JP6010451B2 - 成膜方法 - Google Patents
成膜方法 Download PDFInfo
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- JP6010451B2 JP6010451B2 JP2012279922A JP2012279922A JP6010451B2 JP 6010451 B2 JP6010451 B2 JP 6010451B2 JP 2012279922 A JP2012279922 A JP 2012279922A JP 2012279922 A JP2012279922 A JP 2012279922A JP 6010451 B2 JP6010451 B2 JP 6010451B2
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Description
前記回転テーブルの前記上面の上方において区画され、前記回転テーブルの前記上面に向けてガスを供給する第1の反応ガス供給部を有する第1の処理領域と、
前記回転テーブルの周方向に沿って前記第1の処理領域から離間して配置され、前記回転テーブルの前記上面に対してガスを供給する第2の反応ガス供給部を有する第2の処理領域と、
前記第1の処理領域と前記第2の処理領域との間に設けられ、前記回転テーブルの前記上面に対して分離ガスを供給する分離ガス供給部と、該分離ガス供給部からの前記分離ガスを前記第1の処理領域と前記第2の処理領域へ導く狭い空間を前記回転テーブルの前記上面に対して形成する天井面とを有する分離領域と、を備える成膜装置を用いて、前記複数の基板上に、所定の第1の元素を含む酸化膜に第2の元素を含ませた酸化膜を成膜する成膜方法であって、
前記第1の反応ガス供給部から前記分離ガスを供給し、前記第2の反応ガス供給部から酸化ガスを供給し、前記分離ガス供給部から前記分離ガスを供給した状態で前記回転テーブルを少なくとも1回回転させるプリ酸化工程と、
該プリ酸化工程の後に、前記第1の反応ガス供給部から前記第1の元素を含む第1の反応ガスを供給し、前記第2の反応ガス供給部から前記酸化ガスを供給し、前記分離ガス供給部から前記分離ガスを供給した状態で前記回転テーブルを所定回数回転させ、前記基板上に前記第1の元素を含む酸化膜を成膜する成膜工程と、
前記第1の反応ガス供給部又は前記第2の反応ガス供給部の一方から前記第2の元素を含む第2の反応ガスを供給し、前記第1の反応ガス供給部又は前記第2の反応ガス供給部の他方から不活性ガスを供給し、前記分離ガス供給部から前記分離ガスを供給した状態で前記回転テーブルを所定回数回転させ、前記酸化膜上に前記第2の元素をドープするドープ工程と、を含む。
(成膜装置)
まず、図1乃至図3を用いて、本発明の実施形態1に係る成膜方法を実施するのに好適な成膜装置について説明する。
次に、図1乃至図5において説明した成膜装置を用いた本発明の実施形態1に係る成膜方法について説明する。
図9は、本発明の実施形態2に係る成膜方法の一例を示したシーケンス図である。実施形態2においては、図6に示したHfON膜を、実施形態1とは異なる成膜プロセスで形成する成膜方法について説明する。なお、実施形態2においても、成膜装置は実施形態1において説明した成膜装置を用いるので、その説明は省略する。なお、実施形態1と同様の成膜装置を用いる点は、以後の実施形態においても同様とする。
図10は、本発明の実施形態3に係る成膜方法により成膜されたHfON膜の一例を示した図である。実施形態3に係る成膜方法においては、実施形態1、2で示した多層構造のHfON膜ではなく、図7で示した単膜のHfO膜の上面にNをドープ(添加)した構造のHfON膜を成膜する成膜方法について説明する。
図12は、本発明の実施形態4に係る成膜方法により窒素をドープする対象となるHfSiO膜の一例を示した図である。HfSiO膜は、酸素以外にHfとSiという2種類の元素を含む複合酸化膜であり、図12に示すように、複数のHfO膜とSiO膜とが交互に積層されたラミネート構造を有する。なお、HfO膜とSiO膜のラミネート構造の場合、HfO膜の方が主体となり、SiO膜はHfO膜よりも薄い膜厚で成膜される場合が多いので、図12においても、HfO膜の方がSiO膜よりも厚い膜厚を有する構造を示している。実施形態4に係る成膜方法においては、このような複数種類の元素の酸化膜が積層されたラミネート構造を有する多元素酸化膜に窒素をドープする成膜方法について説明する。
