JP6037113B2 - A surface-coated cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed intermittent cutting - Google Patents

Description

  The present invention is a surface-coated cutting tool that exhibits high chipping resistance with a hard coating layer in high-speed intermittent cutting with high heat generation of alloy steel and the like, and an impact load acting on the cutting edge (hereinafter referred to as “chip coating”). , Referred to as a coated tool).

Conventionally, generally composed of tungsten carbide (hereinafter referred to as WC) based cemented carbide, titanium carbonitride (hereinafter referred to as TiCN) based cermet or cubic boron nitride (hereinafter referred to as cBN) based ultra high pressure sintered body There is known a coated tool in which a Ti—Al based composite nitride layer is formed by physical vapor deposition on a surface of a formed substrate (hereinafter collectively referred to as a substrate) as a hard coating layer. It is known that it exhibits excellent wear resistance.
However, although the above-mentioned conventional coated tool formed by depositing a Ti-Al composite nitride layer has relatively high wear resistance, it tends to cause abnormal wear such as chipping when used under high-speed intermittent cutting conditions. Therefore, various proposals for improving the hard coating layer have been made.

For example, Patent Document 1 satisfies 0.35 ≦ X ≦ 0.60 (where X is an atomic ratio) when expressed on the surface of a substrate by a composition formula: (Ti _1-X Al _X ) N. A hard coating layer made of a composite nitride of Ti and Al is deposited by physical vapor deposition, and the hard coating layer is formed as an alternating laminated structure of the granular crystal structure and columnar crystal structure of the (Ti, Al) N layer. It has been proposed that it is constructed, and this makes it possible for the hard coating layer to exhibit excellent chipping resistance, chipping resistance, and peeling resistance in high-speed intermittent cutting of high-hardness steel.
However, since this coated tool deposits a hard coating layer by physical vapor deposition, the Al content ratio X cannot be increased to 0.6 or more, and it is desired to further improve the cutting performance.

From such a viewpoint, a technique for increasing the Al content ratio X to about 0.9 by forming a hard coating layer by chemical vapor deposition has also been proposed.
For example, Patent Document 2 discloses that the value of the Al content ratio X is 0.65 to 0.65 by performing chemical vapor deposition in a temperature range of 650 to 900 ° C. in a mixed reaction gas of TiCl ₄ , AlCl ₃ , and NH _3. Although it is described that a (Ti _1-X Al _X ) N layer of 0.95 can be formed by vapor deposition, in this document, an Al ₂ O ₃ layer is further formed on the (Ti _1-X Al _X ) N layer. Therefore, the cutting performance is improved by forming the (Ti _1-X Al _X ) N layer in which the value of X is increased from 0.65 to 0.95. There is no disclosure up to the point of how this will be affected.

Further, for example, in Patent Document 3, a TiCN layer and an Al ₂ O ₃ layer are used as an inner layer, and a cubic structure (Ti _1-X Al) including a cubic structure or a hexagonal structure is formed thereon by chemical vapor deposition. _X ) N layer (where X is 0.65 to 0.9) is coated as an outer layer, and compressive stress of 100 to 1100 MPa is applied to the outer layer, thereby improving the heat resistance and fatigue strength of the coated tool. It has been proposed.

JP2011-224715A Special table 2011-516722 gazette Special table 2011-513594 gazette

In recent years, there has been a strong demand for energy saving and energy saving in cutting, and along with this, cutting tends to be faster and more efficient, and the coated tool has even more chipping resistance, chipping resistance, Abnormal damage resistance such as peel resistance is required, and excellent wear resistance over long-term use is required.
However, in the coated tool described in Patent Document 1, a hard coating layer made of a (Ti _1-X Al _X ) N layer is deposited by physical vapor deposition to increase the Al content X in the hard coating layer. Therefore, for example, when it is subjected to high-speed intermittent cutting of alloy steel, it cannot be said that the chipping resistance is sufficient.
On the other hand, for the (Ti _1-X Al _X ) N layer formed by chemical vapor deposition described in Patent Document 2, the Al content X can be increased and a cubic structure can be formed. Therefore, although a hard coating layer having a predetermined hardness and excellent wear resistance can be obtained, the adhesion strength with the substrate is not sufficient, and the toughness is inferior.
Furthermore, although the coated tool described in Patent Document 3 has a predetermined hardness and excellent wear resistance, it is inferior in toughness, so when it is used for high-speed intermittent cutting of alloy steel, etc. In addition, abnormal damage such as chipping, chipping and peeling is likely to occur, and it cannot be said that satisfactory cutting performance is exhibited.
The present invention is a coating that has excellent toughness and excellent chipping resistance and wear resistance over a long period of use even when subjected to high-speed intermittent cutting such as high-speed intermittent cutting of alloy steel. The purpose is to provide a tool.

From the above viewpoint, the present inventors have at least a composite carbonitride of Ti and Al (hereinafter referred to as “(Ti, Al) (C, N)” or “(Ti _1-X Al _X ) (C _Y N ₁ ). As a result of earnest research to improve the chipping resistance and wear resistance of a coated tool formed by chemical vapor deposition of a hard coating layer including _-Y ))), the following findings Got.

Tungsten carbide-based cemented carbide (hereinafter referred to as “WC-based cemented carbide”), titanium carbonitride-based cermet (hereinafter referred to as “TiCN-based cermet”), or cubic boron nitride-based ultrahigh pressure sintered body (hereinafter referred to as “TiCN-based cemented carbide”) On the surface of the substrate composed of any one of “cBN-based ultra-high pressure sintered body”
For example, by a chemical vapor deposition method containing trimethylaluminum (Al (CH ₃ ) ₃ ) as a reaction gas component, as a composite carbonitride layer, from a mixed structure of a predetermined area ratio of a cubic crystal phase and a hexagonal crystal phase (Ti _1-X Al _X ) (C _Y N _1-Y ) layer can be formed by vapor deposition, and the hexagonal crystal phase of the composite carbonitride layer with respect to the normal direction of the substrate surface ( The inclination angle number distribution ratio of the normal line of the (0001) plane can be made 40% or more, whereby the composite carbonitride layer has improved toughness while maintaining high wear resistance, and can be used over a long period of use. They have found that they have excellent chipping resistance and wear resistance.

In addition, the present inventors, in the (Ti _1-X Al _X ) (C _Y N _1-Y ) layer composed of a mixed structure of the cubic crystal phase and the hexagonal crystal phase, By controlling the average grain width of each crystal phase obtained from the measured grain width and aspect ratio, the average aspect ratio to a predetermined numerical range, while maintaining the toughness of the composite carbonitride layer, It has been found that the wear resistance of the composite carbonitride layer can be improved.

