CN103801718B - Surface-coated cutting tool - Google Patents
Surface-coated cutting tool Download PDFInfo
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- CN103801718B CN103801718B CN201310395586.1A CN201310395586A CN103801718B CN 103801718 B CN103801718 B CN 103801718B CN 201310395586 A CN201310395586 A CN 201310395586A CN 103801718 B CN103801718 B CN 103801718B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/148—Composition of the cutting inserts
Abstract
The present invention provides a kind of surface-coated cutting tool, and it is coated with for example, by containing Al in the matrix surface being made up of WC base cemented carbides, TiCN based ceramic metals, cBN base ultra-high pressure sintered bodies（CH3）3What the line and staff control of the hexagonal crystal phase and cube crystalline phase that are used as the chemical vapor deposition method film forming of reacting gas composition was constituted（Ti1‑ XAlX）（CYN1‑Y）Layer, wherein, X, Y are by 0.60≤X≤0.95 of atomic ratio measuring, 0.0005≤Y≤0.005, determine the crystal grain of above-mentioned hexagonal crystal phase（0001）The normal in face is relative to formed by the normal direction of matrix surface during inclination angle, there is peak-peak in the inclination angle subregion in the range of 2~12 degree, and shared number of degrees ratio is more than 40% in the inclination angle subregion, and the Mean aspect size of preferably cubic grain compares αcLess than 2, averaged particles width ωcFor less than 0.3 μm, also, the Mean aspect size of hexagonal crystal grain compares αhFor more than 2, averaged particles width ωhFor 0.1~2 μm.
Description
Technical field
The present invention relates to a kind of surface-coated cutting tool（Hereinafter referred to as coating tool）, its hard coating layer with
The hyperpyrexia of steel alloy etc. is produced and impact load acts on and plays excellent resistance in the high rate intermittent machining of cutting edge
Collapse knife.
Background technology
In the past known to have following coating tool, it is generally by tungsten carbide（Represented below with WC）Base cemented carbide, carbon nitrogen
Change titanium（Represented below with TiCN）Based ceramic metal or cubic boron nitride（Represented below with cBN）Base ultra-high pressure sintered body is constituted
Matrix（They are referred to as matrix below）Surface, by physical vapor deposition evaporation be formed with Ti-Al systems complex nitride
Layer is used as hard coating layer, and these coating tools play excellent wear resistance.
But, although above-mentioned conventional evaporation is formed with the coating tool wear resistance phase of Ti-Al systems composite nitride nitride layer
To excellent, but easily produced when being used under high rate intermittent machining condition and collapse the abnormal wears such as knife, therefore to hard coating layer
Improvement propose various suggestions.
For example, in patent document 1, proposition has to be deposited to be formed when with composition formula on the surface of matrix by physical vapor deposition：
（Ti1-XAlX）When N is represented, 0.35≤X≤0.60 is met（Wherein, X is atomic ratio）Ti and Al complex nitride constitute
Hard coating layer, and using hard coating layer as above-mentioned（Ti、Al）N layers of granular crystal tissue and the alternating layer of columanar structure
Stack structure and constitute, thus in the high rate intermittent machining of glass hard steel, hard coating layer play it is excellent it is resistance to collapse knife,
Fracture resistance and peel resistance.
But, the coating tool is deposited to form hard coating layer by physical vapor deposition, thus can not by Al contain than
Example X is set to more than 0.6, it is desirable to further improve cutting ability.
From as above viewpoint, it is also proposed that by chemical vapor deposition method formation hard coating layer so that by Al contain than
Example X is improved to 0.9 or so technology.
For example, in patent document 2, recording in TiCl4、AlCl3、NH3Mixed reaction gas in, at 650~900 DEG C
Temperature range in carry out chemical vapor deposition, be 0.65~0.95 so as to which the content ratio X to form Al value is deposited（Ti1- XAlX）N layers, but in the publication, with this（Ti1-XAlX）Al is further coated on N layers2O3Layer, and thus improve insulation effect
For the purpose of, but do not disclose to be formed and improve X value to 0.65~0.95（Ti1-XAlX）N layers, there is which kind of shadow to cutting ability
Ring.
Also, in such as patent document 3, proposition has TiCN layer, Al2O3Layer is as internal layer, by chemical vapor deposition method at it
On cube crystal structure by cube crystal structure or comprising structure of hexagonal crystal（Ti1-XAlX）N layers（Wherein, X is 0.65~0.9）
Coated as outer layer, and improve the resistance to of coating tool by assigning 100~1100MPa compression stress to the outer layer
The suggestion of hot and fatigue strength.
Patent document 1：Japanese Unexamined Patent Publication 2011-224715 publications
Patent document 2：Japanese Unexamined Patent Application Publication 2011-516722 publications
Patent document 3：Japanese Unexamined Patent Application Publication 2011-513594 publications
In recent years, it is strong to the requirement for saving labourization and energy-saving in machining, as it does so, being machined with more
High speed, efficient tendency, therefore resistance to collapse knife, fracture resistance and peel resistance etc. resistance to different to coating tool further requirement
It is often damaging, and require to play excellent wear resistance in long-term use.
But, the coating tool described in above-mentioned patent document 1 be deposited by physical vapor deposition to be formed by（Ti1-XAlX）N
The hard coating layer of layer composition, and the Al content X in hard coating layer can not be improved, therefore for example when the high speed for steel alloy
During interrupted cut, it cannot be said that resistance to collapse knife abundant.
On the other hand, for being deposited what is formed by chemical vapor deposition method described in above-mentioned patent document 2（Ti1-XAlX）N
Layer, it is possible to increase Al content X, and can form a cube crystal structure, therefore, it is possible to obtain with predetermined hardness and wear-resistant
The excellent hard coating layer of property, but it is insufficient with the adhesion strength of matrix, and also toughness is poor.
In addition, the coating tool described in above-mentioned patent document 3 has predetermined hardness and excellent in wear resistance, but toughness
It is poor, therefore during high rate intermittent machining for steel alloy etc., easily produce and collapse the Abnormal damages such as knife, defect, stripping, no
It can say that performance being capable of gratifying cutting ability.
The content of the invention
Cut it is an object of the invention to provide a kind of high rate intermittent of high rate intermittent cutting even in for steel alloy etc.
When cutting processing, still possess excellent toughness, and play in long-term use the excellent resistance to cladding work for collapsing knife, wear resistance
Tool.
The present inventor etc. from the above point of view, are formed including at least Ti and Al to improve by chemical vapor deposition to be deposited
Compound carbonitride（Use sometimes below "（Ti, Al）（C, N）" or "（Ti1-XAlX）（CYN1-Y）" represent）Hard coating layer
The resistance to of coating tool collapses knife, wear resistance and the result that further investigation is repeated, and has obtained following opinion.
That is, find by tungsten carbide base carbide alloy（Represented below with " WC base cemented carbides "）, titanium carbide nitride based metal
Ceramics（Represented below with " TiCN based ceramic metals "）Or cubic boron nitride base ultra-high pressure sintered body（" cBN base superelevation is used below
Press sintered body " represent）In any composition matrix surface, for example can be by containing trimethyl aluminium（Al（CH3）3）To make
It is deposited to form the mixing of the predetermined area ratio by cube crystalline phase and hexagonal crystal phase for the chemical vapor deposition method of reacting gas composition
Organizational composition（Ti1-XAlX）（CYN1-Y）This can be combined the six of carbonitride layer by layer as compound carbonitride layer
The crystal grain of prismatic crystal phase（0001）The normal in face is relative to number of degrees distribution proportion in inclination angle formed by the normal direction of matrix surface
More than 40% is set to, thus, composite carbon nitration case keeps toughness while higher wear resistance to improve, and in long-term use
Show and excellent resistance to collapse knife, wear resistance.
