JP5937704B2 - ガラス基板の製造方法及びガラス基板製造装置 - Google Patents
ガラス基板の製造方法及びガラス基板製造装置 Download PDFInfo
- Publication number
- JP5937704B2 JP5937704B2 JP2014561668A JP2014561668A JP5937704B2 JP 5937704 B2 JP5937704 B2 JP 5937704B2 JP 2014561668 A JP2014561668 A JP 2014561668A JP 2014561668 A JP2014561668 A JP 2014561668A JP 5937704 B2 JP5937704 B2 JP 5937704B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- glass
- molten glass
- wall
- gas phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000011521 glass Substances 0.000 title claims description 225
- 239000000758 substrate Substances 0.000 title claims description 125
- 238000004519 manufacturing process Methods 0.000 title claims description 64
- 239000006060 molten glass Substances 0.000 claims description 180
- 238000005352 clarification Methods 0.000 claims description 137
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 119
- 229910052751 metal Inorganic materials 0.000 claims description 93
- 239000002184 metal Substances 0.000 claims description 93
- 238000010438 heat treatment Methods 0.000 claims description 88
- 239000012071 phase Substances 0.000 claims description 87
- 238000012545 processing Methods 0.000 claims description 55
- 238000002844 melting Methods 0.000 claims description 32
- 230000008018 melting Effects 0.000 claims description 32
- 230000002776 aggregation Effects 0.000 claims description 25
- 239000003039 volatile agent Substances 0.000 claims description 22
- 238000004220 aggregation Methods 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 18
- 238000011144 upstream manufacturing Methods 0.000 claims description 18
- 239000002994 raw material Substances 0.000 claims description 14
- 238000001816 cooling Methods 0.000 claims description 12
- 230000017525 heat dissipation Effects 0.000 claims description 12
- 230000005855 radiation Effects 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 8
- 239000007791 liquid phase Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 73
- 229910052760 oxygen Inorganic materials 0.000 description 32
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 29
- 239000001301 oxygen Substances 0.000 description 29
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 27
- 229910001887 tin oxide Inorganic materials 0.000 description 27
- 238000003756 stirring Methods 0.000 description 22
- 238000009423 ventilation Methods 0.000 description 18
- 239000003513 alkali Substances 0.000 description 15
- 239000006025 fining agent Substances 0.000 description 15
- 229910052697 platinum Inorganic materials 0.000 description 15
- 238000012546 transfer Methods 0.000 description 15
- 230000000694 effects Effects 0.000 description 13
- 238000000034 method Methods 0.000 description 13
- 239000000203 mixture Substances 0.000 description 12
- 230000008569 process Effects 0.000 description 12
- 230000002829 reductive effect Effects 0.000 description 10
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 9
- 238000000465 moulding Methods 0.000 description 9
- 238000007670 refining Methods 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 8
- -1 platinum group metals Chemical class 0.000 description 8
- 239000011241 protective layer Substances 0.000 description 8
- 239000011449 brick Substances 0.000 description 7
- 238000006722 reduction reaction Methods 0.000 description 7
- 239000005357 flat glass Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 229910006404 SnO 2 Inorganic materials 0.000 description 4
- 238000005054 agglomeration Methods 0.000 description 4
- 229910052787 antimony Inorganic materials 0.000 description 4
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 4
- GCPXMJHSNVMWNM-UHFFFAOYSA-N arsenous acid Chemical compound O[As](O)O GCPXMJHSNVMWNM-UHFFFAOYSA-N 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 229920006395 saturated elastomer Polymers 0.000 description 4
- 238000010583 slow cooling Methods 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 229910018068 Li 2 O Inorganic materials 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910001260 Pt alloy Inorganic materials 0.000 description 2
- 238000005094 computer simulation Methods 0.000 description 2
- 239000006059 cover glass Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000007792 gaseous phase Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000006479 redox reaction Methods 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- 238000009751 slip forming Methods 0.000 description 2
