CN103801718A - Surface coating cutting tool - Google Patents
Surface coating cutting tool Download PDFInfo
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- CN103801718A CN103801718A CN201310395586.1A CN201310395586A CN103801718A CN 103801718 A CN103801718 A CN 103801718A CN 201310395586 A CN201310395586 A CN 201310395586A CN 103801718 A CN103801718 A CN 103801718A
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- composite carbon
- carbon nitride
- nitride layer
- layer
- inclination angle
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/148—Composition of the cutting inserts
Abstract
The invention provides a surface coating cutting tool which coats a (Til-XA1X)(CYN1-Y) layer formed by hexagonal phase and cubic phase mixed organization forming a film by means of chemical vapor deposition by taking A1 (CH3) as reaction gases on a matrix surface formed by WC-base cemented carbide, TiCN-base metal ceramics, cBN-base ultrahigh pressure sintered body, wherein X and Y are 0.60<=X<=0.95 and 0.0005<=Y<=0.005 by means of atomic ratio. When an inclined angle formed by the normal line of the surface (0001) of a particle of the hexagonal phase relative to the normal line direction of the surface of the matrix is detected, the zoning of the inclined angle in the range of 2-12 degrees has peak value and the degree proportion occupied in the zoning of the inclined angle is more than 40%, preferably, the average aspect ratio Alpha c of the cubic phase is less than 2, the average particle width Omega c is less than 0.3 [mu]m, and moreover, the average aspect ratio Alpha h of the hexagonal phase is more than 2, and the average particle width Omega h is in the range of 0.1-2 [mu]m.
Description
Technical field
The present invention relates to a kind of surface-coated cutting tool (following, be called coating tool), its hard coating layer produce with the high heat of steel alloy etc. and impact load act on the high speed interrupted cut processing of cutting edge in the excellent resistance to cutter that collapses of performance.
Background technology
In the past known have a following coating tool, it is conventionally on the surface of the matrix (below they being referred to as to matrix) being made up of tungsten carbide (representing with WC below) base cemented carbide, titanium carbonitride (representing with TiCN below) based ceramic metal or cubic boron nitride (representing with cBN below) base ultra-high pressure sintered body, being formed with Ti-Al by physical vapor deposition evaporation is that complex nitride layer is used as hard coating layer, and these coating tools are brought into play excellent mar proof.
But, although above-mentioned evaporation is in the past formed with the coating tool mar proof excellence relatively that Ti-Al is complex nitride layer, but while use, easily produce abnormal losses such as collapsing cutter under high speed interrupted cut condition, therefore the improvement of hard coating layer has been proposed to various suggestions.
For example, in patent documentation 1, propose to have the surface at matrix to form and work as with composition formula by physical vapor deposition evaporation: (Ti
1-Xal
x) N is while representing, meet 0.35≤X≤0.60(wherein, X is atomic ratio) Ti and the hard coating layer that forms of the complex nitride of Al, and using hard coating layer as the granular crystal tissue of above-mentioned (Ti, Al) N layer with the alternatively layered structure of columanar structure and forming, in the high speed interrupted cut processing of glass hard steel, hard coating layer is brought into play excellent resistance to cutter, resistance to damaged property and the resistance to fissility of collapsing thus.
But this coating tool forms hard coating layer by physical vapor deposition evaporation, therefore the proportional X that contains of Al cannot be made as more than 0.6, require further to improve cutting ability.
From as above viewpoint, also propose to form hard coating layer by chemical vapor deposition method, thereby Al has been increased to the technology of 0.9 left and right containing proportional X.
For example, in patent documentation 2, record at TiCl
4, AlCl
3, NH
3hybrid reaction gas in, in the temperature range of 650～900 ℃, carry out chemical vapor deposition, thereby can evaporation form the (Ti that the value containing proportional X of Al is 0.65～0.95
1-Xal
x) N layer, but in the document, with at this (Ti
1-Xal
x) further coated Al on N layer
2o
3layer, and to improve thus insulation effect be object, but do not disclose to form, the value of X is increased to 0.65～0.95 (Ti
1-Xal
x) N layer, cutting ability is had to which kind of impact.
And for example, in patent documentation 3, proposing has TiCN layer, Al
2o
3layer is as internal layer, by chemical vapor deposition method on it by (the Ti of cubic crystal structure or the cubic crystal structure that comprises structure of hexagonal crystal
1-Xal
x) N layer (wherein, X is 0.65～0.9) is coated as skin, and improves the heat resistance of coating tool and the suggestion of fatigue strength by the compression stress of this skin being given to 100～1100MPa.
Patent documentation 1: TOHKEMY 2011-224715 communique
Patent documentation 2: Japanese Unexamined Patent Application Publication 2011-516722 communique
Patent documentation 3: Japanese Unexamined Patent Application Publication 2011-513594 communique
In recent years, requirement to the saving labourization in machining and energy-saving is strong, with this, machining has the tendency of high speed, high efficiency more, therefore coating tool is further required to the resistance to resistance to Abnormal damages such as cutter, resistance to damaged property and resistance to fissility that collapse, and require to bring into play excellent mar proof in long-term use.
But the coating tool of recording in above-mentioned patent documentation 1 forms by (Ti by physical vapor deposition evaporation
1-Xal
x) hard coating layer of N layer composition, and cannot improve the Al content X in hard coating layer, therefore for example in the time of high speed interrupted cut for steel alloy, not talkative resistance to collapse cutter abundant.
On the other hand, (the Ti forming for the chemical vapor deposition method of the passing through evaporation of recording in above-mentioned patent documentation 2
1-Xal
x) N layer, Al content X can be improved, and cubic crystal structure can be formed, therefore can obtain having predetermined hardness and the hard coating layer of excellent in wear resistance, but insufficient with the adhesion strength of matrix, and toughness is poor.
In addition, the coating tool of recording in above-mentioned patent documentation 3 has predetermined hardness and excellent in wear resistance, but toughness is poor, therefore during for high speed interrupted cut processing of steel alloy etc., easily produce collapse cutter, damaged, the Abnormal damage such as peel off, not talkative performance can gratifying cutting ability.
Summary of the invention
Even if the object of the present invention is to provide a kind of high speed interrupted cut in the high speed interrupted cut for steel alloy etc. to add man-hour, still possess excellent toughness, and in long-term use the excellent resistance to coating tool that collapses cutter, mar proof of performance.
The inventor etc. from the above point of view, to carry out evaporation by chemical vapor deposition and form the composite carbon nitride that at least comprises Ti and Al and (sometimes use below " (Ti, Al) (C, N) " or " (Ti in order to improve
1-Xal
x) (C
yn
1-Y) " represent) and coating tool resistance to of hard coating layer collapse cutter, mar proof and the result repeatedly furtherd investigate, obtained following opinion.
