JP6027942B2 - Ｔｅｍ用位相板 - Google Patents

Ｔｅｍ用位相板 Download PDF

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Publication number
JP6027942B2
JP6027942B2 JP2013102688A JP2013102688A JP6027942B2 JP 6027942 B2 JP6027942 B2 JP 6027942B2 JP 2013102688 A JP2013102688 A JP 2013102688A JP 2013102688 A JP2013102688 A JP 2013102688A JP 6027942 B2 JP6027942 B2 JP 6027942B2
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Japan
Prior art keywords
thin film
phase plate
phase
phase shift
ctf
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JP2013102688A
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English (en)
Japanese (ja)
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JP2013247113A (ja
JP2013247113A5 (enExample
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ブイエス バート
ブイエス バート
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FEI Co
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FEI Co
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2802—Transmission microscopes

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2013102688A 2012-05-23 2013-05-15 Ｔｅｍ用位相板 Active JP6027942B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP12168997.0 2012-05-23
EP20120168997 EP2667399A1 (en) 2012-05-23 2012-05-23 Improved phase plate for a TEM

Publications (3)

Publication Number Publication Date
JP2013247113A JP2013247113A (ja) 2013-12-09
JP2013247113A5 JP2013247113A5 (enExample) 2016-03-31
JP6027942B2 true JP6027942B2 (ja) 2016-11-16

Family

ID=46149231

Family Applications (1)

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JP2013102688A Active JP6027942B2 (ja) 2012-05-23 2013-05-15 Ｔｅｍ用位相板

Country Status (4)

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US (2) US8772716B2 (enExample)
EP (1) EP2667399A1 (enExample)
JP (1) JP6027942B2 (enExample)
CN (1) CN103560067B (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2667399A1 (en) * 2012-05-23 2013-11-27 FEI Company Improved phase plate for a TEM
EP2690648B1 (en) * 2012-07-26 2014-10-15 Fei Company Method of preparing and imaging a lamella in a particle-optical apparatus
TWI544513B (zh) * 2012-12-18 2016-08-01 中央研究院 可釋出電荷的晶片式薄膜哲尼克相位板及用其觀察有機材料的方法
JP6286270B2 (ja) 2013-04-25 2018-02-28 エフ イー アイ カンパニＦｅｉ Ｃｏｍｐａｎｙ 透過型電子顕微鏡内で位相版を用いる方法
DE102013019297A1 (de) 2013-11-19 2015-05-21 Fei Company Phasenplatte für ein Transmissionselektronenmikroskop
EP2881970A1 (en) * 2013-12-04 2015-06-10 Fei Company Method of producing a freestanding thin film of nano-crystalline carbon
CN106104744B (zh) * 2014-01-21 2019-04-16 拉莫特特拉维夫大学有限公司 用于调节粒子波束的方法与装置
JP2016110767A (ja) * 2014-12-04 2016-06-20 日本電子株式会社 荷電粒子ビーム装置および画像取得方法
JP2016170951A (ja) * 2015-03-12 2016-09-23 日本電子株式会社 位相板およびその製造方法、ならびに電子顕微鏡
US10109453B2 (en) * 2015-03-18 2018-10-23 Battelle Memorial Institute Electron beam masks for compressive sensors
US10170274B2 (en) 2015-03-18 2019-01-01 Battelle Memorial Institute TEM phase contrast imaging with image plane phase grating
US10580614B2 (en) 2016-04-29 2020-03-03 Battelle Memorial Institute Compressive scanning spectroscopy
CN108885963B (zh) * 2016-08-22 2020-02-18 株式会社日立高新技术 电子显微镜以及观察方法
US10295677B2 (en) 2017-05-08 2019-05-21 Battelle Memorial Institute Systems and methods for data storage and retrieval
JP7051591B2 (ja) * 2018-06-05 2022-04-11 株式会社日立製作所 透過電子顕微鏡
WO2020243268A1 (en) 2019-05-28 2020-12-03 The Board Of Trustees Of The Leland Stanford Junior University Optically-addressed phase modulator for electron beams

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3773389B2 (ja) * 2000-03-27 2006-05-10 日本電子株式会社 位相差電子顕微鏡用薄膜位相板並びに位相差電子顕微鏡及び位相板帯電防止法
JP4328044B2 (ja) * 2001-09-25 2009-09-09 日本電子株式会社 差分コントラスト電子顕微鏡および電子顕微鏡像のデータ処理方法
DE10200645A1 (de) * 2002-01-10 2003-07-24 Leo Elektronenmikroskopie Gmbh Elektronenmikroskop mit ringförmiger Beleuchtungsapertur
US7737412B2 (en) * 2004-07-12 2010-06-15 The Regents Of The University Of California Electron microscope phase enhancement
JP4625317B2 (ja) * 2004-12-03 2011-02-02 ナガヤマ アイピー ホールディングス リミテッド ライアビリティ カンパニー 位相差電子顕微鏡用位相板及びその製造方法並びに位相差電子顕微鏡
DE102005040267B4 (de) * 2005-08-24 2007-12-27 Universität Karlsruhe Verfahren zum Herstellen einer mehrschichtigen elektrostatischen Linsenanordnung, insbesondere einer Phasenplatte und derartige Phasenplatte
EP2091062A1 (en) 2008-02-13 2009-08-19 FEI Company TEM with aberration corrector and phase plate
EP2131385A1 (en) * 2008-06-05 2009-12-09 FEI Company Hybrid phase plate
US7977633B2 (en) 2008-08-27 2011-07-12 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E. V. Phase plate, in particular for an electron microscope
JP4896106B2 (ja) * 2008-09-30 2012-03-14 株式会社日立ハイテクノロジーズ 電子顕微鏡
EP2400522A1 (en) 2010-06-24 2011-12-28 Fei Company Blocking member for use in the diffraction plane of a TEM
EP2593958B1 (en) 2010-07-14 2019-02-20 FEI Company Improved contrast for scanning confocal electron microscope
EP2485239A1 (en) * 2011-02-07 2012-08-08 FEI Company Method for centering an optical element in a TEM comprising a contrast enhancing element
EP2667399A1 (en) * 2012-05-23 2013-11-27 FEI Company Improved phase plate for a TEM
EP2704178B1 (en) 2012-08-30 2014-08-20 Fei Company Imaging a sample in a TEM equipped with a phase plate

Also Published As

Publication number Publication date
CN103560067A (zh) 2014-02-05
EP2667399A1 (en) 2013-11-27
US20130313428A1 (en) 2013-11-28
US9006652B2 (en) 2015-04-14
JP2013247113A (ja) 2013-12-09
CN103560067B (zh) 2018-05-15
US8772716B2 (en) 2014-07-08
US20140326878A1 (en) 2014-11-06

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