JP6008563B2 - 蒸気送達装置、その製造方法およびその使用方法 - Google Patents
蒸気送達装置、その製造方法およびその使用方法 Download PDFInfo
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- JP6008563B2 JP6008563B2 JP2012105228A JP2012105228A JP6008563B2 JP 6008563 B2 JP6008563 B2 JP 6008563B2 JP 2012105228 A JP2012105228 A JP 2012105228A JP 2012105228 A JP2012105228 A JP 2012105228A JP 6008563 B2 JP6008563 B2 JP 6008563B2
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- Y10T137/265—Plural outflows
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/2496—Self-proportioning or correlating systems
- Y10T137/2559—Self-controlled branched flow systems
- Y10T137/265—Plural outflows
- Y10T137/2657—Flow rate responsive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/2496—Self-proportioning or correlating systems
- Y10T137/2559—Self-controlled branched flow systems
- Y10T137/265—Plural outflows
- Y10T137/2663—Pressure responsive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
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Description
98 第2の圧力調節装置
100 送達システム
102 送達装置
103 加熱ジャケット
104 化学センサー
106 圧力センサー
107 混合チャンバー
108 第1の圧力/流量コントローラー
110 第2の圧力/流量コントローラー
112 第1の比例バルブ
114 第2の比例バルブ
116、118、120、122 シャットオフバルブ
200 反応器
202 キャリアガスの第1の流れ
204 キャリアガスの第2の流れ
206 第3の流れ
208 質量流量コントローラー
212 配管のコイル
300 チャンバー
302、304、306 導管
310 フランジ
312 空間
Claims (8)
- 送達装置、第1の比例バルブ、第1の流れ、第2の比例バルブ、第2の流れ、混合チャンバー、第3の流れ、化学センサー、第1の圧力/流量コントローラーおよび圧力センサーを含む送達システムであって;
前記第1の流れは、前記送達装置および前記第1の比例バルブを含み、
前記送達装置は入口ポートおよび出口ポートを有しており;前記送達装置は固体前駆体を収容しており;
前記第1の比例バルブは前記送達装置の前記入口ポートと連通しており;前記第1の比例バルブは適用される電圧に基づいて前記送達装置へのキャリアガスの第1の流れのフローを制御するように作動するものであり;
前記第2の流れは、前記第2の比例バルブを含み、
前記第2の比例バルブは前記送達装置の前記出口ポートと連通しており;前記第2の比例バルブは適用される電圧に基づいて前記送達装置へのキャリアガスの第2の流れのフローを制御するように作動するものであり;
前記混合チャンバーは前記送達装置の下流にあり、かつ前記第1の流れと前記第2の流れとを混合するように作動するものであり、第1の導管のフランジと前記混合チャンバーの面との間に形成されるチャンネルにおいて前記第1の流れおよび前記第2の流れが混合され、前記第1の流れを収容する前記第1の導管はフランジを装着しており、および前記混合チャンバーの面は、前記第2の流れを収容する第2の導管と流体連通しており、前記第2の流れは前記送達装置を迂回し前記送達装置の下流の位置で前記第1の流れと接触し前記第3の流れを形成し;
前記第3の流れは、化学センサーを含み;
前記化学センサーは混合チャンバーの下流に配置されており、かつ前記混合チャンバーから出てくる流体流れの化学的内容を分析するように作動するものであり;前記化学センサーは前記第1の比例バルブと連絡しており;
前記第1の圧力/流量コントローラーは前記化学センサーおよび前記第1の比例バルブと作動的に連絡しており;
前記圧力センサーは前記送達装置と流体連通しており;前記圧力センサーは前記第2の流れのフローを制御するように作動するものであり;
前記送達システムはキャリアガスの単位体積あたり実質的に一定のモル数の前駆体蒸気を複数の反応器に送達するように作動するものであり、前記複数の反応器は前記送達システムと連通している;
送達システム。 - 前記混合チャンバーが、前記第1の流れを収容する第1の導管および前記第2の流れを収容する第2の導管と流体連通している、請求項1に記載の送達システム。
- 前記第1の流れおよび前記第2の流れが互いに接触する前に対向した方向に流れている、請求項2に記載の送達システム。
- 第2の圧力/流量コントローラーをさらに含み、前記第2の圧力/流量コントローラーが前記第2の比例バルブと電気連絡している、請求項1に記載の送達システム。
- 第1の圧力/流量コントローラー、前記第1の比例バルブ、前記送達装置、前記混合チャンバーおよび前記化学センサーが第1の閉じたループにある請求項1に記載の送達システム。
- 前記第2の圧力/流量コントローラー、前記第2の比例バルブ、前記混合チャンバーおよび前記圧力センサーが第2の閉じたループにある請求項4に記載の送達システム。
- キャリアガスの第1の流れを送達装置を経由して混合チャンバーに移送し、前記送達装置は前駆体化合物を収容しており、前記キャリアガスの第1の流れが20℃以上の温度であり;
キャリアガスの第2の流れを前記混合チャンバーに移送し、第1の導管のフランジと前記混合チャンバーの面との間に形成されるチャンネルにおいて前記第1の流れおよび前記第2の流れが混合され、前記第1の流れを収容する前記第1の導管はフランジを装着しており、および前記混合チャンバーの面は、前記第2の流れを収容する第2の導管と流体連通しており、前記混合チャンバーは前記送達装置の下流の場所に位置しており;並びに
前記第1の流れおよび前記第2の流れを前記混合チャンバー内で一緒にして第3の流れを形成し、前記第1の流れおよび前記第2の流れが互いに接触する前に互いに対向して流れている;
ことを含む方法。 - 前記第3の流れに配置されている化学センサーからの信号を第1の圧力/流量調節装置、および/または第2の圧力/流量調節装置に伝達することをさらに含み、前記第1の圧力/流量調節装置が前記第1の流れにおけるキャリアガスの流量を制御するように作動するものであり、並びに前記第2の圧力/流量調節装置が前記第2の流れにおけるキャリアガスの流量を制御するように作動するものである、請求項7に記載の方法。
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