Furthermore, the inventors of the present invention have included the Ti of (Ti _1-X Al _X ) (C _Y N _1-Y ) in the crystal having the cubic crystal structure of the cubic crystal phase of the composite carbonitride layer. There is a periodic concentration change of Al, and by periodically limiting the maximum and minimum values of X and the period to a predetermined numerical range, the hardness of the composite carbonitride layer is improved, and more It has been found that the wear resistance of the composite carbonitride layer can be further improved.

  Therefore, when the coated tool provided with the composite carbonitride layer as described above is used for, for example, high-speed intermittent cutting of alloy steel, the occurrence of chipping, chipping, peeling, etc. is suppressed, and long-term use It is possible to exhibit excellent wear resistance.

This invention was made based on the above research results,
“(1) Surface-coated cutting in which a hard coating layer is coated on the surface of a substrate composed of any of tungsten carbide-based cemented carbide, titanium carbonitride-based cermet, or cubic boron nitride-based ultrahigh-pressure sintered body A tool,
(A) the hard coating layer comprises at least a complex carbonitride layer of Ti and Al flat HitoshisoAtsu 1 to 20 [mu] m, the average composition,
_{Formula: (Ti 1-X Al X} ) (C Y N 1-Y)
In this case, the Al content ratio X and the C content ratio Y (where X and Y are atomic ratios) satisfy 0.60 ≦ X ≦ 0.95 and 0.0005 ≦ Y ≦ 0.005, respectively. Satisfied,
(B) When the composite carbonitride layer is analyzed from the longitudinal cross-sectional direction of the composite carbonitride layer of Ti and Al using an electron beam backscattering diffractometer, the crystal structure of each crystal grain is cubic. It consists of a mixed structure of a cubic crystal phase in which an electron beam backscatter diffraction image of the crystal lattice is observed and a hexagonal crystal phase in which an electron beam backscatter diffraction image of the hexagonal crystal lattice is observed, and the cubic crystal phase The area ratio of the hexagonal crystal phase to the total of the hexagonal crystal phase is 10 to 50 area%,
(C) measuring an inclination angle formed by a normal line of a (0001) plane which is a crystal plane of a crystal grain of a hexagonal crystal phase of the composite carbonitride layer with respect to a normal direction of the substrate surface; When the measured inclination angles within the range of 0 to 90 degrees with respect to the normal direction of the substrate surface are divided into pitches of 0.25 degrees and the frequencies existing in each section are tabulated, 2 to 12 degrees The maximum peak exists in the inclination angle section within the range of 2 to 12, and the sum of the frequencies existing in the inclination angle section of 2 to 12 degrees is 40% or more of the entire frequency in the inclination angle frequency distribution. Surface coated cutting tool.
(2) The average grain width ω _c of the cubic crystal phase grains of the composite carbonitride layer is 0.3 μm or less, the average aspect ratio α _c is less than 2,
In the above (1), the average grain width ω _h of the hexagonal crystal phase crystal grains of the composite carbonitride layer is 0.1 to 2 μm, and the average aspect ratio α _h is 2 or more. The surface-coated cutting tool described.
(3) The periodicity of Ti and Al in (Ti _1-X Al _X ) (C _Y N _1-Y ) in a crystal having a cubic crystal structure of cubic crystal phase of the composite carbonitride layer. There is a change in concentration, and the difference between the maximum value and the minimum value of X that changes periodically is 0.05 to 0.25, preferably 0.10 to 0.20, and the period is 3 to 30 nm. The surface-coated cutting tool according to (1) or (2), characterized in that
(4) the composite carbonitride layer is at least, the surface coating according to any one of, which comprises vapor deposited by chemical vapor deposition containing trimethyl aluminum as a reaction gas component from (1) (3) Cutting tool manufacturing method . "
It has the characteristics.
Note that the hard coating layer in the present invention has the above-described composite carbonitride layer as its essential structure, but is further improved by using it together with conventionally known lower layers and upper layers. New characteristics can be created.

  Next, the hard coating layer of the coated tool of the present invention will be described more specifically.

Average composition of Ti and Al composite carbonitride ((Ti _1-X Al _X ) (C _Y N _1-Y )) layer constituting the hard coating layer:
In the above (Ti _1-X Al _X ) (C _Y N _1-Y ) layer, when the Al content ratio X (atomic ratio) is less than 0.60, hexagonal crystals in the structure of the composite carbonitride layer Due to the decrease in the area ratio of the crystal phase, crater wear resistance is reduced, and abnormal damage such as chipping and defects is likely to occur. On the other hand, if the value of X (atomic ratio) exceeds 0.95, Due to the decrease in the Ti content ratio, the decrease in the area ratio of the cubic crystal phase in the structure of the composite carbonitride layer decreases the hardness and flank wear resistance, so X (atomic ratio) The value needs to be 0.60 or more and 0.95 or less.
Further, in the (Ti _1-X Al _X ) (C _Y N _1-Y ) layer, the C component improves the lubricity of the layer, while the N component has an effect of improving the high temperature strength of the layer. However, when the content ratio Y (atomic ratio) of the C component is less than 0.0005, high lubricity cannot be obtained. On the other hand, when the Y (atomic ratio) exceeds 0.005, the high-temperature strength decreases. Therefore, the value of Y (atomic ratio) was determined to be 0.0005 or more and 0.005 or less.
In addition, the (Ti _1-X Al _X ) (C _Y N _1-Y ) layer has an average layer thickness of less than 1 μm, and cannot sufficiently ensure wear resistance over a long period of use. On the other hand, when the average layer thickness exceeds 20 μm, it becomes easy to cause thermoplastic deformation by high-speed intermittent cutting with high heat generation, and this causes uneven wear. Therefore, the total average layer thickness is set to 1 to 20 μm. .

In the present invention, in the composite carbonitride layer composed of the (Ti _1-X Al _X ) (C _Y N _1-Y ) layer having the above average composition, a hexagonal crystal is used instead of a single phase structure throughout the layer. It forms as a mixed structure of crystal phase and cubic crystal phase.
That is, when the crystal structure of the composite carbonitride layer is analyzed using an electron backscattering diffractometer, the cubic crystal phase and hexagonal crystal in which the electron backscattering diffraction image of the cubic crystal lattice is observed. It consists of a mixed structure with the hexagonal crystal phase in which the electron backscatter diffraction image of the crystal lattice is observed, and the area ratio of the hexagonal crystal phase to the total of the cubic crystal phase and the hexagonal crystal phase is 10 to 10 50 area%.
In the composite carbonitride layer composed of the above mixed structure, when the area ratio of the hexagonal crystal phase exceeds 50 area%, the hardness decreases, and in particular, the flank wear resistance decreases.
On the other hand, when the area ratio of the hexagonal crystal phase is less than 10 area%, the crater wear resistance is lowered, and the cutting edge is liable to be damaged abnormally. As a result, the tool life is shortened.
Therefore, the area ratio of the hexagonal crystal phase in the composite carbonitride layer composed of the mixed structure of the cubic crystal phase and the hexagonal crystal phase is 10 to 50 area%.

