JP6039697B2 - 巨大磁気抵抗効果素子およびそれを用いた電流センサ - Google Patents
巨大磁気抵抗効果素子およびそれを用いた電流センサ Download PDFInfo
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- JP6039697B2 JP6039697B2 JP2014559603A JP2014559603A JP6039697B2 JP 6039697 B2 JP6039697 B2 JP 6039697B2 JP 2014559603 A JP2014559603 A JP 2014559603A JP 2014559603 A JP2014559603 A JP 2014559603A JP 6039697 B2 JP6039697 B2 JP 6039697B2
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- Prior art keywords
- magnetic layer
- layer
- alloy
- gmr element
- current sensor
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
- G01R15/20—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices
- G01R15/205—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices using magneto-resistance devices, e.g. field plates
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
- H10N50/85—Magnetic active materials
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Hall/Mr Elements (AREA)
- Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
- Thin Magnetic Films (AREA)
- Measuring Magnetic Variables (AREA)
Description
図7は、変形例に係る電流センサの説明図である。本実施形態の電流センサ10は、図2に示すように、磁気比例式電流センサであるとしたが、これに限定されるものではなく、磁気平衡式電流センサも可能である。
2a、2b 固定抵抗素子
3 下部ギャップ層
4 シード層
5 反強磁性層
6 固定磁性層
6a 第1固定磁性層
6b 非磁性中間層
6c 第2固定磁性層
7 スペーサ層
8 フリー磁性層
8a 第1フリー磁性層
8b 第2フリー磁性層
9 保護層
10 電流センサ
11 導体 12 フィードバックコイル
13 増幅器
15 フィードバックコイル回路
Claims (3)
- 磁化が固定されている固定磁性層と、
磁化が外部磁界によって変化するフリー磁性層と、
前記固定磁性層と前記フリー磁性層との間に位置するスペーサ層と、を有する巨大磁気抵抗効果素子であって、
前記フリー磁性層が、CoFe合金とアモルファス構造のCoFeB合金とが積層されてなり、
前記CoFe合金の膜厚が、2nm以上4nm以下で、且つ前記CoFeB合金の膜厚が、5nm以上14nm以下であることを特徴とする巨大磁気抵抗効果素子。 - 前記CoFe合金をCoXFe100−X合金、および前記CoFeB合金を(CoYFe100−Y)100−ZBZ合金とするとき、Xが80原子%≦X<100原子%、Yが80原子%≦Y<100原子%、およびZが10原子%≦Z≦30原子%であることを特徴とする請求項1に記載の巨大磁気抵抗効果素子。
- 請求項1または請求項2に記載の巨大磁気抵抗効果素子を用いたことを特徴とする電流センサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013019805 | 2013-02-04 | ||
JP2013019805 | 2013-02-04 | ||
PCT/JP2014/050150 WO2014119345A1 (ja) | 2013-02-04 | 2014-01-08 | 巨大磁気抵抗効果素子およびそれを用いた電流センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP6039697B2 true JP6039697B2 (ja) | 2016-12-07 |
JPWO2014119345A1 JPWO2014119345A1 (ja) | 2017-01-26 |
Family
ID=51262059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014559603A Active JP6039697B2 (ja) | 2013-02-04 | 2014-01-08 | 巨大磁気抵抗効果素子およびそれを用いた電流センサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US9523746B2 (ja) |
EP (1) | EP2953178B1 (ja) |
JP (1) | JP6039697B2 (ja) |
WO (1) | WO2014119345A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6199730B2 (ja) * | 2013-12-25 | 2017-09-20 | 株式会社東芝 | 電流センサ及び電流センサモジュール |
JP2017040509A (ja) * | 2015-08-18 | 2017-02-23 | アルプス電気株式会社 | 磁気センサおよび電流センサ |
JP6724459B2 (ja) * | 2016-03-23 | 2020-07-15 | Tdk株式会社 | 磁気センサ |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10284768A (ja) * | 1997-04-10 | 1998-10-23 | Alps Electric Co Ltd | 磁気抵抗効果素子 |
JP2001237472A (ja) * | 1999-06-17 | 2001-08-31 | Matsushita Electric Ind Co Ltd | 磁気抵抗効果素子および磁気抵抗効果記憶素子およびデジタル信号を記憶させる方法 |
JP2009283963A (ja) * | 2001-10-12 | 2009-12-03 | Sony Corp | 磁気抵抗効果素子、磁気メモリ素子、磁気メモリ装置 |
