JP6048794B2 - ノズルプレート、ノズルプレートの製造方法、インクジェットヘッド及びインクジェット印刷装置 - Google Patents
ノズルプレート、ノズルプレートの製造方法、インクジェットヘッド及びインクジェット印刷装置 Download PDFInfo
- Publication number
- JP6048794B2 JP6048794B2 JP2012170502A JP2012170502A JP6048794B2 JP 6048794 B2 JP6048794 B2 JP 6048794B2 JP 2012170502 A JP2012170502 A JP 2012170502A JP 2012170502 A JP2012170502 A JP 2012170502A JP 6048794 B2 JP6048794 B2 JP 6048794B2
- Authority
- JP
- Japan
- Prior art keywords
- nozzle plate
- discharge port
- nozzle
- opening area
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/1433—Structure of nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
- B23P15/16—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass plates with holes of very small diameter, e.g. for spinning or burner nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Coating Apparatus (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Nozzles (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012170502A JP6048794B2 (ja) | 2012-07-31 | 2012-07-31 | ノズルプレート、ノズルプレートの製造方法、インクジェットヘッド及びインクジェット印刷装置 |
| CN201380040170.6A CN104507686B (zh) | 2012-07-31 | 2013-07-19 | 喷嘴板、喷嘴板制造方法、喷墨头和喷墨打印装置 |
| IN2996KON2014 IN2014KN02996A (cg-RX-API-DMAC7.html) | 2012-07-31 | 2013-07-19 | |
| PCT/JP2013/070255 WO2014021200A1 (en) | 2012-07-31 | 2013-07-19 | Nozzle plate, method of manufacturing nozzle plate, inkjet head, and inkjet printing apparatus |
| EP13825001.4A EP2879879B1 (en) | 2012-07-31 | 2013-07-19 | Nozzle plate, method of manufacturing nozzle plate, inkjet head, and inkjet printing apparatus |
| KR1020157002266A KR101690893B1 (ko) | 2012-07-31 | 2013-07-19 | 노즐 플레이트, 노즐 플레이트의 제조 방법, 잉크젯 헤드, 및 잉크젯 인쇄 장치 |
| US14/412,827 US9481173B2 (en) | 2012-07-31 | 2013-07-19 | Nozzle plate, method of manufacturing nozzle plate, inkjet head, and inkjet printing apparatus |
| TW102126682A TWI592312B (zh) | 2012-07-31 | 2013-07-25 | 噴嘴板、噴嘴板製造方法、噴墨頭、以及噴墨列印裝置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012170502A JP6048794B2 (ja) | 2012-07-31 | 2012-07-31 | ノズルプレート、ノズルプレートの製造方法、インクジェットヘッド及びインクジェット印刷装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014028351A JP2014028351A (ja) | 2014-02-13 |
| JP6048794B2 true JP6048794B2 (ja) | 2016-12-21 |
Family
ID=50027878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012170502A Active JP6048794B2 (ja) | 2012-07-31 | 2012-07-31 | ノズルプレート、ノズルプレートの製造方法、インクジェットヘッド及びインクジェット印刷装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9481173B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2879879B1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6048794B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR101690893B1 (cg-RX-API-DMAC7.html) |
| CN (1) | CN104507686B (cg-RX-API-DMAC7.html) |
| IN (1) | IN2014KN02996A (cg-RX-API-DMAC7.html) |
| TW (1) | TWI592312B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2014021200A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017527978A (ja) * | 2014-06-25 | 2017-09-21 | インテル・コーポレーション | 集積型パッシブデバイスを形成するための技術 |
| EP3000602B1 (en) * | 2014-09-26 | 2020-07-22 | Agfa Nv | High viscosity jetting method |
| JP6575102B2 (ja) | 2015-03-27 | 2019-09-18 | 株式会社リコー | 液滴吐出装置 |
| CH711295B1 (fr) * | 2015-07-06 | 2019-11-29 | Cartier Int Ag | Procédé de fixation par assemblage anodique. |
| EP3125296B1 (en) | 2015-07-30 | 2020-06-10 | Ricoh Company, Ltd. | Field-effect transistor, display element, image display device, and system |
| JP6607013B2 (ja) | 2015-12-08 | 2019-11-20 | 株式会社リコー | 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム |
| US10600916B2 (en) | 2015-12-08 | 2020-03-24 | Ricoh Company, Ltd. | Field-effect transistor, display element, image display device, and system |
| JP6701835B2 (ja) | 2016-03-11 | 2020-05-27 | 株式会社リコー | 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム |
| CN105750848B (zh) * | 2016-05-18 | 2017-10-17 | 昆山精诚得精密五金模具有限公司 | 相贯面带微细孔的金属喷嘴套的加工方法 |
| EP3962746B1 (en) | 2019-05-02 | 2025-01-15 | The Board Of Trustees Of The University Of Illinois | Atomic-to-nanoscale matter emission/flow regulation devices and methods |
