JP5909862B2 - アクチュエーター、光スキャナーおよび画像形成装置 - Google Patents

アクチュエーター、光スキャナーおよび画像形成装置 Download PDF

Info

Publication number
JP5909862B2
JP5909862B2 JP2011084839A JP2011084839A JP5909862B2 JP 5909862 B2 JP5909862 B2 JP 5909862B2 JP 2011084839 A JP2011084839 A JP 2011084839A JP 2011084839 A JP2011084839 A JP 2011084839A JP 5909862 B2 JP5909862 B2 JP 5909862B2
Authority
JP
Japan
Prior art keywords
movable
shape
movable portion
movable plate
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011084839A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012218098A (ja
JP2012218098A5 (enExample
Inventor
真希子 日野
真希子 日野
溝口　安志
安志 溝口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2011084839A priority Critical patent/JP5909862B2/ja
Priority to CN2012100981253A priority patent/CN102736244A/zh
Priority to US13/440,338 priority patent/US20120257268A1/en
Publication of JP2012218098A publication Critical patent/JP2012218098A/ja
Publication of JP2012218098A5 publication Critical patent/JP2012218098A5/ja
Application granted granted Critical
Publication of JP5909862B2 publication Critical patent/JP5909862B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
    • B81C1/00626—Processes for achieving a desired geometry not provided for in groups B81C1/00563 - B81C1/00619
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0133—Wet etching

Landscapes

  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2011084839A 2011-04-06 2011-04-06 アクチュエーター、光スキャナーおよび画像形成装置 Active JP5909862B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011084839A JP5909862B2 (ja) 2011-04-06 2011-04-06 アクチュエーター、光スキャナーおよび画像形成装置
CN2012100981253A CN102736244A (zh) 2011-04-06 2012-04-05 致动器、光扫描仪以及图像形成装置
US13/440,338 US20120257268A1 (en) 2011-04-06 2012-04-05 Actuator, optical scanner, and image forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011084839A JP5909862B2 (ja) 2011-04-06 2011-04-06 アクチュエーター、光スキャナーおよび画像形成装置

Publications (3)

Publication Number Publication Date
JP2012218098A JP2012218098A (ja) 2012-11-12
JP2012218098A5 JP2012218098A5 (enExample) 2014-05-15
JP5909862B2 true JP5909862B2 (ja) 2016-04-27

Family

ID=46965931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011084839A Active JP5909862B2 (ja) 2011-04-06 2011-04-06 アクチュエーター、光スキャナーおよび画像形成装置

Country Status (3)

Country Link
US (1) US20120257268A1 (enExample)
JP (1) JP5909862B2 (enExample)
CN (1) CN102736244A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5842369B2 (ja) * 2011-04-11 2016-01-13 セイコーエプソン株式会社 アクチュエーターの製造方法、光スキャナーの製造方法および画像形成装置の製造方法、アクチュエーター、光スキャナーおよび画像形成装置
JP6585147B2 (ja) * 2017-12-01 2019-10-02 浜松ホトニクス株式会社 アクチュエータ装置
EP3628964B1 (de) * 2018-09-28 2024-02-14 Hexagon Technology Center GmbH Opto-elektro-mechanisches strahlmanipulationssystem
JP7263878B2 (ja) * 2019-03-27 2023-04-25 セイコーエプソン株式会社 光スキャナー、三次元計測装置およびロボットシステム
JP2021051222A (ja) * 2019-09-25 2021-04-01 日本電産株式会社 光学素子および光走査装置
JP2021051219A (ja) 2019-09-25 2021-04-01 日本電産株式会社 光学素子および光走査装置
JP7587994B2 (ja) * 2021-01-28 2024-11-21 浜松ホトニクス株式会社 アクチュエータデバイスの製造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4317611A (en) * 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
DE69102590T2 (de) * 1990-05-18 1994-10-06 British Aerospace Trägheitssensoren.
JP3164742B2 (ja) * 1994-11-09 2001-05-08 株式会社東芝 光走査装置
US20010046346A1 (en) * 1999-08-02 2001-11-29 Brent E. Burns Micromachined structure for opto-mechanical micro-switch
JP4602542B2 (ja) * 2000-12-18 2010-12-22 オリンパス株式会社 光偏向器用のミラー揺動体
JP2002321196A (ja) * 2001-02-22 2002-11-05 Canon Inc マイクロ構造体、マイクロ力学量センサ、マイクロアクチュエータ、マイクロ光偏向器、光走査型ディスプレイ、及びそれらの製造方法
US6831765B2 (en) * 2001-02-22 2004-12-14 Canon Kabushiki Kaisha Tiltable-body apparatus, and method of fabricating the same
JP3919616B2 (ja) * 2002-07-05 2007-05-30 キヤノン株式会社 マイクロ構造体及びその製造方法
JP2007316443A (ja) * 2006-05-26 2007-12-06 Canon Inc 光偏向器、及びそれを用いた光学機器
JP5521359B2 (ja) * 2008-03-13 2014-06-11 セイコーエプソン株式会社 光偏向器及びその製造方法
JP2009294458A (ja) * 2008-06-05 2009-12-17 Brother Ind Ltd 光スキャナ
JP5655365B2 (ja) * 2009-08-04 2015-01-21 セイコーエプソン株式会社 光偏向器、光偏向器の製造方法および画像表示装置
JP5842356B2 (ja) * 2011-03-24 2016-01-13 セイコーエプソン株式会社 アクチュエーター、光スキャナーおよび画像形成装置

Also Published As

Publication number Publication date
US20120257268A1 (en) 2012-10-11
JP2012218098A (ja) 2012-11-12
CN102736244A (zh) 2012-10-17

Similar Documents

Publication Publication Date Title
JP5842356B2 (ja) アクチュエーター、光スキャナーおよび画像形成装置
JP5842369B2 (ja) アクチュエーターの製造方法、光スキャナーの製造方法および画像形成装置の製造方法、アクチュエーター、光スキャナーおよび画像形成装置
JP5909862B2 (ja) アクチュエーター、光スキャナーおよび画像形成装置
US8988750B2 (en) Optical scanner, mirror chip, method of manufacturing optical scanner, and image forming apparatus
CN102162917B (zh) 光扫描仪以及图像形成装置
JP5834431B2 (ja) アクチュエーター、アクチュエーターの製造方法、光スキャナーおよび画像形成装置
JP5640687B2 (ja) アクチュエーター、アクチュエーターの製造方法、光スキャナーおよび画像形成装置
JP5817158B2 (ja) 光学デバイス、光学デバイスの製造方法、光スキャナーおよび画像形成装置
JP5842837B2 (ja) アクチュエーター、光スキャナーおよび画像形成装置
JP2012123117A (ja) アクチュエーター、光スキャナーおよび画像形成装置
JP2012220641A (ja) アクチュエーター、光スキャナーおよび画像形成装置
JP6003025B2 (ja) アクチュエーター、光スキャナーおよび画像形成装置
JP5909914B2 (ja) アクチュエーター、光スキャナーおよび画像形成装置
JP5354162B2 (ja) 光学デバイス、光スキャナ及び画像形成装置
JP2011048229A (ja) 光スキャナおよび画像形成装置
JP5168735B2 (ja) 光学デバイス、光スキャナ及び画像形成装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140402

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20140402

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20150728

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150918

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20160301

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20160314

R150 Certificate of patent or registration of utility model

Ref document number: 5909862

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150