WO2012088004A3 - Cmp pad conditioning tool - Google Patents

Cmp pad conditioning tool Download PDF

Info

Publication number
WO2012088004A3
WO2012088004A3 PCT/US2011/065970 US2011065970W WO2012088004A3 WO 2012088004 A3 WO2012088004 A3 WO 2012088004A3 US 2011065970 W US2011065970 W US 2011065970W WO 2012088004 A3 WO2012088004 A3 WO 2012088004A3
Authority
WO
WIPO (PCT)
Prior art keywords
cmp pad
pad conditioning
conditioning tool
tool
present disclosure
Prior art date
Application number
PCT/US2011/065970
Other languages
French (fr)
Other versions
WO2012088004A2 (en
Inventor
Gary E. Ruland
Charles RAREY
Thomas Charles Easley
James Graham
Mark SCHWEIZER
Original Assignee
Diamond Innovations, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Diamond Innovations, Inc. filed Critical Diamond Innovations, Inc.
Priority to KR1020137015870A priority Critical patent/KR101924241B1/en
Priority to AU2011349393A priority patent/AU2011349393B2/en
Priority to CN201180061545.8A priority patent/CN103269831B/en
Priority to SG2013037270A priority patent/SG190811A1/en
Priority to EP11832158.7A priority patent/EP2655015A2/en
Priority to JP2013546301A priority patent/JP6022477B2/en
Publication of WO2012088004A2 publication Critical patent/WO2012088004A2/en
Publication of WO2012088004A3 publication Critical patent/WO2012088004A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0027—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by impregnation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0054—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by impressing abrasive powder in a matrix
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/02—Wheels in one piece

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)

Abstract

The present disclosure provides a CMP pad conditioning tool with at least one integral abrasive protrusion. The present disclosure further provides a method for preparing this CMP pad conditioning tool, along with a method for using said tool to condition a CMP pad.
PCT/US2011/065970 2010-12-20 2011-12-20 Cmp pad conditioning tool WO2012088004A2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
KR1020137015870A KR101924241B1 (en) 2010-12-20 2011-12-20 Cmp pad conditioning tool
AU2011349393A AU2011349393B2 (en) 2010-12-20 2011-12-20 CMP pad conditioning tool
CN201180061545.8A CN103269831B (en) 2010-12-20 2011-12-20 CMP pad refacer
SG2013037270A SG190811A1 (en) 2010-12-20 2011-12-20 Cmp pad conditioning tool
EP11832158.7A EP2655015A2 (en) 2010-12-20 2011-12-20 Cmp pad conditioning tool
JP2013546301A JP6022477B2 (en) 2010-12-20 2011-12-20 CMP pad condition adjustment tool

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201061424870P 2010-12-20 2010-12-20
US61/424,870 2010-12-20

Publications (2)

Publication Number Publication Date
WO2012088004A2 WO2012088004A2 (en) 2012-06-28
WO2012088004A3 true WO2012088004A3 (en) 2012-12-13

Family

ID=45953217

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2011/065970 WO2012088004A2 (en) 2010-12-20 2011-12-20 Cmp pad conditioning tool

Country Status (8)

Country Link
US (1) US20120171935A1 (en)
EP (1) EP2655015A2 (en)
JP (1) JP6022477B2 (en)
KR (1) KR101924241B1 (en)
CN (1) CN103269831B (en)
AU (1) AU2011349393B2 (en)
SG (1) SG190811A1 (en)
WO (1) WO2012088004A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6133218B2 (en) * 2011-03-07 2017-05-24 インテグリス・インコーポレーテッド Chemical mechanical flattening pad conditioner
US9956664B2 (en) 2012-08-02 2018-05-01 3M Innovative Properties Company Abrasive element precursor with precisely shaped features and methods of making thereof
EP2879838B1 (en) 2012-08-02 2023-09-13 3M Innovative Properties Company Abrasive articles with precisely shaped features and method of making thereof
CN115625629A (en) * 2012-08-02 2023-01-20 3M创新有限公司 Abrasive elements having precisely shaped features, abrasive articles made therewith, and methods of making the same
KR102347711B1 (en) * 2014-04-03 2022-01-06 쓰리엠 이노베이티브 프로퍼티즈 컴파니 Polishing pads and systems and methods of making and using the same
GB201504759D0 (en) * 2015-03-20 2015-05-06 Rolls Royce Plc Abrading tool for a rotary dresser
JP7183182B2 (en) * 2017-05-02 2022-12-05 ツー－シックス デラウェア インコーポレイテッド Inert Gas Assisted Laser Machining of Ceramic Containing Articles
TWI621503B (en) * 2017-05-12 2018-04-21 Kinik Company Ltd. Chemical mechanical abrasive polishing pad conditioner and manufacturing method thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5106393A (en) * 1988-08-17 1992-04-21 Australian National University Diamond compact possessing low electrical resistivity
US6027659A (en) * 1997-12-03 2000-02-22 Intel Corporation Polishing pad conditioning surface having integral conditioning points
US20060258276A1 (en) * 2005-05-16 2006-11-16 Chien-Min Sung Superhard cutters and associated methods
US7241206B1 (en) * 2006-02-17 2007-07-10 Chien-Min Sung Tools for polishing and associated methods

