JP5939810B2 - デバイスウェーハの加工方法 - Google Patents
デバイスウェーハの加工方法 Download PDFInfo
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- JP5939810B2 JP5939810B2 JP2012013948A JP2012013948A JP5939810B2 JP 5939810 B2 JP5939810 B2 JP 5939810B2 JP 2012013948 A JP2012013948 A JP 2012013948A JP 2012013948 A JP2012013948 A JP 2012013948A JP 5939810 B2 JP5939810 B2 JP 5939810B2
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- wafer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
- B24B19/02—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding grooves, e.g. on shafts, in casings, in tubes, homokinetic joint elements
- B24B19/022—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding grooves, e.g. on shafts, in casings, in tubes, homokinetic joint elements for helicoidal grooves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54493—Peripheral marks on wafers, e.g. orientation flats, notches, lot number
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/146—Mixed devices
- H01L2924/1461—MEMS
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Description
11a 表面
11b 裏面
15 デバイス
17 デバイス領域
19 外周余剰領域
61 キャリアウェーハ
61a 表面
63 環状溝
64 接着剤
67 デバイス収容領域
69 キャリア余剰領域
Claims (4)
- 表面に形成された複数の交差する分割予定ラインで区画された各領域にそれぞれデバイスが形成されたデバイス領域と、該デバイス領域を囲繞する外周余剰領域とを有するデバイスウェーハの加工方法であって、
該デバイスウェーハが貼着されるキャリアウェーハであって、該デバイスウェーハの該外周余剰領域に対応する位置にキャリア余剰領域を有するキャリアウェーハを準備するキャリアウェーハ準備ステップと、
該キャリアウェーハの表面の該キャリア余剰領域であって該キャリアウェーハの外周縁より内側の位置に、該外周縁に開口しない凹部を形成する凹部形成ステップと、
該凹部形成ステップを実施した後、該キャリアウェーハの表面から突出するように接着剤を該凹部にのみ配設する接着剤配設ステップと、
該接着剤配設ステップを実施した後、該キャリアウェーハの表面側と該デバイスウェーハの表面側とを貼り合わせ、該接着剤で該デバイスウェーハを該キャリアウェーハに固定するウェーハ貼り合わせステップと、
該ウェーハ貼り合わせステップを実施した後、該デバイスウェーハの裏面側を研削、又は、研磨して所定厚みへと薄化する薄化ステップと、
を備える、ことを特徴とするデバイスウェーハの加工方法。 - 前記接着剤配設ステップで、前記凹部に配設される前記接着剤の量は、
前記ウェーハ貼り合わせステップを実施した際に、該接着剤が該デバイス領域に到達しない量に設定される、
ことを特徴とする請求項1に記載のデバイスウェーハの加工方法。 - 前記薄化ステップを実施した後、前記キャリアウェーハを前記デバイスウェーハから剥離する剥離ステップをさらに備える、
ことを特徴とする請求項1又は請求項2に記載のデバイスウェーハの加工方法。 - 前記薄化ステップを実施した後、前記剥離ステップを実施する前に、前記キャリアウェーハに貼着された前記デバイスウェーハに追加処理を施す追加処理ステップをさらに備える、
ことを特徴とする請求項3に記載のデバイスウェーハの加工方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/185,942 | 2011-07-19 | ||
US13/185,942 US8461019B2 (en) | 2011-07-19 | 2011-07-19 | Method of processing device wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013026614A JP2013026614A (ja) | 2013-02-04 |
JP5939810B2 true JP5939810B2 (ja) | 2016-06-22 |
Family
ID=47556061
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012013948A Active JP5939810B2 (ja) | 2011-07-19 | 2012-01-26 | デバイスウェーハの加工方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8461019B2 (ja) |
JP (1) | JP5939810B2 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8580655B2 (en) | 2012-03-02 | 2013-11-12 | Disco Corporation | Processing method for bump-included device wafer |
