JP5902872B2 - ガスエンクロージャアセンブリおよびシステム - Google Patents
ガスエンクロージャアセンブリおよびシステム Download PDFInfo
- Publication number
- JP5902872B2 JP5902872B2 JP2015544055A JP2015544055A JP5902872B2 JP 5902872 B2 JP5902872 B2 JP 5902872B2 JP 2015544055 A JP2015544055 A JP 2015544055A JP 2015544055 A JP2015544055 A JP 2015544055A JP 5902872 B2 JP5902872 B2 JP 5902872B2
- Authority
- JP
- Japan
- Prior art keywords
- assembly
- gas enclosure
- gas
- enclosure assembly
- panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J21/00—Chambers provided with manipulation devices
- B25J21/02—Glove-boxes, i.e. chambers in which manipulations are performed by the human hands in gloves built into the chamber walls; Gloves therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/001—Handling wide copy materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/811—Controlling the atmosphere during processing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/0001—Control or safety arrangements for ventilation
- F24F2011/0002—Control or safety arrangements for ventilation for admittance of outside air
- F24F2011/0004—Control or safety arrangements for ventilation for admittance of outside air to create overpressure in a room
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- General Engineering & Computer Science (AREA)
- Electroluminescent Light Sources (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
- Led Device Packages (AREA)
- Accessory Devices And Overall Control Thereof (AREA)
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261732173P | 2012-11-30 | 2012-11-30 | |
| US61/732,173 | 2012-11-30 | ||
| US13/720,830 US8899171B2 (en) | 2008-06-13 | 2012-12-19 | Gas enclosure assembly and system |
| US13/720,830 | 2012-12-19 | ||
| US201361764973P | 2013-02-14 | 2013-02-14 | |
| US61/764,973 | 2013-02-14 | ||
| PCT/US2013/031083 WO2014084888A1 (en) | 2012-11-30 | 2013-03-13 | Gas enclosure assembly and system |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016011277A Division JP6027276B2 (ja) | 2012-11-30 | 2016-01-25 | ガスエンクロージャアセンブリおよびシステム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016506024A JP2016506024A (ja) | 2016-02-25 |
| JP5902872B2 true JP5902872B2 (ja) | 2016-04-13 |
Family
ID=50828329
Family Applications (7)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015544055A Active JP5902872B2 (ja) | 2012-11-30 | 2013-03-13 | ガスエンクロージャアセンブリおよびシステム |
| JP2016011277A Expired - Fee Related JP6027276B2 (ja) | 2012-11-30 | 2016-01-25 | ガスエンクロージャアセンブリおよびシステム |
| JP2016090252A Active JP6685172B2 (ja) | 2012-11-30 | 2016-04-28 | ガスエンクロージャアセンブリおよびシステム |
| JP2018115532A Active JP6652597B2 (ja) | 2012-11-30 | 2018-06-18 | ガスエンクロージャアセンブリおよびシステム |
| JP2020014690A Active JP6947355B2 (ja) | 2012-11-30 | 2020-01-31 | ガスエンクロージャアセンブリおよびシステム |
| JP2021143917A Active JP7357379B2 (ja) | 2012-11-30 | 2021-09-03 | 基板を印刷するためのシステム |
