JP5911264B2 - 液体吐出ヘッドの製造方法 - Google Patents

液体吐出ヘッドの製造方法 Download PDF

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Publication number
JP5911264B2
JP5911264B2 JP2011240299A JP2011240299A JP5911264B2 JP 5911264 B2 JP5911264 B2 JP 5911264B2 JP 2011240299 A JP2011240299 A JP 2011240299A JP 2011240299 A JP2011240299 A JP 2011240299A JP 5911264 B2 JP5911264 B2 JP 5911264B2
Authority
JP
Japan
Prior art keywords
base pattern
pattern
liquid
manufacturing
orifice plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011240299A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013095061A (ja
JP2013095061A5 (https=
Inventor
浅井　和宏
和宏 浅井
哲朗 本田
哲朗 本田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011240299A priority Critical patent/JP5911264B2/ja
Priority to US13/654,763 priority patent/US9278532B2/en
Priority to CN201210419847.4A priority patent/CN103085480B/zh
Publication of JP2013095061A publication Critical patent/JP2013095061A/ja
Publication of JP2013095061A5 publication Critical patent/JP2013095061A5/ja
Application granted granted Critical
Publication of JP5911264B2 publication Critical patent/JP5911264B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2011240299A 2011-11-01 2011-11-01 液体吐出ヘッドの製造方法 Expired - Fee Related JP5911264B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011240299A JP5911264B2 (ja) 2011-11-01 2011-11-01 液体吐出ヘッドの製造方法
US13/654,763 US9278532B2 (en) 2011-11-01 2012-10-18 Process for producing liquid ejection head
CN201210419847.4A CN103085480B (zh) 2011-11-01 2012-10-29 液体喷出头的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011240299A JP5911264B2 (ja) 2011-11-01 2011-11-01 液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2013095061A JP2013095061A (ja) 2013-05-20
JP2013095061A5 JP2013095061A5 (https=) 2014-12-18
JP5911264B2 true JP5911264B2 (ja) 2016-04-27

Family

ID=48171568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011240299A Expired - Fee Related JP5911264B2 (ja) 2011-11-01 2011-11-01 液体吐出ヘッドの製造方法

Country Status (3)

Country Link
US (1) US9278532B2 (https=)
JP (1) JP5911264B2 (https=)
CN (1) CN103085480B (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106103102B (zh) * 2014-03-31 2017-10-31 惠普发展公司，有限责任合伙企业 印刷电路板流体喷射装置
JP2016221866A (ja) 2015-06-01 2016-12-28 キヤノン株式会社 液体吐出ヘッドの製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0180344U (https=) * 1987-11-16 1989-05-30
JPH10157150A (ja) * 1996-12-05 1998-06-16 Canon Inc 液体噴射記録ヘッドの製造方法および液体噴射記録ヘッドを製造するための基板
IT1290725B1 (it) * 1997-02-18 1998-12-10 Claudio Bernardinis Traliccio metallico combinabile a rete metallica elettrosaldata
WO1999012740A1 (en) * 1997-09-10 1999-03-18 Seiko Epson Corporation Porous structure, ink jet recording head, methods of their production, and ink jet recorder
JP3413082B2 (ja) 1997-11-13 2003-06-03 キヤノン株式会社 液体噴射ヘッドおよびその製造方法
US6774480B1 (en) * 1999-07-30 2004-08-10 Micron Technology, Inc. Method and structure for manufacturing improved yield semiconductor packaged devices
JP4731763B2 (ja) 2001-09-12 2011-07-27 キヤノン株式会社 液体噴射記録ヘッドおよびその製造方法
KR100396559B1 (ko) 2001-11-05 2003-09-02 삼성전자주식회사 일체형 잉크젯 프린트헤드의 제조 방법
JP2007001241A (ja) * 2005-06-27 2007-01-11 Canon Inc インクジェット記録ヘッド
JP4854464B2 (ja) * 2005-10-20 2012-01-18 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
TWI291757B (en) * 2005-11-16 2007-12-21 Ind Tech Res Inst Structure to reduce stress for vias and a fabricating method thereof
JP4939184B2 (ja) 2005-12-15 2012-05-23 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2007216630A (ja) * 2006-02-20 2007-08-30 Canon Inc 液体噴射記録ヘッドおよびその製造方法
JP5679688B2 (ja) * 2010-03-31 2015-03-04 キヤノン株式会社 液体吐出ヘッド及びその製造方法

Also Published As

Publication number Publication date
US20130106017A1 (en) 2013-05-02
JP2013095061A (ja) 2013-05-20
CN103085480B (zh) 2015-03-25
US9278532B2 (en) 2016-03-08
CN103085480A (zh) 2013-05-08

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