EP2951860B1 (en) * | 2013-01-31 | 2020-03-11 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Carrier substrate and method for fixing a substrate structure |
JP2014157909A (ja) * | 2013-02-15 | 2014-08-28 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置の製造方法 |
JP6214192B2 (ja) * | 2013-04-11 | 2017-10-18 | 株式会社ディスコ | 加工方法 |
JP6197422B2 (ja) * | 2013-07-11 | 2017-09-20 | 富士通セミコンダクター株式会社 | 半導体装置の製造方法および支持基板付きウェハ |
JP6230354B2 (ja) * | 2013-09-26 | 2017-11-15 | 株式会社ディスコ | デバイスウェーハの加工方法 |
US9206037B2 (en) * | 2014-03-04 | 2015-12-08 | Disco Corporation | MEMS device chip manufacturing method |
JP6344971B2 (ja) * | 2014-05-16 | 2018-06-20 | 株式会社ディスコ | サポートプレート、サポートプレートの形成方法及びウェーハの加工方法 |
DE102015002542B4 (de) | 2015-02-27 | 2023-07-20 | Disco Corporation | Waferteilungsverfahren |
CA2986768C (en) * | 2015-05-26 | 2022-04-26 | Safe Trek, Inc. | Systems and methods for providing assistance in an emergency |
JP6467333B2 (ja) | 2015-11-12 | 2019-02-13 | 株式会社キトー | チェーンブロックおよび組込カバー |
CN109290875B (zh) * | 2017-07-25 | 2021-06-22 | 北京通美晶体技术股份有限公司 | 背面有凹坑的磷化铟晶片、制法和制备其的腐蚀液 |
CN110349847B (zh) * | 2018-04-08 | 2022-11-04 | 上海新微技术研发中心有限公司 | 一种通过键合材料进行键合的方法和键合结构 |
US11195740B2 (en) | 2019-04-17 | 2021-12-07 | Micron Technology, Inc. | Methods and apparatus for wafer handling and processing |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS531464A (en) * | 1976-06-28 | 1978-01-09 | Nippon Telegr & Teleph Corp <Ntt> | Bonding for crystal base |
JP2000271862A (ja) * | 1999-03-26 | 2000-10-03 | Ibiden Co Ltd | ウェハ研磨装置用ウェハ保持プレート及びその製造方法 |
US6524881B1 (en) * | 2000-08-25 | 2003-02-25 | Micron Technology, Inc. | Method and apparatus for marking a bare semiconductor die |
US6949158B2 (en) * | 2001-05-14 | 2005-09-27 | Micron Technology, Inc. | Using backgrind wafer tape to enable wafer mounting of bumped wafers |
JP2004207606A (ja) | 2002-12-26 | 2004-07-22 | Disco Abrasive Syst Ltd | ウェーハサポートプレート |
US7713841B2 (en) * | 2003-09-19 | 2010-05-11 | Micron Technology, Inc. | Methods for thinning semiconductor substrates that employ support structures formed on the substrates |
JP2007019379A (ja) * | 2005-07-11 | 2007-01-25 | Disco Abrasive Syst Ltd | ウェーハの加工方法 |
US7431788B2 (en) * | 2005-07-19 | 2008-10-07 | Lam Research Corporation | Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system |
JP2008258303A (ja) * | 2007-04-03 | 2008-10-23 | Seiko Epson Corp | 半導体装置の製造方法 |
FR2935536B1 (fr) * | 2008-09-02 | 2010-09-24 | Soitec Silicon On Insulator | Procede de detourage progressif |
JP5495647B2 (ja) * | 2009-07-17 | 2014-05-21 | 株式会社ディスコ | ウェーハの加工方法 |
-
2011
- 2011-07-19 US US13/185,942 patent/US8461019B2/en active Active
-
2012
- 2012-01-26 JP JP2012013948A patent/JP5939810B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2013026614A (ja) | 2013-02-04 |
US20130023107A1 (en) | 2013-01-24 |
US8461019B2 (en) | 2013-06-11 |
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