図15は、本発明の実施形態5に係る成膜方法により成膜されたHfSiON膜の一例を示した図である。図15に示すように、実施形態5に係る成膜方法により成膜されたHfSiON膜は、HfO膜とSiO膜のラミネート構造を有する点では、実施形態4に係る成膜方法により成膜された図13に示したHfSiON膜と同様であるが、ドープされた窒素がHfSiON膜の上面付近のみであり、HfSiON膜の上面付近にHfON膜とSiON膜が形成されている点で、図13に示したHfSiON膜と異なっている。このように、窒素のドープを、膜全体の上面付近でのみ行うように成膜を行ってもよい。
図17は、本発明の実施形態6に係る成膜方法の一例を示したシーケンス図である。実施形態6に係る成膜方法においては、HfO膜にSiをドープしてHfSiO膜を成膜する成膜方法について説明する。
図18は、本発明の実施形態7に係る成膜方法の一例を示したシーケンス図である。実施形態7に係る成膜方法においては、実施形態6に係る成膜方法と同様に、HfO膜にSiをドープしてHfSiO膜を成膜する成膜方法について説明する。実施形態7に係る成膜方法のシーケンスは、図9に示した実施形態2に係る成膜方法におけるシーケンスと類似したものであり、ドープする元素を窒素からシリコンに置き換えたものである。
2 回転テーブル
4 凸状部
11 天板
12 容器本体
15 搬送口
24 凹部(ウエハ載置部)
31、32 反応ガスノズル
41、42 分離ガスノズル
D 分離領域
P1 第1の処理領域
P2 第2の処理領域
H 分離空間
W ウエハ
Claims (21)
- チャンバ内に回転可能に収容され、複数の基板を上面に載置可能な載置部を有する回転テーブルと、
前記回転テーブルの前記上面の上方において区画され、前記回転テーブルの前記上面に向けてガスを供給する第1の反応ガス供給部を有する第1の処理領域と、
前記回転テーブルの周方向に沿って前記第1の処理領域から離間して配置され、前記回転テーブルの前記上面に対してガスを供給する第2の反応ガス供給部を有する第2の処理領域と、
前記第1の処理領域と前記第2の処理領域との間に設けられ、前記回転テーブルの前記上面に対して分離ガスを供給する分離ガス供給部と、該分離ガス供給部からの前記分離ガスを前記第1の処理領域と前記第2の処理領域へ導く狭い空間を前記回転テーブルの前記上面に対して形成する天井面とを有する分離領域と、を備える成膜装置を用いて、前記複数の基板上に、所定の第1の元素を含む酸化膜に第2の元素を含ませた酸化膜を成膜する成膜方法であって、
前記第1の反応ガス供給部から前記分離ガスを供給し、前記第2の反応ガス供給部から酸化ガスを供給し、前記分離ガス供給部から前記分離ガスを供給した状態で前記回転テーブルを少なくとも1回回転させるプリ酸化工程と、
該プリ酸化工程の後に、前記第1の反応ガス供給部から前記第1の元素を含む第1の反応ガスを供給し、前記第2の反応ガス供給部から前記酸化ガスを供給し、前記分離ガス供給部から前記分離ガスを供給した状態で前記回転テーブルを所定回数回転させ、前記基板上に前記第1の元素を含む酸化膜を成膜する成膜工程と、
前記第1の反応ガス供給部又は前記第2の反応ガス供給部の一方から前記第2の元素を含む第2の反応ガスを供給し、前記第1の反応ガス供給部又は前記第2の反応ガス供給部の他方から不活性ガスを供給し、前記分離ガス供給部から前記分離ガスを供給した状態で前記回転テーブルを所定回数回転させ、前記酸化膜上に前記第2の元素をドープするドープ工程と、を含む成膜方法。 - 前記ドープ工程の前後に、前記第1の反応ガス供給部から前記分離ガスを供給し、前記第2の反応ガス供給部から不活性ガスを供給し、前記分離ガス供給部から前記分離ガスを供給した状態で前記回転テーブルを回転させる第1及び第2のパージ工程を有する請求項1に記載の成膜方法。
- 前記成膜工程と前記ドープ工程との間に、前記第1の反応ガス供給部から前記分離ガスを供給し、前記第2の反応ガス供給部から前記酸化ガスを供給し、前記分離ガス供給部から前記分離ガスを供給した状態で前記回転テーブルを少なくとも1回回転させるポスト酸化工程を有する請求項2に記載の成膜方法。