Also, the present inventor etc. has found as follows：What is be made up of the line and staff control of above-mentioned cube of crystalline phase and hexagonal crystal phase
（Ti1-XAlX）（CYN1-Y）In layer, by the way that the particle width and asperratio that are measured by the crystal grain to each crystalline phase are obtained
The averaged particles width of crystal grain of each crystalline phase, in the Mean aspect size number range more predetermined than being limited in, so as to tie up
The toughness of compound carbonitride layer is held, and further improves the wear resistance of compound carbonitride layer.
In addition, the discovery such as the present inventor is as follows：Cube crystalline phase with above-mentioned compound carbonitride layer crystal grain it is vertical
Exist in the crystallization of hexagonal structure（Ti1-XAlX）（CYN1-Y）Ti and Al periodic change in concentration, and pass through will periodically
The X of change maximum and minimum value and cycle are limited in predetermined number range, so as to improve compound carbonitride
The hardness of layer, and further improve the wear resistance of compound carbonitride layer.
Therefore, the coating tool that will be provided with compound carbonitride layer described above is cut for the high rate intermittent of such as steel alloy
When cutting etc., it can suppress to collapse the generation of knife, defect, stripping etc., and excellent wear resistance can be played in long-term use.
The invention is the surface-coated cutting tool completed according to above-mentioned result of study, with following feature：
（1）A kind of surface-coated cutting tool, it is by tungsten carbide base carbide alloy, base titanium carbonitride or vertical
The surface for the matrix that any of prismatic crystal boron nitride-based ultra-high-pressure sintered body is constituted, is coated with hard coating layer, wherein,
（a）Above-mentioned hard coating layer is at least containing the Ti that 1~20 μm of the average thickness to be formed is deposited by chemical vapor deposition method
With Al compound carbonitride layer, when be averaged composition represented with following composition formulas when, Al content ratio X and C content ratios Y
（Wherein, X, Y are atomic ratio）0.60≤X≤0.95,0.0005≤Y≤0.005 are met respectively,
Composition formula：（Ti1-XAlX）（CYN1-Y）
（b）For above-mentioned compound carbonitride layer, crystalline texture of the EBSD device to each crystal grain is used
When being analyzed from the longitudinal section direction of above-mentioned Ti and Al compound carbonitride layer, dissipated by observing that the electronics of cubic lattice is carried on the back
The line and staff control of cube crystalline phase for penetrating diffraction image and the hexagonal crystal phase for the EBSD image for observing hexagoinal lattice
Constitute, also, hexagonal crystal cube crystalline phase and hexagonal crystal phase it is total in shared area ratio be 10~50 area %,
（c）Determine the crystal plane, i.e. of the crystal grain of the hexagonal crystal phase of above-mentioned compound carbonitride layer（0001）The normal phase in face
For inclination angle formed by the normal direction of matrix surface, and in the inclination angle of the measure, by relative to the method for matrix surface
Measure inclination angle of the line direction in the range of 0~90 degree carries out subregion and total degree being present in each subregion by 0.25 degree of spacing
During number, there is peak-peak in the inclination angle subregion in the range of 2~12 degree, and be present in 2~12 degree of the inclination angle subregion
The interior number of degrees add up to more than 40% of total number of degrees in the number of degrees distribution of inclination angle.
（2）It is above-mentioned（1）Described surface-coated cutting tool, wherein,
The averaged particles width ω of the crystal grain of cube crystalline phase of above-mentioned compound carbonitride layercFor less than 0.3 μm, and it is average
Asperratio αcLess than 2, also,
The averaged particles width ω of the crystal grain of the hexagonal crystal phase of above-mentioned compound carbonitride layerhFor 0.1~2 μm, and it is average
Asperratio αhFor more than 2.
（3）It is above-mentioned（1）Or（2）Described surface-coated cutting tool, wherein,
In the crystallization of cube crystal structure of the crystal grain of cube crystalline phase with above-mentioned compound carbonitride layer, exist
（Ti1-XAlX）（CYN1-Y）Ti and Al periodic change in concentration, and the difference of periodically variable X maxima and minima
For 0.05~0.25, preferably 0.10~0.20, and the cycle is 3~30nm.
（4）It is above-mentioned（1）Extremely（3）Any one of surface-coated cutting tool, wherein,
Above-mentioned compound carbonitride layer is the chemical vapor deposition by being at least used as reacting gas composition containing trimethyl aluminium
The layer to be formed is deposited in method.
In addition, the hard coating layer of the present invention using composite carbon nitration case as described above as its essential structure, it is but logical
Cross and be further used in conjunction with known lower layer and upper layer etc., more excellent characteristic can be createed.
Then, more specific description is carried out to the hard coating layer of the coating tool of the invention.
Constitute the Ti and Al of hard coating layer compound carbonitride（（Ti1-XAlX）（CYN1-Y））The average composition of layer：
Above-mentioned（Ti1-XAlX）（CYN1-Y）In layer, if Al content ratio X（Atomic ratio）Value be less than 0.60, then be combined
The area ratio of hexagonal crystal phase in the tissue of carbonitride layer is reduced, so that resistance to crescent hollow abrasion is reduced, and becomes easy
The Abnormal damages such as knife, defect are collapsed in generation, on the other hand, if X（Atomic ratio）Value more than 0.95, then because Ti content ratios are relative
Reduce so that the area ratio of cube crystalline phase in the tissue of compound carbonitride layer is reduced so that hardness is reduced, and it is resistance to after
Knife face abrasiveness is reduced, therefore need to be by X（Atomic ratio）Value be set to less than more than 0.60 0.95.
Also, above-mentioned（Ti1-XAlX）（CYN1-Y）In layer, C compositions have the effect for the lubricity for improving layer, the opposing party
Face, N compositions have the effect for the elevated temperature strength for improving layer, if but the content ratio Y of C compositions（Atomic ratio）Less than 0.0005,
High-lubricity can not be then obtained, on the other hand, if Y（Atomic ratio）More than 0.005, then elevated temperature strength is reduced, therefore by Y（Atom
Than）Value be set to less than more than 0.0005 0.005.
In addition, above-mentioned（Ti1-XAlX）（CYN1-Y）Layer, if its average thickness is less than 1 μm, can not substantially ensure that makes for a long time
Wear resistance in, on the other hand, if its average thickness is more than 20 μm, in high thermogenetic high rate intermittent cutting
Easily cause pyroplastic deformation, this turn into partial wear the reason for, therefore is amounted to be averaged thickness be set to 1~20 μm.
In the invention, by averagely being constituted with above-mentioned（Ti1-XAlX）（CYN1-Y）The compound carbonitride layer of layer composition
In, not throughout the overall homogeneous structure of layer, but formed as the line and staff control of hexagonal crystal phase and cube crystalline phase.
That is, for the section for being combined carbonitride layer, its crystalline texture is divided using EBSD device
During analysis, dissipated by observing that cube crystalline phase of EBSD image of cubic lattice is carried on the back with the electronics for observing hexagoinal lattice
The line and staff control for penetrating the hexagonal crystal phase of diffraction image is constituted, and hexagonal crystal cube crystalline phase and hexagonal crystal phase it is total in shared by
Area ratio be 10~50 area %.