  Further, in the present invention, in order to further enhance the crater wear resistance of the composite carbonitride layer, the field emission scanning electron microscope and the back of the electron beam are used for the crystal grains constituting the hexagonal crystal phase in the composite carbonitride layer. Using a scattering diffractometer, the inclination angle formed by the normal of the (0001) plane, which is the crystal plane of the crystal grain of the hexagonal crystal phase, with respect to the normal direction of the substrate surface is measured. When the measurement inclination angle within the range of 0 to 90 degrees with respect to the normal direction is divided into pitches of 0.25 degrees and the frequencies existing in each section are tabulated, the range of 2 to 12 degrees is included. It is necessary that the highest peak exists in the inclination angle section, and the total of the frequencies existing in the inclination angle section of 2 to 12 degrees occupies 40% or more of the entire frequencies in the inclination angle distribution.

  In addition, the frequency existing in the tilt angle section with the tilt angle of 2 to 12 degrees formed by the normal line of the (0001) plane which is the crystal plane of the crystal grains of the hexagonal crystal phase with respect to the normal direction of the substrate surface is tilted. When the angle distribution is less than 40% of the entire frequency, excellent crater wear resistance cannot be expected. Therefore, the frequency ratio existing in the inclination angle section of 2 to 12 degrees needs to be 40% or more. It is.

  Further, in the present invention, it is preferable that the average grain width and the average aspect ratio are determined within a predetermined numerical range for each crystal grain constituting the cubic crystal phase and the hexagonal crystal phase in the composite carbonitride layer. Thus, it is possible to expect further improvement in hardness and crater wear resistance of the composite carbonitride layer.

Further, in the present invention, the Ti and Al of (Ti _1-X Al _X ) (C _Y N _1-Y ) are contained in a crystal having a cubic crystal structure of the cubic crystal phase of the composite carbonitride layer. It is preferable that the periodic maximum concentration and minimum value and the period of X change periodically, and the period be set to a predetermined numerical range, thereby further improving the hardness of the composite carbonitride layer. And improvement of flank wear resistance can be expected.

Specifically, it is as follows.
First, the crystal grains constituting the cubic crystal phase in the composite carbonitride layer will be described.
The particle width of the substrate surface in a direction parallel to the grain W _c, also the crystal grains of the grain length in the direction perpendicular to the substrate surface and L _c, the ratio between the W _c and L _c L _c / the W _c and the aspect ratio a _c of the crystal grains, further, the average value of the individual average aspect ratio the mean value of the aspect ratio a _c determined for grains alpha _c, the particle width W _c obtained for each grain Is the average grain width ω _c , the average aspect ratio α _c is less than 2 and the average grain width ω _c is 0.3 μm or less, so that the cubic crystal phase has a higher hardness. it can.
Next, the crystal grains constituting the hexagonal crystal phase in the composite carbonitride layer will be described.
As in the case of the crystal grains constituting the cubic crystal phase, for each crystal grain of the hexagonal crystal phase in the composite carbonitride layer, the grain width in the direction parallel to the substrate surface is set to W _h , and L _h perpendicular direction of the particle length to the surface, the ratio L _{h /} W _h of the W _h and L _h is the aspect ratio a _h of each crystal grain, further, the aspect ratio determined for individual grain When the average value of A _h is the average aspect ratio α _h and the average value of the particle width W _h obtained for each crystal grain is the average particle width ω _h , the average aspect ratio α _h is 2 or more, and the average particle width By setting ω _h to 0.1 to 2 μm, the crater wear resistance of the hexagonal crystal phase can be improved.
Therefore, in the present invention, the average aspect ratio α _c of the crystal grains constituting the cubic crystal phase in the composite carbonitride layer is less than 2, the average grain width ω _c is 0.3 μm or less, and the hexagonal crystal The average aspect ratio α _h of the crystal grains constituting the crystal phase is preferably 2 or more, and the average particle width ω _h is preferably 0.1 to 2 μm, thereby improving the hardness of the composite carbonitride layer And crater wear resistance can be improved.

Further, when a crystal having a cubic structure is expressed by a composition formula: (Ti _1-x Al _x ) (C _y N _1-y ), when there is a periodic concentration change of Ti and Al, Distortion occurs and hardness is improved. However, if the difference between the maximum value and the minimum value of X in the composition formula, which is an index of the change in the concentration of Ti and Al, is smaller than 0.05, the distortion of the crystal grains described above is small and sufficient hardness is improved. I can't expect. On the other hand, if the difference between the maximum value and the minimum value of X exceeds 0.25, the distortion of crystal grains becomes too large, lattice defects become large, and the hardness decreases. Further, if the period of concentration change is less than 3 nm, the toughness decreases, and if it exceeds 30 nm, the effect of improving hardness cannot be expected. Therefore, the change in the concentration of Ti and Al present in the crystal having a cubic structure is 0.05 to 0.25, preferably 0.10 to 0, in which the difference between the maximum value and the minimum value of X that changes periodically is 0.05 to 0.25. 20 and the period is preferably 3 to 30 nm, and this can improve the hardness and flank wear resistance of the composite carbonitride layer.

The (Ti _1-X Al _X ) (C _Y N _1-Y ) layer of the present invention can be deposited by, for example, chemical vapor deposition under the following conditions.
Reaction gas composition (volume%):
TiCl ₄ 2.0-3.0%, Al (CH ₃ ) ₃ 3.0-5.0%,
_{AlCl 3 3.0~5.0%, NH 3 2.0~5.0} %,
_{N 2 6.0~10.0%, C 2 H} 4 0~1.0%,
Remaining H ₂ ,
Reaction atmosphere temperature: 700 to 900 ° C.
Reaction atmosphere pressure: 2 to 5 kPa,
By chemical vapor deposition under the above conditions, the average composition satisfies 0.60 ≦ X ≦ 0.95 and 0.0005 ≦ Y ≦ 0.005 (where X and Y are atomic ratios),
_{Formula: (Ti 1-X Al X} ) (C Y N 1-Y)
A composite carbonitride layer of Ti and Al represented by is formed by vapor deposition.
In addition, the area ratio of the cubic crystal phase and the hexagonal crystal phase in the composite carbonitride layer is particularly affected by the content of NH ₃ , for example, other conditions are constant (reaction gas composition (volume%): TiCl ₄ 3.0%, Al (CH ₃ ) ₃ 4.0%, AlCl ₃ 5.0%, N ₂ 8.0%, C ₂ H ₄ 1%, remaining H ₂ , reaction atmosphere temperature: 900 ° C. When the reaction atmosphere pressure is 4 kPa) and only the NH ₃ content is changed, when the NH ₃ content is 2.0% of the lower limit, the area ratio of the hexagonal crystal phase is 33%, When the upper limit is 5.0%, the area ratio of the hexagonal crystal phase is 10%.