JP2010093117A (ja) * | 2008-10-09 | 2010-04-22 | Fujitsu Ltd | 磁気抵抗効果素子とその製造方法および情報記憶装置 |
JP2011159973A (ja) * | 2010-02-01 | 2011-08-18 | Headway Technologies Inc | 磁気抵抗効果素子およびその形成方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59117915U (ja) | 1983-01-29 | 1984-08-09 | トヨタ自動車株式会社 | 自動車のステアリングセンサ |
US6937448B2 (en) | 2002-11-13 | 2005-08-30 | Hitachi Global Storage Technologies Netherlands, B.V. | Spin valve having copper oxide spacer layer with specified coupling field strength between multi-layer free and pinned layer structures |
US7149105B2 (en) * | 2004-02-24 | 2006-12-12 | Infineon Technologies Ag | Magnetic tunnel junctions for MRAM devices |
US7431961B2 (en) | 2004-12-10 | 2008-10-07 | Headway Technologies, Inc. | Composite free layer for CIP GMR device |
EP1772737A3 (de) | 2005-10-08 | 2008-02-20 | Melexis Technologies SA | Baugruppe zur Strommessung |
US20080246104A1 (en) * | 2007-02-12 | 2008-10-09 | Yadav Technology | High Capacity Low Cost Multi-State Magnetic Memory |
JP2008078378A (ja) | 2006-09-21 | 2008-04-03 | Alps Electric Co Ltd | トンネル型磁気検出素子及びその製造方法 |
US9040178B2 (en) * | 2008-09-22 | 2015-05-26 | Headway Technologies, Inc. | TMR device with novel free layer structure |
JP2010097981A (ja) | 2008-10-14 | 2010-04-30 | Fujitsu Ltd | トンネル磁気抵抗効果素子及び磁気記憶装置 |
US8379350B2 (en) * | 2010-06-30 | 2013-02-19 | Tdk Corporation | CPP-type magnetoresistive element including spacer layer |
US9028910B2 (en) * | 2010-12-10 | 2015-05-12 | Avalanche Technology, Inc. | MTJ manufacturing method utilizing in-situ annealing and etch back |
JP2012069958A (ja) * | 2011-10-14 | 2012-04-05 | Toshiba Corp | 磁気記録素子 |
US9252710B2 (en) * | 2012-11-27 | 2016-02-02 | Headway Technologies, Inc. | Free layer with out-of-plane anisotropy for magnetic device applications |
US9082872B2 (en) * | 2013-01-02 | 2015-07-14 | Headway Technologies, Inc. | Magnetic read head with MR enhancements |
-
2014
- 2014-01-08 JP JP2014559603A patent/JP6039697B2/ja active Active
- 2014-01-08 WO PCT/JP2014/050150 patent/WO2014119345A1/ja active Application Filing
- 2014-01-08 EP EP14746159.4A patent/EP2953178B1/en active Active
-
2015
- 2015-07-01 US US14/789,781 patent/US9523746B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10284768A (ja) * | 1997-04-10 | 1998-10-23 | Alps Electric Co Ltd | 磁気抵抗効果素子 |
JP2001237472A (ja) * | 1999-06-17 | 2001-08-31 | Matsushita Electric Ind Co Ltd | 磁気抵抗効果素子および磁気抵抗効果記憶素子およびデジタル信号を記憶させる方法 |
JP2009283963A (ja) * | 2001-10-12 | 2009-12-03 | Sony Corp | 磁気抵抗効果素子、磁気メモリ素子、磁気メモリ装置 |
JP2010093117A (ja) * | 2008-10-09 | 2010-04-22 | Fujitsu Ltd | 磁気抵抗効果素子とその製造方法および情報記憶装置 |
JP2011159973A (ja) * | 2010-02-01 | 2011-08-18 | Headway Technologies Inc | 磁気抵抗効果素子およびその形成方法 |
Also Published As
Publication number | Publication date |
---|---|
EP2953178A4 (en) | 2016-10-12 |
JPWO2014119345A1 (ja) | 2017-01-26 |
WO2014119345A1 (ja) | 2014-08-07 |
EP2953178A1 (en) | 2015-12-09 |
US9523746B2 (en) | 2016-12-20 |
EP2953178B1 (en) | 2017-11-22 |
US20150377985A1 (en) | 2015-12-31 |
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