; find the surface of the matrix of any formation in by tungsten carbide base carbide alloy (following use " WC base cemented carbide " represents), base titanium carbonitride (representing with " TiCN based ceramic metal " below) or cubic boron nitride base ultra-high pressure sintered body (below with " cBN base ultra-high pressure sintered body " expression), for example can be by containing trimethyl aluminium (Al(CH
3)
3) the chemical vapor deposition method evaporation that is used as reacting gas composition forms the (Ti being made up of the line and staff control of the predetermined area ratio of cube crystalline phase and hexagonal crystal phase
1-Xal
x) (C
yn
1-Y) layer as composite carbon nitride layer, and the inclination angle number of degrees distribution proportion that the normal of (0001) face of the crystal grain of the hexagonal crystal phase of this composite carbon nitride layer can be become with respect to the normal direction of matrix surface is made as more than 40%, thus, when composite carbon nitration case keeps higher mar proof, toughness improves, and demonstrates excellent resistance to cutter, the mar proof of collapsing in long-term use.
And the discoveries such as the inventor are as follows: at (the Ti being formed by the line and staff control of above-mentioned cube of crystalline phase and hexagonal crystal phase
1-Xal
x) (C
yn
1-Y) layer in, averaged particles width, the average asperratio of the crystal grain by each crystalline phase that the particle width by the crystal grain of each crystalline phase is measured and asperratio are obtained are limited in predetermined number range, thereby can maintain the toughness of composite carbon nitride layer, and further improve the mar proof of composite carbon nitride layer.
In addition, the discovery such as inventor is as follows: in the crystallization of cubic crystal structure of crystal grain of cube crystalline phase with above-mentioned composite carbon nitride layer, have (Ti
1-Xal
x) (C
yn
1-Y) Ti and the periodic change in concentration of Al, and by by the maximum of periodically variable X and minimum of a value and cycle limit in predetermined number range, thereby can improve the hardness of composite carbon nitride layer, and further improve the mar proof of composite carbon nitride layer.
Therefore, by the coating tool that possesses composite carbon nitride layer described above during for the high speed interrupted cut of such as steel alloy etc., can suppress to collapse cutter, damaged, the generation of peeling off etc., and can in long-term use, bring into play excellent mar proof.
This invention is the surface-coated cutting tool completing according to above-mentioned result of study, has following feature:
(1) surface-coated cutting tool, it,, on the surface of any matrix forming by tungsten carbide base carbide alloy, base titanium carbonitride or cubic boron nitride base ultra-high pressure sintered body, is coated with hard coating layer, wherein,
(a) above-mentioned hard coating layer at least contains the Ti of average bed thickness 1～20 μ m and the composite carbon nitride layer of Al that form by chemical vapor deposition method evaporation, in the time that its average composition is represented with following composition formula, Al contains proportional Y(wherein containing proportional X and C, X, Y are atomic ratio) meet respectively 0.60≤X≤0.95,0.0005≤Y≤0.005
Composition formula: (Ti
1-Xal
x) (C
yn
1-Y)
(b) for above-mentioned composite carbon nitride layer, while using EBSD device to analyze from the longitudinal section direction of the composite carbon nitride layer of above-mentioned Ti and Al the crystalline texture of each crystal grain, form by observing cube crystalline phase of EBSD image of cubic lattice and the line and staff control of hexagonal crystal phase that observes the EBSD image of hexagoinal lattice, and, hexagonal crystal shared area ratio in the total of cube crystalline phase and hexagonal crystal phase is 10～50 area %
(c) measure the crystal plane of the crystal grain of the hexagonal crystal phase of above-mentioned composite carbon nitride layer, the inclination angle that the normal of (0001) face becomes with respect to the normal direction of matrix surface, and in the inclination angle of this mensuration, when mensuration inclination angle by the normal direction with respect to matrix surface within the scope of 0～90 degree is carried out subregion and adds up to the number of degrees that are present in each subregion by 0.25 degree spacing, there is peak-peak in the inclination angle subregion within the scope of 2～12 degree, and the number of degrees that are present in this 2～12 inclination angle subregion of spending add up to the more than 40% of total number of degrees in the number of degrees distribution of inclination angle.
(2) above-mentioned (1) described surface-coated cutting tool, wherein,
The averaged particles width ω of the crystal grain of cube crystalline phase of above-mentioned composite carbon nitride layer
cbe below 0.3 μ m, and average asperratio α
cbe less than 2, and,
The averaged particles width ω of the crystal grain of the hexagonal crystal phase of above-mentioned composite carbon nitride layer
hbe 0.1～2 μ m, and average asperratio α
hbe more than 2.
(3) the described surface-coated cutting tool in above-mentioned (1) or (2), wherein,
In the crystallization of cubic crystal structure of crystal grain of cube crystalline phase with above-mentioned composite carbon nitride layer, there is (Ti
1-Xal
x) (C
yn
1-Y) Ti and the periodic change in concentration of Al, and the maximum of periodically variable X and the difference of minimum of a value be 0.05～0.25, be preferably 0.10～0.20, and this cycle is 3～30nm.
(4) surface-coated cutting tool described in any one in above-mentioned (1) to (3), wherein,
Above-mentioned composite carbon nitride layer is the layer that is used as the chemical vapor deposition method evaporation formation of reacting gas composition by least containing trimethyl aluminium.
In addition, hard coating layer of the present invention is using composite carbon nitration case as above as its internal structure, but by further with known common use the such as lower layer and upper layer, can create more excellent characteristic.
Then, the hard coating layer of the coating tool to this invention carries out more specific description.
Form the Ti of hard coating layer and composite carbon the nitride ((Ti of Al
1-Xal
x) (C
yn
1-Y)) layer average composition:
At above-mentioned (Ti
1-Xal
x) (C
yn
1-Y) layer in, if Al containing proportional X(atomic ratio) value be less than 0.60, the area ratio of the hexagonal crystal phase in the tissue of composite carbon nitride layer reduces, thereby resistance to crescent hollow abrasion reduces, and become easy generation and collapse cutter, the damaged Abnormal damage that waits, on the other hand, if X(atomic ratio) value exceed 0.95, because Ti is containing proportional relative minimizing, thereby the area ratio of cube crystalline phase in the tissue of composite carbon nitride layer reduces, thereby lower hardness, and resistance to wear of the tool flank reduces, therefore need the atomic ratio by X() value be made as more than 0.60 below 0.95.
And, at above-mentioned (Ti
1-Xal
x) (C
yn
1-Y) layer in, C composition has the effect of the lubricity that improves layer, on the other hand, N composition has the effect of elevated temperature strength that improves layer, if but C composition containing proportional Y(atomic ratio) be less than 0.0005, cannot obtain high-lubricity, on the other hand, if Y(atomic ratio) exceed 0.005, elevated temperature strength reduces, therefore by Y(atomic ratio) value be decided to be more than 0.0005 below 0.005.
In addition, above-mentioned (Ti
1-Xal
x) (C
yn
1-Y) layer, if its average bed thickness is less than 1 μ m, cannot fully guarantee the mar proof in long-term use, on the other hand, if its average bed thickness exceedes 20 μ m, in with the thermogenetic high speed interrupted cut of height, easily cause pyroplastic deformation, this becomes the reason of partial wear, is therefore amounted to average bed thickness and is decided to be 1～20 μ m.
