JP6104813B2 - プラズマ処理システムおよびこれを制御する方法 - Google Patents
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Description
[適用例1]プラズマ処理システムを制御する方法であって、
チャンバの少なくとも1つの構成要素からRF信号を受信し、
前記RF信号の基本周波数および広帯域周波数の各々に対するピーク電圧情報を取得するために、デジタルの領域で前記RF信号を処理し、
前記プラズマ処理システムを制御するフィードバック信号および制御信号の1つとして用いられるウェハバイアス情報を、前記ピーク電圧情報から抽出する
方法。
[適用例2]前記プラズマ処理システムの制御は、所望のウェハバイアス電位を維持することを含む適用例1に記載の方法。
[適用例3]前記RF信号は容量型ピックアップ構成要素を介して受信される適用例2に記載の方法。
[適用例4]前記抽出は、少なくともプラズマプロセスパラメータデータを考慮する適用例2に記載の方法。
[適用例5]前記プラズマプロセスパラメータデータは、チャンバ圧力、チャンバ間隙、RF供給電力、RF周波数、RF発生器インピーダンス整合回路のタップ位置、チャンバの化学的性質、チャンバの形態およびウェハ抵抗率の少なくとも1つを含む適用例4に記載の方法。
[適用例6]前記RF信号の処理は、独立して入力されたRF信号データを考慮することを含む適用例5に記載の方法。
[適用例7]前記処理は、前記独立して入力されたRF信号データを用いて前記処理に用いられるデジタルフィルタの調整を実行することを含む適用例6に記載の方法。
[適用例8]前記独立して入力された前記のRF信号データは、前記RF信号の基本周波数および駆動信号位相の少なくとも1つを含む適用例6に記載の方法。
[適用例9]前記RF信号の処理は、アンチエイリアシングフィルタを使用して前記RF信号をフィルタリングすることを含む適用例4に記載の方法。
[適用例10]前記処理は、前記フィルタリング後に前記RF信号にアナログデジタル変換を実行することをさらに含む適用例9に記載の方法。
[適用例11]前記アンチエイリアシングフィルタのフィルタ周波数は、前記アナログデジタル変換のために用いられるアナログデジタルコンバータのサンプリング周波数の半分より大きい適用例10に記載の方法。
[適用例12]少なくとも1つのチャンバと、前記チャンバの少なくとも1つの構成要素から得られるRF信号からウェハバイアス情報を得る装置とを有するプラズマ処理システムであって、
前記RF信号をフィルタリングするアンチエイリアシングフィルタと、
前記フィルタリングの後に前記RF信号にアナログデジタル変換を実行するアナログデジタルコンバータと、
前記変換後にデジタルの領域で前記RF信号を処理して前記RF信号の各基本周波数および広帯域周波数に対するピーク電圧情報を取得する論理回路と、
前記プラズマ処理システムを制御するフィードバック信号および制御信号の1つとして用いられるウェハバイアス情報を、前記ピーク電圧情報から抽出する論理回路と
を備えるプラズマ処理システム。
[適用例13]前記フィルタリングの前に前記RF信号を受信する容量型ピックアップ構成要素をさらに含む適用例12に記載のプラズマ処理システム。
[適用例14]前記抽出する論理回路は、前記ウェハバイアス情報を計算する際に少なくともプラズマプロセスパラメータデータを考慮する適用例12に記載のプラズマ処理システム。
[適用例15]前記プラズマプロセスパラメータデータは、チャンバ圧力、チャンバ間隙、RF供給電力、RF周波数、RF発生器インピーダンス整合回路のタップ位置、チャンバの化学的性質、チャンバの形態およびウェハ抵抗率の少なくとも1つを含む適用例14に記載のプラズマ処理システム。
[適用例16]前記処理する論理回路は、前記ピーク電圧情報および前記広帯域周波数を計算する際に独立して入力されたRF信号データを考慮する適用例15に記載のプラズマ処理システム。
[適用例17]前記処理は、前記独立して入力されたRF信号データを用いて前記処理に用いられるデジタルフィルタの調整を実行することを含む適用例16に記載のプラズマ処理システム。
[適用例18]前記独立して入力された前記RF信号データは、前記RF信号の基本周波数および駆動信号位相の少なくとも1つを含む適用例15に記載のプラズマ処理システム。
Claims (17)
- プラズマ処理システムを制御する方法であって、
チャンバの少なくとも1つの構成要素からRF信号を受信し、
前記RF信号の基本周波数および広帯域周波数の各々に対するピーク電圧情報を取得するために、デジタルの領域で前記RF信号を処理し、当該処理は、前記RF信号の前記基本周波数および前記広帯域周波数の各々をDC信号に変換する処理を含み、