- MQWCQFCZUNBTCM-UHFFFAOYSA-N 2-tert-butyl-6-(3-tert-butyl-2-hydroxy-5-methylphenyl)sulfanyl-4-methylphenol Chemical compound CC(C)(C)C1=CC(C)=CC(SC=2C(=C(C=C(C)C=2)C(C)(C)C)O)=C1O MQWCQFCZUNBTCM-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 238000006124 Pilkington process Methods 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 206010040925 Skin striae Diseases 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004931 aggregating effect Effects 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000008395 clarifying agent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- TXKMVPPZCYKFAC-UHFFFAOYSA-N disulfur monoxide Inorganic materials O=S=S TXKMVPPZCYKFAC-UHFFFAOYSA-N 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000000156 glass melt Substances 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 238000007500 overflow downdraw method Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical compound S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/225—Refining
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/42—Details of construction of furnace walls, e.g. to prevent corrosion; Use of materials for furnace walls
- C03B5/43—Use of materials for furnace walls, e.g. fire-bricks
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/04—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in tank furnaces
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013268962 | 2013-12-26 | ||
JP2013268962 | 2013-12-26 | ||
PCT/JP2014/084541 WO2015099133A1 (ja) | 2013-12-26 | 2014-12-26 | ガラス基板の製造方法及びガラス基板製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP5937704B2 true JP5937704B2 (ja) | 2016-06-22 |
JPWO2015099133A1 JPWO2015099133A1 (ja) | 2017-03-23 |
Family
ID=53478972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014561668A Active JP5937704B2 (ja) | 2013-12-26 | 2014-12-26 | ガラス基板の製造方法及びガラス基板製造装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5937704B2 (zh) |
KR (1) | KR101740159B1 (zh) |
CN (1) | CN104903259B (zh) |
TW (1) | TWI588108B (zh) |
WO (1) | WO2015099133A1 (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102569272B1 (ko) * | 2017-09-13 | 2023-08-22 | 니폰 덴키 가라스 가부시키가이샤 | 유리 물품의 제조 방법 |
KR102143702B1 (ko) * | 2017-12-27 | 2020-08-12 | 아반스트레이트 가부시키가이샤 | 유리 기판의 제조 방법 및 유리 기판 제조 장치 |
CN111704347B (zh) * | 2020-06-08 | 2022-03-18 | 中建材蚌埠玻璃工业设计研究院有限公司 | 一种大流量贵金属通道 |
CN111747634B (zh) * | 2020-06-08 | 2022-03-15 | 中建材蚌埠玻璃工业设计研究院有限公司 | 一种高世代tft-lcd玻璃基板生产线 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010202444A (ja) * | 2009-03-03 | 2010-09-16 | Asahi Glass Co Ltd | ガラス溶融炉及びガラス溶融方法 |
WO2012132471A1 (ja) * | 2011-03-31 | 2012-10-04 | AvanStrate株式会社 | ガラス板製造方法 |
JP2013521205A (ja) * | 2010-02-25 | 2013-06-10 | コーニング インコーポレイテッド | ガラス物品を作製する装置および方法 |
JP2013212942A (ja) * | 2012-03-30 | 2013-10-17 | Avanstrate Inc | ガラス板の製造方法およびガラス板製造装置 |
JP2013216531A (ja) * | 2012-04-06 | 2013-10-24 | Avanstrate Inc | ガラス板の製造方法及びガラス板の製造装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4790783B2 (ja) | 2008-11-05 | 2011-10-12 | AvanStrate株式会社 | ガラス板の製造方法 |
WO2012043769A1 (ja) * | 2010-09-30 | 2012-04-05 | AvanStrate株式会社 | ガラス板製造方法 |
-
2014
- 2014-12-26 TW TW103145889A patent/TWI588108B/zh active
- 2014-12-26 KR KR1020157001896A patent/KR101740159B1/ko active IP Right Grant
- 2014-12-26 CN CN201480001960.8A patent/CN104903259B/zh active Active
- 2014-12-26 JP JP2014561668A patent/JP5937704B2/ja active Active
- 2014-12-26 WO PCT/JP2014/084541 patent/WO2015099133A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010202444A (ja) * | 2009-03-03 | 2010-09-16 | Asahi Glass Co Ltd | ガラス溶融炉及びガラス溶融方法 |
JP2013521205A (ja) * | 2010-02-25 | 2013-06-10 | コーニング インコーポレイテッド | ガラス物品を作製する装置および方法 |
WO2012132471A1 (ja) * | 2011-03-31 | 2012-10-04 | AvanStrate株式会社 | ガラス板製造方法 |
JP2013212942A (ja) * | 2012-03-30 | 2013-10-17 | Avanstrate Inc | ガラス板の製造方法およびガラス板製造装置 |
JP2013216531A (ja) * | 2012-04-06 | 2013-10-24 | Avanstrate Inc | ガラス板の製造方法及びガラス板の製造装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2015099133A1 (ja) | 2015-07-02 |
KR101740159B1 (ko) | 2017-05-25 |
KR20160093536A (ko) | 2016-08-08 |
CN104903259A (zh) | 2015-09-09 |
TWI588108B (zh) | 2017-06-21 |
CN104903259B (zh) | 2017-09-29 |
JPWO2015099133A1 (ja) | 2017-03-23 |
TW201532991A (zh) | 2015-09-01 |
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