JP6022477B2 - Ｃｍｐパッド状態調節ツール - Google Patents

Ｃｍｐパッド状態調節ツール Download PDF

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Publication number
JP6022477B2
JP6022477B2 JP2013546301A JP2013546301A JP6022477B2 JP 6022477 B2 JP6022477 B2 JP 6022477B2 JP 2013546301 A JP2013546301 A JP 2013546301A JP 2013546301 A JP2013546301 A JP 2013546301A JP 6022477 B2 JP6022477 B2 JP 6022477B2
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Japan
Prior art keywords
preform
tool
cmp pad
powder
diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013546301A
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English (en)
Japanese (ja)
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JP2014504458A (ja
JP2014504458A5 (enExample
Inventor
イー．ルランド ゲイリー
イー．ルランド ゲイリー
ラリー チャールズ
ラリー チャールズ
チャールズ イーズリー トーマス
チャールズ イーズリー トーマス
グラハム ジェイムズ
グラハム ジェイムズ
シュワイザー マーク
シュワイザー マーク
Original Assignee
ダイヤモンド イノヴェーションズ インコーポレイテッド
ダイヤモンド イノヴェーションズ インコーポレイテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ダイヤモンド イノヴェーションズ インコーポレイテッド, ダイヤモンド イノヴェーションズ インコーポレイテッド filed Critical ダイヤモンド イノヴェーションズ インコーポレイテッド
Publication of JP2014504458A publication Critical patent/JP2014504458A/ja
Publication of JP2014504458A5 publication Critical patent/JP2014504458A5/ja
Application granted granted Critical
Publication of JP6022477B2 publication Critical patent/JP6022477B2/ja
Expired - Fee Related legal-status Critical Current
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0027—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by impregnation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0054—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by impressing abrasive powder in a matrix
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/02—Wheels in one piece

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
JP2013546301A 2010-12-20 2011-12-20 Ｃｍｐパッド状態調節ツール Expired - Fee Related JP6022477B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201061424870P 2010-12-20 2010-12-20
US61/424,870 2010-12-20
PCT/US2011/065970 WO2012088004A2 (en) 2010-12-20 2011-12-20 Cmp pad conditioning tool

Publications (3)

Publication Number Publication Date
JP2014504458A JP2014504458A (ja) 2014-02-20
JP2014504458A5 JP2014504458A5 (enExample) 2016-09-01
JP6022477B2 true JP6022477B2 (ja) 2016-11-09

Family

ID=45953217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013546301A Expired - Fee Related JP6022477B2 (ja) 2010-12-20 2011-12-20 Ｃｍｐパッド状態調節ツール

Country Status (8)

Country Link
US (1) US20120171935A1 (enExample)
EP (1) EP2655015A2 (enExample)
JP (1) JP6022477B2 (enExample)
KR (1) KR101924241B1 (enExample)
CN (1) CN103269831B (enExample)
AU (1) AU2011349393B2 (enExample)
SG (1) SG190811A1 (enExample)
WO (1) WO2012088004A2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6133218B2 (ja) * 2011-03-07 2017-05-24 インテグリス・インコーポレーテッド 化学機械平坦化パッドコンディショナー
SG11201500802TA (en) 2012-08-02 2015-04-29 3M Innovative Properties Co Abrasive articles with precisely shaped features and method of making thereof
JP2015530265A (ja) * 2012-08-02 2015-10-15 スリーエム イノベイティブ プロパティズ カンパニー 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法
KR102089382B1 (ko) 2012-08-02 2020-03-16 쓰리엠 이노베이티브 프로퍼티즈 컴파니 정밀하게 형상화된 특징부를 갖는 연마 요소 전구체 및 그의 제조 방법
EP3126093B1 (en) * 2014-04-03 2022-08-17 3M Innovative Properties Company Polishing pads and systems and methods of making and using the same
GB201504759D0 (en) * 2015-03-20 2015-05-06 Rolls Royce Plc Abrading tool for a rotary dresser
DE112017001938T5 (de) * 2016-04-06 2019-01-17 M Cubed Technologies, Inc. Diamantverbundwerkstoff-Konditionierer für ein CMP-Tuch
WO2018204556A1 (en) 2017-05-02 2018-11-08 M Cubed Technologies, Inc. Inert gas-assisted laser machining of ceramic-containing articles
TWI621503B (zh) * 2017-05-12 2018-04-21 Kinik Company Ltd. 化學機械研磨拋光墊修整器及其製造方法
KR102880334B1 (ko) 2021-11-26 2025-10-31 삼성전자주식회사 웨이퍼 연마 장치 및 이를 이용한 반도체 장치의 제조 방법