| KR102474000B1 (ko) * | 2022-03-07 | 2022-12-05 | 주식회사피에스디이 | 나노 임프린팅을 위한 디스펜서 및 그 제조 방법 |
| JP2023167238A (ja) * | 2022-05-11 | 2023-11-24 | 日本発條株式会社 | マルチノズルと、マルチノズルを用いた流動体の塗布方法 |
| KR20240017222A (ko) * | 2022-07-28 | 2024-02-07 | 삼성디스플레이 주식회사 | 잉크젯 헤드 및 이를 포함하는 잉크젯 프린팅 장치 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1019084B (zh) * | 1989-09-18 | 1992-11-18 | 佳能公司 | 喷墨记录头、喷墨盒和喷墨装置 |
| EP0495663B1 (en) * | 1991-01-18 | 1997-04-23 | Canon Kabushiki Kaisha | Liquid jet unit with orifices and recording apparatus using the same |
| JP3192720B2 (ja) * | 1991-01-18 | 2001-07-30 | キヤノン株式会社 | 複数吐出部を備えた液体噴射器およびこれを用いた記録装置 |
| JPH05177834A (ja) * | 1991-06-04 | 1993-07-20 | Seiko Epson Corp | インクジェット記録ヘッド |
| US6527369B1 (en) * | 1995-10-25 | 2003-03-04 | Hewlett-Packard Company | Asymmetric printhead orifice |
| JP3738790B2 (ja) | 1996-07-26 | 2006-01-25 | セイコーエプソン株式会社 | インクジェット記録ヘッドの構成部材の開口穿孔方法 |
| JP4352589B2 (ja) * | 2000-06-20 | 2009-10-28 | コニカミノルタホールディングス株式会社 | 剪断モード型インクジェットヘッドの作製方法 |
| SE0003799D0 (sv) * | 2000-10-20 | 2000-10-20 | Aamic Ab | Method of makin gholes and structures comprising such holes |
| DE60331453D1 (de) * | 2002-09-24 | 2010-04-08 | Konica Minolta Holdings Inc | Kopfs mit elektrostatischer anziehung, verfahren zur herstellung einer düsenplatte |
| JP4218949B2 (ja) | 2002-09-24 | 2009-02-04 | コニカミノルタホールディングス株式会社 | 静電吸引型液体吐出ヘッドの製造方法、ノズルプレートの製造方法、静電吸引型液体吐出ヘッドの駆動方法及び静電吸引型液体吐出装置 |
| JP3680855B2 (ja) | 2003-03-31 | 2005-08-10 | 財団法人北九州産業学術推進機構 | 静電誘引式液滴ノズルおよびその製造方法 |
| JP3892423B2 (ja) | 2003-08-29 | 2007-03-14 | シャープ株式会社 | ノズルプレートおよびその製造方法 |
| CN100526080C (zh) * | 2004-07-15 | 2009-08-12 | 株式会社理光 | 液体喷头及其制造方法、图像形成装置 |
| JP2007090862A (ja) * | 2005-08-29 | 2007-04-12 | Fujifilm Corp | ノズル板の製造方法、液体吐出ヘッドの製造方法、および、ノズル板製造用の母型構造 |
| JP2007098888A (ja) * | 2005-10-07 | 2007-04-19 | Seiko Epson Corp | ノズル基板の製造方法、液滴吐出ヘッドの製造方法及び液滴吐出装置の製造方法 |
| JP2007335460A (ja) * | 2006-06-12 | 2007-12-27 | Canon Inc | デバイスパターン形成方法、デバイスパターン、およびデバイスパターン形成装置 |
| WO2008090794A1 (ja) * | 2007-01-23 | 2008-07-31 | Konica Minolta Holdings, Inc. | 液体吐出ヘッド用ノズルプレート及び液体吐出ヘッド用ノズルプレートの製造方法 |
| JP4916008B2 (ja) * | 2007-03-09 | 2012-04-11 | 株式会社ミマキエンジニアリング | 三次元プリンタ |
| JP2009125968A (ja) * | 2007-11-20 | 2009-06-11 | Seiko Epson Corp | ノズル基板の製造方法、および液体噴射装置 |
| KR20110081888A (ko) * | 2008-10-31 | 2011-07-14 | 후지필름 디마틱스, 인크. | 노즐 유출구 형상화 |
| US20100187667A1 (en) * | 2009-01-28 | 2010-07-29 | Fujifilm Dimatix, Inc. | Bonded Microelectromechanical Assemblies |
| JP2010214923A (ja) * | 2009-03-19 | 2010-09-30 | Seiko Epson Corp | ノズル基板の製造方法、その製造方法で製造されたノズル基板、液滴吐出ヘッドの製造方法、その製造方法で製造された液滴吐出ヘッド及び液滴吐出装置 |
| US8205338B2 (en) * | 2009-08-20 | 2012-06-26 | Eastman Kodak Company | Method of making a multi-lobed nozzle |
-
2012
- 2012-07-31 JP JP2012170502A patent/JP6048794B2/ja active Active
-
2013
- 2013-07-19 WO PCT/JP2013/070255 patent/WO2014021200A1/en not_active Ceased
- 2013-07-19 IN IN2996KON2014 patent/IN2014KN02996A/en unknown
- 2013-07-19 EP EP13825001.4A patent/EP2879879B1/en active Active
- 2013-07-19 KR KR1020157002266A patent/KR101690893B1/ko not_active Expired - Fee Related
- 2013-07-19 CN CN201380040170.6A patent/CN104507686B/zh active Active
- 2013-07-19 US US14/412,827 patent/US9481173B2/en active Active
- 2013-07-25 TW TW102126682A patent/TWI592312B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| EP2879879A1 (en) | 2015-06-10 |
| EP2879879B1 (en) | 2024-01-17 |
| TW201408498A (zh) | 2014-03-01 |
| CN104507686A (zh) | 2015-04-08 |
| US9481173B2 (en) | 2016-11-01 |
| TWI592312B (zh) | 2017-07-21 |
| WO2014021200A1 (en) | 2014-02-06 |
| KR20150033704A (ko) | 2015-04-01 |
| EP2879879A4 (en) | 2017-03-15 |
| IN2014KN02996A (cg-RX-API-DMAC7.html) | 2015-05-08 |
| KR101690893B1 (ko) | 2016-12-28 |
| US20150158300A1 (en) | 2015-06-11 |
| JP2014028351A (ja) | 2014-02-13 |
| CN104507686B (zh) | 2017-03-15 |
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