Further, during the film forming step, the reaction was temporarily stopped, and TiCl ₄ : 2.0 to 5.0%, H ₂ : remaining, reaction atmosphere pressure: 3.0 kPa, reaction atmosphere temperature: 800 to 900 ° C. By sandwiching a TiCl ₄ etching step consisting of conditions for a predetermined number of times, (Ti _1-X Al _X ) (C _Y N ₁ ) in the crystal having a cubic crystal structure of the cubic crystal phase of the composite carbonitride layer. A composite carbonitride layer of Ti and Al in which a periodic concentration change of Ti and Al of _-Y ) is present is formed by vapor deposition.
By sandwiching the TiCl ₄ etching process as described above in the film forming process, the cubic TiAlCN is selectively etched, and a local compositional difference between Ti and Al is formed in the crystal grains, which is stabilized. Therefore, it was found that the rearrangement of atoms occurred and the composition changed periodically, and as a result, the hardness was improved.

The composite carbonitride layer formed by the above chemical vapor deposition method analyzes the crystal structure of each crystal grain from the longitudinal cross-sectional direction of the above composite carbonitride layer of Ti and Al using an electron beam backscattering diffractometer. A cubic crystal phase in which the electron beam backscatter diffraction image of the cubic crystal lattice is observed and a hexagonal crystal phase in which the electron beam backscatter diffraction image of the hexagonal crystal lattice is observed, and In the measurement region in the longitudinal section direction of the composite carbonitride layer, the area ratio of the hexagonal crystal phase to the total of the cubic crystal phase and the hexagonal crystal phase in which the electron backscatter diffraction image was observed is 10 to 10. 50 area%.
Further, the inclination angle formed by the normal line of the (0001) plane which is the crystal plane of the hexagonal crystal phase in the mixed structure is measured, and the measured inclination angle with respect to the normal direction of the substrate surface. When the measured inclination angle within the range of 0 to 90 degrees is divided into pitches of 0.25 degrees and the frequencies existing in each division are tabulated, the highest peak in the inclination angle classification within the range of 2 to 12 degrees , And the sum of the frequencies existing in the tilt angle section of 2 to 12 degrees forms a tilt angle number distribution form that is 40% or more of the entire frequencies in the tilt angle frequency distribution.

Moreover, in the chemical vapor deposition conditions, by performing vapor deposition with further limited vapor deposition conditions, the average aspect ratio α _c of the crystal grains constituting the cubic crystal phase in the composite carbonitride layer is less than 2, and the average particles Cubic crystals having a width ω _c of 0.3 μm or less, a crystal grain constituting the hexagonal crystal phase having an average aspect ratio α _h of 2 or more, and an average grain width ω _h of 0.1 to 2 μm A mixed structure of phase and hexagonal crystal phase is formed.
Here, the more limited deposition conditions are, for example, as follows.
Reaction gas composition (volume%):
TiCl ₄ 2.0-2.5%, Al (CH ₃ ) ₃ 3.0-4.0%,
_{AlCl 3 3.0~4.0%, NH 3 2.0~5.0} %,
N ₂ 6.0-10.0%, C ₂ H ₄ 0-1.0%, remaining H ₂ ,
Reaction atmosphere temperature: 800-900 ° C
Reaction atmosphere pressure: 2-3 kPa,

The coated tool of the present invention includes a hexagonal crystal phase of 10 to 50 area% as a composite carbonitride layer, for example, by chemical vapor deposition containing trimethylaluminum (Al (CH ₃ ) ₃ ) as a reaction gas component. A (Ti _1-X Al _X ) (C _Y N _1-Y ) layer composed of a mixed structure of a cubic crystal phase and a hexagonal crystal phase is formed to cover the hexagonal crystal in the composite carbonitride layer. When the inclination angle formed by the normal of the (0001) plane, which is the crystal plane of the phase crystal grain, is measured, the highest peak exists in the inclination angle section within the range of 2 to 12 degrees with respect to the normal direction of the substrate surface. In addition, since the sum of the frequencies existing in the tilt angle section of 2 to 12 degrees shows a tilt angle number distribution form that occupies 40% or more of the entire frequency in the tilt angle frequency distribution, the composite carbonitride layer Improves toughness while maintaining high wear resistance As a result, even when using a high-speed intermittent cutting work of high-speed interrupted cutting, etc. of alloy steel, over a long period of use, excellent chipping resistance is to exert wear resistance.

Furthermore, in the present invention, a (Ti _1-X Al _X ) (C _Y N _1-Y ) layer composed of a mixed structure of a cubic crystal phase and a hexagonal crystal phase is performed by performing the above deposition under more limited conditions. However, when the average grain width and average aspect ratio of the crystal grains of each crystal phase are set within a predetermined numerical range, the composite carbonitride layer is further improved in durability while maintaining the toughness of the composite carbonitride layer. Abrasion can be improved.
Furthermore, in the present invention, in the vapor deposition step, the reaction is temporarily stopped, and the TiCl ₄ etching step is sandwiched a predetermined number of times, whereby a crystal having a cubic crystal structure of cubic crystal phases of the composite carbonitride layer is obtained. (Ti _1-X Al _X ) (C _Y N _1-Y ) have a periodic concentration change of Ti and Al, and the cyclically changing local maximum and minimum values of X and the period are set to a predetermined value. When the value is set within the numerical range, it is possible to further improve the hardness and flank wear resistance of the composite carbonitride layer.

The schematic explanatory drawing of the composite carbonitride layer longitudinal cross-section of this invention coated tool is shown.

  Next, the coated tool of the present invention will be specifically described with reference to examples.