前記DC信号をデジタル信号に変換することと、伝達関数出力を得るために前記RF信号のデジタル信号を伝達関数に適用することとによって、ウェハバイアス情報を、前記ピーク電圧情報から抽出し、当該伝達関数出力は、前記RF信号の各周波数を示し、前記プラズマ処理システムを制御するフィードバック信号として用いられる
方法。 - 前記RF信号は容量型ピックアップを介して受信される請求項1に記載の方法。
- 前記抽出は、少なくとも一つのプラズマプロセスパラメータデータを考慮する請求項1に記載の方法。
- 前記プラズマプロセスパラメータデータは、チャンバ圧力、チャンバ間隙、RF供給電力、RF周波数、RF発生器インピーダンス整合回路のタップ位置、チャンバの化学的性質、チャンバの形態、ウェハタイプおよびウェハ抵抗率の少なくとも1つを含む請求項3に記載の方法。
- 前記RF信号は、複数のRF発生器からそれぞれ独立した入力として受け取られ、前記RF信号の処理は、独立して入力されたRF信号を考慮することを含む請求項3に記載の方法。
- 前記処理は、前記独立して入力されたRF信号を用いて前記処理に用いられるデジタルフィルタの調整を実行することを含む請求項5に記載の方法。
- 前記独立して入力された前記RF信号は、前記RF信号の前記基本周波数および位相の少なくとも1つを含む請求項5に記載の方法。
- 前記RF信号の処理は、ローパスフィルタであるアンチエイリアシングフィルタを使用して前記RF信号をフィルタリングすることを含む請求項3に記載の方法。
- 前記処理は、前記フィルタリング後に前記RF信号にアナログデジタル変換を所定のサンプリング周波数で実行することをさらに含む請求項8に記載の方法。
- 前記アンチエイリアシングフィルタのフィルタ周波数は、前記アナログデジタル変換のために用いられるアナログデジタルコンバータのサンプリング周波数の半分である請求項9に記載の方法。
- 少なくとも1つのチャンバと、前記チャンバの少なくとも1つの構成要素から得られるRF信号からウェハバイアス情報を得る装置とを有するプラズマ処理システムであって、
前記RF信号をフィルタリングするローパスフィルタであるアンチエイリアシングフィルタと、
前記フィルタリングの後に前記RF信号にアナログデジタル変換を、所定のサンプリング周波数で実行するアナログデジタルコンバータと、
前記変換の後にデジタルの領域で前記RF信号を処理して前記RF信号の各基本周波数および広帯域周波数に対するピーク電圧情報を取得する論理回路であって、当該処理は、前記RF信号の前記基本周波数および前記広帯域周波数の各々をDC信号に変換する処理を含む、論理回路と、
前記DC信号をデジタル信号に変換することと、伝達関数出力を得るために前記RF信号のデジタル信号を伝達関数に適用することとによって、ウェハバイアス情報を、前記ピーク電圧情報から抽出する論理回路であって、当該伝達関数出力は、前記RF信号の各周波数を示し、前記プラズマ処理システムを制御するフィードバック信号として用いられる、論理回路と、
を備えるプラズマ処理システム。 - 前記フィルタリングの前に前記RF信号を受信する容量型ピックアップをさらに含む請求項11に記載のプラズマ処理システム。
- 前記抽出する論理回路は、前記ウェハバイアス情報を計算する際に少なくとも一つのプラズマプロセスパラメータデータを考慮する請求項11に記載のプラズマ処理システム。
- 前記プラズマプロセスパラメータデータは、チャンバ圧力、チャンバ間隙、RF供給電力、RF周波数、RF発生器インピーダンス整合回路のタップ位置、チャンバの化学的性質、チャンバの形態、ウェハタイプおよびウェハ抵抗率の少なくとも1つを含む請求項13に記載のプラズマ処理システム。
- 前記RF信号は、独立した入力として受け取られ、前記処理する論理回路は、前記ピーク電圧情報および前記広帯域周波数を計算する際に独立して入力されたRF信号を考慮する請求項14に記載のプラズマ処理システム。
- 前記処理は、前記独立して入力されたRF信号を用いて前記処理に用いられるデジタルフィルタの調整を実行することを含む請求項15に記載のプラズマ処理システム。
- 前記独立して入力された前記RF信号は、前記RF信号の前記基本周波数および位相の少なくとも1つを含む請求項15に記載のプラズマ処理システム。
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US8501631B2 (en) | 2009-11-19 | 2013-08-06 | Lam Research Corporation | Plasma processing system control based on RF voltage |
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