In this invention, at (the Ti by thering is above-mentioned average composition
1-Xal
x) (C
yn
1-Y) in the composite carbon nitride layer of layer composition, not spread all over a homogeneous structure for layer entirety, but as line and staff control's formation of hexagonal crystal phase and cube crystalline phase.
; for the cross section of composite carbon nitride layer; while using EBSD device to analyze its crystalline texture; form by observing cube crystalline phase of EBSD image of cubic lattice and the line and staff control of hexagonal crystal phase that observes the EBSD image of hexagoinal lattice, and hexagonal crystal shared area ratio in the total of cube crystalline phase and hexagonal crystal phase is 10～50 area %.
In the composite carbon nitride layer being formed by above-mentioned line and staff control, if the area ratio of hexagonal crystal phase exceedes 50 area %, lower hardness, especially resistance to wear of the tool flank reduces.
On the other hand, when the area ratio of hexagonal crystal phase becomes while being less than 10 area %, resistance to crescent hollow abrasion declines, and cutting edge becomes and easily cause Abnormal damage, and its result shortens life tools.
Thus, hexagonal crystal shared area ratio in the composite carbon nitride layer being made up of the line and staff control of cube crystalline phase and hexagonal crystal phase is made as to 10～50 area %.
And, in this invention, in order further to improve the resistance to crescent hollow abrasion of composite carbon nitride layer, need to be for the crystal grain that forms hexagonal crystal phase in composite carbon nitride layer, measure the crystal plane of the crystal grain of hexagonal crystal phase with field emission type SEM and EBSD device, the inclination angle that the normal of (0001) face becomes with respect to the normal direction of matrix surface, and in the inclination angle of this mensuration, when mensuration inclination angle by the normal direction with respect to matrix surface within the scope of 0～90 degree is carried out subregion and adds up to the number of degrees that are present in each subregion by 0.25 degree spacing, make the inclination angle subregion within the scope of 2～12 degree have peak-peak, and make the number of degrees that are present in this 2～12 degree inclination angle subregion add up to the more than 40% of total number of degrees accounting in the number of degrees distribution of inclination angle.
And, the crystal plane of the crystal grain of above-mentioned hexagonal crystal phase, the inclination angle that normal of (0001) face becomes with respect to the normal direction of matrix surface be present in the number of degrees in 2～12 degree inclination angle subregions be less than the total number of degrees of the inclination angle number of degrees in distributing 40% time, cannot expect excellent resistance to crescent hollow abrasion, therefore need the number of degrees ratio being present in described 2～12 degree inclination angle subregions to be made as more than 40%.
In addition, in this invention, for cube crystalline phase in formation composite carbon nitride layer and the crystal grain separately of hexagonal crystal phase, preferably averaged particles width and average asperratio are set in predetermined number range, thus, can expect the hardness of composite carbon nitride layer and the further raising of resistance to crescent hollow abrasion.
In addition, in this invention, in the crystallization of cubic crystal structure of crystal grain of cube crystalline phase with above-mentioned composite carbon nitride layer, there is (Ti
1-Xal
x) (C
yn
1-Y) Ti and the periodic change in concentration of Al, and preferably the maximum of periodically variable X and minimum of a value and cycle are set in predetermined number range, thus, can expect the hardness of composite carbon nitride layer and the further raising of resistance to wear of the tool flank.
Specific as follows.
First, the crystal grain that forms cube crystalline phase in composite carbon nitride layer is narrated.
The particle width of the above-mentioned crystal grain of the direction parallel with matrix surface is made as to W
c, and the particle length of the above-mentioned crystal grain of the direction vertical with matrix surface is made as to L
c, and by this W
cwith L
cratio L
c/ W
cbe made as the asperratio A of each crystal grain
c, and, by the asperratio A obtaining for each crystal grain
cmean value be made as average asperratio α
c, by the particle width W obtaining for each crystal grain
cmean value be made as averaged particles width ω
ctime, by average asperratio α
cbe made as and be less than 2, and by averaged particles width ω
cbe made as below 0.3 μ m, thereby cube crystalline phase can be made as to the more crystalline phase of high rigidity.
Then, narrate for the crystal grain that forms the hexagonal crystal phase in composite carbon nitride layer.
With about form described cube crystalline phase crystal grain situation in the same manner, for each crystal grain of the hexagonal crystal phase in composite carbon nitride layer, the particle width of the direction parallel with matrix surface is made as to W
h, and the particle length of the direction vertical with matrix surface is made as to L
h, and by this W
hwith L
hratio L
h/ W
hbe made as the asperratio A of each crystal grain
h, and, by the asperratio A obtaining for each crystal grain
hmean value be made as average asperratio α
h, by the particle width W obtaining for each crystal grain
hmean value be made as averaged particles width ω
htime, by average asperratio α
hbe made as more than 2, and by averaged particles width ω
hbe made as 0.1～2 μ m, thereby can improve the resistance to crescent hollow abrasion of hexagonal crystal phase.
Thus, in this invention, preferably by the average asperratio α of the crystal grain of cube crystalline phase in formation composite carbon nitride layer
cbe made as and be less than 2, and by averaged particles width ω
cbe made as below 0.3 μ m, and, by the average asperratio α of the crystal grain of formation hexagonal crystal phase
hbe made as more than 2, and by averaged particles width ω
hbe made as 0.1～2 μ m, and can realize thus the raising of hardness and the raising of resistance to crescent hollow abrasion of composite carbon nitride layer.
In addition, by the crystallization with cubic crystal structure with composition formula: (Ti
1-Xal
x) (C
yn
1-Y) represent time, while there is the periodic change in concentration of Ti and Al, in crystal grain, produce strain, and hardness improve.But if the big or small index of the change in concentration of Ti and Al, the maximum of X and the difference of minimum of a value in described composition formula is less than 0.05, the strain of aforementioned crystal grain is less and cannot estimate that sufficient hardness improves.On the other hand, if the difference of the maximum of X and minimum of a value exceedes 0.25, the strain of crystal grain becomes excessive, and it is large that lattice defect becomes, and lower hardness.And, if the cycle of change in concentration be less than 3nm, toughness drop, and if exceed 30nm, cannot estimate the raising effect of hardness.Therefore, for being present in Ti in the crystallization with cubic crystal structure and the change in concentration of Al, the difference of the maximum of periodically variable X and minimum of a value is made as to 0.05～0.25, preferably be made as 0.10～0.20, and preferably its cycle is made as to 3～30nm, and can realize thus the raising of hardness and the raising of resistance to wear of the tool flank of composite carbon nitride layer.
(the Ti of this invention
1-Xal
x) (C
yn
1-Y) layer can be by the chemical vapor deposition method evaporation formation of for example following condition.