As raw material powders, WC powder, TiC powder, ZrC powder, TaC powder, NbC powder, Cr ₃ C ₂ powder, and Co powder all having an average particle diameter of 1 to 3 μm were prepared. Then, after adding wax, ball mill mixing in acetone for 24 hours, drying under reduced pressure, press-molding into a green compact of a predetermined shape at a pressure of 98 MPa. Substrate A made of WC-based cemented carbide having an insert shape defined in ISO / SEEN1203AFSN after vacuum sintering under vacuum at a predetermined temperature in the range of 1370 to 1470 ° C. for 1 hour. ~ D were produced respectively.

In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo ₂ C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after sintering, a substrate made of TiCN-based cermet having an ISO standard / SEEN1203AFSN insert shape a -D were produced.

Next, on the surfaces of these tool bases A to D and tool bases a to d, an ordinary chemical vapor deposition apparatus is used, and under the conditions shown in Tables 3 and 4, the (Ti _1-X Al _X ) of the present invention is used. The present invention coated tools 1 to 15 shown in Tables 6 and 7 were manufactured by vapor-depositing a (C _Y N _1-Y ) layer with a target layer thickness.
In addition, about this invention coated tools 6-13, the lower layer and / or the upper layer were formed on the formation conditions shown in Table 3.

Further, for the purpose of comparison, an ordinary chemical vapor deposition apparatus was similarly used on the surfaces of the tool bases A to D and the tool bases a to d, and the conditions of the comparative examples (Ti _1-x Comparative example coated tools 1 to 13 shown in Tables 6 and 8 were manufactured by vapor-depositing Al _x ) (C _y N _1-y ) with a target layer thickness.
In addition, similarly to this invention coated tool 6-13, about the comparative coated tool 6-13, the lower layer and / or the upper layer were formed on the formation conditions shown in Table 3.

For reference, the surface of the tool substrate D and tool substrate c, using conventional physical vapor deposition apparatus, by arc ion _{plating, (Ti 1-X Al X} ) of Reference Example (C _{Y N 1-Y)} layer Were formed by vapor deposition with a target layer thickness, to produce reference example coated tools 14 and 15 shown in Tables 6 and 8.
The conditions for arc ion plating are as follows.
(A) The tool bases A and a are ultrasonically cleaned in acetone and dried, and in the outer peripheral portion at a predetermined distance in the radial direction from the central axis on the rotary table in the arc ion plating apparatus. Along with this, an Al-Ti alloy having a predetermined composition is arranged as a cathode electrode (evaporation source),
(B) First, the inside of the apparatus is evacuated and kept at a vacuum of 10 ⁻² Pa or less, the inside of the apparatus is heated to 500 ° C. with a heater, and then the tool base that rotates while rotating on the rotary table is −1000 V. A DC bias voltage is applied, and a current of 200 A is passed between a cathode electrode and an anode electrode made of an Al—Ti alloy to generate an arc discharge, thereby generating Al and Ti ions in the apparatus, thereby providing a tool base. Clean the surface with bombard,
(C) Next, nitrogen gas is introduced as a reaction gas into the apparatus to form a reaction atmosphere of 4 Pa, a DC bias voltage of −50 V is applied to the tool base that rotates while rotating on the rotary table, and A current of 120 A is passed between the cathode electrode (evaporation source) made of the Al—Ti alloy and the anode electrode to generate arc discharge, and the target average composition and target shown in Table 8 are formed on the surface of the tool base. the average layer thickness of _{(Ti 1-X Al X)} (C Y N 1-Y) layer and the vapor deposited,
Reference Example Coated tools 14 and 15 were produced.

Next, for the hard coating layers of the present invention coated tools 1 to 15, the average thickness of each layer of the hard coating layer, the average Al content ratio X, the average C content ratio Y of the composite carbonitride layer, the hexagonal crystal phase Occupied area ratio S _h , measured inclination angle of normal line of (0001) plane of crystal grains of hexagonal crystal phase, frequency ratio and highest peak existing in inclination angle category of 2 to 12 degrees with respect to normal line of substrate surface The difference between the maximum value and the minimum value of X and the period of concentration change were measured for the tilt angle section in which there is, the concentration change of Ti and Al present in the crystal having a cubic structure.

The specific measurement is as follows.
Measurement of average Al content ratio X and average C content ratio Y:
Using a secondary ion mass spectrometry (SIMS) device, the ion beam is irradiated in the range of 70 μm × 70 μm from the sample surface side, and the concentration in the depth direction of the components emitted by the sputtering action Measurements were made. The average Al content ratio X and the average C content ratio Y indicate average values in the depth direction.

Measurement of the average layer thickness of each hard coating layer:
Cross-sectional measurement was performed using a scanning electron microscope, and the layer thickness of each of the five layers constituting the hard coating layer was measured to obtain an average value. The average value was taken as the average layer thickness of the hard coating layer.

Measurement of the area ratio S _h occupied by the hexagonal crystal phase:
Using an electron beam backscatter diffractometer, in a state where the cross-section of the composite carbonitride layer composed of a composite carbonitride layer of Ti and Al is a polished surface, set in a lens barrel of a field emission scanning electron microscope, An electron beam with an acceleration voltage of 15 kV at an incident angle of 70 degrees is irradiated onto the polished surface with an irradiation current of 1 nA, and each crystal grain existing within the measurement range of the cross-sectional polished surface is irradiated at intervals of 0.1 μm / step. Measure the electron backscatter diffraction image and analyze the crystal structure of each crystal grain to identify whether it is a cubic or hexagonal crystal structure. The area ratio of the occupied hexagonal crystal phase was determined.

Measurement of frequency ratio in which the measurement inclination angle of the normal line of the (0001) plane of the crystal grains of the hexagonal crystal phase is present in the inclination angle section of 2 to 12 degrees with respect to the normal line of the substrate surface:
About the crystal grains constituting the hexagonal crystal phase in the composite carbonitride layer, the crystal grains of the hexagonal crystal phase with respect to the normal direction of the substrate surface using a field emission scanning electron microscope and an electron beam backscatter diffractometer The tilt angle formed by the normal line of the (0001) plane, which is a plane, is measured, and the measured tilt angle within the range of 0 to 90 degrees with respect to the normal direction of the substrate surface is 0.25 of the measured tilt angle. The number of degrees existing in each section is tabulated for each degree pitch, and the inclination angle section where the highest peak exists is obtained, and the total of the frequencies existing in the inclination angle section of 2 to 12 degrees is obtained. The frequency ratio that the total of the frequencies existing in the inclination angle section of ˜12 degrees occupies the entire inclination angle frequency distribution was determined.