In the compound carbonitride layer being made up of above-mentioned line and staff control, if the area ratio of hexagonal crystal phase is more than 50 faces
Product %, then hardness reduction, especially resistance to wear of the tool flank reduction.
On the other hand, when the area ratio of hexagonal crystal phase becomes less than 10 area %, resistance to crescent hollow abrasion declines, and
Cutting edge becomes easily to cause Abnormal damage, and its result life tools shortens.
Thus, by hexagonal crystal in the compound carbonitride layer being made up of the line and staff control of cube crystalline phase and hexagonal crystal phase
Shared area ratio is set to 10~50 area %.
Also, in the invention, in order to further improve compound carbonitride layer resistance to crescent hollow abrasion, it is necessary to for
The crystal grain of hexagonal crystal phase is constituted in compound carbonitride layer, field emission type SEM and EBSD is used
Device determines the crystal plane, i.e. of the crystal grain of hexagonal crystal phase（0001）The normal in face relative to matrix surface normal direction institute into
Inclination angle, and in the inclination angle of the measure, by the measure relative to the normal direction of matrix surface in the range of 0~90 degree
Inclination angle by 0.25 degree of spacing carry out subregion and it is total be present in the number of degrees in each subregion when, make inclining in the range of 2~12 degree
There is peak-peak in oblique angle subregion, and make the number of degrees being present in 2~12 degree of inclination angle subregions are total to account for the inclination angle number of degrees
More than 40% of total number of degrees in distribution.
Also, the crystal plane of the crystal grain of above-mentioned hexagonal crystal phase, i.e.（0001）Normal of the normal in face relative to matrix surface
Inclination angle formed by direction is present in total number of degrees during the number of degrees in 2~12 degree of inclination angle subregions are distributed less than the inclination angle number of degrees
When 40%, it is impossible to expect excellent resistance to crescent hollow abrasion, it is therefore desirable to will be present in 2~12 degree of inclination angle subregions
Number of degrees ratio is set to more than 40%.
In addition, in the invention, the respective crystalline substance for constituting cube crystalline phase and hexagonal crystal phase in compound carbonitride layer
Averaged particles width and average asperratio, are preferably set in predetermined number range, thereby, it is possible to expect to be combined by grain
The hardness of carbonitride layer and the further raising of resistance to crescent hollow abrasion.
In addition, in the invention, in cube crystal structure of the crystal grain of cube crystalline phase with above-mentioned compound carbonitride layer
Exist in crystallization（Ti1-XAlX）（CYN1-Y）Ti and Al periodic change in concentration, and preferably by periodically variable X most
Big value and minimum value and cycle set in predetermined number range, thereby, it is possible to expect the hardness of compound carbonitride layer with
The further raising of resistance to wear of the tool flank.
It is specific as follows.
First, the crystal grain for constituting cube crystalline phase in compound carbonitride layer is described.
The particle width of the above-mentioned crystal grain in the direction parallel with matrix surface is set to Wc, and will be vertical with matrix surface
The particle length of above-mentioned crystal grain in direction be set to Lc, and by the WcWith LcRatio Lc/WcIt is set to the asperratio A of each crystal grainc,
Also, the asperratio A that will be obtained for each crystal graincAverage value be set to Mean aspect size and compare αc, will be for each crystalline substance
The particle width W that grain is obtainedcAverage value be set to averaged particles width ωcWhen, Mean aspect size is compared into αcIt is set to less than 2, and
And by averaged particles width ωcLess than 0.3 μm is set to, so as to which cube crystalline phase to be set to the crystalline phase of more high rigidity.
Then, described for constituting the crystal grain of the hexagonal crystal phase in compound carbonitride layer.
Identically with the situation of the crystal grain on constituting cube crystalline phase, for the hexagonal crystal being combined in carbonitride layer
Each crystal grain of phase, W is set to by the particle width in the direction parallel with matrix surfaceh, and by the direction vertical with matrix surface
Particle length be set to Lh, and by the WhWith LhRatio Lh/WhIt is set to the asperratio A of each crystal grainh, also, will be for each
The asperratio A that crystal grain is obtainedhAverage value be set to Mean aspect size and compare αh, the particle obtained for each crystal grain is wide
Spend WhAverage value be set to averaged particles width ωhWhen, Mean aspect size is compared into αhMore than 2 are set to, and averaged particles are wide
Spend ωh0.1~2 μm is set to, so as to improve the resistance to crescent hollow abrasion of hexagonal crystal phase.
Thus, in the invention, preferably by the Mean aspect chi of the crystal grain of cube crystalline phase constituted in compound carbonitride layer
It is very little to compare αcIt is set to be less than 2, and by averaged particles width ωcIt is set to less than 0.3 μm, also, the crystal grain of hexagonal crystal phase will be constituted
Mean aspect size compares αhIt is set to more than 2, and by averaged particles width ωh0.1~2 μm is set to, and it is compound thus, it is possible to realize
The raising and the raising of resistance to crescent hollow abrasion of the hardness of carbonitride layer.
In addition, by the crystallization with cube crystal structure with composition formula：（Ti1-XAlX）（CYN1-Y）During expression, there is Ti and Al
Periodic change in concentration when, in crystal grain produce strain, and hardness improve.If however, Ti and Al change in concentration is big
The difference of small index, i.e., the maximum of the X in described composition formula and minimum value be less than 0.05, then the strain of foregoing crystal grain it is smaller and
Can not estimated sufficient hardness raising.On the other hand, if X maximum and the difference of minimum value are more than 0.25, the strain of crystal grain
Become too much, lattice defect becomes big, and hardness is reduced.Also, if the cycle of change in concentration is less than 3nm, toughness is reduced, and
If more than 30nm, the raising effect of hardness can not be expected.Therefore, for being present in the Ti in the crystallization with cube crystal structure
With Al change in concentration, the difference of periodically variable X maximum and minimum value is set to 0.05~0.25,0.10 is preferably set to
~0.20, and its cycle is preferably set to 3~30nm, and raising thus, it is possible to the hardness of realizing compound carbonitride layer and resistance to
The raising of wear of the tool flank.
The invention（Ti1-XAlX）（CYN1-Y）Layer can be deposited to be formed for example, by the chemical vapor deposition method of following conditions.
Reacting gas is constituted（Capacity %）：
TiCl42.0~3.0%, Al（CH3）33.0~5.0%,
AlCl33.0~5.0%, NH32.0~5.0%,
N26.0~10.0%, C2H40~1.0%,
Remaining H2、
Reaction atmosphere temperature：700~900 DEG C,
Reaction atmosphere pressure：2~5kPa,
By the chemical vapor deposition method of above-mentioned condition, can be deposited to be formed average composition meet 0.60≤X≤0.95,0.0005≤
Y≤0.005（Wherein, X, Y are atomic ratio）, and the Ti and Al compound carbonitride layer represented with following composition formulas,
Composition formula：（Ti1-XAlX）（CYN1-Y）.