Reacting gas composition (capacity %):
TiCl
42.0～3.0%、Al（CH
3）
33.0～5.0%、
AlCl
33.0～5.0%、NH
32.0～5.0%、
N
26.0～10.0%、C
2H
40～1.0%、
Residue H
2,
Reaction atmosphere temperature: 700～900 ℃,
Reaction atmosphere pressure: 2～5kPa,
By the chemical vapor deposition method of above-mentioned condition, can form satisfied 0.60≤X≤0.95 of average composition, 0.0005≤Y≤0.005(wherein by evaporation, X, Y are atomic ratio), and the composite carbon nitride layer of the Ti representing with following composition formula and Al,
Composition formula: (Ti
1-Xal
x) (C
yn
1-Y).
In addition, cube crystalline phase in composite carbon nitride layer and the area ratio of hexagonal crystal phase, be especially subject to NH
3the impact of content, for example, other conditions are made as to constant (reacting gas composition (capacity %): TiCl
43.0%, Al(CH
3)
34.0%, AlCl
35.0%, N
28.0%, C
2h
41%, residue H
2, reaction atmosphere temperature: 900 ℃ and reaction atmosphere pressure: 4kPa), and only make NH
3changes of contents time, NH
3content be lower limit 2.0% time, the area ratio of hexagonal crystal phase becomes 33%, and, for the upper limit 5.0% time, the area ratio of hexagonal crystal phase becomes 10%.
In addition, while carrying out described film formation process, temporarily stop reaction, and will be by TiCl
4: 2.0～5.0%, H
2: residue, reaction atmosphere pressure: 3.0kPa and reaction atmosphere temperature: the TiCl that the condition of 800～900 ℃ forms
4etching work procedure inserts pre-determined number, thereby evaporation is formed in the crystallization of cubic crystal structure of the crystal grain of cube crystalline phase with composite carbon nitride layer and has (Ti
1-Xal
x) (C
yn
1-Y) Ti and the Ti of periodic change in concentration and the composite carbon nitride layer of Al of Al.By inciting somebody to action TiCl as the aforementioned
4etching work procedure inserts in film formation process, and cubic crystal TiAlCN is optionally etched, forms the composition difference of the locality of Ti and Al in crystal grain, and it causes the rearrangement of atom for stabilisation, produces the cyclically-varying of composition, and it found that hardness improves.
The composite carbon nitride layer forming by above-mentioned chemical vapor deposition method, while using EBSD device to analyze from the longitudinal section direction of the composite carbon nitride layer of above-mentioned Ti and Al the crystalline texture of each crystal grain, form by observing cube crystalline phase of EBSD image of cubic lattice and the line and staff control of hexagonal crystal phase that observes the EBSD image of hexagoinal lattice, and, in the mensuration region of the longitudinal section of composite carbon nitride layer direction, be 10～50 area % at the area ratio of observing hexagonal crystal phase shared in cube crystalline phase of EBSD image and the total of hexagonal crystal phase.
In addition, the crystal plane of the crystal grain to the hexagonal crystal phase in above-mentioned line and staff control, the inclination angle that the normal of (0001) face becomes is measured, and in this mensuration inclination angle by the normal direction with respect to matrix surface the mensuration inclination angle within the scope of 0～90 degree carry out subregion by 0.25 degree spacing and add up to while being present in the number of degrees in each subregion, form following inclination angle distributional pattern: the inclination angle subregion within the scope of 2～12 degree exists peak-peak, and the number of degrees that are present in this 2～12 inclination angle subregion of spending add up to the more than 40% of total number of degrees in the number of degrees distribution of inclination angle.
And, in described chemical vapor deposition condition, by further limiting the evaporation of evaporation condition, form the average asperratio α of the crystal grain that forms cube crystalline phase in composite carbon nitride layer
cbe less than 2, and averaged particles width ω
cbe below 0.3 μ m, and, the average asperratio α of the crystal grain of formation hexagonal crystal phase
hbe more than 2, and averaged particles width ω
hit is the line and staff control of cube crystalline phase and the hexagonal crystal phase of 0.1～2 μ m.
At this, the evaporation condition further limiting is for example as follows.
Reacting gas composition (capacity %):
TiCl
4：2.0～2.5%、Al（CH
3）
3：3.0～4.0%、
AlCl
3：3.0～4.0%、NH
3：2.0～5.0%、
N
2: 6.0～10.0%, C
2h
4: 0～1.0%, residue: H
2,
Reaction atmosphere temperature: 800～900 ℃,
Reaction atmosphere pressure: 2～3kPa.
Coating tool of the present invention, by for example containing trimethyl aluminium (Al(CH
3)
3) be used as the coated (Ti being formed by cube crystalline phase of the hexagonal crystal phase that contains 10～50 area % and the line and staff control of hexagonal crystal phase that forms of chemical vapor deposition method of reacting gas composition
1-Xal
x) (C
yn
1-Y) layer as composite carbon nitride layer, and, while measuring the crystal plane inclination angle that normal of (0001) face becomes of crystal grain of the hexagonal crystal phase in this composite carbon nitride layer, in inclination angle subregion with respect to the normal direction of matrix surface within the scope of 2～12 degree, there is peak-peak, and demonstrate the number of degrees that are present in this 2～12 degree inclination angle subregion and add up to the more than 40% inclination angle number of degrees distributional pattern that accounts for the total number of degrees in the number of degrees distribution of inclination angle, therefore when composite carbon nitride layer keeps higher mar proof, toughness improves, its result, even if the high speed interrupted cut in high speed interrupted cut for steel alloy etc. adds man-hour, also can in long-term use, bring into play the excellent resistance to cutter that collapses, mar proof.
And, in the present invention, by carrying out above-mentioned evaporation under the condition further limiting, at (the Ti being formed by the line and staff control of cube crystalline phase and hexagonal crystal phase
1-Xal
x) (C
yn
1-Y) in layer, when the averaged particles width of the crystal grain of each crystalline phase, average asperratio are set in predetermined number range, when maintaining the toughness of composite carbon nitride layer, can realize the further raising of the mar proof of composite carbon nitride layer.
In addition, in the present invention, while carrying out above-mentioned evaporation operation, temporarily stop reaction, and by inserting the TiCl of pre-determined number
4etching work procedure, thus in the crystallization of cubic crystal structure of crystal grain of cube crystalline phase with composite carbon nitride layer, there is (Ti
1-Xal
x) (C
yn
1-Y) Ti and the periodic change in concentration of Al, and when the maximum of periodically variable X and minimum of a value and cycle are set in predetermined number range, can realize the hardness of composite carbon nitride layer and the further raising of resistance to wear of the tool flank.
Accompanying drawing explanation
Fig. 1 is the diagrammatic illustration figure that represents the composite carbon nitride layer longitudinal section of coating tool of the present invention.
The specific embodiment
Then, according to embodiment, the coating tool of this invention is carried out to more specific description.
[embodiment 1]
As material powder, prepare WC powder, TiC powder, ZrC powder, TaC powder, NbC powder, the Cr of the average grain diameter all with 1～3 μ m
3c
2powder and Co powder, these material powders are fitted in to the mix proportion shown in table 1, further add paraffin, in acetone, ball milling mixes 24 hours, after drying under reduced pressure, the pressed compact take the pressure punch forming of 98MPa as reservation shape, keeps this pressed compact predetermined temperature within the scope of with 1370～1470 ℃ in the vacuum of 5Pa to carry out vacuum-sintering under the condition of 1 hour, after sintering, produce respectively the WC base cemented carbide matrix A～D processed of the blade shapes with ISOSEEN1203AFSN defined.