Further, for each crystal grain of the cubic crystal phase in the composite carbonitride layer, the particle width W _{c in the} direction parallel to the substrate surface and the particle length L _c in the direction perpendicular to the substrate surface are measured. The aspect ratio A _c (= L _c / W _c ) was calculated, the average value of the aspect ratios A _c obtained for the individual crystal grains was calculated as the average aspect ratio α _c , and the individual crystal grains were obtained. and the average value of the particle width W _c is calculated as the average particle width omega _c.
Similarly, for each crystal grain of the hexagonal crystal phase in the composite carbonitride layer, the particle width W _{h in the} direction parallel to the substrate surface and the particle length L _h in the direction perpendicular to the substrate surface are measured, The aspect ratio A _h (= L _h / W _h ) of the crystal grains is calculated, the average value of the aspect ratio A _h obtained for each crystal grain is calculated as the average aspect ratio α _h , and the individual crystal grains The average value of the particle widths W _h obtained for was calculated as the average particle width ω _h .
_{Here, W c, L c, W} h, the measurement of _{L h} was performed as follows.
With the cross section of the composite carbonitride layer composed of the composite carbonitride layer of Ti and Al as a polished surface, the crystal grains in the composite carbonitride layer are 10 μm wide using a scanning electron microscope (magnification 20000 times). A plurality of visual fields were observed, and W _c , L _c , W _h , and L _h were measured for each crystal grain.
Table 7 shows these values.

Change in concentration of Ti and Al present in a crystal having a cubic structure:
Furthermore, the micro area | region of the composite carbonitride layer was observed using the transmission electron microscope (magnification 200000 times), and the compositional analysis was performed from the cross section side using the energy dispersive X-ray spectroscopy (EDS). However, periodic concentration changes of Ti and Al were observed in the crystal having a cubic structure in the composite carbonitride layer, and there were a region where X was relatively large and a region where X was relatively small. For five crystals in the crystal having a cubic structure in the composite carbonitride layer in which periodic concentration changes of Ti and Al exist, periodicity of a region where X is relatively large and a region where X is relatively small By performing line analysis in the direction in which the concentration change exists, and taking the average of the maximum and minimum values of X of the measured crystal, the average composition of each of the regions where X is relatively large and small is obtained, The difference was obtained as the difference between the maximum value and the minimum value of X of the measured crystal, and the average value of the difference between the maximum value and the minimum value of X was determined by averaging the measured five crystals. Similarly, from the results of the above line analysis, X is a relative value for five of the crystals having a periodic concentration change of Ti and Al in the composite carbonitride layer having a cubic structure. By calculating the average of the distance of the large area, the period of change in the concentration of Ti and Al in the measured crystal was obtained, and the average of the period of change in the concentration of Ti and Al was obtained by averaging over the five measured crystals. The value was determined.

Next, for each of the comparative example coated tools 1 to 13 and the reference example coated tools 14 and 15, similarly to the present coated tools 1 to 15, the average Al content ratio X, the average C content ratio Y, and the hard coating layer The average layer thickness t, the area ratio S _h occupied by the hexagonal crystal phase, and the measured tilt angle of the normal line of the (0001) plane of the crystal grains of the hexagonal crystal phase are 2 The frequency ratio existing at 12 degrees and the inclination angle section where the highest peak exists were measured.
Furthermore, W _c , L _c , W _h , and L _h were measured, and α _c , ω _c , α _h , and ω _h were calculated.
Table 8 shows these values.

Next, in the state where each of the above various coated tools is clamped to the tool steel cutter tip portion having a cutter diameter of 125 mm by a fixing jig, the present coated tools 1 to 15, the comparative coated tools 1 to 13, and the reference Example For the coated tools 14 and 15, the following dry high-speed face milling, which is a kind of high-speed intermittent cutting of alloy steel, and a center-cut cutting test were performed, and the flank wear width of the cutting edge was measured.
Work material: Block material of JIS / SCM440 width 100mm, length 400mm
Rotational speed: 943 min ⁻¹ ,
Cutting speed: 370 m / min,
Cutting depth: 1.2 mm,
Single blade feed amount: 0.10 mm / tooth,
Cutting time: 8 minutes,
Table 9 shows the results of the cutting test.

WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr ₃ C ₂ powder, TiN powder and Co powder all having an average particle diameter of 1 to 3 μm are prepared as raw material powders. The powder was blended into the blending composition shown in Table 10, added with wax, ball mill mixed in acetone for 24 hours, dried under reduced pressure, and then press-molded into a compact of a predetermined shape at a pressure of 98 MPa. The powder is sintered in a vacuum of 5 Pa at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour, and after sintering, the cutting edge is subjected to a honing process of R: 0.07 mm. Thus, tool bases α to ε made of a WC-base cemented carbide having an insert shape of ISO standard CNMG120212 were manufactured.

In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo ₂ C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder were prepared, and these raw material powders were blended into the blending composition shown in Table 11, wet mixed by a ball mill for 24 hours, dried, and then pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour. After sintering, the cutting edge portion was subjected to a honing process of R: 0.09 mm. Tool bases ζ to κ made of TiCN-based cermet having a standard / CNMG12041 insert shape were formed.

Next, on the surfaces of these tool bases α to ε and tool bases ζ to κ, a normal chemical vapor deposition apparatus is used, and (Ti _1-X Al _X ) of the present invention is used under the conditions shown in Tables 3 and 4. The present invention coated tools 16 to 30 shown in Tables 12 and 13 were manufactured by vapor-depositing (C _Y N _1-Y ) layers at a target layer thickness.
In addition, about this invention coated tools 19-28, the lower layer and / or the upper layer were formed on the formation conditions shown in Table 3.

Further, for the purpose of comparison, an ordinary chemical vapor deposition apparatus was used on the surfaces of the tool bases α to ε and the tool bases ζ to κ, and under the conditions shown in Tables 3 and 5, (Ti _1-x Comparative example coated tools 16 to 28 shown in Tables 12 and 14 were manufactured by vapor-depositing Al _x ) (C _y N _1-y ) with a target layer thickness.
In addition, similarly to this invention coated tool 19-28, about the comparison coated tool 19-28, the lower layer and / or the upper layer were formed on the formation conditions shown by Table 3. FIG.

For reference, the (Ti _1-X Al _X ) (C _Y N _1-Y ) layer of the reference example is formed on the surfaces of the tool base β and the tool base θ by arc ion plating using a conventional physical vapor deposition apparatus. Were formed by vapor deposition with a target layer thickness to produce reference example-coated tools 29 and 30 shown in Tables 12 and 14.
The arc ion plating conditions are the same as the conditions shown in Example 1, and the target average composition and target average layer thickness (Ti _1-X shown in Table 14) are formed on the surface of the tool base. The Al _X ) (C _Y N _1-Y ) layer was formed by vapor deposition, and Reference Example-coated tools 29 and 30 were produced.