- 前記プリ酸化工程、前記成膜工程、前記ポスト酸化工程、前記第1のパージ工程、前記ドープ工程及び前記第2のパージ工程を1サイクルとし、該サイクルを所定回数繰り返して前記第1の元素を含む酸化膜上に前記第2の元素がドープされた層の積層膜を前記酸化膜として成膜する請求項3に記載の成膜方法。
- 前記サイクルを前記所定回数繰り返した後、前記プリ酸化工程、前記成膜工程及び前記ポスト酸化工程を1回ずつ行ってから前記酸化膜の成膜を終了する請求項4に記載の成膜方法。
- 前記第2のパージ工程の後に、前記第1の反応ガス供給部から前記第1の反応ガスを供給し、前記第2の反応ガス供給部から不活性ガスを供給し、前記分離ガス供給部から前記分離ガスを供給した状態で前記回転テーブルを所定回数回転させる第1の反応ガス供給工程を更に有し、
該第1の反応ガス供給工程の後、前記成膜工程に戻るサイクルを含む請求項3乃至5のいずれか一項に記載の成膜方法。 - 前記成膜工程、前記ポスト酸化工程、前記第1のパージ工程、前記ドープ工程、前記第2のパージ工程及び前記第1の反応ガス供給工程を1サイクルとし、該サイクルを所定回数繰り返して前記第1の元素を含む酸化膜上に前記第2の元素がドープされた層の積層膜を前記酸化膜として成膜する請求項6に記載の成膜方法。
- 前記ポスト酸化工程と前記第1のパージ工程との間に、
第3の元素を含む第3の反応ガスを前記第1の反応ガス供給部から供給し、前記第2の反応ガス供給部から前記酸化ガスを供給し、前記分離ガス供給部から前記分離ガスを供給した状態で前記回転テーブルを所定回数回転させ、前記酸化膜上に前記第3の元素を含む第2の酸化膜を成膜する第2の成膜工程と、
前記第1の反応ガス供給部から前記分離ガスを供給し、前記第2の反応ガス供給部から前記酸化ガスを供給し、前記分離ガス供給部から前記分離ガスを供給した状態で前記回転テーブルを少なくとも1回回転させる第2のポスト酸化工程と、を更に有する請求項6に記載の成膜方法。 - 前記成膜工程、前記ポスト酸化工程、前記第2の成膜工程、前記第2のポスト酸化工程、前記第1のパージ工程、前記ドープ工程、前記第2のパージ工程及び前記第1の反応ガス供給工程を1サイクルとし、該サイクルを所定回数繰り返して前記第1の元素を含む前記酸化膜上に前記第3の元素を含む前記第2の酸化膜が積層された酸化膜に前記第2の元素がドープされた層の積層膜を前記酸化膜として成膜する請求項8に記載の成膜方法。
- 前記サイクルを前記所定回数繰り返した後、前記成膜工程及び前記ポスト酸化工程を1回ずつ行ってから前記酸化膜の成膜を終了する請求項7又は9に記載の成膜方法。
- 前記ポスト酸化工程の後、第3の元素を含む第3の反応ガスを前記第1の反応ガス供給部から供給し、前記第2の反応ガス供給部から前記酸化ガスを供給し、前記分離ガス供給部から前記分離ガスを供給した状態で前記回転テーブルを所定回数回転させ、前記酸化膜上に前記第3の元素を含む第2の酸化膜を成膜する第2の成膜工程を更に有し、
該第2の成膜工程の後、前記プリ酸化工程に戻るサイクルを含む請求項3に記載の成膜方法。 - 前記サイクルを所定回数繰り返した後、前記プリ酸化工程と、前記成膜工程と、前記ポスト酸化工程を1回ずつ行ってから前記酸化膜の成膜を終了する請求項11に記載の成膜方法。
- 前記サイクル終了後の前記ポスト酸化工程は、前記サイクル中の前記ポスト酸化工程よりも長時間行う請求項5、10又は12に記載の成膜方法。
- 前記第3の元素は金属元素又はSiである請求項11又は12に記載の成膜方法。
- 前記第1の元素は金属元素である請求項1乃至14のいずれか一項に記載の成膜方法。
- 前記金属元素は、Hf、Zr、Alである請求項14又は15に記載の成膜方法。
- 前記第2の元素はNである請求項1乃至16のいずれか一項に記載の成膜方法。
- 前記第2の反応ガスはNH3であり、プラズマ処理されて前記酸化膜上に供給される請求項17に記載の成膜方法。
- 前記第2の元素はSiである請求項1乃至16のいずれか一項に記載の成膜方法。
- 前記酸化ガスは、O3ガスである請求項1乃至19のいずれか一項に記載の成膜方法。
- 前記分離ガスは、不活性ガスである請求項1乃至20のいずれか一項に記載の成膜方法。
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