And, as material powder, prepare the TiCN(of the average grain diameter all with 0.5～2 μ m by quality ratio for TiC/TiN=50/50) and powder, Mo
2c powder, ZrC powder, NbC powder, TaC powder, WC powder, Co powder and Ni powder, these material powders are fitted in to the mix proportion shown in table 2, by ball mill wet mixed 24 hours, after dry, take the pressure punch forming of 98MPa as pressed compact, this pressed compact is carried out to sintering in the blanket of nitrogen of 1.3kPa under the temperature maintenance condition of 1 hour with 1540 ℃, after sintering, produce the TiCN based ceramic metal matrix a～d processed of the blade shapes with iso standard SEEN1203AFSN.
[table 1]
[table 2]
Then, use common chemical evaporation plating device, under the condition shown in table 3 and table 4, form (Ti of the present invention on the surface of these tool base A～D and tool base a～d with target bed thickness evaporation
1-Xal
x) (C
yn
1-Y) layer produces the coating tool of the present invention 1～15 shown in table 6, table 7.
In addition, for coating tool 6～13 of the present invention, under the formation condition shown in table 3, form lower layer and/or upper layer.
And, with object relatively, similarly use common chemical evaporation plating device, with the condition shown in table 3 and table 5, form (the Ti of comparative example with target bed thickness evaporation on the surface of tool base A～D and tool base a～d
1-xal
x) (C
yn
1-y) layer, produce thus the comparative example coating tool 1～13 shown in table 6, table 8.
In addition, with coating tool 6～13 of the present invention in the same manner, for comparative example coating tool 6～13, under the formation condition shown in table 3, form lower layer and/or upper layer.
For reference, use physical vapor deposition device is in the past plated in the surface of tool base D and tool base c by arc ions, forms (the Ti of reference example with target bed thickness evaporation
1-xal
x) (C
yn
1-Y) layer, produce thus the reference example coating tool 14,15 shown in table 6, table 8.
In addition, the condition of arc ion plating is as follows.
(a) by above-mentioned tool base D and c with under state dry after Ultrasonic Cleaning in acetone, be arranged on the position at a distance of preset distance along the central shaft on the turntable in radial direction and arc ion plating apparatus along peripheral part, and, as the Al-Ti alloy of cathode electrode (evaporation source) configuration predetermined composition
(b) remain on 10 to carrying out exhaust in installing first, on one side
-2vacuum below Pa, to in device, be heated to after 500 ℃ with heater on one side, to the Dc bias of the apply-1000V of tool base of revolution in rotation on described turntable, and, make the electric current of 200A between the cathode electrode being formed by Al-Ti alloy and anode electrode, flow through and produce arc discharge, make generation Al and Ti ion in device, thereby Bombardment and cleaning is carried out in tool base surface
(c) then, in device, importing nitrogen is made as the reaction atmosphere of 4Pa as reacting gas, and to the Dc bias of the apply-50V of tool base of revolution in rotation on described turntable, and, make the electric current of 120A between the cathode electrode (evaporation source) being formed by above-mentioned Al-Ti alloy and anode electrode, flow through and produce arc discharge, form the target average composition shown in the table 8, (Ti of the average bed thickness of target at the surperficial evaporation of described tool base
1-xal
x) (C
yn
1-Y) layer, thereby produce reference example coating tool 14,15.
Then, for the hard coating layer of the invention described above coating tool 1～15, the average A l of the average bed thickness of each layer, composite carbon nitride layer that has measured hard coating layer containing proportional X, average C containing proportional Y, the mutually shared area ratio S of hexagonal crystal
hand the mensuration inclination angle of the normal of (0001) face of the crystal grain of hexagonal crystal phase is present in the number of degrees ratio in inclination angle subregion 2～12 degree with respect to the normal of matrix surface and has the inclination angle subregion of peak-peak and be present in Ti in the crystallization with cubic crystal structure and the maximum of X of change in concentration and the cycle of the difference of minimum of a value and change in concentration of Al.
In addition, concrete being determined as follows.
Average A l is the mensuration containing proportional Y containing proportional X, average C:
Use offspring mass spectral analysis (SIMS, Secondary-Ion-Mass-Spectroscopy) device, to irradiating ion beam from test portion face side in the scope of 70 μ m × 70 μ m, carry out the concentration determination of depth direction for the composition of emitting by sputter effect.Average A l represents the mean value of depth direction containing proportional Y containing proportional X, average C.
The mensuration of the average bed thickness of each layer of hard coating layer:
Use scanning electron microscope to carry out cross-section determination, measure respectively the bed thickness at 5 places for forming each layer of hard coating layer, and obtain mean value, its mean value is made as to the average bed thickness of hard coating layer.
The area ratio S that hexagonal crystal is mutually shared
hmensuration:
Use EBSD device, in the cross section of the composite carbon nitride layer that the composite carbon nitride layer by Ti and Al is formed under the state of abradant surface, be arranged in the lens barrel of field emission type SEM, incident angle to described abradant surface with 70 degree, the electron ray of the accelerating potential of 15kV is irradiated the crystal grain in each measurement range that is present in described cross section abradant surface with the irradiation electric current of 1nA, with the interval of 0.1 μ m/step, measure EBSD image, and by the crystalline texture analysis of each crystal grain is confirmed to be to cubic crystal structure or structure of hexagonal crystal, and obtain hexagonal crystal shared area ratio in the total of cube crystalline phase and hexagonal crystal phase.
The mensuration inclination angle of the normal of (0001) face of the crystal grain of hexagonal crystal phase is present in the mensuration of the number of degrees ratio of inclination angle subregion 2～12 degree with respect to the normal of matrix surface:
For the crystal grain that forms the hexagonal crystal phase in composite carbon nitride layer, measure the crystal plane of the crystal grain of hexagonal crystal phase with field emission type SEM and EBSD device, the inclination angle that the normal of (0001) face becomes with respect to the normal direction of matrix surface, and in this mensuration inclination angle, mensuration inclination angle by the normal direction with respect to matrix surface within the scope of 0～90 degree is carried out subregion and is added up to the number of degrees that are present in each subregion by 0.25 degree spacing, and obtain the inclination angle subregion that has peak-peak, and obtaining the number of degrees that are present in 2～12 degree inclination angle subregions adds up to, and obtain the number of degrees that are present within the scope of this 2～12 degree inclination angle subregion and add up to the number of degrees ratio that the inclination angle number of degrees distribute overall that accounts for.
In addition, for each crystal grain of cube crystalline phase in composite carbon nitride layer, measure the particle width W of the direction parallel with matrix surface
c, the direction vertical with matrix surface particle length L
c, calculate the asperratio A of each crystal grain
c(=L
c/ W
c), and by the asperratio A obtaining for each crystal grain
cmean value as average asperratio α
ccalculate, and, by the particle width W obtaining for each crystal grain
cmean value as averaged particles width ω
ccalculate.