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4151686A (en) * 1978-01-09 1979-05-01 General Electric Company Silicon carbide and silicon bonded polycrystalline diamond body and method of making it
US6123612A (en) 1998-04-15 2000-09-26 3M Innovative Properties Company Corrosion resistant abrasive article and method of making
US6276998B1 (en) * 1999-02-25 2001-08-21 Applied Materials, Inc. Padless substrate carrier
US6439986B1 (en) * 1999-10-12 2002-08-27 Hunatech Co., Ltd. Conditioner for polishing pad and method for manufacturing the same
US20030109204A1 (en) * 2001-12-06 2003-06-12 Kinik Company Fixed abrasive CMP pad dresser and associated methods
US6852016B2 (en) * 2002-09-18 2005-02-08 Micron Technology, Inc. End effectors and methods for manufacturing end effectors with contact elements to condition polishing pads used in polishing micro-device workpieces
US20050227590A1 (en) * 2004-04-09 2005-10-13 Chien-Min Sung Fixed abrasive tools and associated methods
US20070060026A1 (en) 2005-09-09 2007-03-15 Chien-Min Sung Methods of bonding superabrasive particles in an organic matrix
KR100636793B1 (en) * 2004-12-13 2006-10-23 이화다이아몬드공업 주식회사 Conditioner for Chemical Mechanical Planarization Pad
EP1944125B1 (en) * 2005-08-25 2012-01-25 Hiroshi Ishizuka Tool with sintered body polishing surface and method of manufacturing the same
JP4791121B2 (en) 2005-09-22 2011-10-12 新日鉄マテリアルズ株式会社 Polishing cloth dresser
US7815495B2 (en) * 2007-04-11 2010-10-19 Applied Materials, Inc. Pad conditioner
CN101327578A (en) * 2007-06-22 2008-12-24 钻面奈米科技股份有限公司 Abrading tool and method for producing the same
JP5311178B2 (en) * 2007-10-15 2013-10-09 株式会社ニコン Polishing apparatus and polishing pad dressing method in polishing apparatus
US8382557B2 (en) * 2007-11-14 2013-02-26 Saint-Gobain Abrasives, Inc. Chemical mechanical planarization pad conditioner and methods of forming thereof
JP2011514848A (en) 2008-03-10 2011-05-12 モルガン アドバンスド セラミックス， インコーポレイテッド Non-planar CVD diamond coated CMP pad conditioner and method of manufacturing the same
JP2010125567A (en) * 2008-11-28 2010-06-10 Mitsubishi Materials Corp Cmp pad conditioner
US20100186479A1 (en) 2009-01-26 2010-07-29 Araca, Inc. Method for counting and characterizing aggressive diamonds in cmp diamond conditioner discs
KR101091030B1 (en) * 2010-04-08 2011-12-09 이화다이아몬드공업 주식회사 Method for producing pad conditioner having reduced friction

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5106393A (en) * 1988-08-17 1992-04-21 Australian National University Diamond compact possessing low electrical resistivity
US6027659A (en) * 1997-12-03 2000-02-22 Intel Corporation Polishing pad conditioning surface having integral conditioning points
US20060258276A1 (en) * 2005-05-16 2006-11-16 Chien-Min Sung Superhard cutters and associated methods
US7241206B1 (en) * 2006-02-17 2007-07-10 Chien-Min Sung Tools for polishing and associated methods

Also Published As

Publication number Publication date
KR101924241B1 (en) 2018-11-30
KR20130132480A (en) 2013-12-04
SG190811A1 (en) 2013-07-31
CN103269831B (en) 2017-06-09
AU2011349393A1 (en) 2013-06-06
CN103269831A (en) 2013-08-28
JP2014504458A (en) 2014-02-20
JP6022477B2 (en) 2016-11-09
US20120171935A1 (en) 2012-07-05
AU2011349393B2 (en) 2016-11-10
WO2012088004A2 (en) 2012-06-28
EP2655015A2 (en) 2013-10-30

Similar Documents

Publication Publication Date Title
WO2012088004A3 (en) Cmp pad conditioning tool
WO2010075592A3 (en) Abrasive tip for abrasive tool and method for forming and replacing thereof
IL229061A0 (en) Anti - b7 - h3 antibody, polynucleotides encoding the same, comprising the same nad uses thereof
WO2012167171A3 (en) Z-selective ring-closing metathesis reactions
EP2626476A4 (en) Work machine, data communication system for work machine, operation system for work machine and work machine settings change system
EP2682212A4 (en) Guide pad, cutting tool body, and cutting tool
EP2651601A4 (en) A slot wear indicator for a grinding tool
PT2649242E (en) Method for building structures, particularly passages under operating railways or the like.
EP2527492A4 (en) Cutting edge structure for cutting tool, and cutting tool with the cutting edge structure
GB201109207D0 (en) Diamond tools
GB0913341D0 (en) Abrasive tools
WO2011075636A3 (en) Wise binding agents and epitopes
EP2767568A4 (en) Polishing slurry, and polishing method
PL2364813T3 (en) Honing tool
PL2747942T3 (en) Microfiber reinforcement for abrasive tools
HK1161184A1 (en) Wheel holder, method for manufacturing the same, and cutter wheel holding mechanism using the same
WO2012136909A3 (en) Thixotropic α-lactalbumin hydrogels, method for preparing same and uses thereof
AU2012257707A1 (en) Railway work vehicle
EP2461943A4 (en) Abrasive tool having controlled porosity distribution
HUE046986T2 (en) Ordering system for tools, machine parts and the like
HK1161218A1 (en) Wheel holder, method for manufacturing the same, and cutter wheel holding mechanism using the same
WO2011159740A3 (en) Methods for manufacturing tetranor-prostaglandin d, j, e, a and f metabolites
AU2010901248A0 (en) Sharpening Tool
AU2009903048A0 (en) Sharpening tool
PL119144U1 (en) Work chair, especially for working with the computer

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11832158

Country of ref document: EP

Kind code of ref document: A2

ENP Entry into the national phase

Ref document number: 2011349393

Country of ref document: AU

Date of ref document: 20111220

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 20137015870

Country of ref document: KR

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 2013546301

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE