JP6071612B2 - 液状樹脂組成物、フリップチップ実装体およびその製造方法 - Google Patents
液状樹脂組成物、フリップチップ実装体およびその製造方法 Download PDFInfo
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- JP6071612B2 JP6071612B2 JP2013026998A JP2013026998A JP6071612B2 JP 6071612 B2 JP6071612 B2 JP 6071612B2 JP 2013026998 A JP2013026998 A JP 2013026998A JP 2013026998 A JP2013026998 A JP 2013026998A JP 6071612 B2 JP6071612 B2 JP 6071612B2
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L33/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
- C08L33/04—Homopolymers or copolymers of esters
- C08L33/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, which oxygen atoms are present only as part of the carboxyl radical
- C08L33/08—Homopolymers or copolymers of acrylic acid esters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
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Description
〔1〕(A)エポキシ樹脂、(B)硬化剤、および(C)ジメチルアミノプロピルアクリルアミドとアクリル酸ブチルの共重合体を含むことを特徴とする、液状樹脂組成物。
〔2〕(B)成分が、フェノール系硬化剤、アミン系硬化剤、酸無水物系硬化剤およびイミダゾール系硬化剤からなる群より選択される少なくとも1種である、上記〔1〕記載の液状樹脂組成物。
〔3〕(C)成分が、液状樹脂組成物100質量部に対して、0.02〜2.5質量部である、上記〔1〕または〔2〕記載の液状樹脂組成物。
〔4〕(B)成分がフェノール系硬化剤を含有し、含有されるフェノール系硬化剤が、液状樹脂組成物100質量部に対して、1〜50質量部である、上記〔2〕記載の液状樹脂組成物。
〔5〕上記〔1〕〜〔4〕のいずれか記載の液状樹脂組成物を含む、半導体用封止材。
〔6〕上記〔5〕記載の半導体用封止材を用いる、画像素子用封止材。
〔7〕上記〔1〕〜〔4〕のいずれか記載の液状樹脂組成物の硬化物を有する、フリップチップ実装体。
〔8〕上記〔5〕記載の半導体用封止材を用いて封止する、フリップチップ実装体の製造方法。
表1、2に示す配合で、液状樹脂組成物を調整した。
鏡面研磨したSi基板に、O2プラズマ処理(400W、5分間)を行い、その後、デシケーター中で2〜24時間放置した。このO2プラズマ処理を行ったSi基板上に、シリンジに充填された液状樹脂組成物を、23Gのニードルにて0.25mg吐出してポッティングし、120℃で30分間硬化させた。硬化後、光学顕学顕微鏡を用いて、ブリードの長さを測定した。結果を表1、2に示す。
実施例1〜12、比較例1、5、6で得られた5gの封止用液状樹脂組成物の初期粘度を、Brookfield社製粘度計(型番:DV−1)を用い、25℃で測定した。室温で24時間保持後の5gの封止用液状樹脂組成物の25℃での粘度変化を同じ粘度計で測定した。(24時間保持後の粘度)/(初期粘度)が2倍未満を○、2〜5倍を△、5倍を超えたときを×とした。結果を表1、2に示す。
2、12、22 基板
3、13、23 半導体チップ
31、131、231 パッド
4、14、24 マイクロレンズ
5 ホルダー
6 ホルダー接着剤
7 IRフィルター
8 レンズ
9 レンズバレル
10、11、21 半導体用封止剤
111 ブリード
20、30 ディスペンサー
Claims (8)
- (A)エポキシ樹脂、
(B)硬化剤、および
(C)ジメチルアミノプロピルアクリルアミドとアクリル酸ブチルの共重合体を含み、
(A)成分の含有量が、液状樹脂組成物100質量部に対して、15〜55質量部であり、
(C)成分の含有量が、液状樹脂組成物100質量部に対して、0.001〜2.5質量部であることを特徴とする、液状樹脂組成物。 - (B)成分が、フェノール系硬化剤、アミン系硬化剤、酸無水物系硬化剤およびイミダゾール系硬化剤からなる群より選択される少なくとも1種である、請求項1記載の液状樹脂組成物。
- (C)成分の含有量が、液状樹脂組成物100質量部に対して、0.02〜2.5質量部である、請求項1または2記載の液状樹脂組成物。
- (B)成分がフェノール系硬化剤を含有し、含有されるフェノール系硬化剤の含有量が、液状樹脂組成物100質量部に対して、1〜50質量部である、請求項2記載の液状樹脂組成物。
- 請求項1〜4のいずれか1項記載の液状樹脂組成物を含む、半導体用封止材。
- 請求項5記載の半導体用封止材を用いる、画像素子用封止材。
- 請求項1〜4のいずれか1項記載の液状樹脂組成物の硬化物を有する、フリップチップ実装体。
- 請求項5記載の半導体用封止材を用いて封止する、フリップチップ実装体の製造方法。
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