Similarly, for each crystal grain of the hexagonal crystal phase in composite carbon nitride layer, measure the particle width W of the direction parallel with matrix surface
h, the direction vertical with matrix surface particle length L
h, and calculate the asperratio A of each crystal grain
h(=L
h/ W
h), and by the asperratio A obtaining for each crystal grain
hmean value as average asperratio α
hcalculate, and, by the particle width W obtaining for each crystal grain
hmean value as averaged particles width ω
hcalculate.
At this, W
c, L
c, W
hand L
hbe determined as follows and carry out.
In the cross section of the composite carbon nitride layer that the composite carbon nitride layer by Ti and Al is formed under the state of abradant surface, for the crystal grain in composite carbon nitride layer, use scanning electron microscope (20000 times of multiplying powers) to spread all over width 10 μ m and carry out the observation of many visual fields, and each crystal grain is measured to W
c, L
c, W
hand L
h.
In their value shown in table 7.
Be present in Ti in the crystallization with cubic crystal structure and the change in concentration of Al:
In addition, use transmission electron microscope (200000 times of multiplying powers), tiny area to composite carbon nitride layer is observed, and while using energy dispersion type x-ray spectrometry (EDS) to carry out composition analysis from sectional side, in the crystallization with cubic crystal structure in composite carbon nitride layer, observe the periodic change in concentration of Ti and Al, have the relatively large region of X and less region.For 5 crystallizations that exist in the crystallization of the Ti of the crystallization with cubic crystal structure in composite carbon nitride layer and the periodic change in concentration of Al, in the enterprising line linearity analysis of direction of the periodic change in concentration of existence in the relatively large region of X and less region, by getting separately average of the maximum of X of measured crystallization and minimum of a value, obtain the average composition separately in the relatively large region of X and less region, differed from as the maximum of X and the difference of minimum of a value of measured crystallization and obtained, by 5 measured crystallizations being averaged to obtain the mean value of the maximum of X and the difference of minimum of a value.Similarly, for 5 crystallizations that exist in the crystallization of the Ti of the crystallization with cubic crystal structure in composite carbon nitride layer and the periodic change in concentration of Al, from above-mentioned linear analysis result, by calculating the relatively large Ti that on average obtains measured crystallization of distance in region and the cycle of the change in concentration of Al of X, and by 5 measured crystallizations being averaged to the mean value in the cycle of the change in concentration of obtaining Ti and Al.
Then, with coating tool 1～15 of the present invention in the same manner, for comparative example coating tool 1～13 and reference example coating tool 14,15, measure average A l and contain proportional Y, the average bed thickness t of hard coating layer, the mutually shared area ratio S of hexagonal crystal containing proportional X, average C respectively
hand the mensuration inclination angle of the normal of (0001) face of the crystal grain of hexagonal crystal phase is present in the number of degrees ratio and the inclination angle subregion that has peak-peak of inclination angle subregion 2～12 degree with respect to the normal of matrix surface.
In addition, to W
c, L
c, W
hand L
hmeasure, and calculate α
c, ω
c, α
hand ω
h.
In their value shown in table 8.
[table 3]
[table 4]
(note) film forming classification H～J inserts TiCl in film formation process
4etching work procedure.
[table 5]
[table 6]
Then, above-mentioned various coating tools are all being anchored on stationary fixture under the state of leading section that cutter footpath is the instrument steel cutter of 125mm, coating tool 1～15 of the present invention, comparative example coating tool 1～13 and reference example coating tool 14,15 are implemented to dry type high-speed planar milling, the test of heartcut machining of one of conduct high speed interrupted cut of steel alloy shown below, measured the wear of the tool flank width of cutting edge.
Workpiece: the bulk of JISSCM440 width 100mm, length 400mm,
Rotating speed: 943min
-1,
Cutting speed: 370m/min,
Cutting depth: 1.2mm,
The single-blade amount of feeding: 0.10mm/ sword,
Cutting time: 8 minutes,
The result of above-mentioned cutting test shown in table 9.
[table 9]
The * symbol on comparative example coating tool, reference example coating tool one hurdle represent to collapse cutting time till cutter reaches the life-span because producing (minute).
[embodiment 2]
As material powder, prepare WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, the Cr of the average grain diameter all with 1～3 μ m
3c
2powder, TiN powder and Co powder, these material powders are fitted in to the mix proportion shown in table 10, further add paraffin, in acetone, ball milling mixes 24 hours, after drying under reduced pressure, pressed compact take the pressure punch forming of 98MPa as reservation shape, this pressed compact predetermined temperature within the scope of with 1370～1470 ℃ in the vacuum of 5Pa is kept under the condition of 1 hour, carry out vacuum-sintering, after sintering, process by the cutting edge reconditioning of cutting blade being implemented to R:0.07mm the WC base cemented carbide tool base a～ε processed that produces respectively the blade shapes with iso standard CNMG120412.
And, as material powder, prepare the TiCN(of the average grain diameter all with 0.5～2 μ m by quality ratio for TiC/TiN=50/50) and powder, Mo
2c powder, ZrC powder, NbC powder, TaC powder, WC powder, Co powder and Ni powder, these material powders are fitted in to the mix proportion shown in table 11, by ball mill wet mixed 24 hours, after dry, take the pressure punch forming of 98MPa as pressed compact, this pressed compact is carried out to sintering in the blanket of nitrogen of 1.3kPa under the temperature maintenance condition of 1 hour with 1540 ℃, after sintering, the cutting edge reconditioning of cutting blade enforcement R:0.09mm is processed to produce to the TiCN based ceramic metal tool base ζ～κ processed of the blade shapes with iso standard CNMG120412.
Then, use common chemical evaporation plating device, under the condition shown in table 3 and table 4, form (Ti of the present invention on the surface of these tool base α～ε and tool base ζ～κ with target bed thickness evaporation
1-Xal
x) (C
yn
1-Y) layer, thereby produce the coating tool of the present invention 16～30 shown in table 12, table 13.
In addition, for coating tool 19～28 of the present invention, under the formation condition shown in table 3, form lower layer and/or upper layer.
And, with object relatively, similarly use common chemical evaporation plating device, under the condition shown in table 3 and table 5, form (the Ti of comparative example with target bed thickness evaporation on the surface of α～ε and tool base ζ～κ
1-xal
x) (C
yn
1-y), produce thus the comparative example coating tool 16～28 shown in table 12, table 14.
In addition, with coating tool 19～28 of the present invention in the same manner, for comparative example coating tool 19～28, under the formation condition shown in table 3, form lower layer and/or upper layer.
For reference, use physical vapor deposition device in the past, the surface that is plated in tool base β and tool base θ by arc ions forms the (Ti of reference example with target bed thickness evaporation
1-Xal
x) (C
yn
1-Y) layer, produce thus the reference example coating tool 29,30 shown in table 12, table 14.
In addition, the condition of arc ion plating is used the condition identical with the condition shown in embodiment 1, forms the target average composition shown in the table 14, (Ti of the average bed thickness of target at the surperficial evaporation of described tool base
1-Xal
x) (C
yn
1-Y) layer, thereby produce reference example coating tool 29,30.
