JP6089378B2 - プラズマ処理装置 - Google Patents
プラズマ処理装置 Download PDFInfo
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- JP6089378B2 JP6089378B2 JP2015510973A JP2015510973A JP6089378B2 JP 6089378 B2 JP6089378 B2 JP 6089378B2 JP 2015510973 A JP2015510973 A JP 2015510973A JP 2015510973 A JP2015510973 A JP 2015510973A JP 6089378 B2 JP6089378 B2 JP 6089378B2
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- D06M10/00—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
- D06M10/02—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements ultrasonic or sonic; Corona discharge
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Description
特許文献2:特開平4−334543号公報
本発明の第2実施形態においては、図8に示すように、リング状電極3が第1筒状部2の外周面の全長に亘るように形成され、絶縁管6の内部には、銅の円柱棒からなる導電材料7が絶縁管6の内壁と密着させた状態で挿入されている。このとき、第1筒状部2の内壁と絶縁管6の外周面とで形成される空間にプラズマ生成用ガスを導入するとともに、電源Pを用いてリング状電極3と導電材料7とに電力を付与し、第1筒状部の径方向に電位差を設けるように電圧を印加して誘電体バリア放電を発生させることによってプラズマを生成することができる。
以下に、本発明のプラズマ処理方法を用いた実施例について説明する。
本発明のプラズマ処理装置1を用いて、長尺状の被処理物Wに対してプラズマ処理を施し、その処理効果の検討を行った。
以下に、詳しいサンプルの作成方法について述べる。
長尺状の被処理物Wは、所定のプラズマ処理装置設置範囲(本実施例においては、約1mの設置範囲を設けた。)を設けて設置された2台のニップローラ付糸送りロールによって、未処理の長尺状の被処理物Wが巻かれた原糸ボビンから巻取りボビンへと搬送されるようセットされている。
また、サンプルの接触角の測定方法について述べる。
測定装置には、FIBROsystemAB社(Sweden)製の携帯式接触角計PG−Xを用いた。測定は、サンプルが整列して巻き付けられた糸上に測定装置をセットし、当該糸上に純水を滴下して、整列した糸列と純水との接触角を検出した。なお、接触角は、値が小さいほど親水性の表面であることを示し、値が大きいほど撥水性の表面であることを示す。
No.2およびNo.3に示すように、ヘリウムガス100体積%に対して炭酸ガス1体積%を添加したプラズマ生成用ガスを用いてプラズマ処理を施した場合、ガス流量を5L/minとしたNo.2においては、処理前の接触角が81.7°、処理後の接触角が69.3°と、わずかに親水化効果が認められ、ガス流量を10L/minとしたNo.3においては、処理前の接触角が81.7°、処理後の接触角が0.0°と、高い親水化効果が認められた。
No.4およびNo.5に示すように、へリムガス100体積%に対して酸素ガス1体積%を添加したプラズマ生成用ガスを用いてプラズマ処理を施した場合、ガス流量5L/minとしたNo.4においては、処理前の接触角が81.7°、処理後の接触角が67.7°と、わずかに親水化効果が認められ、ガス流量10L/minとしたNo.5においては、処理前の接触角が81.7°、処理後の接触角が85.7°と、逆に撥水化効果が認められる結果となった。
No.7に示すように、ヘリウムガス100体積%に対して炭酸ガス1体積%を添加したプラズマ生成用ガスを用いてプラズマ処理を施した場合、処理前の接触角が91.7°、処理後の接触角が77.2°と、わずかに親水化効果が認められた。
反対に、No.8に示すように、ヘリウムガス100体積%に対して酸素ガス1体積%を添加したプラズマ生成用ガスを用いてプラズマ処理を施した場合には、処理前の接触角が91.7°、処理後の接触角が96.3°と、接触角が大きくなり撥水化効果が認められる結果となった。
本発明の第3実施形態においては、図9に示すように、例えば、タングステンや鋼などの電気伝導性を有する長尺状の被処理物Wにプラズマ処理を施す場合においても安定にプラズマを生成して、良好なプラズマ処理を可能とするべく発明された実施形態であり、第1筒状部2に対して、直交して貫通するように一体に形成された少なくとも1つの第2筒状部8を備えている。また、プラズマ生成用ガス導入部4から第1筒状部2の内部にプラズマ生成用ガスを導入するとともに、リング状電極3に対して長手方向に電位差を設けるように電圧を印加することにより、第1筒状部2の内部において生成されたプラズマが第2筒状部8の内部に導入されるようにされている。
本発明の第4実施形態におけるプラズマ処理装置1を用いて、長尺状の被処理物Wに対してプラズマ処理を施すとともに、表面処理剤を塗布し、プラズマ処理による表面処理剤の耐摩耗効果の検討を行った。
2 第1筒状部
2a 単位筒
3 リング状電極
4 プラズマ生成用ガス導入部
5 ガイド部
5a ガイド部材
5b 同心円
5c 支持孔
5d 貫通孔
6 絶縁管
7 導電材料
8 第2筒状部
9 連結部材
9a,9b、9c、9d 開口部
10a 上側電極
10b 下側電極
11 絶縁板
12 スペーサー
12a 間隙
13 プラズマ生成用ガス導入口
15 ガイド部材
15a 保持部
W 長尺状の被処理物
P 電源
Claims (1)
- 対向して配置され、平面視において互いが重なり合う範囲の中心付近の密度が最も高く、外周方向に向かって徐々に密度が低くなるような密度分布とされたプラズマを発生させる平板状の上側電極および下側電極と、
前記上側電極と前記下側電極との間における前記上側電極の下面において、少なくとも前記上側電極の下面全面を覆うように配置された絶縁板と、
長尺状の被処理物の搬送方向と平行に配置され、前記絶縁板と前記下側電極との間に所定の間隙を形成した状態で前記下側電極上に前記絶縁板を支持する一対のスペーサーと、
前記間隙における前記プラズマの密度の高い領域であって、長尺状の被処理物の搬送方向における少なくとも中央部に設けられ、前記間隙において長尺状の被処理物をプラズマ密度が高い領域を進むようにガイドするガイド部とを備え、
前記上側電極と前記下側電極が対向する位置において、前記絶縁板および前記下側電極の前記間隙側の内面の少なくとも一方には、プラズマ生成用ガスを前記間隙に導入するためのプラズマ生成用ガス導入口が開口しており、
前記ガイド部は、長尺状の被処理物の搬送経路を形成する1つまたは複数の保持部を有し、
搬送される前記長尺状の被処理物に対して搬送方向軸回りのひねりを加えるように前記長尺状の被処理物を回転させる回転装置を備えることを特徴とするプラズマ処理装置。
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