动通信有限公司 | 滤光片、镜头模组和成像模组 |
| CN107479185A (zh) * | 2017-09-30 | 2017-12-15 | 广东欧珀移动通信有限公司 | 滤光片、显示装置和电子装置 |
| DE102018200380A1 (de) * | 2018-01-11 | 2019-07-11 | Robert Bosch Gmbh | Verfahren und Vorrichtung zum Betreiben eines durchstimmbaren optischen Resonators und optischer Resonator |
| DE102019210707A1 (de) * | 2019-07-19 | 2021-01-21 | Robert Bosch Gmbh | Interferometereinrichtung und Verfahren zum Betreiben einer Interferometereinrichtung |
| CN113946014B (zh) * | 2021-12-20 | 2022-03-04 | 南京高华科技股份有限公司 | 一种可调光谐振器 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH0194312A (ja) * | 1987-10-06 | 1989-04-13 | Sharp Corp | 可変干渉装置 |
| JPH07243963A (ja) | 1994-03-07 | 1995-09-19 | Yazaki Corp | 光共振器とその製造方法 |
| US5751469A (en) | 1996-02-01 | 1998-05-12 | Lucent Technologies Inc. | Method and apparatus for an improved micromechanical modulator |
| US6665109B2 (en) * | 2000-03-20 | 2003-12-16 | Np Photonics, Inc. | Compliant mechanism and method of forming same |
| US6747775B2 (en) * | 2000-03-20 | 2004-06-08 | Np Photonics, Inc. | Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same |
| JP3835525B2 (ja) * | 2001-03-19 | 2006-10-18 | ホーチキ株式会社 | 波長可変フィルタ制御装置 |
| JP3982349B2 (ja) | 2001-07-05 | 2007-09-26 | 株式会社デンソー | 波長可変デバイス |
| JP4019847B2 (ja) | 2001-08-17 | 2007-12-12 | 株式会社デンソー | 機能デバイス |
| US6781208B2 (en) | 2001-08-17 | 2004-08-24 | Nec Corporation | Functional device, method of manufacturing therefor and driver circuit |
| JP2003215473A (ja) | 2002-01-21 | 2003-07-30 | Yokogawa Electric Corp | ファブリペローフィルタ |
| US7368846B2 (en) | 2002-11-06 | 2008-05-06 | Matsushita Electric Industrial Co., Ltd. | Microactuator with displacement sensing function and deformable mirror including the microactuator |
| TW200408824A (en) | 2002-11-21 | 2004-06-01 | Delta Electronics Inc | Method for finesse compensation in a Fabry-Perot device and a Fabry-Perot device with high finesse |
| JP4548288B2 (ja) | 2005-09-22 | 2010-09-22 | セイコーエプソン株式会社 | 波長可変フィルタ |
| JP4466634B2 (ja) * | 2006-01-19 | 2010-05-26 | セイコーエプソン株式会社 | 光学デバイス、波長可変フィルタ、波長可変フィルタモジュール、および光スペクトラムアナライザ |
| JP2008151544A (ja) * | 2006-12-14 | 2008-07-03 | Olympus Corp | 可変分光素子、分光装置および内視鏡システム |
| JP2008183350A (ja) * | 2007-01-31 | 2008-08-14 | Olympus Corp | 可変分光素子、分光装置および内視鏡システム |
| JP5230952B2 (ja) * | 2007-02-13 | 2013-07-10 | オリンパス株式会社 | 内視鏡用可変分光素子、分光装置および内視鏡システム |
| JP2008197362A (ja) | 2007-02-13 | 2008-08-28 | Olympus Corp | 可変分光素子 |
| DE102009001381A1 (de) | 2009-03-06 | 2010-09-09 | Robert Bosch Gmbh | Antriebselement und Verfahren zum Betrieb eines Antriebselements |
| IL201742A0 (en) | 2009-10-25 | 2010-06-16 | Elbit Sys Electro Optics Elop | Tunable spectral filter |
| JP2011106936A (ja) | 2009-11-17 | 2011-06-02 | Seiko Epson Corp | 分光測定装置、および分析装置 |
| JP5589459B2 (ja) | 2010-03-15 | 2014-09-17 | セイコーエプソン株式会社 | 光フィルター及び光フィルターモジュール並びに分析機器及び光機器 |
| JP6010275B2 (ja) * | 2010-03-15 | 2016-10-19 | セイコーエプソン株式会社 | 光フィルター並びにそれを用いた分析機器及び光機器 |
| JP5348032B2 (ja) | 2010-03-16 | 2013-11-20 | セイコーエプソン株式会社 | 光フィルター並びにそれを用いた分析機器及び光機器 |
| JP5834418B2 (ja) | 2011-02-04 | 2015-12-24 | セイコーエプソン株式会社 | 光フィルター、光フィルターモジュール、分析機器及び光機器 |
| JP5909850B2 (ja) | 2011-02-15 | 2016-04-27 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光モジュール、及び光分析装置 |
| JP5807353B2 (ja) | 2011-03-18 | 2015-11-10 | セイコーエプソン株式会社 | 光フィルター及び光フィルターモジュール並びに分析機器及び光機器 |
| JP5874271B2 (ja) | 2011-09-27 | 2016-03-02 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 |
| JP5879910B2 (ja) | 2011-10-18 | 2016-03-08 | セイコーエプソン株式会社 | 光フィルター、光フィルターモジュール、分析機器、及び光機器 |
| JP5888080B2 (ja) | 2012-04-11 | 2016-03-16 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、電子機器、及び波長可変干渉フィルターの駆動方法 |
| JP6015090B2 (ja) | 2012-04-18 | 2016-10-26 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 |
| JP2013238755A (ja) | 2012-05-16 | 2013-11-28 | Seiko Epson Corp | 光学モジュール、電子機器、食物分析装置、分光カメラ、及び波長可変干渉フィルターの駆動方法 |
| JP6019863B2 (ja) | 2012-07-18 | 2016-11-02 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、および電子機器、並びに波長可変干渉フィルターの製造方法 |
| JP2014059497A (ja) | 2012-09-19 | 2014-04-03 | Seiko Epson Corp | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、電子機器、及びmemsデバイス |
| JP6107186B2 (ja) | 2013-02-05 | 2017-04-05 | セイコーエプソン株式会社 | 光学モジュール、電子機器、及び分光カメラ |
| JP6543884B2 (ja) | 2014-01-27 | 2019-07-17 | セイコーエプソン株式会社 | アクチュエーター制御装置、光学モジュール、電子機器、及びアクチュエーター制御方法 |
-
2013
- 2013-02-05 JP JP2013020168A patent/JP6107186B2/ja active Active
-
2014
- 2014-01-29 CN CN201410043550.1A patent/CN103969728B/zh active Active
- 2014-02-04 US US14/171,866 patent/US9297997B2/en active Active
- 2014-02-04 EP EP14153779.5A patent/EP2762948A1/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| EP2762948A1 (en) | 2014-08-06 |
| US9297997B2 (en) | 2016-03-29 |
| JP2014153389A (ja) | 2014-08-25 |
| US20140218586A1 (en) | 2014-08-07 |
| CN103969728B (zh) | 2019-04-19 |
| CN103969728A (zh) | 2014-08-06 |
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