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4151686A (en) * 1978-01-09 1979-05-01 General Electric Company Silicon carbide and silicon bonded polycrystalline diamond body and method of making it
EP0383861B1 (en) * 1988-08-17 1993-08-18 The Australian National University Diamond compact possessing low electrical resistivity
US6027659A (en) * 1997-12-03 2000-02-22 Intel Corporation Polishing pad conditioning surface having integral conditioning points
US6123612A (en) 1998-04-15 2000-09-26 3M Innovative Properties Company Corrosion resistant abrasive article and method of making
US6276998B1 (en) * 1999-02-25 2001-08-21 Applied Materials, Inc. Padless substrate carrier
TW467802B (en) * 1999-10-12 2001-12-11 Hunatech Co Ltd Conditioner for polishing pad and method for manufacturing the same
US20030109204A1 (en) * 2001-12-06 2003-06-12 Kinik Company Fixed abrasive CMP pad dresser and associated methods
US6852016B2 (en) * 2002-09-18 2005-02-08 Micron Technology, Inc. End effectors and methods for manufacturing end effectors with contact elements to condition polishing pads used in polishing micro-device workpieces
US20050227590A1 (en) * 2004-04-09 2005-10-13 Chien-Min Sung Fixed abrasive tools and associated methods
US20060258276A1 (en) * 2005-05-16 2006-11-16 Chien-Min Sung Superhard cutters and associated methods
US20070060026A1 (en) 2005-09-09 2007-03-15 Chien-Min Sung Methods of bonding superabrasive particles in an organic matrix
KR100636793B1 (ko) * 2004-12-13 2006-10-23 이화다이아몬드공업 주식회사 Ｃｍｐ 패드용 컨디셔너
RU2430827C2 (ru) * 2005-08-25 2011-10-10 Хироси ИСИЗУКА Инструмент с полирующей поверхностью из спеченного вещества и способ его изготовления
JP4791121B2 (ja) 2005-09-22 2011-10-12 新日鉄マテリアルズ株式会社 研磨布用ドレッサー
US7241206B1 (en) * 2006-02-17 2007-07-10 Chien-Min Sung Tools for polishing and associated methods
US7815495B2 (en) * 2007-04-11 2010-10-19 Applied Materials, Inc. Pad conditioner
CN101327578A (zh) * 2007-06-22 2008-12-24 钻面奈米科技股份有限公司 研磨工具及其制造方法
JP5311178B2 (ja) * 2007-10-15 2013-10-09 株式会社ニコン 研磨装置及び研磨装置における研磨パッドのドレス方法
US8382557B2 (en) * 2007-11-14 2013-02-26 Saint-Gobain Abrasives, Inc. Chemical mechanical planarization pad conditioner and methods of forming thereof
KR20100133415A (ko) 2008-03-10 2010-12-21 모간 어드밴스드 세라믹스, 인코포레이티드 비평면 ｃｖｄ 다이아몬드 코팅된 ｃｍｐ ｐａｄ 컨디셔너 및 제조 방법
JP2010125567A (ja) * 2008-11-28 2010-06-10 Mitsubishi Materials Corp Ｃｍｐパッドコンディショナー
US20100186479A1 (en) 2009-01-26 2010-07-29 Araca, Inc. Method for counting and characterizing aggressive diamonds in cmp diamond conditioner discs
KR101091030B1 (ko) * 2010-04-08 2011-12-09 이화다이아몬드공업 주식회사 감소된 마찰력을 갖는 패드 컨디셔너 제조방법

Also Published As

Publication number Publication date
WO2012088004A3 (en) 2012-12-13
SG190811A1 (en) 2013-07-31
JP2014504458A (ja) 2014-02-20
EP2655015A2 (en) 2013-10-30
US20120171935A1 (en) 2012-07-05
KR20130132480A (ko) 2013-12-04
AU2011349393B2 (en) 2016-11-10
CN103269831A (zh) 2013-08-28
AU2011349393A1 (en) 2013-06-06
WO2012088004A2 (en) 2012-06-28
CN103269831B (zh) 2017-06-09
KR101924241B1 (ko) 2018-11-30

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