In addition, the area ratio of cube crystalline phase and hexagonal crystal phase in compound carbonitride layer, is particularly subject to NH3Content
Influence, for example, other conditions are set into constant（Reacting gas is constituted（Capacity %）：TiCl43.0%、Al（CH3）34.0%、
AlCl35.0%、N28.0%、C2H41%th, residue H2, reaction atmosphere temperature：900 DEG C and reaction atmosphere pressure：4kPa）, and only make NH3
Changes of contents when, NH3Content when being the 2.0% of lower limit, the area ratio of hexagonal crystal phase turns into 33%, also, is the upper limit
When 5.0%, the area ratio of hexagonal crystal phase turns into 10%.
In addition, when carrying out the film formation process, reaction is temporarily ceased, and will be by TiCl4：2.0~5.0%, H2：It is remaining, anti-
Answer atmosphere pressures：3.0kPa and reaction atmosphere temperature：The TiCl that 800~900 DEG C of condition is constituted4Predetermined time of etching work procedure insertion
Number, exists so as to be deposited and to be formed in the crystallization of cube crystal structure of the crystal grain of cube crystalline phase with compound carbonitride layer
（Ti1-XAlX）（CYN1-Y）Ti and Al periodic change in concentration Ti and Al compound carbonitride layer.By will be as preceding
The TiCl stated4In etching work procedure insertion film formation process, cubic crystal TiAlCN is optionally etched, and Ti and Al is formed in crystal grain
Locality composition difference, it produces the cyclically-varying of composition, its result hair to stabilize and cause the rearrangement of atom
Existing hardness is improved.
By the compound carbonitride layer of above-mentioned chemical vapor deposition method formation, using EBSD device to each crystalline substance
When the crystalline texture of grain is analyzed from the longitudinal section direction of above-mentioned Ti and Al compound carbonitride layer, by observing cubic crystal
Cube crystalline phase of the EBSD image of lattice and it was observed that the hexagonal crystal of the EBSD image of hexagoinal lattice
The line and staff control of phase is constituted, also, in the mensuration region in the longitudinal section direction of compound carbonitride layer, is observing the electronics back of the body
Cube crystalline phase of Scattering and diffracting image and hexagonal crystal phase it is total in the area ratio of shared hexagonal crystal phase be 10~50 faces
Product %.
In addition, crystal plane to the crystal grain of the hexagonal crystal phase in above-mentioned line and staff control, i.e.（0001）Formed by the normal in face
Inclination angle is measured, and in the measure inclination angle by relative to the normal direction of matrix surface in the range of 0~90 degree
Determine inclination angle by 0.25 degree spacing carry out subregion and it is total be present in the number of degrees in each subregion when, form following inclination angle and be distributed
Form：There is peak-peak in the inclination angle subregion in the range of 2~12 degree, and be present in 2~12 degree of the inclination angle subregion
The interior number of degrees add up to more than 40% of total number of degrees in the number of degrees distribution of inclination angle.
Also, in the chemical vapor deposition condition, by further limit the evaporation of evaporation condition, form composition multiple
The Mean aspect size for closing the crystal grain of cube crystalline phase in carbonitride layer compares αcLess than 2, and averaged particles width ωcFor 0.3
Below μm, also, the Mean aspect size of the crystal grain of composition hexagonal crystal phase compares αhFor more than 2, and averaged particles width ωhFor
0.1~2 μm of cube crystalline phase and the line and staff control of hexagonal crystal phase.
Here, the evaporation condition being further defined is for example as follows.
Reacting gas is constituted（Capacity %）：
TiCl4：2.0~2.5%, Al（CH3）3：3.0~4.0%,
AlCl3：3.0~4.0%, NH3：2.0~5.0%,
N2：6.0~10.0%, C2H4：0~1.0%, it is remaining：H2、
Reaction atmosphere temperature：800~900 DEG C,
Reaction atmosphere pressure：2~3kPa.
The coating tool of the present invention, for example, by containing trimethyl aluminium（Al（CH3）3）It is used as the change of reacting gas composition
Vapour deposition method coats to be formed to be made up of cube crystalline phase of the hexagonal crystal phase containing 10~50 area % and the line and staff control of hexagonal crystal phase
's（Ti1-XAlX）（CYN1-Y）Layer determines the hexagonal crystal phase being combined in carbonitride layer as compound carbonitride layer
The crystal plane of crystal grain is（0001）Formed by the normal in face during inclination angle, relative to matrix surface normal direction at 2~12 degree
In the range of inclination angle subregion in there is peak-peak, and show the number of degrees being present in 2~12 degree of inclination angle subregions
More than 40% inclination angle number of degrees distributional pattern of total total number of degrees accounted in the number of degrees distribution of inclination angle, therefore compound carbonitride
Layer keeps toughness while higher wear resistance to improve, as a result, even in the high rate intermittent cutting for steel alloy etc.
During high rate intermittent machining, it can also be played in long-term use and excellent resistance to collapse knife, wear resistance.
Also, in the present invention, by carrying out above-mentioned evaporation under conditions of further limit, by cube crystalline phase and six sides
What the line and staff control of crystalline phase was constituted（Ti1-XAlX）（CYN1-Y）In layer, by averaged particles width, the Mean aspect of the crystal grain of each crystalline phase
When in the size number range more predetermined than being set in, while maintaining the toughness of compound carbonitride layer, composite carbon can be realized
The further raising of the wear resistance of nitride layer.
In addition, in the present invention, when carrying out above-mentioned evaporation process, reaction is temporarily ceased, and by inserting pre-determined number
TiCl4Etching work procedure, so that the crystallization internal memory of cube crystal structure in the crystal grain of cube crystalline phase with compound carbonitride layer
（Ti1-XAlX）（CYN1-Y）Ti and Al periodic change in concentration, and by periodically variable X maximum and minimum value
And cycle set in predetermined number range when, the hardness and resistance to wear of the tool flank of compound carbonitride layer can be realized
Further improve.
Brief description of the drawings
Fig. 1 is the outline figure for the compound carbonitride layer longitudinal section for representing coating tool of the present invention.
Embodiment
Then, more specific description is carried out to the coating tool of the invention according to embodiment.
[embodiment 1]
As material powder, prepare to be respectively provided with WC powder, TiC powder, ZrC powder, the TaC powder of 1~3 μm of average grain diameter
End, NbC powder, Cr3C2Powder and Co powder, these material powders are combined into matching somebody with somebody shown in synthesis table 1, further added
Paraffin, ball milling mixing 24 hours in acetone, after being dried under reduced pressure, using 98MPa pressure punch forming as the pressed compact of predetermined shape,
Carried out under conditions of predetermined temperature of the pressed compact in 5Pa vacuum in the range of with 1370~1470 DEG C is kept for 1 hour true
After sky sintering, sintering, the WC base cemented carbide systems of the blade shapes with ISOSEEN1203AFSN defineds are produced respectively
Matrix A~D.
Also, as material powder, prepare to be respectively provided with the TiCN of 0.5~2 μm of average grain diameter（It is TiC/ by quality ratio
TiN=50/50）Powder, Mo2C powder, ZrC powder, NbC powder, TaC powder, WC powder, Co powder and Ni powder, by these
Material powder with 98MPa pressure with being combined into, with ball mill wet mixed 24 hours, after drying, being rushed shown in synthesis table 2
Molded is pressed compact, the progress under conditions of being kept for 1 hour with 1540 DEG C of temperature in 1.3kPa blanket of nitrogen by the pressed compact
After sintering, sintering, the TiCN based ceramic metal matrixes a of the blade shapes with iso standard SEEN1203AFSN is produced
~d.
