JP6027133B2 - 集積回路(ic)チップのための放熱構造の設計 - Google Patents

集積回路(ic)チップのための放熱構造の設計 Download PDF

Info

Publication number
JP6027133B2
JP6027133B2 JP2014545898A JP2014545898A JP6027133B2 JP 6027133 B2 JP6027133 B2 JP 6027133B2 JP 2014545898 A JP2014545898 A JP 2014545898A JP 2014545898 A JP2014545898 A JP 2014545898A JP 6027133 B2 JP6027133 B2 JP 6027133B2
Authority
JP
Japan
Prior art keywords
die
plates
beams
heat dissipating
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014545898A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015500569A (ja
JP2015500569A5 (https=
Inventor
アンキレッディ,セシャサイー・エス
コープランド,デビッド・ダブリュ
Original Assignee
オラクル・インターナショナル・コーポレイション
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オラクル・インターナショナル・コーポレイション filed Critical オラクル・インターナショナル・コーポレイション
Publication of JP2015500569A publication Critical patent/JP2015500569A/ja
Publication of JP2015500569A5 publication Critical patent/JP2015500569A5/ja
Application granted granted Critical
Publication of JP6027133B2 publication Critical patent/JP6027133B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/20Arrangements for cooling
    • H10W40/22Arrangements for cooling characterised by their shape, e.g. having conical or cylindrical projections
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2089Modifications to facilitate cooling, ventilating, or heating for power electronics, e.g. for inverters for controlling motor
    • H05K7/20927Liquid coolant without phase change
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/20Arrangements for cooling
    • H10W40/22Arrangements for cooling characterised by their shape, e.g. having conical or cylindrical projections
    • H10W40/226Arrangements for cooling characterised by their shape, e.g. having conical or cylindrical projections characterised by projecting parts, e.g. fins to increase surface area
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/30Arrangements for thermal protection or thermal control wherein the packaged device is completely immersed in a fluid other than air, e.g. immersed in a cryogenic fluid
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0272Adaptations for fluid transport, e.g. channels, holes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/40Arrangements for thermal protection or thermal control involving heat exchange by flowing fluids
    • H10W40/47Arrangements for thermal protection or thermal control involving heat exchange by flowing fluids by flowing liquids, e.g. forced water cooling
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/877Bump connectors and die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP2014545898A 2011-12-08 2012-10-11 集積回路(ic)チップのための放熱構造の設計 Active JP6027133B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/314,995 US9184108B2 (en) 2011-12-08 2011-12-08 Heat dissipation structure for an integrated circuit (IC) chip
US13/314,995 2011-12-08
PCT/US2012/059819 WO2013085618A1 (en) 2011-12-08 2012-10-11 Design of a heat dissipation structure for an integrated circuit (ic) chip

Publications (3)

Publication Number Publication Date
JP2015500569A JP2015500569A (ja) 2015-01-05
JP2015500569A5 JP2015500569A5 (https=) 2015-11-26
JP6027133B2 true JP6027133B2 (ja) 2016-11-16

Family

ID=47221534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014545898A Active JP6027133B2 (ja) 2011-12-08 2012-10-11 集積回路(ic)チップのための放熱構造の設計

Country Status (6)