Next, with respect to the hard coating layers of the above-described coated tools 16 to 30 of the present invention, using the same method as shown in Example 1, the average layer thickness of each layer of the hard coating layer, the average Al of the composite carbonitride layer The content ratio X, the average C content ratio Y, the area ratio S _h occupied by the hexagonal crystal phase, and the measured inclination angle of the normal line of the (0001) plane of the crystal grains of the hexagonal crystal phase are relative to the normal line of the substrate surface The frequency ratio existing in the inclination angle section of 2 to 12 degrees and the inclination angle section where the highest peak exists were measured.
In addition, W _c , L _c , A _c (= L _c / W _c ), α _c , and ω _c are measured and calculated for each crystal grain of the cubic crystal phase in the composite carbonitride layer. For each crystal grain of the hexagonal crystal phase in the carbonitride layer, W _h , L _h , A _h (= L _h / W _h ), α _h , and ω _h were measured and calculated.
Table 13 shows the results.

Subsequently, the comparative example coated tools 16 to 28 and the reference example coated tools 29 and 30 were similarly processed in the same manner as the coated tools 16 to 30 of the present invention, with the average layer thickness of each layer of the hard coating layer and the average Al of the composite carbonitride layer. The content ratio X, the average C content ratio Y, the area ratio S _h occupied by the hexagonal crystal phase, and the measured inclination angle of the normal line of the (0001) plane of the crystal grains of the hexagonal crystal phase are relative to the normal line of the substrate surface W _c , L _c , A _c (= L _c) of each crystal grain in the cubic crystal phase in the composite carbonitride layer, the tilt angle section having the highest peak and the frequency ratio existing in the tilt angle section of 2 to 12 degrees / W _c ), α _c , ω _c , and for each crystal grain of the hexagonal crystal phase in the composite carbonitride layer, W _h , L _h , A _h (= L _h / W _h ), α _h , ω _h was measured and calculated.
Table 14 shows the results.

Next, in the state where each of the various coated tools is screwed to the tip of the tool steel tool with a fixing jig, the present coated tools 16 to 30, comparative coated tools 16 to 28, and reference coated tools 29, About 30, the dry high speed intermittent cutting test of the carbon steel and the wet high speed intermittent cutting test of cast iron which were shown below were implemented, and all measured the flank wear width of the cutting edge.
Cutting condition 2:
Work material: JIS / SCM435 lengthwise equally spaced 4 rods with vertical grooves,
Cutting speed: 350 m / min,
Cutting depth: 1.2mm,
Feed: 0.2mm / rev,
Cutting time: 5 minutes
(Normal cutting speed is 220 m / min),
Cutting condition 3:
Work material: JIS / FCD450 lengthwise equidistant round bars with 4 vertical grooves,
Cutting speed: 340 m / min,
Cutting depth: 1.0 mm,
Feed: 0.2mm / rev,
Cutting time: 5 minutes
(Normal cutting speed is 200 m / min),
Table 15 shows the results of the cutting test.

As the raw material powder, cBN powder, TiN powder, TiCN powder, TiC powder, Al powder, and Al ₂ O ₃ powder each having an average particle diameter in the range of 0.5 to 4 μm are prepared. The mixture is blended in the composition shown in FIG. 1, wet mixed with a ball mill for 80 hours, dried, and then pressed into a green compact having a diameter of 50 mm × thickness: 1.5 mm under a pressure of 120 MPa. The green compact is sintered in a vacuum atmosphere at a pressure of 1 Pa at a predetermined temperature within a range of 900 to 1300 ° C. for 60 minutes to obtain a presintered body for a cutting edge piece. In addition, Co: 8% by mass, WC: remaining composition, and diameter: 50 mm × thickness: 2 mm, superposed on a WC-based cemented carbide support piece with a normal super-high pressure Insert into the sintering machine, normal conditions A certain pressure: 4 GPa, temperature: 1200 ° C. to 1400 ° C. within a predetermined temperature, holding time: 0.8 hour sintering, and after sintering, the upper and lower surfaces are polished with a diamond grindstone, and wire discharge It is divided into predetermined dimensions by a processing device, and further Co: 5 mass%, TaC: 5 mass%, WC: remaining composition and ISO standard CNGA1204112 shape (thickness: 4.76 mm × inscribed circle diameter: 12. The brazing part (corner part) of the insert body made of a WC-based cemented carbide with a 7 mm 80 ° rhombus) has a composition consisting of Zr: 37.5%, Cu: 25%, Ti: the rest in volume%. After brazing using a brazing material of Ti-Zr-Cu alloy and having a predetermined dimension, the cutting edge is subjected to honing with a width of 0.13 mm and an angle of 25 °, followed by finishing polishing. ISO regulations The tool substrate (a) to (k) two having the insert shape of CNGA120412 were produced, respectively.

Then, these tool substrate i ~ the surface of the two, using a conventional chemical vapor deposition apparatus under the conditions shown in Table 3 and Table 4, the present invention _{(Ti 1-X Al X)} (C Y N 1- _Y ) The present coated tools 31 to 40 shown in Tables 17 and 18 were manufactured by vapor-depositing layers with a target layer thickness.
In addition, about this invention coated tools 34-38, the lower layer and / or the upper layer were formed on the formation conditions shown in Table 3.

For the purpose of comparison, the same tool substrate i ~ the surface of the two, using a conventional chemical vapor deposition apparatus under the conditions shown in Table _{4, (Ti 1-x Al} x) of Comparative Example (C _{y N 1-} Comparative example-coated tools 31 to 38 shown in Tables 17 and 19 were manufactured by vapor-depositing _y ) with a target layer thickness.
In addition, similarly to this invention coating tool 34-38, about the comparison coating tool 34-38, the lower layer and / or the upper layer were formed on the formation conditions shown in Table 3.

For reference, the (Ti _1-X Al _X ) (C _Y N _1-Y ) layer of the reference example is formed on the surfaces of the tool base A and the tool base B by arc ion plating using a conventional physical vapor deposition apparatus. Were formed by vapor deposition with a target layer thickness to produce reference example coated tools 39 and 40 shown in Tables 17 and 19.
The arc ion plating conditions are the same as the conditions shown in Example 1, and the target average composition and target average layer thickness (Ti _1-X shown in Table 19) are formed on the surface of the tool base. The Al _X ) (C _Y N _1-Y ) layer was formed by vapor deposition to produce reference example coated tools 39 and 40.