| JP2023123905A Pending JP2023153183A (ja) | 2012-11-30 | 2023-07-29 | ガスエンクロージャアセンブリおよびシステム |
Family Applications After (6)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016011277A Expired - Fee Related JP6027276B2 (ja) | 2012-11-30 | 2016-01-25 | ガスエンクロージャアセンブリおよびシステム |
| JP2016090252A Active JP6685172B2 (ja) | 2012-11-30 | 2016-04-28 | ガスエンクロージャアセンブリおよびシステム |
| JP2018115532A Active JP6652597B2 (ja) | 2012-11-30 | 2018-06-18 | ガスエンクロージャアセンブリおよびシステム |
| JP2020014690A Active JP6947355B2 (ja) | 2012-11-30 | 2020-01-31 | ガスエンクロージャアセンブリおよびシステム |
| JP2021143917A Active JP7357379B2 (ja) | 2012-11-30 | 2021-09-03 | 基板を印刷するためのシステム |
| JP2023123905A Pending JP2023153183A (ja) | 2012-11-30 | 2023-07-29 | ガスエンクロージャアセンブリおよびシステム |
Country Status (4)
| Country | Link |
|---|---|
| EP (3) | EP2926363B1 (enExample) |
| JP (7) | JP5902872B2 (enExample) |
| KR (10) | KR102280282B1 (enExample) |
| WO (1) | WO2014084888A1 (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12064979B2 (en) | 2008-06-13 | 2024-08-20 | Kateeva, Inc. | Low-particle gas enclosure systems and methods |
| US10434804B2 (en) | 2008-06-13 | 2019-10-08 | Kateeva, Inc. | Low particle gas enclosure systems and methods |
| US12018857B2 (en) | 2008-06-13 | 2024-06-25 | Kateeva, Inc. | Gas enclosure assembly and system |
| KR102280282B1 (ko) * | 2012-11-30 | 2021-07-21 | 카티바, 인크. | 산업용 프린팅 시스템의 유지 방법 |
| US10468279B2 (en) | 2013-12-26 | 2019-11-05 | Kateeva, Inc. | Apparatus and techniques for thermal treatment of electronic devices |
| EP3975229A1 (en) | 2014-01-21 | 2022-03-30 | Kateeva, Inc. | Apparatus and techniques for electronic device encapsulation |
| KR102315014B1 (ko) | 2014-04-30 | 2021-10-20 | 카티바, 인크. | 가스 쿠션 장비 및 기판 코팅 기술 |
| US12251946B2 (en) | 2014-06-17 | 2025-03-18 | Kateeva, Inc. | Printing system assemblies and methods |
| CN115946453A (zh) | 2014-06-17 | 2023-04-11 | 科迪华公司 | 打印系统组件和方法 |
| KR20170028897A (ko) * | 2014-07-18 | 2017-03-14 | 카티바, 인크. | 교차 흐름 순환 및 여과를 이용한 가스 인클로저 시스템 및 방법 |
| EP3353827A4 (en) * | 2015-09-24 | 2019-05-08 | Kateeva, Inc. | PRESSURE SYSTEM ASSEMBLY AND METHOD |
| US9961783B2 (en) | 2016-07-08 | 2018-05-01 | Kateeva, Inc. | Guided transport path correction |
| WO2020012074A1 (en) | 2018-07-12 | 2020-01-16 | Kemira Oyj | Method for manufacturing multi-layered fibrous web and multi-layered fibrous web |
| CN110227821A (zh) * | 2019-07-04 | 2019-09-13 | 成都德力斯实业有限公司 | 3d打印舱中维持特定气氛环境的柔性连接 |
| CN111086029B (zh) * | 2019-12-31 | 2021-10-08 | 深圳市华星光电半导体显示技术有限公司 | 手套箱系统 |
| JP2022021736A (ja) * | 2020-07-22 | 2022-02-03 | 株式会社カラフルコンテナ | 医療用遮蔽装置 |
| DE102022109269A1 (de) * | 2022-04-14 | 2023-10-19 | Syntegon Technology Gmbh | Isolatorsystem |
| CN119388490A (zh) * | 2024-11-11 | 2025-02-07 | 伊特克斯惰性气体系统(北京)有限公司 | 一种手套箱不可再生装置 |
Family Cites Families (57)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US3251139A (en) * | 1965-03-10 | 1966-05-17 | Us Dynamics Mfg Corp | Dynamic insulating systems |