Country Link
US (2) US9184108B2 (https=)
EP (1) EP2789009B1 (https=)
JP (1) JP6027133B2 (https=)
CN (1) CN103959462B (https=)
TW (1) TWI557858B (https=)
WO (1) WO2013085618A1 (https=)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2914071A1 (en) * 2014-02-28 2015-09-02 AT & S Austria Technologie & Systemtechnik Aktiengesellschaft Heat spreader in multilayer build ups
US9818669B2 (en) * 2014-08-06 2017-11-14 Honeywell International Inc. Printed circuit board assembly including conductive heat transfer
JP6409556B2 (ja) * 2014-12-19 2018-10-24 富士通株式会社 冷却機構付き基板及び電子機器
US9622380B1 (en) * 2015-09-30 2017-04-11 Toyota Motor Engineering & Manufacturing North America, Inc. Two-phase jet impingement cooling devices and electronic device assemblies incorporating the same
US10085362B2 (en) * 2016-09-30 2018-09-25 International Business Machines Corporation Cold plate device for a two-phase cooling system
JP6735664B2 (ja) * 2016-12-28 2020-08-05 昭和電工株式会社 液冷式冷却装置用放熱器およびその製造方法
CN109950250B (zh) 2017-12-20 2022-03-01 晟碟信息科技(上海)有限公司 具有矩阵冷却的数据中心3d固态驱动
US10840167B2 (en) * 2018-11-19 2020-11-17 Advanced Micro Devices, Inc. Integrated heat spreader with configurable heat fins
US11640930B2 (en) 2019-09-05 2023-05-02 Mediatek Inc. Semiconductor package having liquid-cooling lid
CN111341741A (zh) * 2020-03-17 2020-06-26 中国科学院微电子研究所 一种提高散热能力的功率器件封装结构及封装方法
US12315782B2 (en) 2020-05-20 2025-05-27 Google Llc Spring loaded compliant coolant distribution manifold for direct liquid cooled modules
CN215956917U (zh) * 2020-10-29 2022-03-04 春鸿电子科技(重庆)有限公司 液冷散热装置
TWI822094B (zh) * 2022-06-08 2023-11-11 力晶積成電子製造股份有限公司 半導體結構的製造方法
US12191233B2 (en) 2022-07-28 2025-01-07 Adeia Semiconductor Bonding Technologies Inc. Embedded cooling systems and methods of manufacturing embedded cooling systems
CN115274588B (zh) * 2022-08-01 2025-08-08 九识(苏州)智能科技有限公司 一种半导体器件及其制作方法
US20240128149A1 (en) * 2022-10-13 2024-04-18 Taiwan Semiconductor Manufacturing Company, Ltd. Cooling interface region for a semiconductor die package
KR20240097562A (ko) * 2022-12-20 2024-06-27 삼성전자주식회사 냉각 구조를 갖는 반도체 장치
US12261099B2 (en) 2022-12-23 2025-03-25 Adeia Semiconductor Bonding Technologies Inc. Embedded cooling systems with coolant channel for device packaging
CN120457540A (zh) 2022-12-29 2025-08-08 美商艾德亚半导体接合科技有限公司 用于先进设备封装体的嵌入式冷却组件及其制造方法
CN120513517A (zh) 2022-12-31 2025-08-19 美商艾德亚半导体接合科技有限公司 嵌入式液体冷却
US12341083B2 (en) 2023-02-08 2025-06-24 Adeia Semiconductor Bonding Technologies Inc. Electronic device cooling structures bonded to semiconductor elements
US12176263B2 (en) 2023-03-31 2024-12-24 Adeia Semiconductor Bonding Technologies Inc. Integrated cooling assembly including coolant channel on the backside semiconductor device
US12191234B2 (en) 2023-05-17 2025-01-07 Adeia Semiconductor Bonding Technologies Inc. Integrated cooling assemblies for advanced device packaging and methods of manufacturing the same
US12191235B2 (en) 2023-05-17 2025-01-07 Adeia Semiconductor Bonding Technologies Inc. Integrated cooling assemblies including signal redistribution and methods of manufacturing the same
WO2024245523A1 (en) * 2023-05-26 2024-12-05 Huawei Digital Power Technologies Co., Ltd. Mold free electric power module with heat conductive electrically insulating coating
TWI896188B (zh) * 2023-07-24 2025-09-01 智惠創富股份有限公司 液冷散熱器
US12610819B2 (en) 2023-12-21 2026-04-21 Adeia Semiconductor Bonding Technologies Inc. Integrated cooling assemblies for advanced device packaging and methods of manufacturing the same
US12283490B1 (en) 2023-12-21 2025-04-22 Adeia Semiconductor Bonding Technologies Inc. Integrated cooling assemblies for advanced device packaging and methods of manufacturing the same
US12368087B2 (en) * 2023-12-26 2025-07-22 Adeia Semiconductor Bonding Technologies Inc. Embedded cooling systems for advanced device packaging and methods of manufacturing the same
US12525506B2 (en) 2024-02-07 2026-01-13 Adeia Semiconductor Bonding Technologies Inc. Embedded cooling systems for advanced device packaging and methods of manufacturing the same
US12322677B1 (en) 2024-02-07 2025-06-03 Adeia Semiconductor Bonding Technologies Inc. Fluid channel geometry optimizations to improve cooling efficiency
US12336141B1 (en) 2024-03-29 2025-06-17 Adeia Semiconductor Bonding Technologies Inc. Cold plate cavity designs for improved thermal performance
US12532432B2 (en) 2024-03-29 2026-01-20 Adeia Semiconductor Bonding Technologies Inc. Hotspot mitigation in fluid cooling
US12176264B1 (en) 2024-03-29 2024-12-24 Adeia Semiconductor Bonding Technologies Inc. Manifold designs for embedded liquid cooling in a package
US12500138B2 (en) 2024-04-17 2025-12-16 Adeia Semiconductor Bonding Technologies Inc. Cooling channel shape with substantially constant cross sectional area
US12266545B1 (en) 2024-05-24 2025-04-01 Adeia Semiconductor Bonding Technologies Inc. Structures and methods for integrated cold plate in XPUs and memory
US12412808B1 (en) 2024-12-20 2025-09-09 Adeia Semiconductor Bonding Technologies Inc. Cold plate and manifold integration for high reliability
US12513855B1 (en) 2025-03-07 2025-12-30 Adeia Semiconductor Bonding Technologies Inc. Integrated cooling assembly with upper and lower channels