Next, with respect to the hard coating layers of the present invention-coated tools 31 to 40, using the same method as the method shown in Example 1, the average Al content ratio X, the average C content ratio Y of the composite carbonitride layer, The average thickness t of the hard coating layer, the area ratio S _h occupied by the hexagonal crystal phase, and the measured inclination angle of the normal line of the (0001) plane of the crystal grains of the hexagonal crystal phase are inclined with respect to the normal line of the substrate surface The frequency ratio existing in the angle section of 2 to 12 degrees and the tilt angle section where the highest peak exists were measured.
In addition, W _c , L _c , A _c (= L _c / W _c ), α _c , and ω _c are measured and calculated for each crystal grain of the cubic crystal phase in the composite carbonitride layer. For each crystal grain of the hexagonal crystal phase in the carbonitride layer, W _h , L _h , A _h (= L _h / W _h ), α _h , and ω _h were measured and calculated.
Table 18 shows the results.

Next, for the comparative example coated tools 31 to 38 and the reference example coated tools 39 and 40, the average Al content ratio X, the average C content ratio Y of the composite carbonitride layer, as in the present invention coated tools 31 to 40, The average thickness t of the hard coating layer, the area ratio S _h occupied by the hexagonal crystal phase, and the measured inclination angle of the normal line of the (0001) plane of the crystal grains of the hexagonal crystal phase are inclined with respect to the normal line of the substrate surface tilt angle sections power ratio and the highest peak present at the corner segment 2-12 degrees exists, of each crystal grain cubic crystalline phase of the composite carbonitride layer _{W c, L c, a c} (= L c / W _c ), α _c , ω _c , and for each crystal grain of the hexagonal crystal phase in the composite carbonitride layer, W _h , L _h , A _h (= L _h / W _h ), α _h , ω _h was measured and calculated.
Table 19 shows the results.

Next, the coated tools 31 to 40 of the present invention, the comparative coated tools 31 to 38, and the reference example coated with the above various coated tools screwed to the tip of the tool steel tool with a fixing jig. About the tools 39 and 40, the dry high-speed intermittent cutting test of the carburizing hardening alloy steel shown below was implemented, and the flank wear width of the cutting edge was measured.
Work material: JIS · SCr420 (Hardness: HRC60) lengthwise equidistant 4 round bars with longitudinal grooves,
Cutting speed: 220 m / min,
Cutting depth: 0.10 mm,
Feed: 0.10mm / rev,
Cutting time: 4 minutes
Table 20 shows the results of the cutting test.

From the results shown in Tables 6-9, Tables 12-15, and Tables 17-20, the coated tools 1-40 of the present invention are composed of a mixed structure of a cubic crystal phase and a hexagonal crystal phase (Ti _1-X Al _X ) ( _CY N _1-Y ) layer is formed by vapor deposition, and the layer is improved in toughness while maintaining high wear resistance. Exhibits excellent adhesion, lubricity, chipping resistance, and wear resistance in cutting.
Especially about this invention coated tool 4-7, 9-15, 19-22, 24-30, 34-38, 40, the average grain width of each crystal grain of a cubic crystal phase and a hexagonal crystal phase, an average aspect Since the ratio is in the predetermined numerical range, the wear resistance is further improved.
On the other hand, as for the comparative example coated tools 1-13, 16-28, 31-38 and the reference example coated tools 14, 15, 29, 30, 39, 40, all are chipped, chipped, It is clear that not only abnormal damage such as peeling occurs but also the service life is reached in a relatively short time.

As described above, the coated tool of the present invention can be used not only for high-speed intermittent cutting such as high-speed milling cutting of alloy steel but also as a coating tool for various work materials, and for long-term use. Since it exhibits excellent wear resistance, it can satisfactorily respond to higher performance of cutting equipment, labor saving and energy saving of cutting, and cost reduction.

Claims (4)

A surface-coated cutting tool in which a hard coating layer is coated on the surface of a substrate composed of any of tungsten carbide-based cemented carbide, titanium carbonitride-based cermet, or cubic boron nitride-based ultrahigh-pressure sintered body. ,
(A) the hard coating layer comprises at least a complex carbonitride layer of Ti and Al flat HitoshisoAtsu 1 to 20 [mu] m, the average composition,
_{Formula: (Ti 1-X Al X} ) (C Y N 1-Y)
In this case, the Al content ratio X and the C content ratio Y (where X and Y are atomic ratios) satisfy 0.60 ≦ X ≦ 0.95 and 0.0005 ≦ Y ≦ 0.005, respectively. Satisfied,
(B) When the composite carbonitride layer is analyzed from the longitudinal cross-sectional direction of the composite carbonitride layer of Ti and Al using an electron beam backscattering diffractometer, the crystal structure of each crystal grain is cubic. It consists of a mixed structure of a cubic crystal phase in which an electron beam backscatter diffraction image of the crystal lattice is observed and a hexagonal crystal phase in which an electron beam backscatter diffraction image of the hexagonal crystal lattice is observed, and the cubic crystal phase The area ratio of the hexagonal crystal phase to the total of the hexagonal crystal phase is 10 to 50 area%,
(C) measuring an inclination angle formed by a normal line of a (0001) plane which is a crystal plane of a crystal grain of a hexagonal crystal phase of the composite carbonitride layer with respect to a normal direction of the substrate surface; When the measured inclination angles within the range of 0 to 90 degrees with respect to the normal direction of the substrate surface are divided into pitches of 0.25 degrees and the frequencies existing in each section are tabulated, 2 to 12 degrees The maximum peak exists in the inclination angle section within the range of 2 to 12, and the sum of the frequencies existing in the inclination angle section of 2 to 12 degrees is 40% or more of the entire frequency in the inclination angle frequency distribution. Surface coated cutting tool. The average grain width ω _c of the cubic crystal phase grains of the composite carbonitride layer is 0.3 μm or less, the average aspect ratio α _c is less than 2, and
The average grain width ω _h of the crystal grains of the hexagonal crystal phase of the composite carbonitride layer is 0.1 to 2 μm, the average aspect ratio α _h is 2 or more,
The surface-coated cutting tool according to claim 1, wherein In the crystal having the cubic structure of the cubic crystal phase of the composite carbonitride layer, a periodic concentration change of Ti and Al in (Ti _1-X Al _X ) (C _Y N _1-Y ) is observed. 3. The surface according to claim 1, wherein a difference between the maximum value and the minimum value of X that exists and changes periodically is 0.05 to 0.25, and the period is 3 to 30 nm. Coated cutting tool. The composite carbonitride layer is at least, the production of surface-coated cutting tool according to any one of claims 1 to 3, characterized in that vapor deposited by chemical vapor deposition containing trimethyl aluminum as a reaction gas component Way .