[table 1]
[table 2]
Then, using common chemical evaporation plating device, under conditions of shown in table 3 and table 4, in these tool bases A~D
And tool base a~d surface is deposited to form the present invention's with target thickness（Ti1-XAlX）（CYN1-Y）Layer produces table 6, table
Coating tool of the present invention 1~15 shown in 7.
In addition, for coating tool 6~13 of the present invention, forming lower layer and/or top under the formation condition shown in table 3
Layer.
Also, with the purpose compared, similarly using common chemical evaporation plating device, with the condition shown in table 3 and table 5,
It is deposited to form comparative example with target thickness on tool base A~D and tool base a~d surface（Ti1-xAlx）（CyN1-y）
Layer, thus produces table 6, the comparative example coating tool 1~13 shown in table 8.
In addition, identically with coating tool 6~13 of the present invention, for comparative example coating tool 6~13, shown in table 3
Lower layer and/or upper layer are formed under formation condition.
In order to refer to, it is plated in tool base D's and tool base c by arc ions using conventional physical vapor deposition device
Surface, is deposited to form reference example with target thickness（Ti1-xAlx）（CYN1-Y）Layer, thus produces table 6, the reference shown in table 8
Example coating tool 14,15.
In addition, the condition of arc ion plating is as follows.
（a）In the state of being dried after above-mentioned tool base D and c is cleaned with ultrasonic wave in acetone, circumferentially portion is pacified
The position of central shaft at a predetermined distance on the turntable along in radial direction and arc ion plating apparatus, also, make
For cathode electrode（Evaporation source）The Al-Ti alloys of predetermined composition are configured,
（b）First, while being maintained at 10 to being exhausted in device-2Below Pa vacuum, while will be filled with heater
It is heated in putting after 500 DEG C, to the tool base application -1000V revolved round the sun on the turntable while rotation direct current
Bias, also, 200A electric current is flowed through between the cathode electrode and anode electrode being made up of Al-Ti alloys and is produced electric arc
Electric discharge, makes to produce Al and Ti ions in device, so that Bombardment and cleaning is carried out to tool base surface,
（c）Then, the reaction atmosphere that nitrogen is set to 4Pa as reacting gas is imported in device, and to described
Tool base application-the 50V revolved round the sun on turntable while rotation Dc bias, also, make 120A electric current by above-mentioned
The cathode electrode that Al-Ti alloys are constituted（Evaporation source）Flowed through between anode electrode and produce arc discharge, in the instrument base
The surface of body be deposited the target to be formed shown in table 8 averagely constitute, target average thickness（Ti1-xAlx）（CYN1-Y）Layer, so as to make
Produce reference example coating tool 14,15.
Then, for the hard coating layer of the invention described above coating tool 1~15, each layer of hard coating layer is determined
Be averaged thickness, the average Al content ratios X, averagely C content ratios Y for being combined carbonitride layer, the area ratio shared by hexagonal crystal phase
Example ShAnd the crystal grain of hexagonal crystal phase（0001）The measure inclination angle of the normal in face is present in relative to the normal of matrix surface inclines
Number of degrees ratio in 2~12 degree of oblique angle subregion and there is the inclination angle subregion of peak-peak and be present in cube crystal structure
Crystallization in Ti and Al change in concentration X maximum and the cycle of the difference of minimum value and change in concentration.
In addition, being specifically determined as follows.
Average Al content ratios X, average C content ratios Y measure：
Use offspring mass spectral analysis（SIMS, Secondary-Ion-Mass-Spectroscopy）Device, Xiang Congshi
Expect range illumination ion beam of the face side in 70 μm of 70 μ m, depth direction is carried out for acting on the composition released by sputtering
Concentration mensuration.Average Al content ratios X, average C content ratios Y represent the average value of depth direction.
The measure of the average thickness of each layer of hard coating layer：
Cross-section determination is carried out using scanning electron microscope, is determined respectively at 5 for each layer for constituting hard coating layer
Thickness, and obtain average value, be averaged the average thickness that value is set to hard coating layer.
Area ratio S shared by hexagonal crystal phasehMeasure：
Using EBSD device, in the compound carbonitride that will be made up of Ti and Al compound carbonitride layer
In the state of the section of layer is as abradant surface, in the lens barrel for being arranged at field emission type SEM, to the abradant surface
With 70 degree of incident angle, the electron ray of 15kV accelerating potential is present in described cut with 1nA irradiation electric current to each
Crystal grain in the measurement range of face abradant surface is irradiated, with 0.1 μm/step interval, determines EBSD image,
And analyzed to confirm cube crystal structure or structure of hexagonal crystal by the crystalline texture to each crystal grain, and obtain six sides
Crystalline phase cube crystalline phase and hexagonal crystal phase it is total in shared area ratio.
The crystal grain of hexagonal crystal phase（0001）The measure inclination angle of the normal in face is present in relative to the normal of matrix surface
The measure of the number of degrees ratio of 2~12 degree of inclination angle subregion：
Crystal grain for constituting the hexagonal crystal phase in compound carbonitride layer, using field emission type SEM and
EBSD device determines the crystal plane, i.e. of the crystal grain of hexagonal crystal phase（0001）The normal in face is relative to matrix surface
Normal direction formed by inclination angle, and in the measure inclination angle, by relative to the normal direction of matrix surface at 0~90 degree
In the range of measure inclination angle carry out subregion and total number of degrees being present in each subregion by 0.25 degree of spacing, and obtain in the presence of most
The inclination angle subregion of peak value, and obtain the number of degrees that are present in 2~12 degree of inclination angle subregions and add up to, and obtain and be present in this
The total number of degrees ratio for accounting for inclination angle number of degrees distribution entirety of the number of degrees in the range of 2~12 degree of inclination angle subregions.
In addition, for each crystal grain for cube crystalline phase being combined in carbonitride layer, determining the direction parallel with matrix surface
Particle width Wc, vertical with matrix surface direction particle length Lc, calculate the asperratio A of each crystal grainc（=Lc/Wc）,
And the asperratio A that will be obtained for each crystal graincAverage value as Mean aspect size compare αcCalculate, also, will be right
The particle width W obtained in each crystal graincAverage value be used as averaged particles width ωcCalculate.
Similarly, for each crystal grain of the hexagonal crystal phase in compound carbonitride layer, the side parallel with matrix surface is determined
To particle width Wh, vertical with matrix surface direction particle length Lh, and calculate the asperratio A of each crystal grainh（=
Lh/Wh）, and the asperratio A that will be obtained for each crystal grainhAverage value as Mean aspect size compare αhCalculate, and
And, the particle width W that will be obtained for each crystal grainhAverage value be used as averaged particles width ωhCalculate.
Here, Wc、Lc、WhAnd LhBe determined as follows progress.
The section for the compound carbonitride layer that will be made up of Ti and Al compound carbonitride layer as abradant surface shape
Under state, for the crystal grain being combined in carbonitride layer, scanning electron microscope is used（20000 times of multiplying power）Throughout 10 μm of width
Many visual field observations are carried out, and W is determined to each crystal grainc、Lc、WhAnd Lh。
Their value is shown in table 7.
