JP6013181B2 - マルチモード・イメージング - Google Patents

マルチモード・イメージング Download PDF

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Publication number
JP6013181B2
JP6013181B2 JP2012501500A JP2012501500A JP6013181B2 JP 6013181 B2 JP6013181 B2 JP 6013181B2 JP 2012501500 A JP2012501500 A JP 2012501500A JP 2012501500 A JP2012501500 A JP 2012501500A JP 6013181 B2 JP6013181 B2 JP 6013181B2
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images
illumination
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JP2012521559A (ja
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マルガリート，タミール
アブダルハム，ナフタリ
オロン，ラム
ノイ，アミル
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オルボテック・リミテッド
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Input (AREA)
JP2012501500A 2009-03-24 2010-03-23 マルチモード・イメージング Active JP6013181B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/409,788 US8144973B2 (en) 2009-03-24 2009-03-24 Multi-modal imaging
US12/409,788 2009-03-24
PCT/IL2010/000238 WO2010109455A1 (en) 2009-03-24 2010-03-23 Multi-modal imaging

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015126670A Division JP6259422B2 (ja) 2009-03-24 2015-06-24 マルチモード・イメージング

Publications (2)

Publication Number Publication Date
JP2012521559A JP2012521559A (ja) 2012-09-13
JP6013181B2 true JP6013181B2 (ja) 2016-10-25

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ID=42780217

Family Applications (2)

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JP2012501500A Active JP6013181B2 (ja) 2009-03-24 2010-03-23 マルチモード・イメージング
JP2015126670A Active JP6259422B2 (ja) 2009-03-24 2015-06-24 マルチモード・イメージング

Family Applications After (1)

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JP2015126670A Active JP6259422B2 (ja) 2009-03-24 2015-06-24 マルチモード・イメージング

Country Status (7)

Country Link
US (1) US8144973B2 (enExample)
JP (2) JP6013181B2 (enExample)
KR (1) KR101691242B1 (enExample)
CN (1) CN102341692B (enExample)
IL (1) IL214416A (enExample)
TW (1) TWI484163B (enExample)
WO (1) WO2010109455A1 (enExample)

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KR101906139B1 (ko) 2017-01-24 2018-10-10 주식회사 래온 검사 기준 화상을 통한 자동 조명 설정 방식의 머신 비전 시스템 및 동작 방법
KR101906137B1 (ko) 2017-01-24 2018-10-10 주식회사 래온 인쇄회로기판의 결함을 검사하는 장치 및 방법
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KR102684368B1 (ko) * 2019-09-13 2024-07-11 코니카 미놀타 가부시키가이샤 표면 결함 판별 장치, 외관 검사 장치 및 프로그램
CN112683925A (zh) * 2019-10-17 2021-04-20 神讯电脑(昆山)有限公司 物件表面可能缺陷的影像检测扫描方法及其系统
TWI724590B (zh) * 2019-10-25 2021-04-11 精信精密工業股份有限公司 自動缺陷檢測系統及檢測方法
TWI765337B (zh) 2019-12-13 2022-05-21 旺矽科技股份有限公司 雷射晶片檢測方法及設備
KR102216999B1 (ko) * 2020-09-28 2021-02-18 주식회사 하이브비젼 라인 스캔용 논-램버시안 표면 검사 시스템
US11734812B2 (en) * 2021-03-18 2023-08-22 UnitX, Inc. Fused imaging device and method
WO2023119883A1 (ja) * 2021-12-24 2023-06-29 富士フイルム株式会社 検査装置、印刷システム、検査システム及びキュアシステム、基板の製造方法及びプログラム
JP2023122140A (ja) * 2022-02-22 2023-09-01 株式会社Ｓｃｒｅｅｎホールディングス 教師データ生成装置、教師データ生成方法およびプログラム
TWI891285B (zh) * 2024-03-15 2025-07-21 由田新技股份有限公司 多重自動光學複判系統以及多重自動光學複判方法
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Also Published As

Publication number Publication date
JP6259422B2 (ja) 2018-01-10
JP2012521559A (ja) 2012-09-13
IL214416A (en) 2015-10-29
KR20120058443A (ko) 2012-06-07
KR101691242B1 (ko) 2016-12-29
TW201105957A (en) 2011-02-16
WO2010109455A1 (en) 2010-09-30
US8144973B2 (en) 2012-03-27
TWI484163B (zh) 2015-05-11
CN102341692A (zh) 2012-02-01
US20100245813A1 (en) 2010-09-30
JP2016006422A (ja) 2016-01-14
CN102341692B (zh) 2016-05-04
IL214416A0 (en) 2011-09-27

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