CN102736244A - 致动器、光扫描仪以及图像形成装置 - Google Patents

致动器、光扫描仪以及图像形成装置 Download PDF

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Publication number
CN102736244A
CN102736244A CN2012100981253A CN201210098125A CN102736244A CN 102736244 A CN102736244 A CN 102736244A CN 2012100981253 A CN2012100981253 A CN 2012100981253A CN 201210098125 A CN201210098125 A CN 201210098125A CN 102736244 A CN102736244 A CN 102736244A
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CN
China
Prior art keywords
mentioned
movable part
swing
axis
movable plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2012100981253A
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English (en)
Chinese (zh)
Inventor
日野真希子
沟口安志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN102736244A publication Critical patent/CN102736244A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
    • B81C1/00626—Processes for achieving a desired geometry not provided for in groups B81C1/00563 - B81C1/00619
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0133—Wet etching

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  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CN2012100981253A 2011-04-06 2012-04-05 致动器、光扫描仪以及图像形成装置 Pending CN102736244A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-084839 2011-04-06
JP2011084839A JP5909862B2 (ja) 2011-04-06 2011-04-06 アクチュエーター、光スキャナーおよび画像形成装置

Publications (1)

Publication Number Publication Date
CN102736244A true CN102736244A (zh) 2012-10-17

Family

ID=46965931

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2012100981253A Pending CN102736244A (zh) 2011-04-06 2012-04-05 致动器、光扫描仪以及图像形成装置

Country Status (3)

Country Link
US (1) US20120257268A1 (enExample)
JP (1) JP5909862B2 (enExample)
CN (1) CN102736244A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111751985A (zh) * 2019-03-27 2020-10-09 精工爱普生株式会社 光学扫描仪、三维测量装置及机器人系统

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5842369B2 (ja) * 2011-04-11 2016-01-13 セイコーエプソン株式会社 アクチュエーターの製造方法、光スキャナーの製造方法および画像形成装置の製造方法、アクチュエーター、光スキャナーおよび画像形成装置
JP6585147B2 (ja) * 2017-12-01 2019-10-02 浜松ホトニクス株式会社 アクチュエータ装置
EP3628964B1 (de) * 2018-09-28 2024-02-14 Hexagon Technology Center GmbH Opto-elektro-mechanisches strahlmanipulationssystem
JP2021051222A (ja) * 2019-09-25 2021-04-01 日本電産株式会社 光学素子および光走査装置
JP2021051219A (ja) 2019-09-25 2021-04-01 日本電産株式会社 光学素子および光走査装置
JP7587994B2 (ja) * 2021-01-28 2024-11-21 浜松ホトニクス株式会社 アクチュエータデバイスの製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08136839A (ja) * 1994-11-09 1996-05-31 Toshiba Corp 光走査装置
US20010046346A1 (en) * 1999-08-02 2001-11-29 Brent E. Burns Micromachined structure for opto-mechanical micro-switch
US20060209378A1 (en) * 2001-02-22 2006-09-21 Canon Kabushiki Kaisha Tiltable-body apparatus, and method of fabricating the same
CN101533153A (zh) * 2008-03-13 2009-09-16 精工爱普生株式会社 光偏转器及其制造方法
CN103430434A (zh) * 2011-03-24 2013-12-04 精工爱普生株式会社 致动器、光学扫描仪以及图像形成装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4317611A (en) * 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
DE69102590T2 (de) * 1990-05-18 1994-10-06 British Aerospace Trägheitssensoren.
JP4602542B2 (ja) * 2000-12-18 2010-12-22 オリンパス株式会社 光偏向器用のミラー揺動体
JP2002321196A (ja) * 2001-02-22 2002-11-05 Canon Inc マイクロ構造体、マイクロ力学量センサ、マイクロアクチュエータ、マイクロ光偏向器、光走査型ディスプレイ、及びそれらの製造方法
JP3919616B2 (ja) * 2002-07-05 2007-05-30 キヤノン株式会社 マイクロ構造体及びその製造方法
JP2007316443A (ja) * 2006-05-26 2007-12-06 Canon Inc 光偏向器、及びそれを用いた光学機器
JP2009294458A (ja) * 2008-06-05 2009-12-17 Brother Ind Ltd 光スキャナ
JP5655365B2 (ja) * 2009-08-04 2015-01-21 セイコーエプソン株式会社 光偏向器、光偏向器の製造方法および画像表示装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08136839A (ja) * 1994-11-09 1996-05-31 Toshiba Corp 光走査装置
US20010046346A1 (en) * 1999-08-02 2001-11-29 Brent E. Burns Micromachined structure for opto-mechanical micro-switch
US20060209378A1 (en) * 2001-02-22 2006-09-21 Canon Kabushiki Kaisha Tiltable-body apparatus, and method of fabricating the same
CN101533153A (zh) * 2008-03-13 2009-09-16 精工爱普生株式会社 光偏转器及其制造方法
CN103430434A (zh) * 2011-03-24 2013-12-04 精工爱普生株式会社 致动器、光学扫描仪以及图像形成装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111751985A (zh) * 2019-03-27 2020-10-09 精工爱普生株式会社 光学扫描仪、三维测量装置及机器人系统
CN111751985B (zh) * 2019-03-27 2022-07-12 精工爱普生株式会社 光学扫描仪、三维测量装置及机器人系统

Also Published As

Publication number Publication date
JP5909862B2 (ja) 2016-04-27
US20120257268A1 (en) 2012-10-11
JP2012218098A (ja) 2012-11-12

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Application publication date: 20121017