It is present in the change in concentration of the Ti and Al in the crystallization with cube crystal structure：
In addition, using transmission electron microscope（200000 times of multiplying power）, the tiny area for being combined carbonitride layer is entered
Row observation, and use energy dispersion-type X-ray spectroscopic methodology（EDS）When carrying out composition analysis from sectional side, in compound carbonitride
Ti and Al periodic change in concentration is observed in the crystallization with cube crystal structure in layer, there is the relatively large areas of X
Domain and less region.For there is the Ti and Al of the crystallization with cube crystal structure in compound carbonitride layer periodicity
Change in concentration crystallization in 5 crystallizations, the periodic concentration of presence in region relatively large X and less region becomes
Linear analysis is carried out on the direction of change, the X of determined crystallization maximum and minimum value is respective average by taking, and obtains
Region relatively large X and the respective average composition in less region, using its poor X as the crystallization determined maximum
Obtained with the difference of minimum value, be averaged to obtain the flat of X maximum and the difference of minimum value by 5 to being determined crystallizations
Average.Similarly, for the periodic of the Ti and Al that there is the crystallization with cube crystal structure in compound carbonitride layer
5 in the crystallization of change in concentration crystallizations, from above-mentioned linear analysis result, by the distance for calculating the relatively large regions of X
The cycle of the average change in concentration come the Ti and Al that obtain determined crystallization, and put down by 5 crystallizations to being determined
Come the average value in the cycle of the change in concentration of obtaining Ti and Al.
Then, identically with coating tool 1~15 of the present invention, respectively for comparative example coating tool 1~13 and reference example
Coating tool 14,15, determines average Al content ratios X, average C content ratios Y, average thickness t, the hexagonal crystal of hard coating layer
Area ratio S shared by phasehAnd the crystal grain of hexagonal crystal phase（0001）The measure inclination angle of the normal in face is relative to matrix surface
Normal be present in the number of degrees ratio of 2~12 degree of inclination angle subregion and there is the inclination angle subregion of peak-peak.
In addition, to Wc、Lc、WhAnd LhIt is measured, and calculates αc、ωc、αhAnd ωh。
Their value is shown in table 8.
[table 3]
[table 4]
（Note）Film forming classification H~J inserts TiCl in film formation process4Etching work procedure.
[table 5]
[table 6]
Then, above-mentioned various coating tools are being anchored on the instrument steel knife that cutter footpath is 125mm with stationary fixture
In the state of the leading section of tool, to coating tool 1~15 of the present invention, comparative example coating tool 1~13 and reference example coating tool
14th, 15 implement the dry type high-speed planar milling one of cut as high rate intermittent of steel alloy as shown below, heartcut and cut
Processing experiment is cut, the wear of the tool flank width of cutting edge is determined.
Workpiece：JISSCM440 width 100mm, length 400mm bulk,
Rotating speed：943min-1、
Cutting speed：370m/min、
Cutting depth：1.2mm、
The single-blade amount of feeding：0.10mm/ swords,
Cutting time：8 minutes,
The result of above-mentioned cutting test is shown in table 9.
[table 9]
Comparative example coating tool, the * symbols on the column of reference example coating tool one represent because knife is collapsed in generation reach the life-span untill
Cutting time（Minute）.
[embodiment 2]
As material powder, prepare to be respectively provided with WC powder, TiC powder, ZrC powder, the VC powder of 1~3 μm of average grain diameter
End, TaC powder, NbC powder, Cr3C2Powder, TiN powder and Co powder, by these material powders with matching somebody with somebody shown in synthesis table 10
It is combined into, further adds paraffin, in acetone ball milling mixing 24 hours, after being dried under reduced pressure, with 98MPa pressure punch forming
For the pressed compact of predetermined shape, predetermined temperature of the pressed compact in 5Pa vacuum in the range of with 1370~1470 DEG C is kept 1 small
When under conditions of carry out after vacuum-sintering, sintering, by cutting edge portion implement R：0.07mm cutting edge reconditioning processes to distinguish
Produce WC base cemented carbides tool base a~ε of the blade shapes with iso standard CNMG120412.
Also, as material powder, prepare to be respectively provided with the TiCN of 0.5~2 μm of average grain diameter（It is TiC/ by quality ratio
TiN=50/50）Powder, Mo2C powder, ZrC powder, NbC powder, TaC powder, WC powder, Co powder and Ni powder, by these
Material powder with shown in synthesis table 11 with being combined into, with ball mill wet mixed 24 hours, after drying, with 98MPa pressure
Punch forming is pressed compact, by the pressed compact in 1.3kPa blanket of nitrogen with 1540 DEG C of temperature keep 1 hour under conditions of enter
After row sintering, sintering, R is implemented to cutting edge portion：0.09mm cutting edge reconditioning processes to produce with iso standard
TiCN based ceramic metals tool base ζ~κ of CNMG120412 blade shapes.
Then, using common chemical evaporation plating device, under conditions of shown in table 3 and table 4, in these tool bases α~ε
And tool base ζ~κ surface is deposited to form the present invention's with target thickness（Ti1-XAlX）（CYN1-Y）Layer, so as to produce table
12nd, the coating tool of the present invention 16~30 shown in table 13.
In addition, for coating tool 19~28 of the present invention, under the formation condition shown in table 3, formed lower layer and/or on
Portion's layer.
Also, with the purpose compared, similarly using common chemical evaporation plating device, in the condition shown in table 3 and table 5
Under, it is deposited to form comparative example with target thickness on α~ε and tool base ζ~κ surface（Ti1-xAlx）（CyN1-y）, thus make
Produce table 12, the comparative example coating tool 16~28 shown in table 14.
In addition, identically with coating tool 19~28 of the present invention, for comparative example coating tool 19~28, shown in table 3
Formation condition under, form lower layer and/or upper layer.
In order to refer to, using conventional physical vapor deposition device, tool base β and tool base θ are plated in by arc ions
Surface be deposited to form reference example with target thickness（Ti1-XAlX）（CYN1-Y）Layer, thus produces table 12, the ginseng shown in table 14
Examine a coating tool 29,30.
In addition, the condition of arc ion plating use with the condition identical condition shown in embodiment 1, in the tool base
Surface be deposited the target to be formed shown in table 14 averagely constitute, target average thickness（Ti1-XAlX）（CYN1-Y）Layer, so as to manufacture
Go out reference example coating tool 29,30.
Then, for the hard coating layer of the invention described above coating tool 16~30, using with the method shown in embodiment 1
Identical method, determines the average thickness of each layer of hard coating layer, the average Al content ratios X of compound carbonitride layer, flat
Area ratio S shared by equal C content ratios Y, hexagonal crystal phasehAnd the crystal grain of hexagonal crystal phase（0001）The measure of the normal in face is inclined
Oblique angle is present in the number of degrees ratio of 2~12 degree of inclination angle subregion relative to the normal of matrix surface and there is the inclination of peak-peak
Angle subregion.
In addition, for each crystal grain for cube crystalline phase being combined in carbonitride layer, measure/calculating Wc、Lc、Ac（=Lc/Wc）、
αcAnd ωc, also, for each crystal grain for the hexagonal crystal phase being combined in carbonitride layer, measure/calculating Wh、Lh、Ah（=Lh/Wh）、αh
And ωh。
Its result is shown in table 13.
