JP6017134B2 - 生産効率化システム、生産効率化装置および生産効率化方法 - Google Patents
生産効率化システム、生産効率化装置および生産効率化方法 Download PDFInfo
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
- G05B19/4189—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by the transport system
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/31—From computer integrated manufacturing till monitoring
- G05B2219/31277—Dispatching rules, shortest travel time or bidding based to reduce empty travel
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32271—Decision of job dispatching, select job to process next on each machine
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45031—Manufacturing semiconductor wafers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P80/00—Climate change mitigation technologies for sector-wide applications
- Y02P80/10—Efficient use of energy, e.g. using compressed air or pressurized fluid as energy carrier
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Description
所定位置から前記選択された処理装置へ、前記被処理体を搬送する搬送装置を移動させる搬送制御装置と、を備えることを特徴とする生産効率化システムが提供される。
前記搬送指示送信部からの搬送指示に応じて、前記所定位置から前記処理装置の近傍の待機位置へ、前記被処理体を搬送する搬送装置を移動させ、この待機位置で前記搬送装置を停止させ、その後、前記処理装置が前記被処理体をマウント可能な状態になったことを前記装置状態取得部が取得すると、前記待機位置から前記処理装置へ前記搬送装置を移動させる搬送制御装置と、を備えることを特徴とする生産効率化システムが提供される。
図1は本発明の第1の実施形態に係る生産効率化システムの概略構成を示すブロック図である。図1の生産効率化システム1は、スケジューラ2と、ディスパッチャ3と、生産効率化装置4と、複数の処理装置5と、複数の処理装置コントローラ6と、複数の搬送装置7と、搬送制御装置8とを備えている。
第2の実施形態は、搬送装置7bを効率的に移動させて、消費エネルギー低減を図るものである。本発明の第2の実施形態に係る生産効率化システム1の概略構成は、図1と同様のブロック図で表される。
第3の実施形態は、複数の処理装置5および搬送装置7での消費エネルギーの総量が最大消費エネルギー量を超えないように調整するものである。
また、本実施形態を、上述した第2の実施形態と組み合わせてもよい。すなわち、図10の生産効率化装置4bに、さらに、図6の装置状態取得部45および搬送指示送信部46を設け、搬送タイミング判定部64が判定した搬送経路に従って被処理体を処理装置5まで搬送する際に、処理装置5が被処理体をマウント可能な状態になるまで、被処理体を待機位置で一旦停止させるようにしてもよい。
2 スケジューラ
3 ディスパッチャ
4,4a,4b 生産効率化装置
5 処理装置
6 処理装置コントローラ
7,7a,7b 搬送装置
8 搬送制御装置
9 生産実行制御装置
11 工程間搬送路
12 工程内搬送路
13 ストッカ
41 装置ロケーションマップ
42 第1装置選択部
43 第2装置選択部
44 装置回答部
45 装置状態取得部
46 搬送指示送信部
61 エネルギー消費量集計部
62 テーブル作成部
63 処理装置判定部
64 搬送タイミング判定部
81 搬送指示受信部
82 制御部
Claims (4)
- 工程内搬送経路上に配置された複数の処理装置のそれぞれの位置を考慮して、被処理体を処理すべき処理装置を選択する生産効率化装置と、
所定位置から前記選択された処理装置へ、前記被処理体を搬送する搬送装置を移動させる搬送制御装置と、を備え、
前記生産効率化装置は、
前記複数の処理装置から前記被処理体を処理可能な2以上の処理装置を選択する第1装置選択部と、
前記第1装置選択部により選択された処理装置の中から、前記所定位置からの搬送距離が最も短い処理装置を選択する第2装置選択部と、を有することを特徴とする生産処理システム。 - 前記第1装置選択部は、前記被処理体を用いて生産される製品に応じて、前記被処理体を処理可能な処理装置を選択することを特徴とする請求項1に記載の生産処理システム。
- 前記生産効率化装置は、前記選択された処理装置の状態を取得する装置状態取得部を有し、
前記搬送制御装置は、
前記所定位置から前記選択された処理装置の近傍の待機位置へ前記搬送装置を移動させ、この待機位置で前記搬送装置を停止させ、
その後、前記選択された処理装置が前記被処理体を搬入できる状態になったことを前記装置状態取得部が取得すると、前記待機位置から前記選択された処理装置へ前記搬送装置を移動させることを特徴とする請求項1または2に記載の生産処理システム。 - 前記複数の処理装置のそれぞれに対して設けられ、対応する処理装置の消費エネルギーを管理する複数の消費エネルギー管理部を備え、
前記生産効率化装置は、前記消費エネルギー管理部で管理している処理装置の消費エネルギーと、前記搬送装置の消費エネルギーと、に基づいて、前記複数の処理装置全体および前記搬送装置で消費する消費エネルギーが予め定めた最大消費エネルギーを超えないように、前記被処理体を処理すべき処理装置を選択することを特徴とする請求項1乃至3のいずれかに記載の生産処理システム。
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JP2011272476A JP6017134B2 (ja) | 2011-12-13 | 2011-12-13 | 生産効率化システム、生産効率化装置および生産効率化方法 |
KR1020147016031A KR101953423B1 (ko) | 2011-12-13 | 2012-11-08 | 생산 효율화 시스템, 생산 효율화 장치 및 생산 효율화 방법 |
PCT/JP2012/078923 WO2013088865A1 (ja) | 2011-12-13 | 2012-11-08 | 生産効率化システム、生産効率化装置および生産効率化方法 |
TW101146792A TWI557655B (zh) | 2011-12-13 | 2012-12-12 | Production efficiency system, production efficiency of the device and production efficiency of the method |
US14/303,059 US10012980B2 (en) | 2011-12-13 | 2014-06-12 | Modifying operational efficiency by repositioning process apparatus |
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KR101930981B1 (ko) * | 2011-11-25 | 2018-12-19 | 도쿄엘렉트론가부시키가이샤 | 처리 장치군 컨트롤러, 생산 처리 시스템, 처리 장치군 제어 방법, 생산 효율화 시스템, 생산 효율화 장치 및 생산 효율화 방법 |
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US20140297017A1 (en) | 2014-10-02 |
TWI557655B (zh) | 2016-11-11 |
US10012980B2 (en) | 2018-07-03 |
TW201346790A (zh) | 2013-11-16 |
KR20140102678A (ko) | 2014-08-22 |
JP2013125788A (ja) | 2013-06-24 |
WO2013088865A1 (ja) | 2013-06-20 |
KR101953423B1 (ko) | 2019-02-28 |
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