Then, for the hard coating layer of the invention described above coating tool 16～30, use the method identical with the method shown in embodiment 1, the average bed thickness of each layer of mensuration hard coating layer, the average A l of composite carbon nitride layer contain proportional Y, the mutually shared area ratio S of hexagonal crystal containing proportional X, average C
hand the mensuration inclination angle of the normal of (0001) face of the crystal grain of hexagonal crystal phase is present in the number of degrees ratio and the inclination angle subregion that has peak-peak of inclination angle subregion 2～12 degree with respect to the normal of matrix surface.
In addition, for each crystal grain of cube crystalline phase in composite carbon nitride layer, measure/calculate W
c, L
c, A
c(=L
c/ W
c), α
cand ω
c, and, for each crystal grain of the hexagonal crystal phase in composite carbon nitride layer, measure/calculate W
h, L
h, A
h(=L
h/ W
h), α
hand ω
h.
Its result shown in table 13.
Then, for comparative example coating tool 16～28 and reference example coating tool 29,30, the average A l of the average bed thickness of each layer, composite carbon nitride layer that measures respectively/calculate in the same manner hard coating layer with coating tool 16～30 of the present invention containing proportional X, average C containing the mutually shared area ratio S of proportional Y, hexagonal crystal
h, hexagonal crystal phase the mensuration inclination angle of normal of (0001) face of crystal grain be present in the number of degrees ratio of inclination angle subregion 2～12 degree with respect to the normal of matrix surface and have the W of each crystal grain of cube crystalline phase in inclination angle subregion and the composite carbon nitride layer of peak-peak
c, L
c, A
c(=L
c/ W
c), α
cand ω
c, and, measure/calculate W for each crystal grain of the hexagonal crystal phase in composite carbon nitride layer
h, L
h, A
h(=L
h/ W
h), α
hand ω
h.
Its result shown in table 14.
[table 10]
[table 11]
[table 12]
Then, above-mentioned various coating tools are all being anchored on stationary fixture under the state of leading section of instrument steel lathe tool, to coating tool 16～30 of the present invention, comparative example coating tool 16～28 and reference example coating tool 29,30, implement the dry type high speed interrupted cut processing experiment of carbon steel shown below, the wet type high speed interrupted cut test of cast iron, all measure the wear of the tool flank width of cutting edge.
Machining condition 2:
The length direction of workpiece: JISSCM435 be uniformly-spaced formed with 4 pods pole,
Cutting speed: 350m/min,
Cutting depth: 1.2mm,
Feed speed: 0.2mm/rev,
Cutting time: 5 minutes,
(common cutting speed is 220m/min)
Machining condition 3:
The length direction of workpiece: JISFCD450 be uniformly-spaced formed with 4 pods pole,
Cutting speed: 340m/min,
Cutting depth: 1.0mm,
Feed speed: 0.2mm/rev,
Cutting time: 5 minutes,
(common cutting speed is 200m/min)
The result of above-mentioned cutting test shown in table 15.
[table 15]
The * symbol on comparative example coating tool, reference example coating tool one hurdle represent to collapse cutting time till cutter reaches the life-span because producing (minute).
[embodiment 3]
As material powder, prepare all to have cBN powder, TiN powder, TiCN powder, TiC powder, Al powder and the Al of the average grain diameter within the scope of 0.5～4 μ m
2o
3powder, these material powders are fitted in to the mix proportion shown in table 16, by ball mill wet mixed 80 hours and after being dried, take the pressure punch forming of 120MPa as thering is diameter: the pressed compact of the size of 50mm × thickness: 1.5mm, then, by this pressed compact in the vacuum atmosphere of pressure: 1Pa, predetermined temperature within the scope of using 900～1300 ℃ keeps carrying out sintering under the condition of 60 minutes and as cutting edge sheet presintering body, by this presintering body with prepare separately there is Co:8 quality %, WC: under the overlapping state of the WC base cemented carbide supporting slice processed of the size of remaining composition and diameter: 50mm × thickness: 2mm, pack common ultra-high pressure sintering device into, in common condition at pressure: 4GPa, temperature: retention time in the predetermined temperature within the scope of 1200～1400 ℃: carry out ultra-high pressure sintering under the condition of 0.8 hour, after sintering, use skive to grind upper and lower surface, and be divided into predetermined size by wire electrodischarge processing unit (plant), further there is Co:5 quality %, TaC:5 quality %, WC: the soldering portion (nose part) of the WC base cemented carbide vane body processed of the shape (80 ° of rhombuses of thickness: 4.76mm × inscribed circle diameter: 12.7mm) of remaining composition and iso standard CNGA120412 is used to be had in volume % by Zr:37.5%, Cu:25% and Ti: the brazing material of the Ti-Zr-Cu alloy of the composition that residue forms carries out soldering, after periphery is processed into preliminary dimension, cutting blade is implemented to width: 0.13mm, angle: the cutting edge reconditioning processing of 25 °, further implementing fine finishining grinds, produce respectively thus the tool base first～fourth of the blade shapes with iso standard CNGA120412.
[table 16]
Then, use common chemical evaporation plating device, under the condition shown in table 3 and table 4, form (Ti of the present invention on the surface of these tool base first～fourths with target bed thickness evaporation
1-Xal
x) (C
yn
1-Y) layer, produce thus the coating tool of the present invention 31～40 shown in table 17, table 18.
In addition, for coating tool 34～38 of the present invention, under the formation condition shown in table 3, form lower layer and/or upper layer.
And, with object relatively, similarly use common chemical evaporation plating device, under the conditions shown in Table 4, form (the Ti of comparative example with target bed thickness evaporation on the surface of tool base first～fourth
1-xal
x) (C
yn
1-y), produce thus the comparative example coating tool 31～38 shown in table 17, table 19.
In addition, for comparative example coating tool 34～38, with coating tool 34～38 of the present invention in the same manner, under the formation condition shown in table 3, form lower layer and/or upper layer.
For reference, use physical vapor deposition device in the past, by arc ion plating, form (the Ti of reference example with target bed thickness evaporation on the surface of tool base first and tool base second
1-Xal
x) (C
yn
1-Y) layer, produce thus the reference example coating tool 39,40 shown in table 17, table 19.
In addition, the condition of arc ion plating is used the condition identical with the condition shown in embodiment 1, forms the target average composition shown in the table 19, (Ti of the average bed thickness of target at the surperficial evaporation of described tool base
1-Xal
x) (C
yn
1-Y) layer, thereby produce reference example coating tool 39,40.
Then, for the hard coating layer of the invention described above coating tool 31～40, use the method identical with the method shown in embodiment 1, the average A l that measures composite carbon nitride layer contains proportional Y, the average bed thickness t of hard coating layer, the mutually shared area ratio S of hexagonal crystal containing proportional X, average C
hand the mensuration inclination angle of the normal of (0001) face of the crystal grain of hexagonal crystal phase is present in the ratio and the inclination angle subregion that has peak-peak of the number of degrees of inclination angle subregion 2～12 degree with respect to the normal of matrix surface.