Then, for comparative example coating tool 16~28 and reference example coating tool 29,30, with coating tool 16 of the present invention
~30 determine/calculate the average thickness of each layer of hard coating layer, the average Al of compound carbonitride layer respectively in the same manner contains
Area ratio S shared by ratio X, averagely C content ratios Y, hexagonal crystal phaseh, hexagonal crystal phase crystal grain（0001）The normal in face
Measure inclination angle be present in the number of degrees ratio of 2~12 degree of inclination angle subregion relative to the normal of matrix surface and there is top
The W of each crystal grain of cube crystalline phase in the inclination angle subregion and compound carbonitride layer of valuec、Lc、Ac（=Lc/Wc）、αcAnd ωc, and
And, for be combined carbonitride layer in hexagonal crystal phase each crystal grain determine/calculate Wh、Lh、Ah（=Lh/Wh）、αhAnd ωh。
Its result is shown in table 14.
[table 10]
[table 11]
[table 12]
Then, in the state for the leading section that above-mentioned various coating tools are anchored on to instrument steel lathe tool with stationary fixture
Under, to coating tool 16~30 of the present invention, comparative example coating tool 16~28 and reference example coating tool 29,30, implement following
The dry type high rate intermittent machining experiment of shown carbon steel, the wet type high rate intermittent cutting test of cast iron, determine cutting edge
Wear of the tool flank width.
Machining condition 2：
Workpiece：JISSCM435 length direction be formed with equal intervals 4 pods pole,
Cutting speed：350m/min、
Cutting depth：1.2mm、
Feed speed：0.2mm/rev、
Cutting time：5 minutes,
（Common cutting speed is 220m/min）
Machining condition 3：
Workpiece：JISFCD450 length direction be formed with equal intervals 4 pods pole,
Cutting speed：340m/min、
Cutting depth：1.0mm、
Feed speed：0.2mm/rev、
Cutting time：5 minutes,
（Common cutting speed is 200m/min）
The result of above-mentioned cutting test is shown in table 15.
[table 15]
Comparative example coating tool, the * symbols on the column of reference example coating tool one represent because knife is collapsed in generation reach the life-span untill
Cutting time（Minute）.
[embodiment 3]
As material powder, prepare cBN powder, TiN powder, the TiCN of average grain diameter being respectively provided with 0.5~4 μ m
Powder, TiC powder, Al powder and Al2O3Powder, these material powders are combined into matching somebody with somebody shown in synthesis table 16, ball mill is used
Wet mixed 80 hours and after being dried, the pressure punch forming using 120MPa is with diameter：50mm × thickness：1.5mm
Size pressed compact, then, by the pressed compact in pressure：It is predetermined in the range of with 900~1300 DEG C in 1Pa vacuum atmosphere
Temperature is sintered under conditions of being kept for 60 minutes and is used as cutting blade pre-sintered body, by the pre-sintered body with separately preparing
Have Co：8 mass %, WC：Remaining composition and diameter：50mm × thickness：The WC base cemented carbide systems supporting of 2mm size
In the state of piece is overlapping, load common ultra-high pressure sintering device, in common condition i.e. in pressure：4GPa, temperature：1200~
Retention time in predetermined temperature in the range of 1400 DEG C：Carry out using Buddha's warrior attendant after ultra-high pressure sintering, sintering under conditions of 0.8 hour
Stone abrasion wheel grinding upper and lower surface, and predetermined size is divided into by wire electrodischarge processing unit (plant), further with Co：5 matter
Measure %, TaC：5 mass %, WC：The shape of remaining composition and iso standard CNGA120412（Thickness：4.76mm × inscribed circle is straight
Footpath：12.7mm 80 ° of rhombuses）WC base cemented carbide vane bodies brazed portion（Nose part）Using with terms of volume %
By Zr：37.5%、Cu：25% and Ti：The brazing material of the Ti-Zr-Cu alloys for the composition that residue is constituted carries out soldering, periphery processing
Into after preliminary dimension, width is implemented to cutting edge portion：0.13mm, angle：25 ° of cutting edge reconditioning processing, further implements essence
Processing grinding, thus produces tool base first~fourth of the blade shapes with iso standard CNGA120412 respectively.
[table 16]
Then, using common chemical evaporation plating device, under conditions of shown in table 3 and table 4, these tool base first~
The surface of fourth is deposited to form the present invention's with target thickness（Ti1-XAlX）（CYN1-Y）Layer, thus produces table 17, shown in table 18
Coating tool 31~40 of the present invention.
In addition, for coating tool 34~38 of the present invention, under the formation condition shown in table 3, formed lower layer and/or on
Portion's layer.
Also, with the purpose compared, similarly using common chemical evaporation plating device, under the conditions shown in Table 4, in work
The surface of tool matrix first~fourth is deposited to form comparative example with target thickness（Ti1-xAlx）（CyN1-y）, thus produce table 17, table
Comparative example coating tool 31~38 shown in 19.
In addition, for comparative example coating tool 34~38, identically with coating tool 34~38 of the present invention, shown in table 3
Formation condition under, form lower layer and/or upper layer.
In order to refer to, using conventional physical vapor deposition device, by arc ion plating, in tool base first and tool base
The surface of second is deposited to form reference example with target thickness（Ti1-XAlX）（CYN1-Y）Layer, thus produces table 17, shown in table 19
Reference example coating tool 39,40.
In addition, the condition of arc ion plating use with the condition identical condition shown in embodiment 1, in the tool base
Surface be deposited the target to be formed shown in table 19 averagely constitute, target average thickness（Ti1-XAlX）（CYN1-Y）Layer, so as to manufacture
Go out reference example coating tool 39,40.
Then, for the hard coating layer of the invention described above coating tool 31~40, using with the method shown in embodiment 1
Identical method, measure is combined the flat of the average Al content ratios X, average C content ratios Y, hard coating layer of carbonitride layer
Area ratio S shared by equal thickness t, hexagonal crystal phasehAnd the crystal grain of hexagonal crystal phase（0001）The measure inclination angle of the normal in face
Relative to matrix surface normal be present in 2~12 degree of inclination angle subregion the number of degrees ratio and there is the inclination angle of peak-peak
Subregion.
In addition, for each crystal grain for cube crystalline phase being combined in carbonitride layer, measure/calculating Wc、Lc、Ac（=Lc/Wc）、
αcAnd ωc, also, for each crystal grain for the hexagonal crystal phase being combined in carbonitride layer, measure/calculating Wh、Lh、Ah（=Lh/Wh）、αh
And ωh。
Its result is shown in table 18.
Then, for comparative example coating tool 31~38 and reference example coating tool 39,40, with coating tool 31 of the present invention
~40 measure/calculating is combined the average Al content ratios X, average C content ratios Y, hard bag of carbonitride layer respectively in the same manner
Area ratio S shared by the average thickness t of coating, hexagonal crystal phasehAnd the crystal grain of hexagonal crystal phase（0001）The survey of the normal in face
Constant inclination oblique angle is present in the ratio of the number of degrees in 2~12 degree of inclination angle subregion relative to the normal of matrix surface and there is top
The W of each crystal grain of cube crystalline phase in the inclination angle subregion and compound carbonitride layer of valuec、Lc、Ac（=Lc/Wc）、αcAnd ωc, and
And, for be combined carbonitride layer in hexagonal crystal phase each crystal grain determine/calculate Wh、Lh、Ah（=Lh/Wh）、αhAnd ωh。
Its result is shown in table 19.
[table 17]
Then, in the state for the leading section that above-mentioned various coating tools are anchored on to instrument steel lathe tool with stationary fixture
Under, to coating tool 31~40 of the present invention, comparative example coating tool 31~38 and reference example coating tool 39,40, implement following
The dry type high rate intermittent machining experiment of shown carburizing and quenching steel alloy, determines the wear of the tool flank width of cutting edge.