| US3670466A (en) * | 1970-08-03 | 1972-06-20 | Metal Products Corp | Insulated panel |
| US5029518A (en) * | 1989-10-16 | 1991-07-09 | Clean Air Technology, Inc. | Modular clean room structure |
| JPH0549294U (ja) * | 1991-12-05 | 1993-06-29 | 信越化学工業株式会社 | グローブボックス |
| DK85093D0 (da) * | 1993-07-16 | 1993-07-16 | Landsforeningen Til Kraeftens | Method and apparatus for performing operations |
| US6274058B1 (en) * | 1997-07-11 | 2001-08-14 | Applied Materials, Inc. | Remote plasma cleaning method for processing chambers |
| JPH11312640A (ja) * | 1998-02-25 | 1999-11-09 | Canon Inc | 処理装置および該処理装置を用いたデバイス製造方法 |
| US6023899A (en) * | 1998-11-03 | 2000-02-15 | Climatecraft Technologies, Inc. | Wall panel assembly with airtight joint |
| US6375304B1 (en) * | 2000-02-17 | 2002-04-23 | Lexmark International, Inc. | Maintenance mist control |
| JP4889883B2 (ja) * | 2000-07-10 | 2012-03-07 | 株式会社半導体エネルギー研究所 | 成膜方法および成膜装置 |
| JP3939101B2 (ja) * | 2000-12-04 | 2007-07-04 | 株式会社荏原製作所 | 基板搬送方法および基板搬送容器 |
| FR2827682B1 (fr) * | 2001-07-20 | 2004-04-02 | Gemplus Card Int | Regulation de pression par transfert d'un volume de gaz calibre |
| US6733734B2 (en) * | 2001-10-31 | 2004-05-11 | Matheson Tri-Gas | Materials and methods for the purification of hydride gases |
| JP3868280B2 (ja) | 2001-12-04 | 2007-01-17 | 株式会社美和製作所 | 有機電界発光素子の製造装置 |
| JP4066661B2 (ja) * | 2002-01-23 | 2008-03-26 | セイコーエプソン株式会社 | 有機el装置の製造装置および液滴吐出装置 |
| JP3979113B2 (ja) * | 2002-02-12 | 2007-09-19 | セイコーエプソン株式会社 | チャンバ装置の大気置換方法、チャンバ装置、これを備えた電気光学装置および有機el装置 |
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| JP2005074299A (ja) * | 2003-08-29 | 2005-03-24 | Seiko Epson Corp | ドラフトチャンバ、ヘッド洗浄設備、ヘッド保管設備および液滴吐出装置、並びに電気光学装置の製造方法、電気光学装置および電子機器 |
| JP2005238159A (ja) * | 2004-02-27 | 2005-09-08 | Seiko Epson Corp | 材料塗布方法、カラーフィルタ基板の製造方法、エレクトロルミネッセンス表示装置の製造方法、プラズマ表示装置の製造方法、検査方法、および吐出システム |
| US7354845B2 (en) * | 2004-08-24 | 2008-04-08 | Otb Group B.V. | In-line process for making thin film electronic devices |
| JP2005313114A (ja) * | 2004-04-30 | 2005-11-10 | Seiko Epson Corp | 液滴吐出装置、液滴吐出方法、電気光学装置の製造方法、電気光学装置および電子機器 |
| JP4805555B2 (ja) * | 2004-07-12 | 2011-11-02 | 株式会社東芝 | 塗布装置及び塗布方法 |
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| KR20060044265A (ko) * | 2004-11-11 | 2006-05-16 | 엘지전자 주식회사 | 유기 전계발광표시소자의 제조장치 |
| JP4258462B2 (ja) * | 2004-11-19 | 2009-04-30 | セイコーエプソン株式会社 | 圧力調整弁、機能液供給装置および描画装置 |
| JP2006216803A (ja) * | 2005-02-04 | 2006-08-17 | Daikin Ind Ltd | 処理装置 |
| DE202005005902U1 (de) * | 2005-04-07 | 2005-06-16 | M + W Zander Facility Engineering Gmbh | Gerät zur Handhabung und/oder Behandlung von Erzeugnissen |
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| TW200818374A (en) * | 2006-08-04 | 2008-04-16 | Du Pont | Substrate carrier enclosure |
| JP2008047340A (ja) * | 2006-08-11 | 2008-02-28 | Dainippon Printing Co Ltd | 有機エレクトロルミネッセンス素子 |