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4450472A (en) * 1981-03-02 1984-05-22 The Board Of Trustees Of The Leland Stanford Junior University Method and means for improved heat removal in compact semiconductor integrated circuits and similar devices utilizing coolant chambers and microscopic channels
US4620216A (en) * 1983-04-29 1986-10-28 International Business Machines Corporation Unitary slotted heat sink for semiconductor packages
US4765397A (en) * 1986-11-28 1988-08-23 International Business Machines Corp. Immersion cooled circuit module with improved fins
US5077601A (en) 1988-09-09 1991-12-31 Hitachi, Ltd. Cooling system for cooling an electronic device and heat radiation fin for use in the cooling system
US5224538A (en) 1991-11-01 1993-07-06 Jacoby John H Dimpled heat transfer surface and method of making same
JPH06252300A (ja) * 1992-12-28 1994-09-09 Hitachi Ltd 冷却装置を備えた集積回路チップ及びその製造方法
JPH06244328A (ja) * 1993-02-19 1994-09-02 Fujitsu Ltd ヒートシンク
JP3236137B2 (ja) * 1993-07-30 2001-12-10 富士通株式会社 半導体素子冷却装置
GB2296132B (en) 1994-12-12 1999-02-24 Siemens Plessey Electronic Improvements in or relating to cooling systems
US5957194A (en) * 1996-06-27 1999-09-28 Advanced Thermal Solutions, Inc. Plate fin heat exchanger having fluid control means
US6026895A (en) 1998-02-06 2000-02-22 Fujitsu Limited Flexible foil finned heatsink structure and method of making same
GB2358243B (en) 1999-11-24 2004-03-31 3Com Corp Thermally conductive moulded heat sink
JP4043986B2 (ja) * 2003-03-31 2008-02-06 古河電気工業株式会社 放熱フィンを備えたヒートシンクおよび放熱フィンの固定方法
GB2407375B (en) * 2003-10-22 2006-06-28 Motorola Inc Heat sinks
US7271034B2 (en) * 2004-06-15 2007-09-18 International Business Machines Corporation Semiconductor device with a high thermal dissipation efficiency
US7442882B2 (en) * 2006-05-08 2008-10-28 International Business Machines Corporation 3D checkerboard perforation pattern for increased shielding effectiveness
US7755185B2 (en) * 2006-09-29 2010-07-13 Infineon Technologies Ag Arrangement for cooling a power semiconductor module
CN101368713B (zh) * 2007-08-17 2010-11-10 富准精密工业(深圳)有限公司 散热器
JP2009099740A (ja) * 2007-10-16 2009-05-07 Furukawa Electric Co Ltd:The 筐体の冷却装置
US7731079B2 (en) * 2008-06-20 2010-06-08 International Business Machines Corporation Cooling apparatus and method of fabrication thereof with a cold plate formed in situ on a surface to be cooled
US20100002392A1 (en) * 2008-07-07 2010-01-07 I-Ming Liu Assembled Heat Sink Structure
US8054629B2 (en) * 2008-09-30 2011-11-08 Intel Corporation Microfins for cooling an ultramobile device
US7961469B2 (en) 2009-03-31 2011-06-14 Apple Inc. Method and apparatus for distributing a thermal interface material
JP5718814B2 (ja) * 2009-08-07 2015-05-13 株式会社Uacj ヒートシンク

Also Published As

Publication number Publication date
US20130148305A1 (en) 2013-06-13
JP2015500569A (ja) 2015-01-05
WO2013085618A1 (en) 2013-06-13
CN103959462B (zh) 2018-01-19
US9355932B2 (en) 2016-05-31
EP2789009A1 (en) 2014-10-15
EP2789009B1 (en) 2017-03-22
TW201334131A (zh) 2013-08-16
US20150357260A1 (en) 2015-12-10
CN103959462A (zh) 2014-07-30
TWI557858B (zh) 2016-11-11
US9184108B2 (en) 2015-11-10

Similar Documents

Publication Publication Date Title
JP6027133B2 (ja) 集積回路(ic)チップのための放熱構造の設計
EP4190137B1 (en) Cooling device for cooling components of a circuit board
CN101803019B (zh) 一种集成电路叠层及其配置集成电路叠层的方法
US11854935B2 (en) Enhanced base die heat path using through-silicon vias
JP5009085B2 (ja) 半導体装置
US7233501B1 (en) Interleaved memory heat sink
JP2023518671A (ja) 熱管理装置を備える異種集積モジュール
US10475733B2 (en) Method and structures for heat dissipating interposers
CN109727937B (zh) 包含散热元件的组合件以及相关系统及方法
US10721838B1 (en) Stacked base heat sink with heat pipes in-line with airflow
JP2002151640A (ja) 半導体装置
CN111554643B (zh) 用于倒装芯片球栅阵列的散热器设计
US20250169031A1 (en) Heat exchanger for high performance heat chip sets
JP2016071269A (ja) 電子機器、及びシステム
JPH0982857A (ja) マルチチップパッケージ構造
TWI522032B (zh) 散熱模組
CN113316349B (zh) 散热装置
US20240395663A1 (en) Semiconductor Device Package with Thermal Module
CN118645485A (zh) 半导体器件及其形成方法
CN118295500A (zh) 一种运算组件及风冷服务器
CN107710883A (zh) 使用高导电散热垫的印刷电路板散热系统

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20151007

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20151007

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160913

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20160920

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20161013

R150 Certificate of patent or registration of utility model

Ref document number: 6027133

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250