Workpiece：JIS·SCr420（Hardness：HRC60）Length direction be formed with equal intervals 4 pods pole,
Cutting speed：220m/min、
Cutting depth：0.10mm、
Feed speed：0.10mm/rev、
Cutting time：4 minutes,
The result of above-mentioned cutting test is shown in table 20.
[table 20]
Comparative example coating tool, the * symbols on the column of reference example coating tool one represent because knife is collapsed in generation reach the life-span untill
Cutting time（Minute）.
It was found from the result shown in table 6~9, table 12~15 and table 17~20：Coating tool 1~40 of the present invention, is deposited shape
Into having what the line and staff control by cube crystalline phase and hexagonal crystal phase was constituted（Ti1-XAlX）（CYN1-Y）Layer, also, this layer keeps higher
Toughness is improved while wear resistance, therefore, it is possible to add in the high-speed milling machining of steel alloy or the cutting of external diameter high rate intermittent
Excellent adhesiveness, lubricity are played in work, resistance to knife and wear resistance is collapsed.
Especially for coating tool 4~7,9~15,19~22,24~30,34~38,40 of the present invention, due to general cube
Averaged particles width, the Mean aspect size ratio of each crystal grain of crystalline phase and hexagonal crystal phase are placed in predetermined number range, therefore
Wear resistance is further improved.
In contrast, for comparative example coating tool 1~13,16~28,31~38 and reference example coating tool 14,15,
29th, 30,39,40, it specify that not only to produce in hard coating layer and collapse the Abnormal damages such as knife, defect, stripping, and shorter
Time in reach service life.
Industrial applicability
As described above, according to the coating tool of the invention, can not only be in the high-speed milling machining of steel alloy etc.
Use, but also can be used as the coating tool of various workpiece in high rate intermittent machining, and be used for a long time
It is middle to play excellent wear resistance, therefore, it is possible to be enough to tackle the high performance of topping machanism and the saving labourization of machining
And energy-saving even cost degradation.
Claims (5)
1. a kind of surface-coated cutting tool, it is by tungsten carbide base carbide alloy, base titanium carbonitride or cubic crystal
The surface for the matrix that any of boron nitride-based ultra-high-pressure sintered body is constituted, is coated with hard coating layer, the Surface coating is cut
The instrument of cutting is characterised by,
(a) above-mentioned hard coating layer is at least containing the Ti and Al that 1~20 μm of the average thickness to be formed is deposited by chemical vapor deposition method
Compound carbonitride layer, when be averaged composition represented with following composition formulas when, Al content ratio X and C content ratios Y difference
0.60≤X≤0.95,0.0005≤Y≤0.005 are met, wherein, X, Y are atomic ratio,
Composition formula：(Ti1-XAlX)(CYN1-Y)
(b) for above-mentioned compound carbonitride layer, using EBSD device to the crystalline texture of each crystal grain from upper
When the longitudinal section direction for stating Ti and Al compound carbonitride layer is analyzed, by observing that the electron backscattered of cubic lattice spreads out
The line and staff control of cube crystalline phase for penetrating image and the hexagonal crystal phase for the EBSD image for observing hexagoinal lattice is constituted,
Also, hexagonal crystal cube crystalline phase and hexagonal crystal phase it is total in shared area ratio be 10~50 area %,
(c) determine the crystal grain of the hexagonal crystal phase of above-mentioned compound carbonitride layer crystal plane, i.e. (0001) face normal relative to
Inclination angle formed by the normal direction of matrix surface, and in the inclination angle of the measure, by relative to the normal side of matrix surface
To the measure inclination angle in the range of 0~90 degree subregion and total number of degrees being present in each subregion are carried out by 0.25 degree of spacing
When, be present peak-peak in the inclination angle subregion in the range of 2~12 degree, and be present in 2~12 degree of the inclination angle subregion
The number of degrees add up to more than 40% of total number of degrees in the distribution of the inclination angle number of degrees.
2. surface-coated cutting tool according to claim 1, it is characterised in that
The averaged particles width ω of the crystal grain of cube crystalline phase of above-mentioned compound carbonitride layercFor less than 0.3 μm, and Mean aspect
Size compares αcLess than 2, also,
The averaged particles width ω of the crystal grain of the hexagonal crystal phase of above-mentioned compound carbonitride layerhFor 0.1~2 μm, and Mean aspect chi
It is very little to compare αhFor more than 2.
3. surface-coated cutting tool according to claim 1 or 2, it is characterised in that
In the crystallization of cube crystal structure of the crystal grain of cube crystalline phase with above-mentioned compound carbonitride layer, there is (Ti1-XAlX)
(CYN1-Y) Ti and Al periodic change in concentration, and the X periodically changed maxima and minima difference be 0.05
~0.25, and the cycle is 3~30nm.
4. surface-coated cutting tool according to claim 1 or 2, it is characterised in that
Above-mentioned compound carbonitride layer is to be steamed by the chemical vapor deposition method for being at least used as reacting gas composition containing trimethyl aluminium
Plate the layer formed.
5. surface-coated cutting tool according to claim 3, it is characterised in that
Above-mentioned compound carbonitride layer is to be steamed by the chemical vapor deposition method for being at least used as reacting gas composition containing trimethyl aluminium
Plate the layer formed.
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| JP2012-249280 | 2012-11-13 | ||
| JP2012249280A JP6037113B2 (en) | 2012-11-13 | 2012-11-13 | A surface-coated cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed intermittent cutting |
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| JP6268530B2 (en) | 2013-04-01 | 2018-01-31 | 三菱マテリアル株式会社 | Surface coated cutting tool with excellent chipping resistance due to hard coating layer |
| JP6296294B2 (en) * | 2014-07-30 | 2018-03-20 | 三菱マテリアル株式会社 | Surface coated cutting tool with excellent chipping resistance due to hard coating layer |
| JP6296298B2 (en) * | 2014-08-28 | 2018-03-20 | 三菱マテリアル株式会社 | Surface coated cutting tool with excellent chipping resistance due to hard coating layer |
| JP5924507B2 (en) * | 2014-09-25 | 2016-05-25 | 三菱マテリアル株式会社 | Surface coated cutting tool with excellent chipping resistance due to hard coating layer |
| JP6376466B2 (en) * | 2014-11-13 | 2018-08-22 | 三菱マテリアル株式会社 | Surface coated cutting tool |
| JP6617917B2 (en) * | 2014-11-28 | 2019-12-11 | 三菱マテリアル株式会社 | Surface coated cutting tool |
| CN107771225B (en) * | 2015-07-27 | 2020-10-30 | 瓦尔特公开股份有限公司 | Cutting tool with TiAlN coating |
| WO2017061144A1 (en) * | 2015-10-09 | 2017-04-13 | 住友電工ハードメタル株式会社 | Surface-coated cutting tool |
| CN108699686B (en) * | 2015-12-07 | 2021-01-26 | Ihi伯尔纳股份公司 | Coating extrusion tool |
| JP6481897B2 (en) | 2016-09-16 | 2019-03-13 | 三菱マテリアル株式会社 | Surface coated cutting tool |
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| JP6037113B2 (en) | 2016-11-30 |
| JP2014097536A (en) | 2014-05-29 |
| CN103801718A (en) | 2014-05-21 |
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