In addition, for each crystal grain of cube crystalline phase in composite carbon nitride layer, measure/calculate W
c, L
c, A
c(=L
c/ W
c), α
cand ω
c, and, for each crystal grain of the hexagonal crystal phase in composite carbon nitride layer, measure/calculate W
h, L
h, A
h(=L
h/ W
h), α
hand ω
h.
Its result shown in table 18.
Then, for comparative example coating tool 31～38 and reference example coating tool 39,40, the average A l that measures respectively/calculate in the same manner composite carbon nitride layer with coating tool 31～40 of the present invention containing proportional X, average C containing proportional Y, the average bed thickness t of hard coating layer, the mutually shared area ratio S of hexagonal crystal
hand the mensuration inclination angle of the normal of (0001) face of the crystal grain of hexagonal crystal phase is present in the ratio of the number of degrees in inclination angle subregion 2～12 degree with respect to the normal of matrix surface and has the W of each crystal grain of cube crystalline phase in inclination angle subregion and the composite carbon nitride layer of peak-peak
c, L
c, A
c(=L
c/ W
c), α
cand ω
c, and, measure/calculate W for each crystal grain of the hexagonal crystal phase in composite carbon nitride layer
h, L
h, A
h(=L
h/ W
h), α
hand ω
h.
Its result shown in table 19.
[table 17]
Then, above-mentioned various coating tools are all being anchored on stationary fixture under the state of leading section of instrument steel lathe tool, to coating tool 31～40 of the present invention, comparative example coating tool 31～38 and reference example coating tool 39,40, implement the dry type high speed interrupted cut processing experiment of carburizing and quenching steel alloy shown below, measure the wear of the tool flank width of cutting edge.
Workpiece: JISSCr420(hardness: HRC60) length direction be uniformly-spaced formed with 4 pods pole,
Cutting speed: 220m/min,
Cutting depth: 0.10mm,
Feed speed: 0.10mm/rev,
Cutting time: 4 minutes,
The result of above-mentioned cutting test shown in table 20.
[table 20]
The * symbol on comparative example coating tool, reference example coating tool one hurdle represent to collapse cutting time till cutter reaches the life-span because producing (minute).
Result from shown in table 6～9, table 12～15 and table 17～20: coating tool 1～40 of the present invention, evaporation is formed with the (Ti being made up of the line and staff control of cube crystalline phase and hexagonal crystal phase
1-Xal
x) (C
yn
1-Y) layer, and when the higher mar proof of this layer of maintenance, toughness improves, and therefore can in the high-speed milling machining of steel alloy or the processing of external diameter high speed interrupted cut, bring into play excellent adhesiveness, lubricity, resistance to cutter and the mar proof of collapsing.
Especially, for coating tool 4～7,9～15,19～22,24～30,34～38,40 of the present invention, due to the averaged particles width of each crystal grain of cube crystalline phase and hexagonal crystal phase, average asperratio are placed in predetermined number range, therefore mar proof further improves.
With respect to this, for comparative example coating tool 1～13,16～28,31～38 and reference example coating tool 14,15,29,30,39,40, clear and definite not only hard coating layer all produce collapse cutter, damaged, the Abnormal damage such as peel off, and reach service life within the shorter time.
Utilizability in industry
As mentioned above, according to the coating tool of this invention, not only can in the high speed interrupted cut processing of the high-speed milling machining of steel alloy etc., use, but also can use as the coating tool of various workpiece, and bring into play excellent mar proof in long-term use, therefore can be enough to tackle the high performance of topping machanism and the saving labourization of machining and even cost degradation of energy-saving.
Claims (4)
1. a surface-coated cutting tool, it is on the surface of any matrix forming by tungsten carbide base carbide alloy, base titanium carbonitride or cubic boron nitride base ultra-high pressure sintered body, be coated with hard coating layer, this surface-coated cutting tool is characterised in that
(a) above-mentioned hard coating layer at least contains the Ti of average bed thickness 1～20 μ m and the composite carbon nitride layer of Al that form by chemical vapor deposition method evaporation, in the time that its average composition is represented with following composition formula, Al meets respectively 0.60≤X≤0.95,0.0005≤Y≤0.005 containing proportional X and C containing proportional Y, wherein, X, Y are atomic ratio
Composition formula: (Ti
1-Xal
x) (C
yn
1-Y)
(b) for above-mentioned composite carbon nitride layer, while using EBSD device to analyze from the longitudinal section direction of the composite carbon nitride layer of above-mentioned Ti and Al the crystalline texture of each crystal grain, form by observing cube crystalline phase of EBSD image of cubic lattice and the line and staff control of hexagonal crystal phase that observes the EBSD image of hexagoinal lattice, and, hexagonal crystal shared area ratio in the total of cube crystalline phase and hexagonal crystal phase is 10～50 area %
(c) measure the crystal plane of the crystal grain of the hexagonal crystal phase of above-mentioned composite carbon nitride layer, the inclination angle that the normal of (0001) face becomes with respect to the normal direction of matrix surface, and in the inclination angle of this mensuration, when mensuration inclination angle by the normal direction with respect to matrix surface within the scope of 0～90 degree is carried out subregion and adds up to the number of degrees that are present in each subregion by 0.25 degree spacing, there is peak-peak in the inclination angle subregion within the scope of 2～12 degree, and the number of degrees that are present in this 2～12 inclination angle subregion of spending add up to the more than 40% of total number of degrees in the number of degrees distribution of inclination angle.
2. surface-coated cutting tool according to claim 1, is characterized in that,
The averaged particles width ω of the crystal grain of cube crystalline phase of above-mentioned composite carbon nitride layer
cbe below 0.3 μ m, and average asperratio α
cbe less than 2, and,
The averaged particles width ω of the crystal grain of the hexagonal crystal phase of above-mentioned composite carbon nitride layer
hbe 0.1～2 μ m, and average asperratio α
hbe more than 2.
3. surface-coated cutting tool according to claim 1 and 2, is characterized in that,
In the crystallization of cubic crystal structure of crystal grain of cube crystalline phase with above-mentioned composite carbon nitride layer, there is (Ti
1-Xal
x) (C
yn
1-Y) Ti and the periodic change in concentration of Al, and the maximum of X and the difference of minimum of a value that periodically change be 0.05～0.25, and this cycle is 3～30nm.
4. according to the surface-coated cutting tool described in any one in claims 1 to 3, it is characterized in that,
Above-mentioned composite carbon nitride layer is the layer that is used as the chemical vapor deposition method evaporation formation of reacting gas composition by least containing trimethyl aluminium.
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| JP2012249280A JP6037113B2 (en) | 2012-11-13 | 2012-11-13 | A surface-coated cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed intermittent cutting |
| JP2012-249280 | 2012-11-13 |
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Also Published As
| Publication number | Publication date |
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| CN103801718B (en) | 2017-09-15 |
| JP2014097536A (en) | 2014-05-29 |
| JP6037113B2 (en) | 2016-11-30 |
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