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| JP2008207089A (ja) * | 2007-02-26 | 2008-09-11 | Kyowa Sansho:Kk | 汚水処理装置及び汚水処理方法 |
| KR101139737B1 (ko) * | 2007-05-16 | 2012-04-26 | 가부시키가이샤 알박 | 유기 el 장치의 제조 방법 |
| KR20100038301A (ko) * | 2007-06-14 | 2010-04-14 | 메사츄세츠 인스티튜트 어브 테크놀로지 | 필름 증착 방법 및 장치 |
| US20090308860A1 (en) * | 2008-06-11 | 2009-12-17 | Applied Materials, Inc. | Short thermal profile oven useful for screen printing |
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| JP2010134315A (ja) * | 2008-12-08 | 2010-06-17 | Seiko Epson Corp | 液状体吐出装置 |
| JP5332855B2 (ja) * | 2009-04-20 | 2013-11-06 | セイコーエプソン株式会社 | 製膜装置 |
| JP2010250199A (ja) * | 2009-04-20 | 2010-11-04 | Seiko Epson Corp | 製膜装置及び製膜方法 |
| JP5760334B2 (ja) * | 2009-06-19 | 2015-08-05 | 大日本印刷株式会社 | 有機電子デバイス及びその製造方法 |
| JP2011088101A (ja) * | 2009-10-26 | 2011-05-06 | Seiko Epson Corp | 液滴吐出装置 |
| JP5170067B2 (ja) * | 2009-11-20 | 2013-03-27 | コニカミノルタホールディングス株式会社 | 有機elパネルおよび有機elパネルの製造方法 |
| KR20110058283A (ko) * | 2009-11-26 | 2011-06-01 | 세메스 주식회사 | 기판 이송 장치 |
| JP5529517B2 (ja) | 2009-12-16 | 2014-06-25 | 東レエンジニアリング株式会社 | 密閉式ブースおよび基板処理システム |
| CN102821869B (zh) * | 2010-03-26 | 2015-06-24 | 夏普株式会社 | 成膜装置和成膜方法 |
| JP5062339B2 (ja) * | 2010-05-12 | 2012-10-31 | パナソニック株式会社 | インクジェット装置 |
| KR101208262B1 (ko) * | 2010-06-30 | 2012-12-04 | (주)에이티엘 | 글래스 검사 장치 |
| CN102328317A (zh) * | 2011-09-08 | 2012-01-25 | 杭州泰林生物技术设备有限公司 | 一种软舱体隔离器 |
| KR102280282B1 (ko) * | 2012-11-30 | 2021-07-21 | 카티바, 인크. | 산업용 프린팅 시스템의 유지 방법 |
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2013
- 2013-03-13 KR KR1020207022298A patent/KR102280282B1/ko active Active
- 2013-03-13 KR KR1020217022322A patent/KR102326995B1/ko active Active
- 2013-03-13 KR KR1020157014277A patent/KR101650456B1/ko active Active
- 2013-03-13 KR KR1020167014087A patent/KR101828361B1/ko active Active
- 2013-03-13 EP EP13858304.2A patent/EP2926363B1/en not_active Not-in-force
- 2013-03-13 KR KR1020197029295A patent/KR102141959B1/ko active Active
- 2013-03-13 KR KR1020217036621A patent/KR102479011B1/ko active Active
- 2013-03-13 KR KR1020187035564A patent/KR102032081B1/ko active Active
- 2013-03-13 KR KR1020227029657A patent/KR20220124282A/ko not_active Ceased
- 2013-03-13 KR KR1020247003182A patent/KR20240018677A/ko not_active Ceased
- 2013-03-13 WO PCT/US2013/031083 patent/WO2014084888A1/en not_active Ceased
- 2013-03-13 EP EP19162637.3A patent/EP3518276B1/en active Active
- 2013-03-13 JP JP2015544055A patent/JP5902872B2/ja active Active
- 2013-03-13 EP EP18155378.5A patent/EP3340278A1/en not_active Withdrawn
- 2013-03-13 KR KR1020187003619A patent/KR101928890B1/ko active Active
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2016
- 2016-01-25 JP JP2016011277A patent/JP6027276B2/ja not_active Expired - Fee Related
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